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1. 发明申请

WO0195352A3 APPARATUS AND METHOD FOR ACCELERATING ELECTRONS IN A PLASMA REACTOR 审中-公开
标题翻译：用于加速等离子体反应器中的电子的装置和方法
公开(公告)号：WO0195352A3
公开(公告)日：2002-05-30
申请号：PCT/US0117190
申请日：2001-05-29
申请人： TOKYO ELECTRON LTD , QUON BILL H , JEVTIC JOVAN , WINDHORN THOMAS H , JOHNSON WAYNE L
发明人： QUON BILL H , JEVTIC JOVAN , WINDHORN THOMAS H , JOHNSON WAYNE L
IPC分类号： H05H1/46 , H01J37/32 , H01L21/3065
CPC分类号： H01J37/32082 , H01J37/32706
摘要： Apparatus and method for supplying a bias voltage to a wafer chuck in a plasma reactor system, in which an RF voltage source produces a relatively low frequency RF voltage, a VHF voltage source produces a VHF voltage having a higher frequency than the RF voltage, and a coupling circuit connected between the RF and VHF voltage sources and wafer chuck combines the RF and VHF voltages for application to the wafer chuck.
摘要翻译：用于向等离子体反应器系统中的晶片卡盘提供偏置电压的装置和方法，其中RF电压源产生相对低频的RF电压，VHF电压源产生具有比RF电压更高的频率的VHF电压，以及连接在RF和VHF电压源和晶片卡盘之间的耦合电路将RF和VHF电压组合以用于晶片卡盘。

2. 发明申请

WO0165895A3 ELECTRICALLY CONTROLLED PLASMA UNIFORMITY IN A HIGH DENSITY PLASMA SOURCE 审中-公开
标题翻译：在高密度等离子体源中电控制等离子体均匀性
公开(公告)号：WO0165895A3
公开(公告)日：2002-02-07
申请号：PCT/US0106239
申请日：2001-02-28
申请人： TOKYO ELECTRON LTD , JOHNSON WAYNE L , WINDHORN THOMAS H , STRANG ERIC J
发明人： JOHNSON WAYNE L , WINDHORN THOMAS H , STRANG ERIC J
IPC分类号： C23C14/34 , C23C16/48 , H01J37/32 , H01L21/3065 , H05H1/46
CPC分类号： H01J37/321 , H05H1/46
摘要： Apparatus including a chamber and a coil system for converting a field-generating current into an RF magnetic field in the chamber when the chamber contains an ionized gas which interacts with the RF magnetic field to create a plasma. The plasma is contained within a cylindrical region enclosed by the chamber, which region has a longitudinal center axis, and the region is considered to be made up of a plurality of annular zones concentric with the center axis and disposed at respectively different distances from the center axis. The coil system is composed of: a plurality of individual coils each positioned and dimensioned to produce an RF magnetic field which predominantly influences a respective annular zone.
摘要翻译：一种装置，包括一个室和一个线圈系统，用于当室内包含与RF磁场相互作用以产生等离子体的电离气体时，将场产生电流转换成室内的RF磁场。等离子体包含在由腔室包围的圆柱形区域内，该区域具有纵向中心轴线，并且该区域被认为由与中心轴线同心的多个环形区域组成并且分别设置在与中心不同的距离处轴。线圈系统由以下组成：多个单独的线圈，每个线圈定位和尺寸设计成产生主要影响相应环形区域的RF磁场。

3. 发明申请

WO0159804A3 DEVICE AND METHOD FOR COUPLING TWO CIRCUIT COMPONENTS WHICH HAVE DIFFERENT IMPEDANCES 审中-公开
标题翻译：用于耦合具有不同冲突的两个电路组件的装置和方法
公开(公告)号：WO0159804A3
公开(公告)日：2002-05-30
申请号：PCT/US0140073
申请日：2001-02-09
申请人： TOKYO ELECTRON LTD , MITROVIC ANDREJ S , WINDHORN THOMAS H , JOHNSON WAYNE L
发明人： MITROVIC ANDREJ S , WINDHORN THOMAS H , JOHNSON WAYNE L
IPC分类号： H05H1/46 , C23F4/00 , H01J37/32 , H01L21/205 , H01L21/3065 , H01P5/02
CPC分类号： H01J37/32211 , H01P5/024
摘要： An AC power feed device for conducting electrical power from a source to a load. The feed device has a constant characteristic impedance along its length and an outer periphery that varies in size progressively along its length, or the feed device has an input end connected to the match network and an output end connected to an electrode, and has a characteristic impedance with varies from a value substantially equal to the output impedance of a match network coupled at the input end to a value equal to the impedance of the electrode.
摘要翻译：一种用于从电源向负载传导电力的交流供电装置。进给装置沿其长度具有恒定的特性阻抗，外周沿其长度逐渐变化，或者进给装置具有连接到匹配网络的输入端和连接到电极的输出端，并且具有特征阻抗从基本上等于在输入端耦合的匹配网络的输出阻抗的值变化到等于电极阻抗的值。

