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1. 发明授权

US08557185B2 Pressure vessel arrangement comprising an external pressure vessel and at least one insert basket 有权
标题翻译：压力容器装置包括外部压力容器和至少一个插入篮
公开(公告)号：US08557185B2
公开(公告)日：2013-10-15
申请号：US12545254
申请日：2009-08-21
申请人： Josef Schulmeyr , Stefan Geyer , Manfred Gehrig
发明人： Josef Schulmeyr , Stefan Geyer , Manfred Gehrig
IPC分类号： B01J3/04
CPC分类号： F16J12/00 , B01D11/0203 , B01D11/0288 , C12C3/10
摘要： A pressure vessel arrangement comprises an external pressure vessel and at least one insert basket in the pressure vessel for receiving a substance to be treated which is exposable to a pressure fluid which is feedable to the pressure vessel and the insert basket. There is provided a control device for the internal pressure prevailing in the insert basket, in particular in the form of a switchable pressure compensation line connecting the interior of the insert basket directly to the surroundings, i.e. not via the pressure vessel.
摘要翻译：压力容器装置包括外部压力容器和压力容器中的至少一个插入篮，用于接收可暴露于压力容器的待处理物质，该压力流体可供给压力容器和插入篮。提供了一种用于插入篮中的内部压力的控制装置，特别是以可切换的压力补偿线的形式，将插入篮的内部直接连接到周围环境，即不通过压力容器。

2. 发明授权

US06854484B2 Valve for a slurry outlet opening of a chemical mechanical polishing device and chemical mechanical polishing device having a valve 有权
标题翻译：用于化学机械抛光装置的浆料出口开口的阀和具有阀的化学机械抛光装置
公开(公告)号：US06854484B2
公开(公告)日：2005-02-15
申请号：US10210014
申请日：2002-07-31
申请人： Stefan Geyer , Andreas Fischer
发明人： Stefan Geyer , Andreas Fischer
IPC分类号： B24B37/04 , B24B57/02 , H01L21/304 , F16K15/14
CPC分类号： B24B37/04 , B24B57/02 , Y10T137/788 , Y10T137/7885
摘要： A valve for a slurry outlet opening in an installation for chemical mechanical polishing, in particular of semiconductor wafers in DRAM production, includes an elastic diaphragm, which covers the slurry outlet opening and has at least one self-closing opening. It is possible for the opening to be moved into a feedthrough position for the slurry by flowing slurry and to be automatically moved into a blocking position for the slurry when the slurry is not flowing. A CMP installation having such a valve is also provided. This creates a simple way of preventing particle agglomerations in the region of the fluid outlet opening of a CMP installation.
摘要翻译：用于化学机械抛光的装置中的浆料出口开口的阀，特别是DRAM生产中的半导体晶片的阀包括一个弹性隔膜，其覆盖浆料出口开口并且具有至少一个自闭合开口。通过流动浆料将开口移动到浆料的馈通位置，并且当浆料不流动时自动移动到浆料的阻挡位置。还提供了具有这种阀的CMP装置。这创建了一种在CMP装置的流体出口的区域中防止颗粒聚集的简单方法。

3. 发明申请

US20090293593A1 Slurry Transport And Storage System 有权
标题翻译：泥浆运输和存储系统
公开(公告)号：US20090293593A1
公开(公告)日：2009-12-03
申请号：US12131936
申请日：2008-06-03
申请人： Stefan GEYER
发明人： Stefan GEYER
IPC分类号： G01N11/00 , G01N11/04 , B65D25/04
CPC分类号： G01N11/06
摘要： An embodiment of the present invention is a transport and storage system for a slurry comprising: a main container; and a test container, the main container and the test container being exposed to the same environmental conditions, the main container and the test container containing a slurry from the same batch, wherein the test container is designed to determine the viscosity of the slurry.
摘要翻译：本发明的一个实施例是用于浆料的运输和储存系统，包括：主容器; 以及测试容器，主容器和测试容器暴露在相同的环境条件下，主容器和测试容器含有来自相同批料的浆料，其中测试容器被设计成确定浆料的粘度。

