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    • 2. 发明申请
    • Light-emitting semiconductor device using group III nitrogen compound
    • 使用III族氮化合物的发光半导体器件
    • US20080173880A1
    • 2008-07-24
    • US12003173
    • 2007-12-20
    • Katsuhide ManabeHisaki KatoMichinari SassaShiro YamazakiMakoto AsaiNaoki ShibataMasayoshi Koike
    • Katsuhide ManabeHisaki KatoMichinari SassaShiro YamazakiMakoto AsaiNaoki ShibataMasayoshi Koike
    • H01L33/00H01L21/00
    • H01L33/32H01L33/0025H01L33/007H01L33/325H01L33/38H01L33/382H01L33/385H01L33/40
    • A light-emitting semiconductor device (10) consecutively includes a sapphire substrate (1), an AlN buffer layer (2), a silicon (Si) doped GaN n+-layer (3) of high carrier (n-type) concentration, a Si-doped (Alx3Ga1-x3)y3In1-y3N n+-layer (4) of high carrier (n-type) concentration, a zinc (Zn) and Si-doped (Alx2Ga1-x2)y2In1-y2N emission layer (5), and a Mg-doped (Alx1Ga1-x1)y1In1-y1N p-layer (6). The AlN layer (2) has a 500 Å thickness. The GaN n+-layer (3) has about a 2.0 μm thickness and a 2×1018/cm3 electron concentration. The n+-layer (4) has about a 2.0 μm thickness and a 2×1018/cm3 electron concentration. The emission layer (5) has about a 0.5 μm thickness. The p-layer 6 has about a 1.0 μm thickness and a 2×1017/cm3 hole concentration. Nickel electrodes (7, 8) are connected to the p-layer (6) and n+-layer (4), respectively. A groove (9) electrically insulates the electrodes (7, 8). The composition ratio of Al, Ga, and In in each of the layers (4, 5, 6) is selected to meet the lattice constant of GaN in the n+-layer (3). The LED (10) is designed to improve luminous intensity and to obtain purer blue color.
    • 发光半导体器件(10)连续地包括蓝宝石衬底(1),AlN缓冲层(2),高载体的硅(Si)掺杂GaN n + +层(3) (n型)浓度,Si掺杂(Al x3 Ga 1-x 3)y 3在1-y 3中, 具有高载流子(n型)浓度的氮(Zn)和Si掺杂(Al 2 x 2 Ga 2) 1-x2 Y2在1-y2 N发射层(5)中,以及Mg掺杂(Al x1 Ga) 在1-y1 N p层(6)中。 AlN层(2)的厚度为500埃。 GaN n + +(3)具有约2.0μm厚度和2×10 18 / cm 3电子浓度。 n + +层(4)具有约2.0μm厚度和2×10 18 / cm 3电子浓度。 发射层(5)的厚度约为0.5μm。 p层6具有约1.0μm厚度和2×10 17 / cm 3孔浓度。 镍电极(7,8)分别连接到p层(6)和n + +层(4)。 一个凹槽(9)使电极(7,8)电绝缘。 选择各层(4,5,6)中的Al,Ga和In的组成比以满足n +层(3)中的GaN的晶格常数。 LED(10)被设计为提高发光强度并获得更纯的蓝色。
    • 5. 发明申请
    • Light-emitting semiconductor device using group III nitrogen compound
    • 使用III族氮化合物的发光半导体器件
    • US20060118821A1
    • 2006-06-08
    • US11328079
    • 2006-01-10
    • Katsuhide ManabeHisaki KatoMichinari SassaShiro YamazakiMakoto AsaiNaoki ShibataMasayoshi Koike
    • Katsuhide ManabeHisaki KatoMichinari SassaShiro YamazakiMakoto AsaiNaoki ShibataMasayoshi Koike
    • H01L31/109
    • H01L33/32H01L33/0025H01L33/007H01L33/325H01L33/38H01L33/382H01L33/385H01L33/40
    • A light-emitting semiconductor device (10) consecutively includes a sapphire substrate (1), an AlN buffer layer (2), a silicon (Si) doped GaN n+-layer (3) of high carrier (n-type) concentration, a Si-doped (Alx3Ga1-x3)y3In1-y3N n+-layer (4) of high carrier (n-type) concentration, a zinc (Zn) and Si-doped (Alx2Ga1-x2)y2In1-y2N emission layer (5), and a Mg-doped (Alx1Ga1-x1)y1In1-y1N p-layer (6). The AlN layer (2) has a 500 Å thickness. The GaN n+-layer (3) has about a 2.0 μm thickness and a 2×1018/cm3 electron concentration. The n+-layer (4) has about a 2.0 μm thickness and a 2×1018/cm3 electron concentration. The emission layer (5) has about a 0.5 μm thickness. The p-layer 6 has about a 1.0 μm thickness and a 2×1017/cm3 hole concentration. Nickel electrodes (7, 8) are connected to the p-layer (6) and n+-layer (4), respectively. A groove (9) electrically insulates the electrodes (7, 8). The composition ratio of Al, Ga, and In in each of the layers (4, 5, 6) is selected to meet the lattice constant of GaN in the n+-layer (3). The LED (10) is designed to improve luminous intensity and to obtain purer blue color.
