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1. 发明申请

US20050145892A1 Mask, semiconductor device manufacturing method, and semiconductor device 审中-公开
标题翻译：掩模，半导体器件制造方法和半导体器件
公开(公告)号：US20050145892A1
公开(公告)日：2005-07-07
申请号：US10506147
申请日：2003-03-13
申请人： Shinichiro Nohdo , Shigeru Moriya
发明人： Shinichiro Nohdo , Shigeru Moriya
IPC分类号： G03F1/20 , H01L29/76 , G03C5/00 , H01L31/113
CPC分类号： G03F1/20 , H01J2237/31794
摘要： A mask capable of improving superimposing accuracy of patterns drawn on a plurality of masks, a production method of a semiconductor device capable of improving a yield of semiconductor devices, and a semiconductor device wherein a pattern can be made finer are provided. A mask including a plurality of mask regions formed with mutually different mask patterns to be transferred to the same device, wherein all the mask patterns are drawn by the same electron beam exposure means; the mask pattern of each mask is drawn with being divided to a plurality of deflection regions; the deflection region is in a range wherein a part of the mask pattern can be drawn on the mask by deflecting an electron beam by fixing the electron beam exposure means; and the deflection region is divided, so that the mask pattern in any deflection region of each of the masks is transferred on the same region on the device as a mask pattern in one deflection region of other mask, a production method of a semiconductor device using the mask and a semiconductor device produced using the mask.
摘要翻译：提供能够提高在多个掩模上绘制的图案的叠加精度的掩模，提供能够提高半导体器件的产量的半导体器件的制造方法以及可以使图案更细的半导体器件。一种掩模，其包括形成有相互不同的掩模图案的多个掩模区域以转移到同一器件，其中所有掩模图案由相同的电子束曝光装置绘制; 每个掩模的掩模图案被划分成多个偏转区域; 偏转区域处于通过固定电子束曝光装置而使电子束偏转而能够在掩模上绘制一部分掩模图案的范围内; 并且偏转区域被分割，使得每个掩模的任何偏转区域中的掩模图案在与其他掩模的一个偏转区域中作为掩模图案的器件上的相同区域上转印，使用半导体器件的制造方法掩模和使用掩模制造的半导体器件。

2. 发明申请

US20060151710A1 Exposure device, exposure method, and semiconductor device manufacturing method 失效
标题翻译：曝光装置，曝光方法和半导体器件制造方法
公开(公告)号：US20060151710A1
公开(公告)日：2006-07-13
申请号：US10534917
申请日：2003-11-13
申请人： Shinji Omori , Shigeru Moriya , Shinichiro Nohdo
发明人： Shinji Omori , Shigeru Moriya , Shinichiro Nohdo
IPC分类号： H01J3/14 , A61N5/00
CPC分类号： B82Y40/00 , B82Y10/00 , G03F1/20 , H01J37/304 , H01J37/3174
摘要： To provide an exposure apparatus and an exposure method able to correct an image-placement error during an exposure which is unable to decrease only by correcting electron beam description data of a mask pattern, and a semiconductor device manufacturing method used the same, wherein an image placement R2 of a mask is measured at an inversion posture against an exposure posture (ST7), the measured image placement R2 is corrected with considering a pattern displacement caused by gravity at the exposure posture and a first correction data Δ1 is prepared based on a difference of the corrected image placement and a designed data (ST10), and an exposure is performed by deflecting charged particle beam to correct a position of a pattern to be exposed to a subject based on the first correction data Δ1 (ST13).
摘要翻译：为了提供一种曝光装置和曝光方法，能够通过校正掩膜图案的电子束描述数据而不能减小曝光期间的图像放置误差，以及使用其的半导体器件制造方法，其中图像以与曝光姿势相反的反转姿势（ST7）测量掩模的放置R 2，考虑由曝光姿势引起的重力引起的图案位移，并且准备第一校正数据Delta 1来校正测量图像布置R 2 基于校正图像放置的差异和设计数据（ST10），并且通过基于第一校正数据Delta 1来对带电粒子束进行偏转来校正要暴露于对象的图案的位置来执行曝光（ ST 13）。

