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1. 发明专利

CA2345097C METHOD OF DETECTING ABNORMALITIES IN FLOW RATE IN PRESSURE-TYPE FLOW CONTROLLER 未知
公开(公告)号：CA2345097C
公开(公告)日：2004-05-11
申请号：CA2345097
申请日：2000-07-27
申请人： TOKYO ELECTRON LTD , IIDA SEIICHI , OHMI TADAHIRO , FUJIKIN KK
发明人： IIDA SEIICHI , KAGATSUME SATOSHI , IDETA EIJI , IKEDA NOBUKAZU , HIROSE JUN , FUKASAWA KAZUO , OHMI TADAHIRO , NAGAOKA HIDEKI , KOIZUMI HIROSHI , UNO TOMIO , NISHINO KOUJI , DOHI RYOUSUKE
IPC分类号： G01F1/36 , F16K37/00 , G05B23/02 , G05D7/06 , G01D21/00 , F16K17/22
摘要： A method checks the flow rate for abnormalities while controlling the fl ow rate of fluid in a pressure-type flow controller FCS using an orifice - the pressure-type flow controller wherein with the upstream pressure P1 maintained about two o r more times higher than the downstream pressure P2, the downstream flow rate Q C i s calculated by the equation Q C = KP1 (K: constant) and wherein the control valve CV is controlled on the basis of the difference signal Q Y between the calculated flow rate Q C and the set flow rate Q S. The method comprises, outputting a testing signal .DELTA.Qs having a testing amplitude Vo from a testing circuit provided separately or a flow rate setting circuit to the control valve CV, measuring the pressure amplitude V of the variable pressure .DELTA.P1 of the pressure P1 on the upstream side of the orifice th at arises in response to actuation of the control valve CV and setting off an alarm for t he clogging of the orifice when the pressure amplitude V is smaller than a limit amplitu de Vt. If the testing signal .DELTA.Qs is superimposed on a steady-state set flow rate signal Qso and outputted to control the valve CV from the testing circuit or the flow rate setting circuit, the flow rate can be checked for abnormalities while controlling the flow ra te by the steady-state set flow rate signal Qso.

2. 发明专利

DE60036362T2 未知
公开(公告)号：DE60036362T2
公开(公告)日：2008-06-12
申请号：DE60036362
申请日：2000-07-27
申请人： TOKYO ELECTRON LTD , FUJIKIN KK , OHMI TADAHIRO , IIDA SEIICHI
发明人： OHMI TADAHIRO , IIDA SEIICHI , KAGATSUME SATOSHI , HIROSE JUN , FUKASAWA KAZUO , KOIZUMI HIROSHI , NAGAOKA HIDEKI , UNO TOMIO , NISHINO KOUJI , IKEDA NOBUKAZU , DOHI RYOUSUKE , IDETA EIJI
IPC分类号： G01F1/36 , G05B23/02 , F16K17/22 , F16K37/00 , G01D21/00 , G05D7/06
摘要： A method checks the flow rate for abnormalities while controlling the flow rate of fluid in a pressure-type flow controller FCS using an orifice - the pressure-type flow controller wherein with the upstream pressure P1 maintained about two or more times higher than the downstream pressure P2, the downstream flow rate QC is calculated by the equation QC = KP1 (K: constant) and wherein the control valve CV is controlled on the basis of the difference signal QY between the calculated flow rate QC and the set flow rate QS. The method comprises, outputting a testing signal DELTA Qs having a testing amplitude Vo from a testing circuit provided separately or a flow rate setting circuit to the control valve CV, measuring the pressure amplitude V of the variable pressure DELTA P1 of the pressure P1 on the upstream side of the orifice that arises in response to actuation of the control valve CV and setting off an alarm for the clogging of the orifice when the pressure amplitude V is smaller than a limit amplitude Vt. If the testing signal DELTA Qs is superimposed on a steady-state set flow rate signal Qso and outputted to control the valve CV from the testing circuit or the flow rate setting circuit, the flow rate can be checked for abnormalities while controlling the flow rate by the steady-state set flow rate signal Qso.