4. 发明申请

WO2004077894A2 METHOD AND SYSTEM FOR PROVIDING IMPEDANCE MATCHING NETWORK AND NETWORK ASSEMBLY 审中-公开
标题翻译：用于提供阻抗匹配网络和网络组件的方法和系统
公开(公告)号：WO2004077894A2
公开(公告)日：2004-09-10
申请号：PCT/US2004004846
申请日：2004-02-20
申请人： TOKYO ELECTRON LTD , WINDHORN THOMAS H
发明人： WINDHORN THOMAS H
IPC分类号： H01J37/32 , H05H1/46
CPC分类号： H01J37/32082 , H01J37/32183 , H05H1/46
摘要： An impedance matching network and network assembly employ one or more variable inductive elements, wherein one or more of the variable inductive elements includes a high temperature ferrite core, a helical coil, and a means for physically translating the magnetic core through the helical coil. An impedance matching network may alternatively or additionally employ one or more variable inductive elements, wherein one or more of the variable inductive elements is cooled using a fan assembly. Further, the impedance matching network and network assembly may alternatively or additionally employ one or more variable inductive elements, wherein the cooling of one or more of the variable inductive elements is facilitated by increasing the surface area of the variable inductive element core.
摘要翻译：阻抗匹配网络和网络组件使用一个或多个可变电感元件，其中一个或多个可变电感元件包括高温铁氧体磁芯，螺旋线圈和用于物理平移磁芯穿过螺旋线圈的装置。替代地或另外地，阻抗匹配网络可以采用一个或多个可变电感元件，其中一个或多个可变电感元件使用风扇组件冷却。此外，阻抗匹配网络和网络组件可以可选地或附加地使用一个或多个可变电感元件，其中通过增加可变电感元件核心的表面面积来促进一个或多个可变电感元件的冷却。

5. 发明申请

WO0215649A2 CLOSE COUPLED MATCH STRUCTURE FOR RF DRIVE ELECTRODE 审中-公开
标题翻译： RF驱动电极的紧密耦合匹配结构
公开(公告)号：WO0215649A2
公开(公告)日：2002-02-21
申请号：PCT/US0124571
申请日：2001-08-07
申请人： TOKYO ELECTRON LTD , WINDHORN THOMAS H
发明人： WINDHORN THOMAS H
IPC分类号： H05H1/46 , B01J19/08 , C23C16/505 , H01J37/32 , H01L21/3065 , H01L21/31 , H05H1/00
CPC分类号： H01J37/32091 , H01J37/32082 , H01J37/32183 , H01J2237/3323
摘要： An electrode assembly for supplying RF power from a RF power source having an output impedance to an electrically non-linear medium, the assembly being composed of: a drive electrode in communication with the medium and forming with the medium a load impedance; and an impedance match network coupled between the RF power source and the drive electrode for matching the output impedance of the RF source to the load impedance. The match network has an output component that is directly connected to the drive electrode. The electrode assembly can further have a body of RF energy absorbing material disposed between the match network and the drive electrode, the absorbing material having a frequency dependent energy absorption characteristic which increases with frequency.
摘要翻译：一种用于将RF功率从具有输出阻抗的RF功率源提供给非线性介质的电极组件，该组件包括：驱动电极，与介质通信并与介质一起形成负载阻抗; 以及耦合在RF电源和驱动电极之间的阻抗匹配网络，用于将RF源的输出阻抗匹配到负载阻抗。匹配网络具有直接连接到驱动电极的输出组件。电极组件还可以具有设置在匹配网络和驱动电极之间的RF能量吸收材料主体，吸收材料具有随频率而增加的频率相关的能量吸收特性。

