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    • 6. 发明申请
    • HIGH DENSITY THREE-DIMENSIONAL INTEGRATED CAPACITORS
    • 高密度三维集成电容器
    • WO2012079013A1
    • 2012-06-14
    • PCT/US2011/064219
    • 2011-12-09
    • TESSERA, INC.OGANESIAN, VageHABA, BelgacemMOHAMMED, IlyasSAVALIA, Piyush
    • OGANESIAN, VageHABA, BelgacemMOHAMMED, IlyasSAVALIA, Piyush
    • H01L21/02H01L21/768H01L23/48H01L23/64
    • H01L28/91H01L23/481H01L28/60H01L2223/6622H01L2924/0002H01L2924/09701H01L2924/00
    • A component (10) includes a substrate (20) and a capacitor (40). The substrate (20) can have first and second surfaces (21, 22) and an opening (30) extending from the first surface. The capacitor (40) can include first, second, third, and fourth conductive plates (61, 62, 71, 72), each plate extending along an inner surface (31) of the opening (30). The capacitor (40) can include first and second electrodes (163, 164) exposed at first and second spaced apart locations, and third and fourth electrodes (173, 174) exposed at third and fourth spaced apart locations. The third plate (71) can overlie the first plate (61) and can be separated therefrom by a first dielectric layer (81). The second plate (62) can overlie the third plate (71) and can be separated therefrom by a second dielectric layer (82). The fourth plate (72) can overlie the second plate (62) and can be separated therefrom by a third dielectric layer (83).
    • 组件(10)包括衬底(20)和电容器(40)。 衬底(20)可以具有从第一表面延伸的第一和第二表面(21,22)和开口(30)。 电容器(40)可以包括第一,第二,第三和第四导电板(61,62,71,72),每个板沿着开口(30)的内​​表面(31)延伸。 电容器(40)可以包括在第一和第二间隔开的位置处暴露的第一和第二电极(163,164),以及在第三和第四间隔开的位置暴露的第三和第四电极(173,174)。 第三板(71)可以覆盖第一板(61),并且可以通过第一介电层(81)与第一板(61)分离。 第二板(62)可以覆盖第三板(71),并且可以通过第二介电层(82)与第三板(71)分离。 第四板(72)可以覆盖第二板(62),并且可以通过第三介电层(83)与第二板(72)分离。
    • 10. 发明申请
    • STACKED MICROELECTRONIC ASSEMBLY HAVING INTERPOSER CONNECTING ACTIVE CHIPS
    • 具有连接主动插座的插座的堆叠式微电子组件
    • WO2012075371A1
    • 2012-06-07
    • PCT/US2011/063025
    • 2011-12-02
    • TESSERA, INC.HABA, BelgacemOGANESIAN, VageMOHAMMED, IlyasSAVALIA, PiyushMITCHELL, Craig
    • HABA, BelgacemOGANESIAN, VageMOHAMMED, IlyasSAVALIA, PiyushMITCHELL, Craig
    • H01L25/065H01L23/48H01L25/16
    • H01L25/0657H01L21/486H01L21/76898H01L23/36H01L23/481H01L23/49822H01L23/49827H01L25/16H01L2224/16225H01L2225/06513H01L2225/06517H01L2225/06541H01L2225/06572H01L2924/15311
    • A microelectronic assembly (100) can include first and second microelectronic elements (102, 112) each embodying active semiconductor devices adjacent a front surface (104, 114) thereof, and an interposer (120) of a material having a CTE less than 10 ppm/°C. Each microelectronic element (102, 112) can have a conductive pad (106, 116) exposed at the respective front surface (104, 114). The interposer (120) can have a second conductive element (118) extending within an opening (222) in the interposer and exposed at first and second surfaces (227, 229) of the interposer. The first and second surfaces (227, 229) can face the front surface (104, 114) of the respective first and second microelectronic elements (102, 112). Each microelectronic element (102, 112) can include a first conductive element (236, 238) extending within an opening (206, 216) extending from a rear surface (237, 239) towards the front surface (104, 114) of the respective microelectronic element. At least one of the first conductive elements (236, 238) can extend through the conductive pad (204, 214) of the respective first or second microelectronic element (102, 112).
    • 微电子组件(100)可以包括第一和第二微电子元件(102,112),每个微电子元件(102,112)各自体现邻近其前表面(104,114)的有源半导体器件,以及具有CTE小于10ppm的材料的插入件(120) /C。 每个微电子元件(102,112)可以具有在相应的前表面(104,114)处暴露的导电垫(106,116)。 插入器(120)可以具有在插入器中的开口(222)内延伸并在插入件的第一和第二表面(227,229)处露出的第二导电元件(118)。 第一和第二表面(227,229)可面对相应的第一和第二微电子元件(102,112)的前表面(104,114)。 每个微电子元件(102,112)可以包括第一导电元件(236,238),该第一导电元件(236,238)在从后表面(237,239)朝向相应的后表面(227,119)的前表面(104,114)延伸的开口(206,216)内延伸 微电子元件。 第一导电元件(236,238)中的至少一个可以延伸通过相应的第一或第二微电子元件(102,112)的导电焊盘(204,214)。