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    • 1. 发明授权
    • Method of eliminating boron contamination in annealed wafer
    • 消除退火晶圆中硼污染的方法
    • US07199057B2
    • 2007-04-03
    • US10525442
    • 2003-08-28
    • So Ik BaeYoshinobu NakadaKenichi Kaneko
    • So Ik BaeYoshinobu NakadaKenichi Kaneko
    • H01L21/311H01L21/322
    • H01L21/324H01L21/02046
    • A method by which a silicon wafer is prevented from increasing boron concentration near the surface and difference in the boron concentration does not arise between the surface of the annealed wafer and the silicon bulk to eliminate boron contamination in the silicon wafer caused by an annealing treatment is provided. The method includes, when annealing a silicon wafer having a surface on which a native oxide film has formed and boron of environmental origin or from chemical treatment prior to annealing has deposited, steps of carrying out temperature heat-up in a mixed gas atmosphere having a mixing ratio of hydrogen gas to inert gas of 5% to 100% so as to remove the boron-containing native oxide film, followed by annealing in an inert gas atmosphere.
    • 防止硅晶片在表面附近增加硼浓度并且在退火晶片的表面与硅体之间不产生硼浓度的差异以消除由退火处理引起的硅晶片中的硼污染的方法是 提供。 该方法包括:在退火之后退火具有形成有自然氧化膜的表面和环境来源的硼或退火之前的化学处理的硅晶片退火时,在具有 氢气与惰性气体的混合比为5%〜100%,除去含硼自然氧化膜,然后在惰性气体气氛中进行退火。
    • 2. 发明申请
    • Method of eliminating boron contamination in annealed wafer
    • 消除退火晶圆中硼污染的方法
    • US20060148249A1
    • 2006-07-06
    • US10525442
    • 2003-08-28
    • So BaeYoshinobu NakadaKenichi Kaneko
    • So BaeYoshinobu NakadaKenichi Kaneko
    • H01L21/44
    • H01L21/324H01L21/02046
    • A method by which a silicon wafer is prevented from increasing boron concentration near the surface and difference in the boron concentration does not arise between the surface of the annealed wafer and the silicon bulk to eliminate boron contamination in the silicon wafer caused by an annealing treatment is provided. The method includes, when annealing a silicon wafer having a surface on which a native oxide film has formed and boron of environmental origin or from chemical treatment prior to annealing has deposited, steps of carrying out temperature heat-up in a mixed gas atmosphere having a mixing ratio of hydrogen gas to inert gas of 5% to 100% so as to remove the boron-containing native oxide film, followed by annealing in an inert gas atmosphere.
    • 防止硅晶片在表面附近增加硼浓度并且在退火晶片的表面与硅体之间不产生硼浓度的差异以消除由退火处理引起的硅晶片中的硼污染的方法是 提供。 该方法包括:在退火之后退火具有形成有自然氧化膜的表面和环境来源的硼或退火之前的化学处理的硅晶片退火时,在具有 氢气与惰性气体的混合比为5%〜100%,除去含硼自然氧化膜,然后在惰性气体气氛中进行退火。
    • 6. 发明授权
    • Printing-medium type discrimination device and printing apparatus
    • 打印介质型识别装置和打印装置
    • US06520614B2
    • 2003-02-18
    • US09767827
    • 2001-01-24
    • Kenichi Kaneko
    • Kenichi Kaneko
    • B41J2938
    • B41J11/009B41J13/0054
    • There is provided a printing apparatus for performing printing on a printing medium with a capability of discriminating the type of printing medium on which the printing is to be executed, whereby various printing conditions can be properly selected and set up. Sensors for measuring the reflectances of a front side face, on which the printing will be performed, and of a back side face of the printing medium are provided and the type of printing medium is discriminated through the use of a difference value of the two reflectances and previously-measured standard values. The printing is executed on the printing medium that was discriminated in this way under proper printing conditions.
