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1. 发明申请

US20110305120A1 FIRST AND SECOND ORDERS TEMPERATURE-COMPENSATED RESONATOR 有权
标题翻译：第一和第二订单温度补偿谐振器
公开(公告)号：US20110305120A1
公开(公告)日：2011-12-15
申请号：US13156648
申请日：2011-06-09
申请人： Thierry Hessler , Silvio Dalla Piazza
发明人： Thierry Hessler , Silvio Dalla Piazza
IPC分类号： G04F5/06 , H01L41/04
CPC分类号： H03H9/02448 , G04F5/063 , H03H9/02023 , H03H9/02102 , H03H9/215 , H03H2003/027 , H03H2003/0407 , H03H2009/241
摘要： The invention relates to a temperature-compensated resonator including a body used in deformation, wherein the core (58, 58′, 18) of the body (3, 5, 7, 15, 23, 25, 27, 33, 35, 37, 43, 45, 47) is formed from a plate formed at a cut angle (θ′) in a quartz crystal determining the first and second orders temperature coefficients (α, β, α′, β′). According to the invention, the body (3, 5, 7, 15, 23, 25, 27, 33, 35, 37, 43, 45, 47) includes a coating (52, 54, 56, 52′, 54′, 56′, 16) deposited at least partially on the core (58, 58′, 18) and having first and second orders Young's modulus variations (CTE1, CTE2, CTE1′, CTE2′) according to temperature of opposite signs respectively to said first and second orders temperature coefficients (α, β, α′, β′) of said resonator so as to render the latter substantially zero. The invention concerns the field of time and frequency bases.
摘要翻译：本发明涉及一种包括用于变形的主体的温度补偿谐振器，其中主体（3,5,7,15,23,25,27,33,35,37）的芯体（58,58'，18），43,45,47）由确定第一和第二阶温度系数（α，＆bgr;α'，＆bgr''）的石英晶体以切割角度形成的板形（＆根据本发明，身体（3,5,7,15,23,25,27,33,35,37,43,45,47）包括涂层（52,54,56,52'，54'， 56'，16）至少部分地沉积在所述芯（58,58'，18）上，并且具有根据相反符号的温度的第一和第二阶次杨氏模量变化（CTE1，CTE2，CTE1'，CTE2'）分别与所述第一和所述谐振器的二阶温度系数（α，＆bgr;α'，＆bgr“），以使后者基本为零。本发明涉及时间和频率的领域。

2. 发明授权

US08724431B2 First and second orders temperature-compensated resonator 有权
标题翻译：第一和第二阶温度补偿谐振器
公开(公告)号：US08724431B2
公开(公告)日：2014-05-13
申请号：US13156648
申请日：2011-06-09
申请人： Thierry Hessler , Silvio Dalla Piazza
发明人： Thierry Hessler , Silvio Dalla Piazza
IPC分类号： G04F1/04
CPC分类号： H03H9/02448 , G04F5/063 , H03H9/02023 , H03H9/02102 , H03H9/215 , H03H2003/027 , H03H2003/0407 , H03H2009/241
摘要： A temperature-compensated resonator includes a body used in deformation, wherein the core (58, 58′, 18) of the body (3, 5, 7, 15, 23, 25, 27, 33, 35, 37, 43, 45, 47) is formed from a plate formed at a cut angle (θ′) in a quartz crystal determining the first and second orders temperature coefficients (α, β, α′, β′). According to the invention, the body (3, 5, 7, 15, 23, 25, 27, 33, 35, 37, 43, 45, 47) includes a coating (52, 54, 56, 52′, 54′, 56′, 16) deposited at least partially on the core (58, 58′, 18) and having first and second orders Young's modulus variations (CTE1, CTE2, CTE1′, CTE2′) according to temperature of opposite signs respectively to the first and second orders temperature coefficients (α, β, α′, β′) of the resonator so as to render compensated first and second orders temperature coefficients substantially zero.
摘要翻译：温度补偿谐振器包括用于变形的主体，其中主体（3,5,7,15,23,25,27,33,35,37,43,45）的芯体（58,58'，18），47）由在确定第一和第二阶温度系数（α，＆bgr;α'，＆bgr''）的石英晶体中以切割角度形成的板（“the”s“）形成。根据本发明，身体（3,5,7,15,23,25,27,33,35,37,43,45,47）包括涂层（52,54,56,52'，54'， 56'，16）至少部分地沉积在所述芯部（58,58'，18）上，并且具有根据相反符号的温度的第一和第二阶次杨氏模量变化（CTE1，CTE2，CTE1'，CTE2'）到第一和谐振器的第二阶温度系数（α，＆bgr;α'，＆bgr“），以使补偿的第一和第二阶温度系数基本上为零。