    • 发光半导体器件(10)连续地包括蓝宝石衬底(1),AlN缓冲层(2),高载体的硅(Si)掺杂GaN n + +层(3) (n型)浓度,Si掺杂(Al x3 Ga 1-x 3)y 3在1-y 3中, 具有高载流子(n型)浓度的氮(Zn)和Si掺杂(Al 2 x 2 Ga 2) 1-x2 Y2在1-y2 N发射层(5)中,以及Mg掺杂(Al x1 Ga) 在1-y1 N p层(6)中。 AlN层(2)的厚度为500埃。 GaN n + +层(3)具有约2.0μm厚度和2×10 18 / cm 3电子浓度。 n + +层(4)具有约2.0μm厚度和2×10 18 / cm 3电子浓度。 发射层(5)的厚度约为0.5μm。 p层6具有约1.0μm厚度和2×10 17 / cm 3孔浓度。 镍电极(7,8)分别连接到p层(6)和n + +层(4)。 一个凹槽(9)使电极(7,8)电绝缘。 选择各层(4,5,6)中的Al,Ga和In的组成比以满足n +层(3)中的GaN的晶格常数。 LED(10)被设计为提高发光强度并获得更纯的蓝色。
    • 6. 发明申请
    • LIght-emitting semiconductor device using group III nitrogen compound
    • 使用III族氮化合物的发光半导体器件
    • US20050224834A1
    • 2005-10-13
    • US11143664
    • 2005-06-03
    • Katsuhide ManabeHisaki KatoMichinari SassaShiro YamazakiMakoto AsaiNaoki ShibataMasayoshi Koike
    • Katsuhide ManabeHisaki KatoMichinari SassaShiro YamazakiMakoto AsaiNaoki ShibataMasayoshi Koike
    • H01L33/00H01L33/32H01L33/38H01L33/40
    • H01L33/32H01L33/0025H01L33/007H01L33/325H01L33/38H01L33/382H01L33/385H01L33/40
    • A light-emitting semiconductor device (10) consecutively includes a sapphire substrate (1), an AlN buffer layer (2), a silicon (Si) doped GaN n+-layer (3) of high carrier (n-type) concentration, a Si-doped (Alx3Ga1-x3)y3In1-y3N n+-layer (4) of high carrier (n-type) concentration, a zinc (Zn) and Si-doped (Alx2Ga1-x2)y2In1-y2N emission layer (5), and a Mg-doped (Alx1Ga1-x1)y1In1-y1N p-layer (6). The AlN layer (2) has a 500 Å thickness. The GaN n+-layer (3) has about a 2.0 μm thickness and a 2×1018/cm3 electron concentration. The n+-layer (4) has about a 2.0 μm thickness and a 2×1018/cm3 electron concentration. The emission layer (5) has about a 0.5 μm thickness. The p-layer 6 has about a 1.0 μm thickness and a 2×1017/cm3 hole concentration. Nickel electrodes (7, 8) are connected to the p-layer (6) and n+-layer (4), respectively. A groove (9) electrically insulates the electrodes (7, 8). The composition ratio of Al, Ga, and In in each of the layers (4, 5, 6) is selected to meet the lattice constant of GaN in the n+-layer (3). The LED (10) is designed to improve luminous intensity and to obtain purer blue color.
