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1. 发明申请

WO2005076075A3 ADAPTIVE REAL TIME CONTROL OF A RETICLE/MASK SYSTEM 审中-公开
标题翻译：自适应/掩蔽系统的自适应实时控制
公开(公告)号：WO2005076075A3
公开(公告)日：2006-04-27
申请号：PCT/US2005002064
申请日：2005-01-19
申请人： TOKYO ELECTRON LTD , TOKYO ELECTRON AMERICA INC , KAUSHAL SANJEEV , PANDEY PRADEEP , SUGASHIMA KENJI
发明人： KAUSHAL SANJEEV , PANDEY PRADEEP , SUGASHIMA KENJI
IPC分类号： G03F1/00 , F23N1/00 , G03F20060101 , G03F1/14 , G03F7/20
CPC分类号： G03F1/68 , G03F1/78 , H01L21/67248
摘要： An adaptive real time thermal processing system is presented that includes a multivariable controller (260). Generally, the method (1600) includes creating a dynamic model of the thermal processing system (1630); incorporating reticle/mask curvature in the dynamic model; coupling a diffusion-amplification model into the dynamic thermal model; creating a multivariable controller; parameterizing the nominal setpoints into a vector of intelligent setpoints (1650); creating a process sensitivity matrix; creating intelligent setpoints using an efficient optimization method and process data; and establishing recipes that select appropriate models and setpoints during run-time.
摘要翻译：提出了一种包括多变量控制器（260）的自适应实时热处理系统。通常，方法（1600）包括创建热处理系统（1630）的动态模型; 在动态模型中结合掩模/掩模曲率; 将扩散扩增模型耦合到动态热模型中; 创建一个多变量控制器; 将标称设定值参数化为智能设定值的向量（1650）; 创建一个过程敏感性矩阵; 使用有效的优化方法和过程数据创建智能设定点; 并建立在运行期间选择合适的模型和设定值的配方。

2. 发明申请

WO2006081023A3 METHOD AND APPARATUS FOR MONOLAYER DEPOSITION (MLD) 审中-公开
标题翻译：单层沉积法（MLD）的方法与装置
公开(公告)号：WO2006081023A3
公开(公告)日：2006-11-02
申请号：PCT/US2005046495
申请日：2005-12-21
申请人： TOKYO ELECTRON LTD , TOKYO ELECTRON AMERICA INC , KAUSHAL SANJEEV , PANDEY PRADEEP , SUGISHIMA KENJI
发明人： KAUSHAL SANJEEV , PANDEY PRADEEP , SUGISHIMA KENJI
IPC分类号： C23C16/455 , C23C16/52 , C30B15/16 , C30B25/14
CPC分类号： C23C16/45527 , C23C16/52
摘要： An adaptive real time thermal processing system is presented that includes a multivariable controller. The method includes creating a dynamic model of the Monolayer Deposition (MLD) processing system and incorporating virtual sensors in the dynamic model. The method includes using process recipes comprising intelligent set points, dynamic models, and/or virtual sensors.
摘要翻译：提出了一种包括多变量控制器的自适应实时热处理系统。该方法包括创建单层沉积（MLD）处理系统的动态模型，并将虚拟传感器并入动态模型中。该方法包括使用包括智能设定点，动态模型和/或虚拟传感器的过程配方。

3. 发明专利

JP2007273987A Monitoring method of heat treatment system 有权
标题翻译：热处理系统监测方法
公开(公告)号：JP2007273987A
公开(公告)日：2007-10-18
申请号：JP2007086195
申请日：2007-03-29
申请人： Tokyo Electron America Inc , Tokyo Electron Ltd , ト−キョ−・エレクトロン・アメリカ・インコーポレーテッド , 東京エレクトロン株式会社
发明人： KAUSHAL SANJEEV , PANDEY PRADEEP , SUGIJIMA KENJI
IPC分类号： H01L21/02 , G01K1/14 , G01K7/02 , H01L21/324
CPC分类号： H01L22/20
摘要： PROBLEM TO BE SOLVED: To provide a method of monitoring a heat treatment system in real time by using a built-in self-test (BIST) table for detecting, diagnosing and/or predicting a failure condition and/or the deterioration of performance. SOLUTION: This method comprises steps of: placing a plurality of wafers W in a treatment chamber 104 of a heat treatment system 100; executing a self-test process; determining a real time transient error from a measured transient response, and a reference transient response determined by a BIST rule stored in a BIST table; and comparing a warning limit and an operation limit set by the BIST rule regarding the self test process and the transient error. COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：提供一种通过使用内置自检（BIST）表来实时监测热处理系统的方法，用于检测，诊断和/或预测故障状况和/或劣化的表现。解决方案：该方法包括以下步骤：将多个晶片W放置在热处理系统100的处理室104中; 执行自检过程; 从测量的瞬态响应确定实时瞬态误差，以及由存储在BIST表中的BIST规则确定的参考瞬态响应; 并比较BIST规则对自检过程和瞬态误差设置的警告限制和操作限制。版权所有（C）2008，JPO＆INPIT

4. 发明专利

AT289083T 未知
公开(公告)号：AT289083T
公开(公告)日：2005-02-15
申请号：AT98958508
申请日：1998-11-10
申请人： TOKYO ELECTRON LTD
发明人： SHAH SUNIL C , PANDEY PRADEEP , ERICKSON MARK A
IPC分类号： G05B13/04 , G05B17/02 , G05B17/00