3. 发明授权

US07456031B2 Exposure device, exposure method, and semiconductor device manufacturing method 失效
标题翻译：曝光装置，曝光方法和半导体器件制造方法
公开(公告)号：US07456031B2
公开(公告)日：2008-11-25
申请号：US10534917
申请日：2003-11-13
申请人： Shinji Omori , Shigeru Moriya , Shinichiro Nohdo
发明人： Shinji Omori , Shigeru Moriya , Shinichiro Nohdo
IPC分类号： H01L31/26 , H01L21/66
CPC分类号： B82Y40/00 , B82Y10/00 , G03F1/20 , H01J37/304 , H01J37/3174
摘要： To provide an exposure apparatus and an exposure method able to correct an image-placement error during an exposure which is unable to decrease only by correcting electron beam description data of a mask pattern, and a semiconductor device manufacturing method used the same, wherein an image placement R2 of a mask is measured at an inversion posture against an exposure posture (ST7), the measured image placement R2 is corrected with considering a pattern displacement caused by gravity at the exposure posture and a first correction data Δ1 is prepared based on a difference of the corrected image placement and a designed data (ST10), and an exposure is performed by deflecting charged particle beam to correct a position of a pattern to be exposed to a subject based on the first correction data Δ1 (ST13).
摘要翻译：为了提供一种曝光装置和曝光方法，能够通过校正掩膜图案的电子束描述数据而不能减小曝光期间的图像放置误差，以及使用其的半导体器件制造方法，其中图像以与曝光姿势相反的反转姿势（ST7）测量掩模的放置R 2，考虑由曝光姿势引起的重力引起的图案位移，并且准备第一校正数据Delta 1来校正测量图像布置R 2 基于校正图像放置的差异和设计数据（ST10），并且通过基于第一校正数据Delta 1来对带电粒子束进行偏转来校正要暴露于对象的图案的位置来执行曝光（ ST 13）。

4. 发明授权

US07102243B2 Mask-making member and its production method, mask and its making method, exposure process, and fabrication method of semiconductor device 失效
公开(公告)号：US07102243B2
公开(公告)日：2006-09-05
申请号：US10712333
申请日：2003-11-13
申请人： Kaoru Koike , Shigeru Moriya
发明人： Kaoru Koike , Shigeru Moriya
IPC分类号： H01L23/544
CPC分类号： G03F1/20 , H01J2237/0435 , H01J2237/31791 , H01L23/544 , H01L2223/5442 , H01L2223/54453 , H01L2924/0002 , Y10S438/975 , H01L2924/00
摘要： A mask blank has a plurality of pattern formation regions in which mask circuit patterns are to be formed, and a supporting region in which any mask circuit pattern is not to be formed. The supporting region is provided for holding the plurality of pattern formation regions while separating the plurality of pattern formation regions from each other. The supporting region has first and second alignment marks. Exposure of a mask made from the mask blank for forming mask circuit patterns thereon is performed on the basis of the first alignment marks, and exposure of a substrate for forming circuit patterns thereon is performed on the basis of the second alignment marks. With this configuration, a mask used for charged particle beam reduction-and-division transfer exposure can be highly accurately produced at a low cost, and exposure of a substrate can be highly accurately performed by using the mask.

5. 发明授权

US5793276A Organic PTC thermistor 失效
标题翻译：有机PTC热敏电阻
公开(公告)号：US5793276A
公开(公告)日：1998-08-11
申请号：US682301
申请日：1996-07-17
申请人： Hisanao Tosaka , Minoru Takaya , Shigeru Moriya , Hisashi Kobuke , Munemitsu Hamada
发明人： Hisanao Tosaka , Minoru Takaya , Shigeru Moriya , Hisashi Kobuke , Munemitsu Hamada
IPC分类号： H01C1/14 , H01C7/02 , H01C7/00
CPC分类号： H01C7/027 , H01C1/1406
摘要： An organic PTC thermistor having a positive temperature coefficient of resistivity, which comprises a PTC composition comprising an organic polymer having dispersed therein a conductive substance, and at least one pair of electrodes, wherein the conductive substance is tungsten carbide powder; or the electrodes each comprise a metal mesh and a metal layer.
摘要翻译：一种具有正温度系数电阻率的有机PTC热敏电阻，其包括含有分散有导电物质的有机聚合物的PTC组合物和至少一对电极，其中所述导电物质是碳化钨粉末; 或者电极各自包括金属网和金属层。

