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    • 8. 发明授权
    • Silicon carbide large area device fabrication apparatus and method
    • 碳化硅大面积器件制造装置及方法
    • US06410356B1
    • 2002-06-25
    • US09520751
    • 2000-03-07
    • Robert John WojnarowskiErnest Wayne BalchLeonard Richard Douglas
    • Robert John WojnarowskiErnest Wayne BalchLeonard Richard Douglas
    • H01L2166
    • H01L22/20H01L23/34H01L2224/92144H01L2924/014H01L2924/1301H01L2924/00
    • A method for interconnecting high-temperature silicon carbide (SiC) devices enables such high-temperature devices to be used in fabricating electronic circuits of significant scale. This method comprises empirically measuring operational characteristics of a plurality of the devices to be interconnected, the operational characteristics comprising devices which are measured to be non-working and devices which are measured to be working; characterizing the operational characteristics in an operational characteristics map; designing interconnection paths between and among the devices that are characterized to be working by the operational characteristics map; and excluding from the interconnection paths, devices that are characterized to be non-working by the operational characteristics map. A preferred embodiment of this method further includes disposing a temporary polymer layer over the devices; forming via holes through the temporary polymer layer, to bonding pads of the devices; applying a current-balancing resistive metal over the temporary polymer layer; establishing connections between the current-balancing resistive metal and the bonding pads; designing the interconnection paths between and among the working devices by patterning the current-balancing resistive metal based on the operational characteristics map; and removing the temporary polymer layer.
    • 用于互连高温碳化硅(SiC)器件的方法使得这种高温器件能够用于制造具有显着规模的电子电路。 该方法包括经验地测量待互连的多个设备的操作特性,操作特性包括被测量为不工作的设备和被测量为工作的设备; 表征操作特征图中的操作特性; 设计特征在于通过操作特征图工作的设备之间的互连路径; 并且从互连路径中排除特征在于通过操作特性图不工作的设备。 该方法的优选实施例还包括在器件上设置临时聚合物层; 通过所述临时聚合物层形成通孔到所述装置的焊盘; 在临时聚合物层上施加电流平衡电阻金属; 建立电流平衡电阻金属和焊盘之间的连接; 通过基于操作特性图构图电流平衡电阻金属来设计工作装置之间和之间的互连路径; 并除去临时聚合物层。
    • 10. 发明授权
    • Broad band energy harvesting system and related methods
    • 宽带能量采集系统及相关方法
    • US07667375B2
    • 2010-02-23
    • US11398840
    • 2006-04-06
    • Ertugrul BerkcanRobert John WojnarowskiEmad Andarawis AndarawisSamantha RaoEladio Delgado
    • Ertugrul BerkcanRobert John WojnarowskiEmad Andarawis AndarawisSamantha RaoEladio Delgado
    • H01L41/08H01L41/083
    • H01L41/1136H02N2/188
    • A broad band energy harvesting system to harvest energy from a structure and associated methods are provided. The system includes a structure carrying a plurality of environmentally produced vibration frequencies extending over a frequency range and an energy harvesting apparatus positioned in vibration receiving communication with the structure to harvest energy from the structure. Each energy harvesting apparatus includes broadly tuned energy harvesting generators having relatively low quality factor and corresponding relatively wide bandwidth. The energy harvesting generators collectively provide energy harvesting over multiple modes to thereby provide energy harvesting over a substantial portion of the frequency range. Each energy harvesting generator can include a cantilevered beam connected to a common backbone comprised of a resilient material configured to transfer energy between adjacent generators to further enhance energy harvesting.
    • 提供了一种从结构和相关方法收集能量的宽带能量收集系统。 该系统包括承载在频率范围上延伸的多个环境产生的振动频率的结构,以及定位在振动中的能量收集装置,该振动接收与结构的通信以从结构收集能量。 每个能量收集装置包括具有相对较低质量因素和相应较宽带宽的广泛调谐的能量采集发生器。 能量收集发电机在多种模式下共同提供能量收集,从而在频率范围的大部分内提供能量收集。 每个能量收集发生器可以包括连接到公共骨架的悬臂梁,弹性材料构造成在相邻发电机之间传递能量以进一步增强能量收集。