专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明授权

US11428216B2 Cryopump and method for controlling cryopump 有权
公开(公告)号：US11428216B2
公开(公告)日：2022-08-30
申请号：US16725384
申请日：2019-12-23
申请人： SUMITOMO HEAVY INDUSTRIES, LTD.
发明人： Kakeru Takahashi
IPC分类号： F04B37/08 , F04B37/14
摘要： A cryopump includes: a first-stage cryopanel; a second-stage cryopanel; a cryocooler thermally coupled to the first-stage cryopanel and the second-stage cryopanel to cool the first-stage cryopanel to a first-stage cooling temperature and cool the second-stage cryopanel to a second-stage cooling temperature that is lower than the first-stage cooling temperature; and a cryocooler controller configured to execute first-stage temperature control for controlling the first-stage cooling temperature to a first-stage target temperature and increase the cooling capacity of the cryocooler when an increase in the second-stage cooling temperature is detected during the execution of the first-stage temperature control.

2. 发明申请

US20220163030A1 CRYOPUMP SYSTEM AND MONITORING METHOD THEREOF 有权
公开(公告)号：US20220163030A1
公开(公告)日：2022-05-26
申请号：US17533983
申请日：2021-11-23
申请人： SUMITOMO HEAVY INDUSTRIES, LTD.
发明人： Kakeru Takahashi
IPC分类号： F04B51/00
摘要： A cryopump system mounted on a vacuum process device, the cryopump system including at least one cryopump, a cryopump controller that controls the cryopump, a network that connects the cryopump to the cryopump controller and transmits information related to the cryopump between the cryopump and the cryopump controller, and a cryopump monitor that is connected to the network and displays the information related to the cryopump, which is transmitted via the network, in which the cryopump controller is disposed in a casing of the vacuum process device, and the cryopump monitor is disposed outside the casing of the vacuum process device.

3. 发明授权

US10125755B2 Cryopump, control method of cryopump, and cryocooler 有权
公开(公告)号：US10125755B2
公开(公告)日：2018-11-13
申请号：US14971693
申请日：2015-12-16
申请人： Sumitomo Heavy Industries, Ltd.
发明人： Kakeru Takahashi
IPC分类号： F04B37/08
摘要： A cryopump includes a cryopanel, a cryocooler which is configured to cool the cryopanel, and includes a cryocooler motor configured to drive the cryocooler and a cryocooler inverter configured to control an operating frequency of the cryocooler motor, and a control unit configured to control the cryocooler to perform a cool-down operation by which a temperature of the cryopanel is decreased from room temperature to a standard operating temperature. The control unit includes an operating frequency determination unit configured to determine an operating frequency of the cryocooler motor within an operating frequency range having an upper limit operating frequency and outputs the operating frequency to the cryocooler inverter, and an upper limit adjustment unit configured to decrease the upper limit operating frequency based on a decrease in a temperature of the cryopanel during the cool-down operation.

4. 发明申请

US20160177934A1 CRYOPUMP, CONTROL METHOD OF CRYOPUMP, AND CRYOCOOLER 审中-公开
标题翻译： CRYOPUMP，CRYOPUMP的控制方法和CRYOCOOLER
公开(公告)号：US20160177934A1
公开(公告)日：2016-06-23
申请号：US14971693
申请日：2015-12-16
申请人： Sumitomo Heavy Industries, Ltd.
发明人： Kakeru Takahashi
IPC分类号： F04B37/08 , G05D23/19 , G05B11/30
CPC分类号： F04B37/08
摘要： A cryopump includes a cryopanel, a cryocooler which is configured to cool the cryopanel, and includes a cryocooler motor configured to drive the cryocooler and a cryocooler inverter configured to control an operating frequency of the cryocooler motor, and a control unit configured to control the cryocooler to perform a cool-down operation by which a temperature of the cryopanel is decreased from room temperature to a standard operating temperature. The control unit includes an operating frequency determination unit configured to determine an operating frequency of the cryocooler motor within an operating frequency range having an upper limit operating frequency and outputs the operating frequency to the cryocooler inverter, and an upper limit adjustment unit configured to decrease the upper limit operating frequency based on a decrease in a temperature of the cryopanel during the cool-down operation.
摘要翻译：低温泵包括低温板，低温冷却器，其被配置为冷却低温板，并且包括构造成驱动低温冷却器的低温冷却器马达和配置成控制低温冷却器马达的运行频率的低温冷却器逆变器，以及控制单元，其构造成控制低温冷冻机以执行冷冻操作，通过该操作，冷冻板的温度从室温降低到标准工作温度。控制单元包括：操作频率确定单元，被配置为在具有上限工作频率的工作频率范围内确定低温冷却器电动机的工作频率，并将该工作频率输出到低温冷却器逆变器;以及上限调节单元，基于在冷却运行期间冷冻板的温度降低的上限运行频率。

