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    • 7. 发明专利
    • High frequency semiconductor device
    • 高频半导体器件
    • JP2003017651A
    • 2003-01-17
    • JP2001199712
    • 2001-06-29
    • Toshiba Corp株式会社東芝
    • ONO NAOKOYAMAGUCHI KEIICHIIZEKI YUJI
    • H01L25/18H01L21/338H01L21/822H01L25/04H01L27/04H01L29/812
    • H01L2224/16225H01L2924/12032H01L2924/1305H01L2924/00
    • PROBLEM TO BE SOLVED: To provide a small and high performance high frequency power semiconductor device having a smaller phase difference within an active element. SOLUTION: This device has an assembly substrate 2 having input side high frequency transmission lines (61a, 62a and 63a) and output side high frequency transmission lines (61b, 62b and 63b), a first semiconductor chip 51 mounted on a first main surface side of the assembly substrate 2, and a second semiconductor chip 52 mounted on a second main surface side of the assembly substrate 2. The semiconductor chip 51 is provided with a semiconductor active element having a first input electrode (gate electrode pad) 408 and a first output electrode (drain electrode) 410. The semiconductor chip 52 is provided with a semiconductor active element having a second input electrode 428 and a second output electrode 430 which are in a mirror image relation mutually with the first input electrode 408 and the first output electrode 410 respectively.
    • 要解决的问题:提供一种在有源元件内具有较小相位差的小型和高性能的高频功率半导体器件。 解决方案:该装置具有具有输入侧高频传输线(61a,62a和63a)和输出侧高频传输线(61b,62b和63b)的组装基板2,安装在第一主表面侧的第一半导体芯片51 和安装在组装基板2的第二主表面侧的第二半导体芯片52.半导体芯片51设置有半导体有源元件,该半导体有源元件具有第一输入电极(栅电极焊盘)408和第一 输出电极(漏极)410.半导体芯片52设置有半导体有源元件,其具有与第一输入电极408和第一输出电极相互成镜像关系的第二输入电极428和第二输出电极430 410。
    • 8. 发明专利
    • BALL BONDING METHOD AND DEVICE
    • JP2000133674A
    • 2000-05-12
    • JP30140398
    • 1998-10-22
    • TOSHIBA CORP
    • IZEKI YUJI
    • H01L21/60
    • PROBLEM TO BE SOLVED: To raise the mounting yield by a method wherein a charge removal process for removing a charge in a wire and a ball is provided between a process for forming the ball on the point of the wire by discharge of an electric torch electrode and a first bonding process. SOLUTION: A ball 1a is formed on the point of a wire 1 by discharge of an electric torch electrode and a charge removal process 11 for removing a charge in the wire 1 and the ball 1a is provided between this ball formation process and a first bonding process. Or a switch 12 is used as charge removal circuits, the charge removal circuit on one side of the charge removal circuits is connected electrically with the wire 1 and the other charge removal circuit is earthed. This switch 12 is controlled by a signal from a control circuit 7 and is turned on at the time of the process 11. The switch 12 may be formed of an electronic element and may be constituted of a mechanical switch. Or clampers for charge removal are provided as the charge removal circuits, the clamper on one side of the clampers for charge removal is earthed, and when the wire is clamped by the earthed clamper, the wire is earthed.