4. 发明申请

US20080197493A1 Integrated circuit including conductive bumps 审中-公开
标题翻译：集成电路包括导电凸块
公开(公告)号：US20080197493A1
公开(公告)日：2008-08-21
申请号：US11707427
申请日：2007-02-16
申请人： Stefan Geyer
发明人： Stefan Geyer
IPC分类号： H01L23/48 , H01L21/00
CPC分类号： H05K3/3457 , H01L24/11 , H01L24/13 , H01L24/95 , H01L2224/05001 , H01L2224/05023 , H01L2224/05124 , H01L2224/05147 , H01L2224/05155 , H01L2224/05166 , H01L2224/05171 , H01L2224/05568 , H01L2224/0558 , H01L2224/05644 , H01L2224/13099 , H01L2224/131 , H01L2224/16 , H01L2224/27416 , H01L2924/0001 , H01L2924/01013 , H01L2924/01022 , H01L2924/01023 , H01L2924/01024 , H01L2924/01029 , H01L2924/01068 , H01L2924/01078 , H01L2924/01079 , H01L2924/01082 , H01L2924/014 , H01L2924/14 , H01L2924/19043 , H05K2203/0465 , H05K2203/1554 , H01L2924/00014 , H01L2924/013
摘要： One embodiment provides an integrated circuit including an electrical contact and a conductive bump elongated via centrifugal forces. The conductive bump has a base and a top. The base is attached to the electrical contact and the top remains unattached.
摘要翻译：一个实施例提供了一种集成电路，其包括电接触和通过离心力伸长的导电凸块。导电凸块具有基部和顶部。基座连接到电气触点，顶部保持未连接。

5. 发明授权

US07344807B2 Gassing-free exposure mask 有权
标题翻译：无气味的面膜
公开(公告)号：US07344807B2
公开(公告)日：2008-03-18
申请号：US10843669
申请日：2004-05-12
申请人： Stefan Geyer
发明人： Stefan Geyer
IPC分类号： G03F1/00
CPC分类号： G03F1/64
摘要： The present invention relates to an exposure mask for structuring a photoresist layer on a substrate wafer, in which an inorganic adhesive is used as an adhesive device for connecting a reticle having a lithographic structure, a frame and a pellicle. For chemical reasons, an adhesive of this type has no tendency or a considerably lower tendency to gassing out than an organic adhesive used in conventional exposure masks, so that the risk of particles which are deposited on the lithographic structure and which can cause projection errors during an exposure process is largely ruled out. The invention relates further to a method of producing such an inorganic adhesive and also a method of producing an exposure mask with the aid of such an inorganic adhesive.
摘要翻译：本发明涉及用于在基板晶片上构造光致抗蚀剂层的曝光掩模，其中使用无机粘合剂作为用于连接具有光刻结构的掩模版，框架和防护薄膜的粘合装置。由于化学原因，这种粘合剂与常规曝光掩模中使用的有机粘合剂相比，没有趋向或显着降低倾向的倾向，因此沉积在光刻结构上并且可能导致投影误差的颗粒的风险很大程度上排除了曝光过程。本发明还涉及生产这种无机粘合剂的方法，以及借助于这种无机粘合剂制备曝光掩模的方法。

6. 发明授权

US06911059B2 Abrasive pad and process for the wet-chemical grinding of a substrate surface 失效
标题翻译：研磨垫和衬底表面的湿化学研磨工艺
公开(公告)号：US06911059B2
公开(公告)日：2005-06-28
申请号：US10723630
申请日：2003-11-26
申请人： Stefan Geyer
发明人： Stefan Geyer
IPC分类号： B24B37/00 , B24D3/00 , B24D3/28 , B24D3/34 , B24D7/18 , B24D13/14 , C08K3/22 , C08K3/34 , C08L101/00 , H01L21/304 , B24B5/00 , B24B29/00 , B24D11/00 , B24D13/00
CPC分类号： B24D13/147 , B24D3/34
摘要： An abrasive pad is suitable for the wet-chemical grinding of a substrate surface. The novel abrasive pad has a polymer matrix with a defined water-solubility. The water-solubility is realized by the level of nonpolar and polar repeat units in the polymers.
摘要翻译：研磨垫适用于衬底表面的湿化学研磨。新型研磨垫具有确定的水溶性的聚合物基质。水溶性通过聚合物中非极性和极性重复单元的水平来实现。