6. 发明专利

AU3679001A Device and method for measuring an electric field inside a plasma 未知
公开(公告)号：AU3679001A
公开(公告)日：2001-08-27
申请号：AU3679001
申请日：2001-02-09
申请人： TOKYO ELECTRON LTD
发明人： JOHNSON WAYNE L , WINDHORN THOMAS H
IPC分类号： G01R19/00 , G01R29/08 , H05H1/00
摘要： An RF electric field probe device for measuring an RF electric field intensity in a plasma. The device is composed essentially of an electric field sensing unit and an output unit. The electric field sensing unit is composed of a first electro-optical component positionable in the plasma and operable to modulate light as a function of variations of the RF electric field in the plasma at the fundamental frequency and harmonics of the RF electric field, and a first antenna unit electrically coupled to the first component for coupling the first component to the RF electric field. The output unit is coupled to the electric field sensing unit for providing an output signal containing information relating to the magnitude and frequency of the modulation which occurs in the first component. The probe device may be used to map a plasma region by moving the probe device to any selected point in the plasma region.

7. 发明专利

AU6505701A Apparatus and method for improving electron acceleration 未知
公开(公告)号：AU6505701A
公开(公告)日：2001-12-17
申请号：AU6505701
申请日：2001-05-29
申请人： TOKYO ELECTRON LTD
发明人： QUON BILL H , JEVTIC JOVAN , WINDHORN THOMAS H , JOHNSON WAYNE L
IPC分类号： H05H1/46 , H01J37/32 , H01L21/3065

8. 发明专利

AU3990601A Electrically controlled plasma uniformity in a high density plasma source 未知
公开(公告)号：AU3990601A
公开(公告)日：2001-09-12
申请号：AU3990601
申请日：2001-02-28
申请人： TOKYO ELECTRON LTD
发明人： JOHNSON WAYNE L , WINDHORN THOMAS H , STRANG ERIC J
IPC分类号： C23C14/34 , C23C16/48 , H01J37/32 , H01L21/3065 , H05H1/46
摘要： Apparatus including a chamber and a coil system for converting a field-generating current into a RF magnetic field in the chamber when the chamber contains an ionized gas which interacts with the RF magnetic field to create a plasma. The plasma is contained within a cylindrical region enclosed by the chamber, which region has a longitudinal center axis, and the region is considered to be made up of a plurality of annular zones concentric with the center axis and disposed at respectively different distances from the center axis. The coil system is composed of: a plurality of individual coils each positioned and dimensioned to produce a RF magnetic field which predominantly influences a respective annular zone.

9. 发明专利

AU4997701A Device and method for coupling two circuit components which have different impedances 未知
公开(公告)号：AU4997701A
公开(公告)日：2001-08-20
申请号：AU4997701
申请日：2001-02-09
申请人： TOKYO ELECTRON LTD
发明人： MITROVIC ANDREJ S , WINDHORN THOMAS H , JOHNSON WAYNE L
IPC分类号： H05H1/46 , C23F4/00 , H01J37/32 , H01L21/205 , H01L21/3065 , H01P5/02 , H01J37/00

10. 发明专利

AU7919901A Close coupled match structure for rf drive electrode 未知
公开(公告)号：AU7919901A
公开(公告)日：2002-02-25
申请号：AU7919901
申请日：2001-08-07
申请人： TOKYO ELECTRON LTD
发明人： WINDHORN THOMAS H
IPC分类号： H05H1/46 , B01J19/08 , C23C16/505 , H01J37/32 , H01L21/3065 , H01L21/31 , H05H1/00
摘要： An electrode assembly for supplying RF power from a RF power source having an output impedance to an electrically non-linear medium, the assembly being composed of: a drive electrode in communication with the medium and forming with the medium a load impedance; and an impedance match network coupled between the RF power source and the drive electrode for matching the output impedance of the RF source to the load impedance. The match network has an output component that is directly connected to the drive electrode. The electrode assembly can further have a body of RF energy absorbing material disposed between the match network and the drive electrode, the absorbing material having a frequency dependent energy absorption characteristic which increases with frequency.

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