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1. 发明申请

WO2002059933A2 VERTICALLY TRANSLATABLE CHUCK ASSEMBLY AND METHOD FOR A PLASMA REACTOR SYSTEM 审中-公开
标题翻译：垂直翻转卡盘组件及等离子体反应器系统的方法
公开(公告)号：WO2002059933A2
公开(公告)日：2002-08-01
申请号：PCT/US2001/048851
申请日：2001-12-20
申请人： TOKYO ELECTRON LIMITED , JOHNSON, Wayne, L. , FINK, Steven, T. , BROWNING, Jeff , JEVTIC, Jovan
发明人： JOHNSON, Wayne, L. , FINK, Steven, T. , BROWNING, Jeff , JEVTIC, Jovan
IPC分类号： H01J37/00
CPC分类号： H01L21/67069 , H01J37/32082 , H01J37/32174
摘要： A chuck assembly (110) for supporting a workpiece (116) within a plasma reactor chamber (60) having sidewalls (64) surrounding an interior region (65) capable of supporting a plasma. The assembly includes a chuck base (130) and a plurality of support arms (150A-150C) extending outwardly from the chuck base perimeter to the chamber sidewalls. The support arms are adapted to support the chuck base within the interior region, while also being adapted to provide a path for mechanically, electrically, pneumatically and/or fluidly communicating with the chuck assembly from outside the chamber. The chuck assembly includes a workpiece support member (160) arranged above the chuck base, capable of supporting the workpiece and serving as a chuck electrode. The workpiece support member is supported by one or more vertical translation member (168) arranged between and operatively connected to the chuck base and the workpiece support member. The chuck assembly includes a match network (180MN), wherein at least a portion of the match network is mounted directly to the workpiece support member. The use of the support arms allows for the positioning of a vacuum pump system (250) directly beneath the chuck assembly.
摘要翻译：一种用于在等离子体反应室（60）内支撑工件（116）的卡盘组件（110），其具有围绕能够支撑等离子体的内部区域（65）的侧壁（64）。该组件包括卡盘基部（130）和从卡盘基部周边向腔室侧壁向外延伸的多个支撑臂（150A-150C）。支撑臂适于在内部区域内支撑卡盘基座，同时还适于提供从腔室外部与卡盘组件机械地，电气地，气动地和/或流体地连通的路径。卡盘组件包括布置在卡盘基座上方的工件支撑构件（160），其能够支撑工件并用作卡盘电极。工件支撑构件由一个或多个垂直移动构件（168）支撑，垂直移动构件（168）布置在卡盘基部和工件支撑构件之间并且可操作地连接至卡盘基部和工件支撑构件卡盘组件包括匹配网络（180MN），其中匹配网络的至少一部分直接安装到工件支撑构件。支撑臂的使用允许将真空泵系统（250）定位在卡盘组件的正下方。

2. 发明申请

WO2002097937A1 INDUCTIVELY COUPLED HIGH-DENSITY PLASMA SOURCE 审中-公开
标题翻译：感应耦合高密度等离子体源
公开(公告)号：WO2002097937A1
公开(公告)日：2002-12-05
申请号：PCT/US2002/022080
申请日：2002-03-25
申请人： TOKYO ELECTRON LIMITED , QUON, Bill, H. , JEVTIC, Jovan , ANTLEY, Sam , STRANG, Eric, J.
发明人： QUON, Bill, H. , JEVTIC, Jovan , ANTLEY, Sam , STRANG, Eric, J.
IPC分类号： H01T23/00
CPC分类号： H01J37/321 , H01J37/32357 , H01J37/3266
摘要： A high-density plasma source (100) is disclosed. The source includes an annular insulating body (300) with an annular cavity (316) formed within. An inductor coil (340) serving as an antenna is arranged within the annular cavity and is operable to generate a first magnetic field within a plasma duct (60) interior region (72) and inductively couple to the plasma when the annular body is arranged to surround a portion of the plasma duct. A grounded conductive housing (400) surrounds the annular insulating body. An electrostatic shield (360) is arranged adjacent the inner surface of the insulating body and is grounded to the conductive housing. Upper and lower magnet rings (422 and 424) are preferably arranged adjacent the upper and lower surfaces of the annular insulating body outside of the conductive housing. A T-match network is in electrical communication with said inductor coil and is adapted to provide for efficient transfer of RF power from an RF power source to the plasma. At least one plasma source can be used to form a high-density plasma suitable for plasma processing of a workpiece residing in a plasma chamber in communication with the at least one source.
摘要翻译：公开了一种高密度等离子体源（100）。源包括环形绝缘体（300），其内部形成有环形空腔（316）。用作天线的电感线圈（340）布置在环形空腔内，并且可操作以在等离子体管道（60）内部区域（72）内产生第一磁场，并且当环形体布置成围绕等离子体管道的一部分。接地导电壳体（400）围绕环形绝缘体。静电屏蔽（360）被布置成邻近绝缘体的内表面并且被接地到导电壳体。上，下磁环（422和424）优选地布置成邻近导电外壳外的环形绝缘体的上表面和下表面。 T匹配网络与所述电感器线圈电连通，并且适于提供从RF功率源到等离子体的RF功率的有效传输。可以使用至少一个等离子体源来形成适于等离子体处理等离子体处理的等离子体处理，所述等离子体处理驻留在与所述至少一个源连通的等离子体室中。