6. 发明授权

US5165071A Digital color copying machine 失效
标题翻译：数码彩色复印机
公开(公告)号：US5165071A
公开(公告)日：1992-11-17
申请号：US382175
申请日：1989-07-19
申请人： Shigeru Moriya , Yoshihiko Hirota
发明人： Shigeru Moriya , Yoshihiko Hirota
IPC分类号： H04N1/387
CPC分类号： H04N1/3873 , H04N1/3871
摘要： A digital color copying machine comprising a memory for storing a multi-level image signal or a binary image signal is disclosed. In a superimpose mode of the copying machine, after an image signal of a first document image stored in the memory is read out, the first document image is superimposed on a second document image on a copying paper.
摘要翻译：公开了一种包括用于存储多电平图像信号或二进制图像信号的存储器的数字彩色复印机。在复印机的叠加模式中，在存储在存储器中的第一文档图像的图像信号被读出之后，第一文档图像叠加在复印纸上的第二文档图像上。

7. 发明授权

US5119182A Image forming apparatus comprising sample image printing mode and image forming method therefor 失效
标题翻译：图像形成装置，包括样本图像打印模式及其图像形成方法
公开(公告)号：US5119182A
公开(公告)日：1992-06-02
申请号：US482897
申请日：1990-02-22
申请人： Toshio Tsuboi , Keiji Nakatani , Shigeru Moriya
发明人： Toshio Tsuboi , Keiji Nakatani , Shigeru Moriya
IPC分类号： H04N1/60
CPC分类号： H04N1/6011 , H04N1/6013
摘要： There are disclosed an image forming apparatus such as a digital copying machine and an image forming method. In the image forming apparatus and method, there are transformed supplied reference color image data into plural sample image data having color tones stepwisely different from each other by multiplying the reference color image data one by one by supplied plural color adjustment coefficients, and then, there are recorded plural sample images corresponding to the plural sample image data on a piece of recording paper. When the operator selects one of the plural sample images, a controller alters the supplied reference color image data into another reference color image data responsive to color adjustment coefficients of the selected one of the plural sample images.
摘要翻译：公开了诸如数字复印机和图像形成方法的图像形成装置。在图像形成装置和方法中，通过将所提供的多个颜色调整系数逐个乘以参考彩色图像数据，将提供的参考彩色图像数据变换为具有逐步不同的色调的多个样本图像数据，然后在那里在一张记录纸上记录与多个样本图像数据对应的多个样本图像。当操作者选择多个样本图像中的一个时，控制器响应于多个样本图像中所选择的一个样本图像的颜色调整系数，将提供的参考彩色图像数据改变为另一参考彩色图像数据。

8. 发明授权

US5099336A Copying machine capable of copying plural reproduced images from single original on a same copying paper and copying process thereof 失效
标题翻译：能够在同一复印纸上复制来自单张原稿的复印图像的复印机及其复印处理
公开(公告)号：US5099336A
公开(公告)日：1992-03-24
申请号：US451127
申请日：1989-12-15
申请人： Shigeru Moriya
发明人： Shigeru Moriya
IPC分类号： G03G15/36 , G03G15/00 , G03G15/01 , G03G15/16 , G03G21/00 , H04N1/23 , H04N1/387
CPC分类号： H04N1/3875 , G03G15/0131 , G03G15/16
摘要： A copying machine which is capable of copying a single original in the plural form on a copying paper having a size larger than that of the original and a copying process thereof. The first scanning of the single original is performed plural times to form a plurality of electrostatic latent images on a photosensitive material, said images being spaced by an interval equal to the length L which extends in the sub scanning direction of the single original or by an interval L longer than the length, thereby developing the electrostatic latent images with a toner. The resultant toner images are transferred to the copying paper in accordance with the first transfer operation. The second scanning of the original is next performed plural times while delaying a time alone corresponding to the length L which extends in the sub scanning direction of the original image so as to form plural electrostatic latent images with the interval L being left therebetween in the same manner as defined above, whereby the last-mentioned electrostatic latent images are developed with the toner. Each of the resultant toner images is transferred between the toner images formed previously on the copying paper to form consecutive plural reproduced images. Since a transfer charger is actuated in unison with the time when each of the toner image is brought to a transfer position and the icrease in charges on the copying paper is controlled, satisfactory reproduced images can be obtained.
摘要翻译：一种复印机，其能够将复数形式的单个原稿复制在尺寸大于原稿的复印纸上，以及复印处理。执行单个原稿的第一次扫描多次以在感光材料上形成多个静电潜像，所述图像间隔等于在单个原稿的副扫描方向上延伸的长度L，或者通过间隔L比长度长，从而用调色剂显影静电潜像。所得调色剂图像根据第一次转印操作被转印到复印纸上。原稿的第二扫描接下来执行多次，同时延迟单独对应于在原始图像的副扫描方向上延伸的长度L的时间，以便形成多个静电潜像，其中间隔L保持在原始图像之间方式，由此最后提到的静电潜像用调色剂显影。所得到的调色剂图像中的每一个在预先形成在复印纸上的调色剂图像之间转印以形成连续的多个再现图像。由于转印充电器与将每个调色剂图像带到转印位置并且在复印纸上的电荷中的光油被控制的时间一致地致动，所以可以获得令人满意的再现图像。

