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1. 发明申请

US20090159432A1 Thin-film deposition apparatus using discharge electrode and solar cell fabrication method 审中-公开
标题翻译：使用放电电极和太阳能电池制造方法的薄膜沉积装置
公开(公告)号：US20090159432A1
公开(公告)日：2009-06-25
申请号：US12227970
申请日：2007-08-22
申请人： Shingo Kawano , Eiichiro Ohtsubo , Naoyuki Miyazono , Keisuke Kawamura , Yoshiaki Takeuchi
发明人： Shingo Kawano , Eiichiro Ohtsubo , Naoyuki Miyazono , Keisuke Kawamura , Yoshiaki Takeuchi
IPC分类号： C23C14/34
CPC分类号： C23C16/509 , C23C16/45563 , C23C16/4557 , C23C16/46 , H01J37/32009 , H01J37/3244 , H01J37/32449 , H01J37/32541 , H01L21/02422 , H01L21/02532 , H01L21/0262 , H01L31/075 , H01L31/18 , H01L31/1824 , Y02E10/545 , Y02E10/548 , Y02P70/521
摘要： A discharge electrode, a thin-film deposition apparatus, and a solar cell fabrication method, which suppress the generation of a film thickness distribution and a film quality distribution, are provided. The discharge electrode includes two lateral structures 20 that are substantially parallel to each other and extend in an X direction; and a plurality of longitudinal structures 21a that are provided between the two lateral structures, are substantially parallel to each other, and extend in a Y direction substantially orthogonal to the X direction. The longitudinal structures 21a each include an electrode main body 35 whose one end 35a is connected to one of the lateral structures 20 and whose the other end 35b is connected to the other lateral structure 20; a gas pipe 41 disposed in a gas-pipe accommodating space 36; and a porous body 40. An opening 38 opens to a substrate 8 and is covered with the porous body 40. A gas diffusion path 37 connects the gas-pipe accommodating space 36 and the opening 38. The electrode inner surface 39 faces the gas-pipe accommodating space 36 and opposes the pipe outer surface 42b. A nozzle hole group 42c is arranged in the second direction in the gas pipe 41, and faces a section 39a at a side opposite to the gas diffusion path 37 in the electrode inner surface 39.
摘要翻译：提供抑制膜厚分布的产生和膜质量分布的放电电极，薄膜沉积装置和太阳能电池的制造方法。放电电极包括基本上彼此平行并沿X方向延伸的两个横向结构20; 并且设置在两个横向结构之间的多个纵向结构21a基本上彼此平行，并且在大致正交于X方向的Y方向上延伸。纵向结构21a各自包括电极主体35，其一端35a连接到横向结构20中的一个，另一端35b连接到另一侧向结构20; 设置在气体管容纳空间36中的气体管道41; 和多孔体40.开口38通向基板8并被多孔体40覆盖。气体扩散路37连接气体管容纳空间36和开口38.电极内表面39面对气体 - 管容纳空间36并与管外表面42b相对。喷嘴孔组42c沿气体配管41的第二方向排列，与电极内表面39的与气体扩散路37相反侧的部分39a相对。

2. 发明申请

US20130084408A1 VACUUM PROCESSING APPARATUS AND PLASMA PROCESSING METHOD 审中-公开
标题翻译：真空加工设备和等离子体处理方法
公开(公告)号：US20130084408A1
公开(公告)日：2013-04-04
申请号：US13703694
申请日：2011-05-09
申请人： Sachiko Nakao , Eishiro Sasakawa , Yoshiaki Takeuchi , Naoyuki Miyazono , Eiichiro Ohtsubo
发明人： Sachiko Nakao , Eishiro Sasakawa , Yoshiaki Takeuchi , Naoyuki Miyazono , Eiichiro Ohtsubo
IPC分类号： C23C16/50
CPC分类号： C23C16/50 , C23C16/4412 , C23C16/4557 , C23C16/45578 , C23C16/46 , C23C16/511 , H01J37/32229 , H01L31/1804 , H01L31/1816 , H01L31/1824 , H01L31/1876 , H01L31/202 , Y02E10/545 , Y02E10/547 , Y02P70/521
摘要： A vacuum processing apparatus includes a discharge chamber with a ridge waveguide having an exhaust-side ridge electrode and a substrate-side ridge electrode between which a plasma is formed; a pair of converters, which convert high-frequency power into TE mode, which represents the basic transmission mode of rectangular waveguides, for transmission to the discharge chamber, and form a plasma between the exhaust-side ridge electrode and the substrate-side ridge electrode; a uniform heating temperature controller, which is disposed on the outer surface of the substrate-side ridge electrode and heats the electrode uniformly; and a heat-absorbing temperature control unit, which is disposed on the outer surface of the exhaust-side ridge electrode and controls thermal flux through the thickness direction of a substrate undergoing plasma processing. The substrate is disposed between the exhaust-side ridge electrode and the substrate-side ridge electrode, and subjected to plasma processing.
摘要翻译：一种真空处理装置，包括具有带有排气侧脊电极的脊波导和形成有等离子体的基板侧脊电极的放电室，一对转换器，其将高频功率转换成TE模式，其表示矩形波导的基本传输模式，用于传输到放电室，并且在排气侧脊电极和衬底侧脊电极之间形成等离子体 ; 均匀的加热温度控制器，其设置在基板侧脊电极的外表面上，并均匀地加热电极; 以及吸收温度控制单元，其设置在排气侧脊电极的外表面上，并控制经受等离子体处理的基板的厚度方向的热通量。基板设置在排气侧脊电极和基板侧脊电极之间，进行等离子体处理。