5. 发明申请

US20140230461A1 CRYOPUMP AND METHOD OF OPERATING THE CRYOPUMP 审中-公开
标题翻译： CRYOPUMP和操作CRYOPUMP的方法
公开(公告)号：US20140230461A1
公开(公告)日：2014-08-21
申请号：US14182778
申请日：2014-02-18
申请人： SUMITOMO HEAVY INDUSTRIES, LTD.
发明人： Kakeru Takahashi
IPC分类号： F04B37/08
CPC分类号： F04B37/08 , B01D8/00 , F04B37/085 , F04C18/0215 , F25B9/14
摘要： A cryopump includes a high-temperature cryopanel, a low-temperature cryopanel, and a cooling system. The cooling system has: a refrigerator provided with a first stage for cooling the high-temperature cryopanel and a second stage for cooling the low-temperature cryopanel; and a control unit configured to control a cool-down operation in which the first stage and the second stage are cooled in order to initiate a vacuum pumping operation of the cryopump. The cooling system may be configured to selectively provide a cooling relief effect to the first stage at least temporarily in the cool-down operation.
摘要翻译：低温泵包括高温冷冻板，低温冷冻板和冷却系统。该冷却系统具有：具有用于冷却高温冷冻板的第一阶段的冷藏器和用于冷却低温冷冻板的第二阶段; 以及控制单元，被配置为控制其中第一级和第二级被冷却的冷却操作，以便启动低温泵的真空泵送操作。冷却系统可以被配置为在冷却运行中至少暂时地选择性地向第一阶段提供冷却减轻效果。

6. 发明申请

US20210301805A1 CRYOPUMP SYSTEM, AND CONTROL DEVICE AND REGENERATION METHOD FOR CRYOPUMP SYSTEM 有权
公开(公告)号：US20210301805A1
公开(公告)日：2021-09-30
申请号：US17212562
申请日：2021-03-25
申请人： SUMITOMO HEAVY INDUSTRIES, LTD.
发明人： Syuhei Gotanda , Kakeru Takahashi
IPC分类号： F04B37/08 , F04B41/06 , F04B49/22
摘要： A cryopump system includes a plurality of cryopumps, each cryopump including a rough valve connecting the cryopump to a common rough pump and a pressure sensor measuring a pressure in the cryopump, and a controller that controls, for each cryopump, the rough valve based on a measured pressure from the pressure sensor such that the cryopump is decompressed to a first reference pressure by the common rough pump and thereafter a vacuum is maintained in the cryopump, and the cryopump is further decompressed to a second reference pressure lower than the first reference pressure by the common rough pump. The controller is configured to, based on the measured pressure from the pressure sensor of a first cryopump, open the rough valve of a second cryopump such that the second cryopump is decompressed to the first reference pressure while the vacuum is maintained in the first cryopump.

7. 发明申请

US20210293230A1 CRYOPUMP AND CONTROL METHOD FOR CRYOPUMP 有权
公开(公告)号：US20210293230A1
公开(公告)日：2021-09-23
申请号：US17204441
申请日：2021-03-17
申请人： SUMITOMO HEAVY INDUSTRIES, LTD.
发明人： Kakeru Takahashi
IPC分类号： F04B37/08 , F04B49/03
摘要： A cryopump includes a cryopump container, a pressure sensor that measures a pressure in the cryopump container and generates time-series pressure data indicating the measured pressure, a vent valve that is provided on the cryopump container, is electrically operable to open and close, and is capable of being mechanically opened by a differential pressure between inside and outside the cryopump container, and a controller that, during cryopump regeneration, detects stabilization of the measured pressure based on the time-series pressure data from the pressure sensor and controls the vent valve to open upon detection of the stabilization of the measured pressure.

8. 发明申请

US20170198684A1 CRYOPUMP 审中-公开
公开(公告)号：US20170198684A1
公开(公告)日：2017-07-13
申请号：US15399488
申请日：2017-01-05
申请人： Sumitomo Heavy Industries, Ltd.
发明人： Kakeru Takahashi
IPC分类号： F04B37/08
摘要： A cryopump includes a second cryopanel unit which is thermally connected to a second cooling stage of a cryocooler, a radiation shield which includes a shield main opening, a shield side opening, and a shield bottom opening, and a cryopump housing having a housing bottom portion which faces the shield bottom opening. A dimension of the shield bottom opening is larger than a distance from the second cryopanel unit to the housing bottom portion.

9. 发明授权

US09700812B2 Cryopump 有权
公开(公告)号：US09700812B2
公开(公告)日：2017-07-11
申请号：US14197882
申请日：2014-03-05
申请人： Sumitomo Heavy Industries, Ltd.
发明人： Kakeru Takahashi
IPC分类号： B01D8/00 , F04B37/08
CPC分类号： B01D8/00 , F04B37/08
摘要： A cryopump includes: a cryopanel assembly including a plurality of cryopanels each having an adsorption area on both surfaces thereof; a radiation shield forming a gas receiving space that surrounds the cryopanel assembly; and a radiation cover disposed in a cryopump inlet. The radiation cover includes a main plate located at a position in the cryopanel inlet that corresponds to the cryopanel assembly and a louver portion located at a position in the cryopanel inlet that corresponds to the gas receiving space. The radiation cover may not include the louver portion.

10. 发明授权

US09404486B2 Cryopump, cryopanel structure, and vacuum evacuation method 有权
标题翻译：冷冻库，低温板结构和真空抽真空法
公开(公告)号：US09404486B2
公开(公告)日：2016-08-02
申请号：US14079166
申请日：2013-11-13
申请人： Sumitomo Heavy Industries, Ltd.
发明人： Kakeru Takahashi
IPC分类号： F04B37/08
CPC分类号： F04B37/08
摘要： A cryopump includes a nested array of cryopanels. A hydrogen molecule incident into a clearance in the nested array of cryopanels is reflected by a cryopanel. The reflected hydrogen molecule is adsorbed by another cryopanel. Each of the cryopanels may have an inverted frustum shape.
摘要翻译：低温泵包括一套嵌套的低温板阵列。入射到嵌套阵列冷冻板中的间隙的氢分子被低温板反射。反射的氢分子被另一个低温板吸附。每个冷冻板可以具有倒立的截头锥体形状。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式