5. 发明专利

DE69828995D1 未知
公开(公告)号：DE69828995D1
公开(公告)日：2005-03-17
申请号：DE69828995
申请日：1998-11-10
申请人： TOKYO ELECTRON LTD
发明人： SHAH C , PANDEY PRADEEP , ERICKSON A
IPC分类号： G05B13/04 , G05B17/02 , G05B17/00

6. 发明专利

DE69828995T2 未知
公开(公告)号：DE69828995T2
公开(公告)日：2006-01-19
申请号：DE69828995
申请日：1998-11-10
申请人： TOKYO ELECTRON LTD
发明人： SHAH C , PANDEY PRADEEP , ERICKSON A
IPC分类号： G05B13/04 , G05B17/00 , G05B17/02

7. 发明专利

DE69533517D1 未知
公开(公告)号：DE69533517D1
公开(公告)日：2004-10-21
申请号：DE69533517
申请日：1995-10-17
申请人： TOKYO ELECTRON LTD
发明人： SHAH C , PANDEY PRADEEP
IPC分类号： C23C16/52 , H01L21/00 , H05B1/02 , C23C14/54 , C30B31/18 , C30B25/16
摘要： A system for controlling a thermal reactor is disclosed that characterizes the thermal reactor with a reactor model that indicates behavior of the thermal reactor and of a load contained in the thermal reactor and that accounts for interaction among a set of heating zones of the thermal reactor. An online reactor model is then determined that estimates the thermal behavior of the load based upon an online input power to the thermal reactor and upon an online temperature indication from the thermal reactor. A time varying temperature and reactant flow recipe is determined that minimizes end of run parameters on the load. A multi-variable controller is employed to minimize temperature deviations of the load from a predetermined temperature recipe or time varying trajectory.

8. 发明专利

DE69822314D1 未知
公开(公告)号：DE69822314D1
公开(公告)日：2004-04-15
申请号：DE69822314
申请日：1998-08-21
申请人： TOKYO ELECTRON LTD
发明人： SHAH C , PANDEY PRADEEP
IPC分类号： G05B13/04
摘要： A method for the estimation of the state variables of nonlinear systems with exogenous inputs is based on improved extended Kalman filtering (EKF) type techniques. The method uses a discrete-time model, based on a set of nonlinear differential equations describing the system, that is linearized about the current operating point. The time update for the state estimates is performed using integration methods. Integration, which is accomplished through the use of matrix exponential techniques, avoids the inaccuracies of approximate numerical integration techniques. The updated state estimates and corresponding covariance estimates use a common time-varying system model for ensuring stability of both estimates. Other improvements include the use of QR factorization for both time and measurement updating of square-root covariance and Kalman gain matrices and the use of simulated annealing for ensuring that globally optimal estimates are produced.

9. 发明公开

EP1208514A4 REAL-TIME PLANNER FOR DESIGN 审中-公开
标题翻译： ECHT-ZEIT PLANERFÜRENTWÜRFE
公开(公告)号：EP1208514A4
公开(公告)日：2009-01-28
申请号：EP00905567
申请日：2000-01-06
申请人： TOKYO ELECTRON LTD
发明人： SHAH SUNIL C , PANDEY PRADEEP , GUDMUNDSSON THORKELL , ERICKSON MARK
IPC分类号： G06F19/00 , G05B15/02 , G05B17/02 , G06F17/50
CPC分类号： G05B17/02 , G05B15/02 , G06F17/50 , G06F2217/10 , Y02T10/82
摘要： A method for computer aided design of a product or process. The method includes the steps of representing a computer-aided design activity as a design cycle (410-495) . The design cycle (410-495) is then converted into individual iterations of decisions to be made within the design cycle. The individual iterations of decisions are then mapped into a hierarchical structure of influence diagrams. The decision making process of the influence diagrams are performed and data is collected from the decision process that has been performed. The remaining unexecuted decisions and their posterior probabilities are updated based upon the outcomes of the decision process that was most recently performed.
摘要翻译：计算机辅助设计产品或过程的方法。该方法包括将计算机辅助设计活动表示为设计周期（410-495）的步骤。然后将设计周期（410-495）转换为在设计周期内做出的各个决策迭代。然后将决策的单个迭代映射到影响图的分层结构。执行影响图的决策过程，并从已执行的决策过程收集数据。其余的未执行决策及其后验概率根据最近执行的决策过程的结果进行更新。

10. 发明专利

DE69533517T2 未知
公开(公告)号：DE69533517T2
公开(公告)日：2005-03-03
申请号：DE69533517
申请日：1995-10-17
申请人： TOKYO ELECTRON LTD
发明人： SHAH C , PANDEY PRADEEP
IPC分类号： C23C16/52 , H01L21/00 , H05B1/02 , C23C14/54 , C30B31/18 , C30B25/16
摘要： A system for controlling a thermal reactor is disclosed that characterizes the thermal reactor with a reactor model that indicates behavior of the thermal reactor and of a load contained in the thermal reactor and that accounts for interaction among a set of heating zones of the thermal reactor. An online reactor model is then determined that estimates the thermal behavior of the load based upon an online input power to the thermal reactor and upon an online temperature indication from the thermal reactor. A time varying temperature and reactant flow recipe is determined that minimizes end of run parameters on the load. A multi-variable controller is employed to minimize temperature deviations of the load from a predetermined temperature recipe or time varying trajectory.

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