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    • 10. 发明申请
    • DISPLAY DEVICE AND MANUFACTURING METHOD OF DISPLAY DEVICE
    • 显示装置的显示装置和制造方法
    • US20110031501A1
    • 2011-02-10
    • US12904536
    • 2010-10-14
    • Hideomi SUZAWAShunpei YAMAZAKI
    • Hideomi SUZAWAShunpei YAMAZAKI
    • H01L33/16
    • H01L51/56H01L27/3246H01L27/3248H01L27/3258H01L27/3262H01L51/5206H01L51/5234H01L51/5246H01L51/5259H01L2251/5315H01L2251/5323
    • According to one feature of the present invention, a display device is manufactured according to the steps of forming a semiconductor layer; forming a gate insulating layer over the semiconductor layer; forming a gate electrode layer over the gate insulating layer; forming source and drain electrode layers in contact with the semiconductor layer; forming a first electrode layer electrically connected to the source or drain electrode layer; forming an inorganic insulating layer over part of the first electrode layer, the gate electrode layer, the source electrode layer, and the drain electrode layer; subjecting the inorganic insulating layer and the first electrode layer to plasma treatment; forming an electroluminescent layer over the inorganic insulating layer and the first electrode layer which are subjected to plasma treatment; and forming a second electrode layer over the electroluminescent layer.
    • 根据本发明的一个特征,根据形成半导体层的步骤制造显示装置; 在所述半导体层上形成栅极绝缘层; 在所述栅绝缘层上形成栅电极层; 形成与半导体层接触的源极和漏极电极层; 形成电连接到所述源极或漏极电极层的第一电极层; 在所述第一电极层,所述栅极电极层,所述源极电极层和所述漏极电极层的一部分上形成无机绝缘层; 对无机绝缘层和第一电极层进行等离子体处理; 在经过等离子体处理的无机绝缘层和第一电极层上形成电致发光层; 以及在所述电致发光层上形成第二电极层。