7. 发明授权

US6050125A Calibrating wafer and method for the production of a calibrating wafer 失效
标题翻译：校准晶圆及制造校准晶片的方法
公开(公告)号：US6050125A
公开(公告)日：2000-04-18
申请号：US141080
申请日：1998-08-27
申请人： Stefan Geyer , Michael Horn , Ralf Gothel , Kathrin Kurth
发明人： Stefan Geyer , Michael Horn , Ralf Gothel , Kathrin Kurth
IPC分类号： G01N1/00 , G01N1/28 , G01N21/93 , H01L21/304 , H01L21/66 , H01L23/544 , G01J1/02
CPC分类号： H01L22/34 , G01N21/93 , G01N2001/2893
摘要： A calibrating wafer and a method for the production of a calibrating wafer having polymer microspheres. The polymer microspheres are subjected to a heat treatment in a temperature range in which the polymer microspheres start to soften.
摘要翻译：一种校准晶片和用于生产具有聚合物微球的校准晶片的方法。聚合物微球体在聚合物微球开始软化的温度范围内进行热处理。

8. 发明授权

US08245565B2 Slurry transport and storage system 有权
标题翻译：泥浆运输和储存系统
公开(公告)号：US08245565B2
公开(公告)日：2012-08-21
申请号：US12131936
申请日：2008-06-03
申请人： Stefan Geyer
发明人： Stefan Geyer
IPC分类号： G01N11/04
CPC分类号： G01N11/06
摘要： An embodiment of the present invention is a transport and storage system for a slurry comprising: a main container; and a test container, the main container and the test container being exposed to the same environmental conditions, the main container and the test container containing a slurry from the same batch, wherein the test container is designed to determine the viscosity of the slurry.
摘要翻译：本发明的一个实施例是用于浆料的运输和储存系统，包括：主容器; 以及测试容器，主容器和测试容器暴露在相同的环境条件下，主容器和测试容器含有来自相同批料的浆料，其中测试容器被设计成确定浆料的粘度。

9. 发明申请

US20100047135A1 PRESSURE VESSEL ARRANGEMENT COMPRISING AN EXTERNAL PRESSURE VESSEL AND AT LEAST ONE INSERT BASKET 有权
标题翻译：包含外部压力容器和至少一个插件篮的压力容器装置
公开(公告)号：US20100047135A1
公开(公告)日：2010-02-25
申请号：US12545254
申请日：2009-08-21
申请人： Josef Schulmeyr , Stefan Geyer , Manfred Gehrig
发明人： Josef Schulmeyr , Stefan Geyer , Manfred Gehrig
IPC分类号： B01J3/04 , G05D16/00
CPC分类号： F16J12/00 , B01D11/0203 , B01D11/0288 , C12C3/10
摘要： A pressure vessel arrangement comprises an external pressure vessel and at least one insert basket in the pressure vessel for receiving a substance to be treated which is exposable to a pressure fluid which is feedable to the pressure vessel and the insert basket. There is provided a control device for the internal pressure prevailing in the insert basket, in particular in the form of a switchable pressure compensation line connecting the interior of the insert basket directly to the surroundings, i.e. not via the pressure vessel.
摘要翻译：压力容器装置包括外部压力容器和压力容器中的至少一个插入篮，用于接收可暴露于压力容器的待处理物质，该压力流体可供给压力容器和插入篮。提供了一种用于插入篮中的内部压力的控制装置，特别是以可切换的压力补偿线的形式，将插入篮的内部直接连接到周围环境，即不通过压力容器。

10. 发明授权

US4946695A Process for the extraction of nonpolar constituents from plant material 失效
标题翻译：从植物材料中提取非极性成分的方法
公开(公告)号：US4946695A
公开(公告)日：1990-08-07
申请号：US332244
申请日：1989-03-31
申请人： Adrian Forster , Stefan Geyer , Josef Schulmeyr , Roland Schmidt , Manfred Gehrig
发明人： Adrian Forster , Stefan Geyer , Josef Schulmeyr , Roland Schmidt , Manfred Gehrig
IPC分类号： C11B9/02 , A23F5/20 , A23L3/015 , B01D11/00 , B01D11/02 , C09F1/00 , C12C3/00 , C12C3/08 , C12C3/10 , C12C7/00
CPC分类号： C12C9/025 , C12C3/10
摘要： This invention relates to a process for extracting nonpolar constituents from natural substances such as hops with simultaneous separation of residues of nonpolar plant protectives (fungicides/insecticides). In a first step, the plant protective as well as other ingredients that are soluble under the chosen conditions is extracted with compressed gases, and in a subsequent stage, the dissolved mixture is passed through an adsorbent and the plant protective is selectively removed from the mixture.

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