    • 发光半导体器件(10)连续地包括蓝宝石衬底(1),AlN缓冲层(2),高载体的硅(Si)掺杂GaN n + +层(3) (n型)浓度,Si掺杂(Al x3 Ga 1-x 3)y 3在1-y 3中, 具有高载流子(n型)浓度的氮(Zn)和Si掺杂(Al 2 x 2 Ga 2) 1-x2 Y2在1-y2 N发射层(5)中,以及Mg掺杂(Al x1 Ga) 在1-y1 N p层(6)中。 AlN层(2)的厚度为500埃。 GaN n + +(3)具有约2.0μm厚度和2×10 18 / cm 3电子浓度。 n + +层(4)具有约2.0μm厚度和2×10 18 / cm 3电子浓度。 发射层(5)的厚度约为0.5μm。 p层6具有约1.0μm厚度和2×10 17 / cm 3孔浓度。 镍电极(7,8)分别连接到p层(6)和n + +层(4)。 一个凹槽(9)使电极(7,8)电绝缘。 选择各层(4,5,6)中的Al,Ga和In的组成比以满足n +层(3)中的GaN的晶格常数。 LED(10)被设计为提高发光强度并获得更纯的蓝色。
    • 7. 发明授权
    • Light emitting semiconductor device using group III nitride compound and
method of producing the same
    • 使用III族氮化物化合物的发光半导体器件及其制造方法
    • US5700713A
    • 1997-12-23
    • US406415
    • 1995-03-20
    • Shiro YamazakiNaoki ShibataMasayoshi Koike
    • Shiro YamazakiNaoki ShibataMasayoshi Koike
    • H01L33/12H01L33/14H01L33/32H01L33/40H01L33/44H01L21/20
    • H01L33/32H01L33/325Y10S148/099Y10S438/93
    • A light-emitting semiconductor device a sapphire substrate (1), an AlN buffer layer (2), a silicon (Si) doped GaN n.sup.+ -layer (3) of high carrier (n-type) concentration, a Si-doped (Al.sub.x2 Ga.sub.1-x2).sub.y2 In.sub.1-y2 N n.sup.+ -layer (4) of high carrier (n-type) concentration, a zinc (Zn) and Mg doped ((Al.sub.x1 Ga.sub.1-x1).sub.y2 In.sub.1-y2 N n.sup.+ -layer (5), and a Mg doped (Al.sub.x2 Ga.sub.1-x2).sub.y2 In.sub.1-y2 N n.sup.+ -layer (6). The AlN layer (2) has a 500 .ANG. thickness. The GaN n.sup.+ -layer (3) has about a 2.0 .mu.m thickness and a 2.times.10.sup.18 /cm.sup.3 electron concentration. The n.sup.+ -layer (4) has about a 2.0 .mu.m thickness and a 2.times.10.sup.18 /cm.sup.3 electron concentration. A double i-layer structure includes the emission layer (5) and the i-layer (6). The emission layer (5) has about a 0.5 .mu.m thickness, and the i-layer (6) has about a 0.5 .mu.m thickness. Parts of the emission layer (5) and the i-layer (6) are p-type regions (50, 60). Both of the p-type regions exhibit p-type conduction with a 2.times.10.sup.17 /cm.sup.3 hole concentration. The emission layer (5) and the i-layer (6), except for the p-type region, exhibit semi-insulative characteristics.
