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1. 发明申请

WO2009114387A1 AUTONOMOUS BIOLOGICALLY BASED LEARNING TOOL 审中-公开
标题翻译：自主生物学的学习工具
公开(公告)号：WO2009114387A1
公开(公告)日：2009-09-17
申请号：PCT/US2009/036169
申请日：2009-03-05
申请人： TOKYO ELECTRON LIMITED , KAUSHAL, Sanjeev , PATEL, Sukesh Janubhai , SUGISHIMA, Kenji
发明人： KAUSHAL, Sanjeev , PATEL, Sukesh Janubhai , SUGISHIMA, Kenji
IPC分类号： G06F17/00
CPC分类号： G06N5/04 , G05B13/0265 , G06N5/02 , G06N99/005
摘要： Autonomous biologically based learning tool systems and methods that the tool systems employ for learning and analysis are provided. An autonomous biologically based learning tool system includes (a) one or more tool systems that perform a set of specific tasks or processes, and generate assets and data related to the assets that characterize the various processes and associated tool performance; (b) an interaction manager that receives and formats data, and (c) an autonomous learning system based on biological principles of learning, such system comprises a memory platform and a processing platform that are defined recursively and communicate through a network. Autonomous tool systems can be deployed recursively to assemble increasingly complex autonomous tools. Knowledge generated and accumulated in the autonomous learning system(s) associated with individual or assembled complex autonomous tools can be cast into semantic networks that can be employed for learning and driving tool goals based on context.
摘要翻译：提供了自动生物学的学习工具系统和工具系统用于学习和分析的方法。一种自主的基于生物学的学习工具系统包括（a）执行一组特定任务或过程的一个或多个工具系统，并生成与表征各种过程和相关工具性能的资产相关的资产和数据; （b）接收和格式化数据的交互管理器，以及（c）基于生物学习原理的自主学习系统，该系统包括递归定义并通过网络进行通信的存储器平台和处理平台。自动工具系统可以递归部署，以组合日益复杂的自主工具。在与个人或组装的复杂自主工具相关的自主学习系统中生成和积累的知识可以被投入到可以用于基于上下文学习和驱动工具目标的语义网络中。

2. 发明申请

WO2008111991A2 SPINTRONIC TRANSISTOR 审中-公开
标题翻译：自旋晶体管
公开(公告)号：WO2008111991A2
公开(公告)日：2008-09-18
申请号：PCT/US2007/073099
申请日：2007-07-10
申请人： TOKYO ELECTRON LIMITED , KAUSHAL, Sanjeev , SUGISHIMA, Kenji , GANGULY, Swaroop
发明人： KAUSHAL, Sanjeev , SUGISHIMA, Kenji , GANGULY, Swaroop
IPC分类号： H01L31/00
CPC分类号： H01L29/66984 , H01F10/16 , H01L29/1054
摘要： A semiconductor device Including: a substrate comprising silicon: a channel region formed on the substrate; a spin injector formed on the substrate at a first side of the channel region and configured to diffuse a spin-polarized current into the channel region; a spin detector formed on the substrate at a second side of the channel region and configured to receive said spin polarized current from the channel region; and a gate formed on the substrate in an area of said channel region,
摘要翻译：一种半导体器件，包括：包括硅的衬底：形成在衬底上的沟道区; 自旋注入器，在所述沟道区的第一侧处形成在所述衬底上，并被配置为将自旋极化电流扩散到所述沟道区中; 自旋检测器，所述自旋检测器在所述沟道区的第二侧处形成在所述衬底上并且被配置为从所述沟道区接收所述自旋极化电流; 以及在所述沟道区域的区域中的衬底上形成的栅极，

3. 发明申请

WO2007115136A1 MONITORING A MONOLAYER DEPOSITION (MLD) SYSTEM USING A BUILT-IN SELF TEST (BIST) TABLE 审中-公开
标题翻译：使用内置自检（BIST）表监测单层沉积（MLD）系统
公开(公告)号：WO2007115136A1
公开(公告)日：2007-10-11
申请号：PCT/US2007/065568
申请日：2007-03-30
申请人： TOKYO ELECTRON LIMITED , TOKYO ELECTRON AMERICA, INC , KAUSHAL, Sanjeev , PANDEY, Pradeep , SUGISHIMA, Kenji
发明人： KAUSHAL, Sanjeev , PANDEY, Pradeep , SUGISHIMA, Kenji
IPC分类号： G05B19/418 , G05B23/02
CPC分类号： G05B19/41875 , C23C16/45546 , C23C16/52 , G05B23/0254 , G05B2219/11 , G05B2219/1112 , G05B2219/37514 , G05B2219/37533 , G05B2219/45031 , Y02P90/14 , Y02P90/22 , Y02P90/26
摘要： A method of monitoring a processing system (100, 200, 300) in real-time using low-pressure based modeling techniques that include processing one or more of wafers (W) in a processing chamber (50, 104, 202); determining a measured dynamic process response for a rate of change for a process parameter; executing a real-time dynamic model to generate a predicted dynamic process response; determining a dynamic estimation error using a difference between the predicted dynamic process response and the expected process response; and comparing the dynamic estimation error to operational limits.
摘要翻译：一种监视处理系统（100,200,300）的方法，用于实时使用基于低压的建模技术，其包括处理处理室（50,104,202）中的一个或多个晶片（W）; 确定针对过程参数的变化率的测量的动态过程响应; 执行实时动态模型以产生预测的动态过程响应; 使用预测的动态过程响应和预期过程响应之间的差来确定动态估计误差; 并将动态估计误差与运算极限进行比较。