3. 发明专利

AT373257T 未知
公开(公告)号：AT373257T
公开(公告)日：2007-09-15
申请号：AT00948265
申请日：2000-07-27
申请人： TOKYO ELECTRON LTD , FUJIKIN KK , OHMI TADAHIRO , IIDA SEIICHI
发明人： OHMI TADAHIRO , IIDA SEIICHI , KAGATSUME SATOSHI , HIROSE JUN , FUKASAWA KAZUO , KOIZUMI HIROSHI , NAGAOKA HIDEKI , UNO TOMIO , NISHINO KOUJI , IKEDA NOBUKAZU , DOHI RYOUSUKE , IDETA EIJI
IPC分类号： G01F1/36 , G05B23/02 , F16K17/22 , F16K37/00 , G01D21/00 , G05D7/06
摘要： A method checks the flow rate for abnormalities while controlling the flow rate of fluid in a pressure-type flow controller FCS using an orifice - the pressure-type flow controller wherein with the upstream pressure P1 maintained about two or more times higher than the downstream pressure P2, the downstream flow rate QC is calculated by the equation QC = KP1 (K: constant) and wherein the control valve CV is controlled on the basis of the difference signal QY between the calculated flow rate QC and the set flow rate QS. The method comprises, outputting a testing signal DELTA Qs having a testing amplitude Vo from a testing circuit provided separately or a flow rate setting circuit to the control valve CV, measuring the pressure amplitude V of the variable pressure DELTA P1 of the pressure P1 on the upstream side of the orifice that arises in response to actuation of the control valve CV and setting off an alarm for the clogging of the orifice when the pressure amplitude V is smaller than a limit amplitude Vt. If the testing signal DELTA Qs is superimposed on a steady-state set flow rate signal Qso and outputted to control the valve CV from the testing circuit or the flow rate setting circuit, the flow rate can be checked for abnormalities while controlling the flow rate by the steady-state set flow rate signal Qso.

4. 发明专利

DE60036362D1 未知
公开(公告)号：DE60036362D1
公开(公告)日：2007-10-25
申请号：DE60036362
申请日：2000-07-27
申请人： TOKYO ELECTRON LTD , FUJIKIN KK , OHMI TADAHIRO , IIDA SEIICHI
发明人： OHMI TADAHIRO , IIDA SEIICHI , KAGATSUME SATOSHI , HIROSE JUN , FUKASAWA KAZUO , KOIZUMI HIROSHI , NAGAOKA HIDEKI , UNO TOMIO , NISHINO KOUJI , IKEDA NOBUKAZU , DOHI RYOUSUKE , IDETA EIJI
IPC分类号： G01F1/36 , G05B23/02 , F16K17/22 , F16K37/00 , G01D21/00 , G05D7/06
摘要： A method checks the flow rate for abnormalities while controlling the flow rate of fluid in a pressure-type flow controller FCS using an orifice - the pressure-type flow controller wherein with the upstream pressure P1 maintained about two or more times higher than the downstream pressure P2, the downstream flow rate QC is calculated by the equation QC = KP1 (K: constant) and wherein the control valve CV is controlled on the basis of the difference signal QY between the calculated flow rate QC and the set flow rate QS. The method comprises, outputting a testing signal DELTA Qs having a testing amplitude Vo from a testing circuit provided separately or a flow rate setting circuit to the control valve CV, measuring the pressure amplitude V of the variable pressure DELTA P1 of the pressure P1 on the upstream side of the orifice that arises in response to actuation of the control valve CV and setting off an alarm for the clogging of the orifice when the pressure amplitude V is smaller than a limit amplitude Vt. If the testing signal DELTA Qs is superimposed on a steady-state set flow rate signal Qso and outputted to control the valve CV from the testing circuit or the flow rate setting circuit, the flow rate can be checked for abnormalities while controlling the flow rate by the steady-state set flow rate signal Qso.