    • 发光半导体器件蓝宝石衬底(1),AlN缓冲层(2),掺杂高(n型)的硅(Si)掺杂的GaN n +层(3),掺杂Si(Alx2Ga1 -x2)n + +(4),Zn(Zn)和Mg掺杂的((Alx1Ga1-x1)y2In1-y2Nn +层(5),Mg掺杂 (Alx2Ga1-x2)y2In1-y2N n +层(6),AlN层(2)的厚度为500,GaN n +层(3)的厚度约为2.0μm,电子浓度为2×10 18 / cm 3。 n +层(4)的厚度约为2.0μm,电子浓度为2×10 18 / cm 2,i层结构包括发光层(5)和i层(6),发射层(5) 具有约0.5μm的厚度,i层(6)的厚度为0.5μm左右,发光层(5)和i层(6)的一部分为p型区域(50,60) 两个p型区域都具有2x1017 / cm3空穴浓度的p型导电,发射层(5)和i层(6),e 对于p型区域,表示半绝缘特性。
    • 9. 发明授权
    • Light-emitting aluminum gallium indium nitride compound semiconductor device having an improved luminous intensity
    • 具有改善的发光强度的发光铝镓铟氮化物半导体器件
    • US07001790B2
    • 2006-02-21
    • US09783035
    • 2001-02-15
    • Katsuhide ManabeHisaki KatoMichinari SassaShiro YamazakiMakoto AsaiNaoki ShibataMasayoshi Koike
    • Katsuhide ManabeHisaki KatoMichinari SassaShiro YamazakiMakoto AsaiNaoki ShibataMasayoshi Koike
    • H01L21/00
    • H01L33/32H01L33/0025H01L33/007H01L33/325H01L33/38H01L33/382H01L33/385H01L33/40
    • A light-emitting semiconductor device (10) consecutively includes a sapphire substrate (1), an AlN buffer layer (2), a silicon (Si) doped GaN n+-layer (3) of high carrier (n-type) concentration, a Si-doped (Alx3Ga1-x3)y3In1-y3N n+-layer (4) of high carrier (n-type) concentration, a zinc (Zn) and Si-doped (Alx2Ga1-x2)y2In1-y2N emission layer (5), and a Mg-doped (Alx1Ga1-x1)y1In1-y1N p-layer (6). The AlN layer (2) has a 500 Å thickness. The GaN n+-layer (3) has about a 2.0 μm thickness and a 2×1018/cm3 electron concentration. The n+-layer (4) has about a 2.0 μm thickness and a 2×1018/cm3 electron concentration. The emission layer (5) has about a 0.5 μm thickness. The p-layer 6 has about a 1.0 μm thickness and a 2×1017/cm3 hole concentration. Nickel electrodes (7, 8) are connected to the p-layer (6) and n+-layer (4), respectively. A groove (9) electrically insulates the electrodes (7, 8). The composition ratio of Al, Ga, and In in each of the layers (4, 5, 6) is selected to meet the lattice constant of GaN in the n+-layer (3). The LED (10) is designed to improve luminous intensity and to obtain purer blue color.
    • 发光半导体器件(10)连续地包括蓝宝石衬底(1),AlN缓冲层(2),高载体的硅(Si)掺杂GaN n + +层(3) (n型)浓度,Si掺杂(Al x3 Ga 1-x 3)y 3在1-y 3中, 具有高载流子(n型)浓度的氮(Zn)和Si掺杂(Al 2 x 2 Ga 2) 1-x2 Y2在1-y2 N发射层(5)中,以及Mg掺杂(Al x1 Ga) 在1-y1 N p层(6)中。 AlN层(2)的厚度为500埃。 GaN n + +(3)具有约2.0μm厚度和2×10 18 / cm 3电子浓度。 n + +层(4)具有约2.0μm厚度和2×10 18 / cm 3电子浓度。 发射层(5)的厚度约为0.5μm。 p层6具有约1.0μm厚度和2×10 17 / cm 3孔浓度。 镍电极(7,8)分别连接到p层(6)和n + +层(4)。 一个凹槽(9)使电极(7,8)电绝缘。 选择各层(4,5,6)中的Al,Ga和In的组成比以满足n +层(3)中的GaN的晶格常数。 LED(10)被设计为提高发光强度并获得更纯的蓝色。