4. 发明申请

WO2006081023A2 METHOD AND APPARATUS FOR MONOLAYER DEPOSITION (MLD) 审中-公开
标题翻译：单层沉积方法和装置（MLD）
公开(公告)号：WO2006081023A2
公开(公告)日：2006-08-03
申请号：PCT/US2005/046495
申请日：2005-12-21
申请人： TOKYO ELECTRON LIMITED , TOKYO ELECTRON AMERICA, INC. , KAUSHAL, Sanjeev , PANDEY, Pradeep , SUGISHIMA, Kenji
发明人： KAUSHAL, Sanjeev , PANDEY, Pradeep , SUGISHIMA, Kenji
IPC分类号： C23C16/455 , C30B25/14 , C30B15/16 , C23C16/52
CPC分类号： C23C16/45527 , C23C16/52
摘要： An adaptive real time thermal processing system is presented that includes a multivariable controller. The method includes creating a dynamic model of the MLD processing system and incorporating virtual sensors in the dynamic model. The method includes using process recipes comprising intelligent set points, dynamic models, and/or virtual sensors.
摘要翻译：提出了一种包括多变量控制器的自适应实时热处理系统。该方法包括创建MLD处理系统的动态模型，并将虚拟传感器并入动态模型中。该方法包括使用包括智能设定点，动态模型和/或虚拟传感器的过程配方。

5. 发明申请

WO2008111991A3 SPINTRONIC TRANSISTOR 审中-公开
标题翻译：旋转晶体管
公开(公告)号：WO2008111991A3
公开(公告)日：2008-12-11
申请号：PCT/US2007073099
申请日：2007-07-10
申请人： TOKYO ELECTRON LTD , KAUSHAL SANJEEV , SUGISHIMA KENJI , GANGULY SWAROOP
发明人： KAUSHAL SANJEEV , SUGISHIMA KENJI , GANGULY SWAROOP
IPC分类号： H01L31/00
CPC分类号： H01L29/66984 , H01F10/16 , H01L29/1054
摘要： A semiconductor device Including: a substrate comprising silicon: a channel region formed on the substrate; a spin injector formed on the substrate at a first side of the channel region and configured to diffuse a spin-polarized current into the channel region; a spin detector formed on the substrate at a second side of the channel region and configured to receive said spin polarized current from the channel region; and a gate formed on the substrate in an area of said channel region,
摘要翻译：一种半导体器件包括：包括硅的衬底：形成在衬底上的沟道区; 旋转注入器，其形成在所述沟道区域的第一侧的所述衬底上并且被配置为将自旋极化电流扩散到所述沟道区域中; 自旋检测器，形成在所述沟道区的第二侧的所述衬底上，并被配置为从所述沟道区接收所述自旋极化电流; 以及在所述沟道区域的区域中形成在所述衬底上的栅极，

6. 发明申请

WO2007115084A1 MONITORING A SYSTEM DURING LOW-PRESSURE PROCESSES 审中-公开
标题翻译：在低压过程中监测系统
公开(公告)号：WO2007115084A1
公开(公告)日：2007-10-11
申请号：PCT/US2007/065483
申请日：2007-03-29
申请人： TOKYO ELECTRON LIMITED , TOKYO ELECTRON AMERICA, INC. , KAUSHAL, Sanjeev , PANDEY, Pradeep , SUGISHIMA, Kenji
发明人： KAUSHAL, Sanjeev , PANDEY, Pradeep , SUGISHIMA, Kenji
IPC分类号： G05B19/418 , G05B23/02
CPC分类号： G05B19/41875 , C23C16/52 , G05B23/0254 , G05B2219/37514 , G05B2219/37533 , G05B2219/45031 , Y02P90/22 , Y02P90/26
摘要： A method of monitoring a processing system (100, 200, 300) in real-time using low-pressure based modeling techniques that include processing one or more of wafers (W) in a processing chamber (50, 104, 202); determining a measured dynamic process response for a rate of change for a process parameter; executing a real-time dynamic model to generate a predicted dynamic process response; determining a dynamic estimation error using a difference between the predicted dynamic process response and the expected process response; and comparing the dynamic estimation error to operational limits.
摘要翻译：一种监视处理系统（100,200,300）的方法，用于实时使用基于低压的建模技术，其包括处理处理室（50,104,202）中的一个或多个晶片（W）; 确定针对过程参数的变化率的测量的动态过程响应; 执行实时动态模型以产生预测的动态过程响应; 使用预测的动态过程响应和预期过程响应之间的差来确定动态估计误差; 并将动态估计误差与运算极限进行比较。