9. 发明授权

US4992863A Colored image reading apparatus 失效
标题翻译：彩色图像读取装置
公开(公告)号：US4992863A
公开(公告)日：1991-02-12
申请号：US286884
申请日：1988-12-20
申请人： Shigeru Moriya
发明人： Shigeru Moriya
IPC分类号： H04N1/60
CPC分类号： H04N1/6016
摘要： A colored image reading apparatus in which the light-intensity signals produced in response to the red, green and blue color components of the light carrying the image information pickup up from a given document sheet bearing multi-colored images are converted into quantity-of-ink data signals indicating the quantities of cyanic-, magenta- and yellow-colored inks to be used for the formation of colored pixels, wherein the conversion of the color-density signals into the quantity-of-ink data signals is effected by a conversion table into which are stored quantity-of-ink data produced through mathematic calculation involving logarithmic conversion of variable values which are generated as the products of multiplication between a set of fixed parameters and numerical values respectively representing the color densities indicated by the light-intensity signals. The set of parameters is selected from among a plurality of sets of parameters including optional sets of parameters and a standard set of parameters. Any of the plurality of optional sets of parameters may be selected either manually by the operator or through preliminary detection of the predominant color used in the original multi-color images. The standard set of paremeters is selected for use when none of the optional sets of parameters is selected. The color image reading apparatus of the present invention permits naturally colored images to be reproduced accurately.
摘要翻译：一种彩色图像读取装置，其中响应于从具有多色图像的给定文档纸张拾取的图像信息的光的红色，绿色和蓝色分量产生的光强度信号被转换为数量，指示用于形成有色像素的用于形成彩色像素的氰色，金色和黄色油墨的量的油墨数据信号，其中将色度密度信号转换成油墨数据信号通过转换其中存储了通过数学计算产生的墨水数据，其包括可变值的对数转换，其被生成为一组固定参数和分别表示由光强度信号指示的色浓度的数值之间的乘积的乘积。这些参数集从多个参数组中选择，包括可选参数集合和一组标准参数。可以由操作者手动选择多个可选择的参数组中的任何一个或通过初步检测在原始多色图像中使用的主要颜色。当没有选择任何一组参数时，选择标准的曲线表组合使用。本发明的彩色图像读取装置允许自然的彩色图像被精确地再现。

10. 发明授权

US4516848A Charging device for an electrostatic copying machine 失效
标题翻译：静电复印机充电装置
公开(公告)号：US4516848A
公开(公告)日：1985-05-14
申请号：US433434
申请日：1982-10-08
申请人： Shigeru Moriya
发明人： Shigeru Moriya
IPC分类号： H01T19/00 , G03G15/02 , G03G15/00
CPC分类号： G03G15/0258
摘要： A charging device for an electrostatic copying machine in which a tongue piece is positioned adjacent to a charging wire. A DC signal is applied to a piezoelectric element to flex the tongue piece to a position in contact with or closely adjacent to the charging wire, and a high frequency signal is superimposed onto the DC signal so as to flex and vibrate the tongue piece against the charging wire. The vibratory piezoelectric element may be fixed to and suspended from the charging wire; alternatively the piezoelectric vibratory element may support the charging wire at an intermediate portion of the charging wire.
摘要翻译：一种用于静电复印机的充电装置，其中舌片位于充电线附近。将DC信号施加到压电元件以将舌片弯曲到与充电线接触或紧密相邻的位置，并且将高频信号叠加到DC信号上，以使舌片抵抗充电线。振动压电元件可以固定到充电线并悬挂在充电线上; 替代地，压电振动元件可以在充电线的中间部分处支撑充电线。

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