3. 发明授权

US07791255B2 Packaging for piezoelectric resonator 有权
标题翻译：压电谐振器封装
公开(公告)号：US07791255B2
公开(公告)日：2010-09-07
申请号：US12270337
申请日：2008-11-13
申请人： Silvio Dalla Piazza , Thierry Hessler
发明人： Silvio Dalla Piazza , Thierry Hessler
IPC分类号： H01L41/08
CPC分类号： H03H9/1021 , B81B2201/0271 , B81B2207/096 , B81C1/00301 , H03H9/02818 , H03H9/02952 , H03H9/0557
摘要： The invention concerns an assembly comprising a piezoelectric resonator (14) and a case (10), the case including a base part (11), on which the resonator is mounted, a wall (12) extending from said base part so as to surround at least partially said resonator, and a cover fixed to said wall in such a way as to close said case. The base part includes a main portion (17) and at least two conductive vias (16a, 16b). The conductive vias electrically connect The piezoelectric resonator to an outside circuit through the base part, and each of the conductive vias is surrounded by a insulating lining (18) so as to insulate the vias from the main portion (17). The main portion (17) of the base part (11) is divided into two parts by an insulating partition (21) in such a way that the two conductive vias are on different sides of the partition.
摘要翻译：本发明涉及一种包括压电谐振器（14）和壳体（10）的组件，所述壳体包括其上安装有所述谐振器的基座部分（11），从所述基座部分延伸以围绕至少部分地表示所述谐振器，以及以这样的方式固定到所述壁上的盖，以关闭所述壳体。基部包括主要部分（17）和至少两个导电通孔（16a，16b）。导电通孔将压电谐振器通过基部电连接到外部电路，并且每个导电通孔被绝缘衬里（18）包围，以使通孔与主体部分（17）绝缘。基部（11）的主要部分（17）通过绝缘隔板（21）被分成两部分，使得两个导电通孔位于隔板的不同侧面上。

4. 发明申请

US20100117491A1 PACKAGING FOR PIEZOELECTRIC RESONATOR 有权
标题翻译：压电谐振器包装
公开(公告)号：US20100117491A1
公开(公告)日：2010-05-13
申请号：US12270337
申请日：2008-11-13
申请人： Silvio Dalla Piazza , Thierry Hessler
发明人： Silvio Dalla Piazza , Thierry Hessler
IPC分类号： H01L41/00
CPC分类号： H03H9/1021 , B81B2201/0271 , B81B2207/096 , B81C1/00301 , H03H9/02818 , H03H9/02952 , H03H9/0557
摘要： The invention concerns an assembly comprising a piezoelectric resonator (14) and a case (10), the case including a base part (11), on which the resonator is mounted, a wall (12) extending from said base part so as to surround at least partially said resonator, and a cover fixed to said wall in such a way as to close said case. The base part includes a main portion (17) and at least two conductive vias (16a, 16b). The conductive vias electrically connect The piezoelectric resonator to an outside circuit through the base part, and each of the conductive vias is surrounded by a insulating lining (18) so as to insulate the vias from the main portion (17). The main portion (17) of the base part (11) is divided into two parts by an insulating partition (21) in such a way that the two conductive vias are on different sides of the partition.
摘要翻译：本发明涉及一种包括压电谐振器（14）和壳体（10）的组件，所述壳体包括其上安装有所述谐振器的基座部分（11），从所述基座部分延伸以围绕至少部分地表示所述谐振器，以及以这样的方式固定到所述壁上的盖，以关闭所述壳体。基部包括主要部分（17）和至少两个导电通孔（16a，16b）。导电通孔将压电谐振器通过基部电连接到外部电路，并且每个导电通孔被绝缘衬里（18）包围，以使通孔与主体部分（17）绝缘。基部（11）的主要部分（17）通过绝缘隔板（21）被分成两部分，使得两个导电通孔位于隔板的不同侧面上。