5. 发明专利

CA2345097A1 METHOD OF DETECTING ABNORMALITIES IN FLOW RATE IN PRESSURE-TYPE FLOW CONTROLLER 未知
公开(公告)号：CA2345097A1
公开(公告)日：2001-02-22
申请号：CA2345097
申请日：2000-07-27
申请人： FUJIKIN KK , OHMI TADAHIRO , IIDA SEIICHI , TOKYO ELECTRON LTD
发明人： IDETA EIJI , NISHINO KOUJI , IKEDA NOBUKAZU , UNO TOMIO , DOHI RYOUSUKE , HIROSE JUN , KAGATSUME SATOSHI , FUKASAWA KAZUO , KOIZUMI HIROSHI , NAGAOKA HIDEKI , OHMI TADAHIRO , IIDA SEIICHI
IPC分类号： G01F1/36 , F16K37/00 , G05B23/02 , G05D7/06 , G01D21/00 , F16K17/22
摘要： A method for detecting abnormal flow rate by easily detecting an obstruction of an orifice while a fluid pressure flow rate controller using an orifice i s controlling the flow rate. The method uses a flow rate controller (FCS) so a s to calculate the flow rate Qc on the downstream side when the upstream-side pressure P1 is maintained at a value about twice or more the downstream-side pressure P2 from Qc=KP1 (K: constant) and to control the operation of a control valve (CV) according to a signal Qy representing the difference between the calculated flow rate Qc and a preset flow rate Qs. A testing circuit or flow rate setting circuit provided separately outputs a testing signal .DELTA.Qs having a testing amplitude V0 to the control valve (CV). Th e pressure amplitude V of a pressure variation .DELTA.P1 of the upstream-side pressure P1 occurring in response to the opening/closing of the control valv e (CV) is measured. When the pressure amplitude V decreases below a limit amplitude Vt, the obstruction of the orifice is announced, thus implementing the method. If the testing signal .DELTA.Qs is superimposed on a steady-stat e preset flow rate signal Qs0 and outputted together from the testing circuit or the flow rate setting circuit to the control valve (CV), an abnormal flow ra te can be detectedwhile controlling the flow rate by using the steady-state preset flow rate signal Qs0.

6. 发明公开

EP1126347A4 METHOD FOR DETECTING ABNORMAL FLOW RATE FOR PRESSURE FLOW RATE CONTROLLER 有权
标题翻译：检测方法的异常流量一个流程中的稳压器EION加压流体
公开(公告)号：EP1126347A4
公开(公告)日：2004-11-03
申请号：EP00948265
申请日：2000-07-27
申请人： TOKYO ELECTRON LTD , FUJIKIN KK , OHMI TADAHIRO , IIDA SEIICHI
发明人： OHMI TADAHIRO , IIDA SEIICHI , KAGATSUME SATOSHI , HIROSE JUN , FUKASAWA KAZUO , KOIZUMI HIROSHI , NAGAOKA HIDEKI , UNO TOMIO , NISHINO KOUJI , IKEDA NOBUKAZU , DOHI RYOUSUKE , IDETA EIJI
IPC分类号： G01F1/36 , F16K37/00 , G05B23/02 , G05D7/06 , F16K17/22 , G01D21/00
CPC分类号： G05B23/0235 , G05B23/0256 , G05D7/0635 , Y10T137/0396 , Y10T137/7759 , Y10T137/7761 , Y10T137/8326
摘要： A method for detecting abnormal flow rate by easily detecting an obstruction of an orifice while a fluid pressure flow rate controller using an orifice is controlling the flow rate. The method uses a flow rate controller (FCS) so as to calculate the flow rate Qc on the downstream side when the upstream-side pressure P1 is maintained at a value about twice or more the downstream-side pressure P2 from Qc=KP1 (K: constant) and to control the operation of a control valve (CV) according to a signal Qy representing the difference between the calculated flow rate Qc and a preset flow rate Qs. A testing circuit or flow rate setting circuit provided separately outputs a testing signal ΔQs having a testing amplitude V0 to the control valve (CV). The pressure amplitude V of a pressure variation ΔP1 of the upstream-side pressure P1 occurring in response to the opening/closing of the control valve (CV) is measured. When the pressure amplitude V decreases below a limit amplitude Vt, the obstruction of the orifice is announced, thus implementing the method. If the testing signal ΔQs is superimposed on a steady-state preset flow rate signal Qs0 and outputted together from the testing circuit or the flow rate setting circuit to the control valve (CV), an abnormal flow rate can be detected while controlling the flow rate by using the steady-state preset flow rate signal Qs0.

