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    • 3. 发明授权
    • Scanning device
    • 扫描设备
    • US06250141B1
    • 2001-06-26
    • US09436600
    • 1999-11-09
    • Stefan GeyerMichael HornRüdiger Hunger
    • Stefan GeyerMichael HornRüdiger Hunger
    • G01N1902
    • H01L22/12
    • A scanning device for semiconductor wafers with which rapid and dependable scanning is permitted. The invention is characterized by a base plate with a guiding pin protruding from it for the manual guidance of a depositing plate which is displaceable on the latter. The depositing plate is intended to receive a semiconductor wafer and is provided on an underside with meandering guiding channels for guiding by the guiding pin. A liquid drop is kept on a surface of the semiconductor wafer by a scanning tube and collects metal and dopant traces from the semiconductor wafer. The liquid drop can then be analyzed for determining a purity of the surface of the semiconductor wafer.
    • 一种用于半导体晶片的扫描装置,可以进行快速可靠的扫描。 本发明的特征在于具有从其突出的引导销的底板,用于手动引导可在其上移动的沉积板。 沉积板旨在接收半导体晶片,并且设置在下侧,具有用于由引导销引导的曲折引导通道。 通过扫描管将液滴保持在半导体晶片的表面上,并从半导体晶片收集金属和掺杂物迹线。 然后可以分析液滴以确定半导体晶片的表面的纯度。