7. 发明申请

WO2007030194A1 BUILT-IN SELF TEST FOR A THERMAL PROCESSING SYSTEM 审中-公开
标题翻译：用于热处理系统的内置自检
公开(公告)号：WO2007030194A1
公开(公告)日：2007-03-15
申请号：PCT/US2006/026220
申请日：2006-07-06
申请人： TOKYO ELECTRON LIMITED , TOKYO ELECTRON AMERICA, INC. , KAUSHAL, Sanjeev , PANDEY, Pradeep , SUGISHIMA, Kenji , DIP, Anthony , SMITH, David , JOE, Raymond , GANDHI, Sundar
发明人： KAUSHAL, Sanjeev , PANDEY, Pradeep , SUGISHIMA, Kenji , DIP, Anthony , SMITH, David , JOE, Raymond , GANDHI, Sundar
CPC分类号： H01L22/10 , G05B23/0254 , H01L21/67248
摘要： A method of monitoring a thermal processing system (100, 200) in real-time using a built-in self test (BIST) table that includes positioning a plurality of wafers (W) in a processing chamber (202) in the thermal processing system (100, 200); executing a real-time dynamic model (330) to generate a predicted dynamic process response for the processing chamber (202) during the processing time; creating a first measured dynamic process response; determining a dynamic estimation error using a difference between the predicted dynamic process response and the measured dynamic process response; and comparing the dynamic estimation error to operational thresholds established by one or more rules in the BiST table.
摘要翻译：一种使用内置自检（BIST）表实时监测热处理系统（100,200）的方法，其包括将多个晶片（W）定位在热处理系统中的处理室（202）中（100,200）; 执行实时动态模型（330）以在处理时间期间生成用于处理室（202）的预测动态过程响应; 创建第一个测量动态过程响应; 使用预测的动态过程响应和测量的动态过程响应之间的差来确定动态估计误差; 并将动态估计误差与由BiST表中的一个或多个规则建立的操作阈值进行比较。

8. 发明申请

WO2012129249A3 BIOLOGICALLY BASED CHAMBER MATCHING 审中-公开
标题翻译：基于生物学的腔室匹配
公开(公告)号：WO2012129249A3
公开(公告)日：2014-05-01
申请号：PCT/US2012029847
申请日：2012-03-20
申请人： TOKYO ELECTRON LTD , KAUSHAL SANJEEV , SUGISHIMA KENJI , PATEL SUKESH JANUBHAI , FILMAN ROBERT , POLAK WOLFGANG , WOLFE ORION , BURGER JESSIE
发明人： KAUSHAL SANJEEV , SUGISHIMA KENJI , PATEL SUKESH JANUBHAI , FILMAN ROBERT , POLAK WOLFGANG , WOLFE ORION , BURGER JESSIE
IPC分类号： G06F15/18
CPC分类号： G06N99/005 , G05B23/0237 , G06F3/04842
摘要： The subject disclosure relates to automatically learning relationships among a plurality of manufacturing tool parameters as applied to arbitrary semiconductor manufacturing tools and a graphical user interface that is supported, at least in part, by an autonomous learning system. The graphical user interface can create one or more matrixes based on received data and can further generate additional matrices by transforming the one or more matrixes. A series of windows can be output, wherein the series of windows, provide performance analysis that comprises a matching between a focus chamber and a reference chamber. In an aspect, the focus chamber and the reference chamber can be different chambers. In another aspect, the focus chamber and the reference chamber can be the same chamber, which provides analysis of the deterioration in performance of the same chamber over time.
摘要翻译：本公开涉及自动学习应用于任意半导体制造工具的多个制造工具参数之间的关系以及至少部分由自主学习系统支持的图形用户界面。图形用户界面可以基于接收到的数据创建一个或多个矩阵，并且可以通过转换一个或多个矩阵来进一步生成附加矩阵。可以输出一系列窗口，其中该系列窗口提供包括聚焦室和参考室之间的匹配的性能分析。在一个方面，聚焦室和参考室可以是不同的室。在另一方面，聚焦室和参考室可以是相同的室，其提供了相同室随时间的性能劣化的分析。