3. 发明申请

WO2007084442A3 OPTICAL INTERFACE FOR LOCAL MRI COILS 审中-公开
公开(公告)号：WO2007084442A3
公开(公告)日：2007-07-26
申请号：PCT/US2007/001006
申请日：2007-01-16
申请人： INVIVO CORPORATION , JEVTIC, Jovan , NUNEZ, Tatum
发明人： JEVTIC, Jovan , NUNEZ, Tatum
IPC分类号： G01V3/00
摘要： An implementation of an optical transmission path for NMR signals from local coils (34) in magnetic resonance imaging employs a photomodulator (49, 46) that may be incorporated into a connecting optical cable (28) to be shared among multiple local coils and provide for connection and disconnection at an electrical interface eliminating the need for optical connectors.

4. 发明申请

WO2007106601A2 MRI COIL WITH WHISPER GALLERY MODE PHOTONIC SENSOR 审中-公开
标题翻译： MRI线圈与图像模式光电传感器
公开(公告)号：WO2007106601A2
公开(公告)日：2007-09-20
申请号：PCT/US2007/006795
申请日：2007-03-15
申请人： INVIVO CORPORATION , DUENSING, Randy, G. , JEVTIC, Jovan
发明人： DUENSING, Randy, G. , JEVTIC, Jovan
IPC分类号： G01J3/12
CPC分类号： G01R33/3692 , G02F1/225 , G02F2203/15
摘要： A whispering gallery mode optical resonator (26) is constructed from an electro-optic material allowing direct electrical modulation of a light signal. Modulation frequencies of greater than the bandwidth of the modes (42) of the whispering gallery mode optical resonators are made possible by means of a resonance splitting technique that provides a second passband mode offset from the primary passband modes of the whispering gallery mode optical resonators to accommodate a modulation sideband (44).
摘要翻译：耳语画廊模式光学谐振器（26）由允许光信号的直接电调制的电光材料构成。通过谐振分割技术使得可以通过谐振分离技术使得大于电话槽模式光谐振器的模式（42）的带宽的调制频率提供从耳语库模式光谐振器的主通带模式到第二通带模式偏移的第二通带模式偏移适应调制边带（44）。

5. 发明申请

WO2006076624A1 PHASED ARRAY MRI COIL WITH CONTROLLABLE COUPLED RING RESONATOR 审中-公开
标题翻译：具有可控联轴器谐振器的相位阵列MRI线圈
公开(公告)号：WO2006076624A1
公开(公告)日：2006-07-20
申请号：PCT/US2006/001316
申请日：2006-01-13
申请人： INVIVO CORPORATION , JEVTIC, Jovan , PIKEJA, Velibor
发明人： JEVTIC, Jovan , PIKEJA, Velibor
IPC分类号： G01R33/34 , G01R33/3415 , G01R33/36
CPC分类号： G01R33/3607 , G01R33/34046 , G01R33/3415
摘要： A coil for magnetic resonance imaging operates in a transmit mode with multiple loops locked together in a phase relationship like a birdcage coil to provide a uniform transmission field, but in a receive mode like a phased array coil, each coil operating independently to produce a separate signal for reception by the MRI machine. Phasing of the coil during transmit mode is provided by a ring resonator controllably coupled to the loops. Controllable coupling is provided by a series of current limiting elements interposed between the resonant ring and the loops of the coil.
摘要翻译：用于磁共振成像的线圈以发射模式工作，其中多个环路以类似鸟笼线圈的相位关系锁定在一起，以提供均匀的发射场，但是在类似相控阵线圈的接收模式中，每个线圈独立地工作以产生单独的信号由MRI机器接收。在发射模式期间线圈的相位由可控地耦合到环路的环形谐振器提供。可控耦合由插入在谐振环和线圈的环之间的一系列限流元件提供。

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