5. 发明申请

US20110001394A1 PIEZOELECTRIC THIN-FILM TUNING FORK RESONATOR 审中-公开
标题翻译：压电薄膜调谐器谐振器
公开(公告)号：US20110001394A1
公开(公告)日：2011-01-06
申请号：US12497055
申请日：2009-07-02
申请人： Silvio Dalla Piazza , Felix Staub
发明人： Silvio Dalla Piazza , Felix Staub
IPC分类号： H01L41/047
CPC分类号： H03H9/215 , H03H9/131
摘要： The piezoelectric thin-film tuning fork resonator (40) comprises an integral tuning fork made out of a quartz crystal. The tuning fork comprises a base (48) and a pair of parallel vibrating arms (44, 46) extending from the base. Each of the vibrating arms carries: first and second electrodes (62, 64) provided on at least one main surface of the arm, said first and second electrodes being formed respectively on an inner portion and on an outer portion of said one main surface, in such a way as to be spaced apart, first and second piezoelectric thin films (66, 68) formed over the first and second electrodes respectively, third and fourth electrodes (70, 72) formed over the first and second piezoelectric thin films respectively.
摘要翻译：压电薄膜音叉谐振器（40）包括由石英晶体制成的整体音叉。音叉包括基座（48）和从底座延伸的一对平行的振动臂（44,46）。每个振动臂承载设置在臂的至少一个主表面上的第一和第二电极（62,64），所述第一和第二电极分别形成在所述一个主表面的内部部分和外部部分上，分隔开形成在第一和第二电极上的第一和第二压电薄膜（66,68），分别形成在第一和第二压电薄膜上的第三和第四电极（70,72）。

6. 发明申请

US20090015107A1 Packaging for piezoelectric resonator 审中-公开
标题翻译：压电谐振器封装
公开(公告)号：US20090015107A1
公开(公告)日：2009-01-15
申请号：US11777760
申请日：2007-07-13
申请人： Silvio Dalla Piazza
发明人： Silvio Dalla Piazza
IPC分类号： H01L41/053 , H01L41/22
CPC分类号： H03H9/1021 , Y10T29/42
摘要： The invention concerns a package comprising a case (10) for receiving a piezoelectric resonator (11), including a main part (12) with a bottom (13) and sides (14), in which the resonator shall be mounted and a cover (26) fixed to the main part closing the case, wherein the main part and the cover are both made of silicon.
摘要翻译：本发明涉及一种包括一个用于接收压电谐振器（11）的壳体（10）的封装件，包括具有底部（13）的主要部分（12）和侧面（14） 26）固定到封闭壳体的主要部分，其中主要部分和盖子均由硅制成。

7. 发明授权

US07168319B2 Angular speed measuring transducer 有权
标题翻译：角速度传感器
公开(公告)号：US07168319B2
公开(公告)日：2007-01-30
申请号：US11303984
申请日：2005-12-19
申请人： Silvio Dalla Piazza , Bruno Studer
发明人： Silvio Dalla Piazza , Bruno Studer
IPC分类号： G01P9/04
CPC分类号： G01C19/5607
摘要： A transducer for measuring an angular velocity formed by a single piezoelectric tuning fork (21) that rotates at said angular velocity, including first (23) and second (24) vibrating legs extending from a base (22), excitation electrodes (25a, 25b, 26a, 26b) arranged on the excitation leg (23), detection electrodes (27a, 27b, 28a, 28b), arranged on the detection leg (24), characterized in that the detection leg includes at least one first groove (33, 34) on the top face and at least one second groove (35, 36) on the bottom face, and in that the detection electrodes include first and second detection electrodes arranged facing each other, the first (27a) respectively the second detection electrode (28a) being arranged on one lateral flank of the groove (33) respectively of the groove (34) such that the electrical field between the first and second detection electrodes is substantially rectilinear through the detection leg, and third and fourth detection electrodes arranged facing each other, the third (27b) respectively the fourth detection electrode (28b) being arranged on one lateral flank of the groove (36) respectively of the groove (35), such that the electrical field between the third and fourth detection electrodes is substantially rectilinear through the detection leg.
摘要翻译：一种用于测量由单个压电音叉（21）形成的角速度的换能器，所述单个压电音叉（21）以所述角速度旋转，包括从基座（22）延伸的第一（23）和第二（24）振动腿，激励电极（25a，布置在激励腿（23）上的检测电极（27a，27b，28a，28b）的布置在检测腿（24）上的检测腿（25b，26a，26b），其特征在于，所述顶面上的至少一个第一凹槽（33,34）和所述底面上的至少一个第二凹槽（35,36），并且所述检测电极包括彼此相对布置的第一和第二检测电极，所述第一（分别地，第二检测电极（28a）分别布置在凹槽（34）的凹槽（33）的一个侧面上，使得第一和第二检测电极之间的电场通过检测腿基本上直线，第三和第四所述第三检测电极（28b）分别布置在所述槽（35）的所述槽（36）的一个侧面上，使得所述第三检测电极（28b）之间的电场并且第四检测电极通过检测腿基本上是直线的。