9. 发明申请

WO2010114641A1 METHOD AND SYSTEM FOR DETECTION OF TOOL PERFORMANCE DEGRADATION AND MISMATCH 审中-公开
标题翻译：用于检测工具性能降低和误差的方法和系统
公开(公告)号：WO2010114641A1
公开(公告)日：2010-10-07
申请号：PCT/US2010/023113
申请日：2010-02-03
申请人： TOKYO ELECTRON LIMITED , KAUSHAL, Sanjeev , PATEL, Sukesh, J. , SUGISHIMA, Kenji
发明人： KAUSHAL, Sanjeev , PATEL, Sukesh, J. , SUGISHIMA, Kenji
IPC分类号： G06F15/18
CPC分类号： G05B13/0265 , G05B19/4065 , G05B2219/33041 , G05B2219/37252 , G06N5/04 , G06N99/005 , Y02P90/86
摘要： Autonomous biologically based learning tool system(s) and method(s) that the tool system(s) employs for learning and analysis of performance degradation and mismatch are provided. The autonomous biologically based learning tool system includes (a) one or more tool systems that perform a set of specific tasks or processes and generate assets and data related to the assets that characterize the various processes and associated tool performance; (b) an interaction manager that receives and formats the data, and (c) an autonomous learning system based on biological principles of learning. Objectively generated knowledge gleaned from synthetic or production data can be utilized to determine a mathematical relationship among a specific output variable and a set of associated influencing variables. The generated relationship facilitates assessment of performance degradation of a set of tools, and performance mismatch among tools therein.
摘要翻译：提供了自动生物学的学习工具系统和工具系统用于学习和分析性能下降和失配的方法。自主的基于生物学的学习工具系统包括（a）执行一组特定任务或过程的一个或多个工具系统，并生成与表征各种过程和相关工具性能的资产相关的资产和数据; （b）接收和格式化数据的交互管理器，（c）基于生物学习原理的自主学习系统。可以利用从合成或生产数据中获取的客观生成的知识来确定特定输出变量与一组相关影响变量之间的数学关系。生成的关系有助于评估一组工具的性能下降，以及其中的工具之间的性能不匹配。

10. 发明申请

WO2007112180A3 SEMICONDUCTOR PROCESSING SYSTEM WITH WIRELESS SENSOR NETWORK MONITORING SYSTEM INCORPORATED THEREWITH 审中-公开
标题翻译：具有无线传感器网络监控系统的半导体处理系统
公开(公告)号：WO2007112180A3
公开(公告)日：2008-01-10
申请号：PCT/US2007063462
申请日：2007-03-07
申请人： TOKYO ELECTRON LTD , TOKYO ELECTRON AMERICA INC , KAUSHAL SANJEEV , SUGISHIMA KENJI , RAO DONTHINENI RAMESH KUMAR
发明人： KAUSHAL SANJEEV , SUGISHIMA KENJI , RAO DONTHINENI RAMESH KUMAR
IPC分类号： H01L21/00
CPC分类号： H01L21/67253 , H01L21/67242 , H01L21/67248 , H01L21/67288 , H01L2924/0002 , H01L2924/00
摘要： A method and system for non-invasive sensing and monitoring of a processing system (100, 200) employed in semiconductor manufacturing. The method allows for detecting and diagnosing drift and failures in the processing system (100, 200) and taking the appropriate correcting measures. The method includes positioning at least one non-invasive sensor (247a-d, 248a-b, 249a-b, 250a-c, 906) on an outer surface of a system component of the processing system (200), where the at least one invasive sensor forms a wireless sensor network (902), acquiring a sensor signal from the at least one non-invasive sensor (247a-d, 248a-b, 249a-b, 250a-c, 906), where the sensor signal tracks a gradual or abrupt change in a processing state of the system component during flow of a process gas in contact with the system component, and extracting the sensor signal from the wireless sensor network (902) to store and process the sensor signal. In one embodiment, the non-invasive sensor (247a-d, 248a-b, 249a-b, 250a-c, 906) can be an accelerometer sensor and the wireless sensor network (902) can be motes-based.
摘要翻译：一种用于半导体制造中使用的处理系统（100,200）的非侵入式感测和监测的方法和系统。该方法允许检测和诊断处理系统（100,200）中的漂移和故障并采取适当的校正措施。该方法包括将至少一个非侵入式传感器（247a-d，248a-b，249a-b，250a-c，906）定位在处理系统（200）的系统部件的外表面上，其中至少一个入侵传感器形成无线传感器网络（902），从至少一个非侵入式传感器（247a-d，248a-b，249a-b，250a-c，906）获取传感器信号，其中传感器信号跟踪在与系统部件接触的处理气体的流动期间系统部件的处理状态的逐渐或突然的变化，以及从无线传感器网络（902）提取传感器信号以存储和处理传感器信号。在一个实施例中，非侵入式传感器（247a-d，248a-b，249a-b，250a-c，906）可以是加速度计传感器，并且无线传感器网络（902）可以是基于空白的。

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