7. 发明授权

US6422264B2 Parallel divided flow-type fluid supply apparatus, and fluid-switchable pressure-type flow control method and fluid-switchable pressure-type flow control system for the same fluid supply apparatus 有权
标题翻译：平行分流式流体供给装置和流体切换式压力式流量控制方法以及用于同一流体供给装置的流体切换型压力式流量控制系统
公开(公告)号：US6422264B2
公开(公告)日：2002-07-23
申请号：US73464000
申请日：2000-12-13
申请人： FUJIKIN KK , OHMI TADAHIRO , TOKYO ELECTRON LTD
发明人： OHMI TADAHIRO , KAGATSUME SATOSHI , SUGIYAMA KAZUHIKO , MINAMI YUKIO , NISHINO KOUJI , DOHI RYOUSUKE , YONEHANA KATSUNORI , IKEDA NOBUKAZU , YAMAJI MICHIO , HIROSE JUN , FUKAZAWA KAZUO , KOIZUMI HIROSHI , NAGAOKA HIDEKI , MORIMOTO AKIHIRO , UNO TOMIO , IDETA EIJI , MATSUMOTO ATSUSHI , UENOYAMA TOYOMI , HIROSE TAKASHI
IPC分类号： G05D7/06
CPC分类号： G05D7/0658 , G05D7/0664 , Y10S438/935 , Y10T137/0396 , Y10T137/7759 , Y10T137/7761 , Y10T137/86389 , Y10T137/87877 , Y10T137/87917
摘要： A fluid supply apparatus with a plurality of flow lines branching out from one pressure regulator with the flow lines arranged in parallel and constructed so that opening or closing one flow passage will have no transient effect on the steady flow of the other flow passages. Each flow passage is provided with a time delay-type mass flow controller MFC so that when one closed fluid passage is opened, the mass flow controller on that flow passage reaches a set flow rate Qs in a specific delay time DELTAt from the starting point.The invention includes a method and an apparatus in which a plurality of gas types can be controlled in flow rate with high precision by one pressure-type flow control system.
摘要翻译：一种流体供给装置，具有从一个压力调节器分支出的多个流动管线，流动线平行布置并构造成使得打开或关闭一个流动通道对其它流动通道的稳定流动将没有暂时的影响。每个流路设置有时间延迟型质量流量控制器MFC，使得当一个封闭流体通道打开时，该流路上的质量流量控制器在起始点的特定延迟时间DELTAt中达到设定流量Qs。本发明包括通过一个压力式流量控制系统以高精度控制多种气体类型的方法和装置。

8. 发明专利

AT389202T 未知
公开(公告)号：AT389202T
公开(公告)日：2008-03-15
申请号：AT05076130
申请日：1999-08-09
申请人： FUJIKIN KK , TOKYO ELECTRON LTD , OHMI TADAHIRO
发明人： OHMI TADAHIRO , KAGATSUME SATOSHI , HIROSE JUN , NISHINO KOUJI
IPC分类号： F16K7/14 , G05D7/06 , C01B5/00 , F15D1/04 , F16K31/06 , G05B11/36
摘要： A fluid-switchable flow rate control system that permits free changing of the full scale flow rate and which can control a plurality of kinds of fluids with high precision. The fluid-switchable flow rate control system controls the flow rate of fluid with the pressure P1 on the upstream side of the orifice member held about twice or more higher than the downstream pressure P2, the fluid-switchable flow rate control system comprising an orifice member 8 replaceable with another to provide a suitable orifice diameter according to the kind of fluid and the flow rate range, a control valve 2 provided on the upstream side thereof, a pressure detector 6 provided between the control valve 2 and the orifice member 8, and a flow rate calculation circuit 14 where, from the pressure P1 detected by the pressure detector, the flow rate Qc is calculated by the equation Qc = KP1 (K: constant), a flow rate-setting circuit 16 for outputting flow rate setting signal Qe, a flow rate conversion circuit 18 for multiplying the calculated flow rate signal Qc by the flow rate conversion rate k into switch-over calculated flow rate signal Qf (Qf = kQc) to change the full scale flow rate, and a calculation control circuit 20 to output the difference between the switch-over calculation flow rate signal Qf and the flow rate setting signal Qe as control signal Qy to the drive 4 of the control valve 2, thereby opening or closing the control valve to bring the control signal Qy to zero, thus controlling the flow rate on the downstream side of the orifice member.