8. 发明授权

US07138752B1 Small-sized piezoelectric resonator 有权
标题翻译：小型压电谐振器
公开(公告)号：US07138752B1
公开(公告)日：2006-11-21
申请号：US11148437
申请日：2005-06-09
申请人： Silvio Dalla Piazza , Bruno Studer , Thomas Luethi
发明人： Silvio Dalla Piazza , Bruno Studer , Thomas Luethi
IPC分类号： H01L41/08
CPC分类号： H03H9/21
摘要： The piezoelectric resonator according to the invention includes a tuning fork shaped part with two parallel vibrating arms, connected to each other by a linking part, from which protrude a central arm located between both vibrating arms of the tuning fork shaped part, the vibrating arms carrying first electrodes to make them vibrate, these electrodes being connected to connection elements carried by the central arm, wherein a slot has been cut within the linking part opposite to the central arm and wherein second electrodes have been arranged along said slot.
摘要翻译：根据本发明的压电谐振器包括具有两个平行的振动臂的音叉形部分，其通过连接部分相互连接，中央臂位于音叉形部分的两个振动臂之间，中心臂突出，第一电极使它们振动，这些电极连接到由中央臂承载的连接元件，其中，在与中心臂相对的连接部分内已经切割了槽，并且其中第二电极沿着所述槽布置。

9. 发明授权

US07084556B1 Small-sized piezoelectric resonator 有权
标题翻译：小型压电谐振器
公开(公告)号：US07084556B1
公开(公告)日：2006-08-01
申请号：US11148440
申请日：2005-06-09
申请人： Silvio Dalla Piazza , Bruno Studer , Thomas Luethi
发明人： Silvio Dalla Piazza , Bruno Studer , Thomas Luethi
IPC分类号： H01L41/08
CPC分类号： H03H9/21
摘要： The piezoelectric resonator according to the invention includes a tuning fork shaped part with two parallel vibrating arms, connected to each other by a linking part, from which protrude a central arm located between both vibrating arms of the tuning fork shaped part, wherein at least one groove is formed on at least one of a front side and a rear side of each vibrating arm.
摘要翻译：根据本发明的压电谐振器包括具有两个平行的振动臂的音叉形部分，该平行振动臂通过连接部分相互连接，中央臂位于音叉形部分的两个振动臂之间，其中至少一个在每个振动臂的前侧和后侧中的至少一个上形成有凹槽。

10. 发明授权

US5668317A Device and method for measuring an angular speed 失效
标题翻译：用于测量角速度的装置和方法
公开(公告)号：US5668317A
公开(公告)日：1997-09-16
申请号：US663928
申请日：1996-06-14
申请人： Pierre-Andre Farine , Jean-Daniel Etienne , Silvio Dalla Piazza
发明人： Pierre-Andre Farine , Jean-Daniel Etienne , Silvio Dalla Piazza
IPC分类号： G01C19/56 , G01P9/04
CPC分类号： G01C19/5614
摘要： An angular speed measuring device includes an oscillator for producing an excitation signal which induces mechanical vibrations in a rotating tuning fork, and an analog processing circuit for processing an electrical detection signal derived from the tuning fork. The analog processing circuit comprises a temperature-independent phase shifter responsive to the excitation signal for producing two signals in quadrature. The quadrature signals are applied to two multipliers which also receive the detection signal. The output signals from the multipliers are dependent on the fixed phase shift .phi. between the excitation signal and the detection signal, which is fixed for a given tuning fork, and on the variable phase shift .psi. which is a function of the rotational speed of the tuning fork, but the multiplier output signals are independent of temperature. After A/D conversion, the multiplier output signals are processed in a microprocessor to determine the angular speed.
摘要翻译：角速度测量装置包括用于产生在旋转音叉中引起机械振动的激励信号的振荡器和用于处理从音叉导出的电检测信号的模拟处理电路。模拟处理电路包括一个温度独立的移相器，响应激励信号产生正交的两个信号。正交信号被施加到也接收检测信号的两个乘法器。来自乘法器的输出信号取决于对于给定音叉固定的激励信号和检测信号之间的固定相移phi以及作为调谐转速的函数的可变相移psi 叉，但乘数输出信号与温度无关。在A / D转换之后，乘法器输出信号在微处理器中处理以确定角速度。

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