    • 提供一种用于在打印介质上执行打印的打印装置,其具有区分要执行打印的打印介质的类型的能力,从而可以适当地选择和设置各种打印条件。 设置用于测量正在进行打印的正面的反射率的传感器和打印介质的背面,并且通过使用两个反射率的差值来区分打印介质的类型 和以前测量的标准值。 在正常打印条件下以这种方式区分的打印介质上执行打印。
    • 7. 发明授权
    • Heat engine
    • 热机
    • US06336316B1
    • 2002-01-08
    • US09622693
    • 2000-09-18
    • Shoichi FujiiYoshiharu TsujikawaKenichi Kaneko
    • Shoichi FujiiYoshiharu TsujikawaKenichi Kaneko
    • F02C310
    • F02C6/006F02C3/36F02C6/18F02C7/141F02C7/143F02C7/16F05D2260/211Y02E20/14Y02E20/16
    • A heat engine is provided that can improve thermal efficiency of a gas turbine . When gas such as air enters a compressor C101 of a gas turbine apparatus 100 (state 1), the gas becomes high-temperature gas by a combustor B102 (state 3) and moves toward a turbine T103. Another turbine T104 is placed at the back portion of the turbine T103 where air of state 3 enters, the gas enters a first heat exchanger Hx 105 (state 4) and is supplied to a compressor C109 (state 5). Thereafter, the supplied gas is discharged from a compressor C112 (state 12) through a heat exchanger Hx106 of an intercooling portion 151, a compressor C110, a heat exchanger Hx107, a compressor C111, and a heat exchanger Hx108 (states 6 to 11).
    • 提供了能够提高燃气轮机的热效率的热机。 当诸如空气的气体进入燃气轮机装置100的压缩机C101(状态1)时,气体通过燃烧器B102(状态3)变成高温气体并朝向涡轮机T103移动。 另一个涡轮T104放置在涡轮机T103的后部,状态3的空气进入,气体进入第一热交换器Hx 105(状态4),并被供给到压缩机C109(状态5)。 此后,从中间冷却部151,压缩机C110,热交换器H×10,7,压缩机C111,热交换器H×108(状态6〜11)的热交换器H×106,将供给的气体从压缩机C112(状态12)排出, 。
    • 9. 发明申请
    • TASK ASSISTANCE SYSTEM, TASK ASSISTANCE METHOD, AND PROGRAM
    • 任务辅助系统,任务辅助方法和程序
    • US20150139489A1
    • 2015-05-21
    • US14401663
    • 2013-02-28
    • Hiroo HaradaKatsuyuki NagaiKenichi KanekoTeppei Takasugi
    • Hiroo HaradaKatsuyuki NagaiKenichi KanekoTeppei Takasugi
    • G06K9/00G06T7/00
    • G06K9/00355G01B11/00G06T7/73G06T2207/10004G06T2207/30196G06T2207/30241
    • A task assistance system includes: a location detection unit (101) for setting a sensing plane in a first face side of a display means capable of displaying a plurality of articles and calculating location information of a hand located on the sensing plane or location information of an object different from the hand; a region setting unit (102) for setting a plurality of sensing regions on the sensing plane using the location information of the hand or the location information of the object calculated by the location detection unit (101); and a pass-through region determination unit (104) for determining which one of the plurality of sensing regions a hand extended to the display means from the first face side has passed through using the location information of the hand calculated by the location detection unit (101), after the region setting unit (102) sets the plurality of sensing regions.
    • 任务辅助系统包括:位置检测单元,用于在能够显示多个物品的显示装置的第一面侧设置感测平面,并计算位于感测平面上的手的位置信息或位置信息 一个不同于手的物体; 区域设定单元,用于使用由所述位置检测单元计算的所述对象的位置信息或所述对象的位置信息来设置所述感测平面上的多个感测区域; 以及通过区域确定单元(104),用于使用由位置检测单元计算出的手的位置信息来确定从第一面侧延伸到显示装置的手的多个感测区域中的哪一个已经通过 101),在区域设定单元(102)设置多个感测区域之后。