9. 发明专利

DE69832956D1 未知
公开(公告)号：DE69832956D1
公开(公告)日：2006-02-02
申请号：DE69832956
申请日：1998-08-13
申请人： FUJIKIN KK , TOKYO ELECTRON LTD , OHMI TADAHIRO
发明人： OHMI TADAHIRO , KAGAZUME TETU , SUGIYAMA KAZUHIKO , FUKADA OSAMU , OZAWA SUSUMU , SATOU YOSHIHIRO , DOHI RYOUSUKE , UNO TOMIO , NISHINO KOUJI , FUKUDA HIROYUKI , IKEDA NOBUKAZU , YAMAJI MICHIO
IPC分类号： B23P15/16 , F15D1/08 , G01F1/40 , G01F1/42 , G05D7/01
摘要： An orifice for use in pressure type flow rate control unit which can be manufactured easily and inexpensively, and which has a linear relationship between pressure P1 upstream of the orifice and the flow rate over a wide range of pressure ratio P2/P1 (where P1 is the pressure upstream of the orifice and P2 is the pressure downstream of same), with the flow rate characteristic relationship among a plurality of orifices being easily adjustable. More specifically, the orifice has a structure comprising a tapered inlet section (1) wherein one open end of a bottom hole (6) bored into a main body member (D) is cut into a shape like the mouthpiece of a trumpet, and a short drawn parallel part (2) continuing therefrom; and a short expanded tapered section (3) formed by expanding the diameter of the other open end of the bottom hole (6) and continuing from the drawn parallel part (2), and an expanded parallel part (4) continuing therefrom.

10. 发明专利

DE69832956T2 未知
公开(公告)号：DE69832956T2
公开(公告)日：2006-08-17
申请号：DE69832956
申请日：1998-08-13
申请人： FUJIKIN KK , TOKYO ELECTRON LTD , OHMI TADAHIRO
发明人： OHMI TADAHIRO , KAGAZUME TETU , SUGIYAMA KAZUHIKO , FUKADA OSAMU , OZAWA SUSUMU , SATOU YOSHIHIRO , DOHI RYOUSUKE , UNO TOMIO , NISHINO KOUJI , FUKUDA HIROYUKI , IKEDA NOBUKAZU , YAMAJI MICHIO
IPC分类号： F15D1/08 , B23P15/16 , G01F1/40 , G01F1/42 , G05D7/01
摘要： An orifice for use in pressure type flow rate control unit which can be manufactured easily and inexpensively, and which has a linear relationship between pressure P1 upstream of the orifice and the flow rate over a wide range of pressure ratio P2/P1 (where P1 is the pressure upstream of the orifice and P2 is the pressure downstream of same), with the flow rate characteristic relationship among a plurality of orifices being easily adjustable. More specifically, the orifice has a structure comprising a tapered inlet section (1) wherein one open end of a bottom hole (6) bored into a main body member (D) is cut into a shape like the mouthpiece of a trumpet, and a short drawn parallel part (2) continuing therefrom; and a short expanded tapered section (3) formed by expanding the diameter of the other open end of the bottom hole (6) and continuing from the drawn parallel part (2), and an expanded parallel part (4) continuing therefrom.

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