3. 发明授权

US4971128A Automatic rim exchanger for use in a tire uniformity machine 失效
标题翻译：用于轮胎均匀机器的自动轮辋交换器
公开(公告)号：US4971128A
公开(公告)日：1990-11-20
申请号：US299685
申请日：1989-01-23
申请人： Yukihiro Koga , Naoyuki Miyazono
发明人： Yukihiro Koga , Naoyuki Miyazono
IPC分类号： B29D30/06 , G01M17/02
CPC分类号： B29D30/0662 , G01M17/021
摘要： An improved automatic rim exchanger for use in a tire uniformity machine includes an upper spindle adapted to be rotated about the same axis as an axis of a tire, a fitting portion provided at the bottom of the upper spindle and associated with a chuck for detachably supporting upper rim structure of an upper rim holding member and upper rim, a lower spindle associated with a lock mechanism, which spindle is rotatably disposed on a lower spindle assembly mounted on an elevator member, has lower rim structure of a lower rim holding member and a lower rim detachably fitted therein, and is raised and lowered in the axial direction on the same axis, a jointly movable support member projecting from the lower rim means and adapted to be detachably fitted in a holding hole of the upper rim structure for supporting the upper rim structure, and a conveyor for supporting the vertically fitted upper and lower rim structure to feed and eject them.
摘要翻译：一种用于轮胎均匀机器的改进的自动轮辋交换器包括适于围绕与轮胎的轴线相同的轴线旋转的上主轴，设置在上心轴的底部并与卡盘相关联的配合部分，该卡盘用于可拆卸地支撑上边缘保持构件和上边缘的上边缘结构，与锁定机构相关联的下主轴，该主轴可旋转地设置在安装在升降构件上的下主轴组件上，具有下边缘保持构件的下边缘结构，下边缘可拆卸地装配在其中，并且在同一轴线上在轴向方向上升下降，从下边缘装置突出的可共同移动的支撑构件，并且可拆卸地装配在上边缘结构的保持孔中，用于支撑上部边缘结构，以及用于支撑竖直安装的上边缘和下边缘结构以输送和弹出它们的输送机。

4. 发明授权

US06244105B1 Tire uniformity machine 有权
标题翻译：轮胎均匀机
公开(公告)号：US06244105B1
公开(公告)日：2001-06-12
申请号：US09459047
申请日：1999-12-10
申请人： Toshiharu Nishihara , Naoyuki Miyazono
发明人： Toshiharu Nishihara , Naoyuki Miyazono
IPC分类号： G01M1702
CPC分类号： G01M17/021
摘要： In a tire uniformity machine in which a tire is mounted between upper and lower spindles via upper and lower rims, a rim holding apparatus 10 is composed of a parallel spindle 1 which is in parallel with the axis of tire uniformity machine, a taper collet 2 formed with an inner hole engaging concentrically with the parallel spindle 1 at the center portion thereof and a taper surface at the outer peripheral portion thereof, a rim formed with a taper surface engaging with the taper surface of the taper collet 2 at the inner peripheral portion thereof, a rim clamping device 4 which holds the rim 3 and is mounted so that the parallel spindle 1 is capable of being moved in the axial direction, and a fixing device 5 for determining the axial position of the rim clamping device 4. Thereby, there is provided a highly accurate tire uniformity machine in which (1) the change of rim width and the fitting/removal of rim can be performed easily, and (2) the runout of rim can be decreased to 0.025 mm (standard) or less.
摘要翻译：在通过上下边缘将轮胎安装在上下主轴之间的轮胎均匀机中，轮辋保持装置10由与轮胎均匀机的轴线平行的平行主轴1，锥形夹头2 形成有与中心部的平行心轴1同心配合的内孔和在其外周部的锥面，与锥形夹头2的内周部的锥面接合的边缘，夹持装置4，其保持轮缘3并安装成使得平行主轴1能够沿轴向移动;以及定影装置5，用于确定轮辋夹紧装置4的轴向位置。由此，提供了一种高精度轮胎均匀性机器，其中（1）轮辋宽度的改变和轮辋的装配/拆卸可以容易地进行，（2）轮辋的跳动可以减小到0.025m m（标准）以下。

5. 发明授权

US6089084A Tire uniformity machine 失效
标题翻译：轮胎均匀机
公开(公告)号：US6089084A
公开(公告)日：2000-07-18
申请号：US920813
申请日：1997-08-29
申请人： Toshiharu Nishihara , Naoyuki Miyazono
发明人： Toshiharu Nishihara , Naoyuki Miyazono
IPC分类号： B29D30/08 , B60C19/00 , G01M1/02 , G01M1/30 , G01M17/02
CPC分类号： G01M17/021
摘要： In a tire uniformity machine in which a tire is mounted between upper and lower spindles via upper and lower rims, a rim holding apparatus 10 is composed of a parallel spindle 1 which is in parallel with the axis of tire uniformity machine, a taper collet 2 formed with an inner hole engaging concentrically with the parallel spindle 1 at the center portion thereof and a taper surface at the outer peripheral portion thereof, a rim formed with a taper surface engaging with the taper surface of the taper collet 2 at the inner peripheral portion thereof, a rim clamping device 4 which holds the rim 3 and is mounted so that the parallel spindle 1 is capable of being moved in the axial direction, and a fixing device 5 for determining the axial position of the rim clamping device 4. Thereby, there is provided a highly accurate tire uniformity machine in which (1) the change of rim width and the fitting/removal of rim can be performed easily, and (2) the runout of rim can be decreased to 0.025 mm (standard) or less.
摘要翻译：在通过上下边缘将轮胎安装在上下主轴之间的轮胎均匀机中，轮辋保持装置10由与轮胎均匀机的轴线平行的平行主轴1，锥形夹头2 形成有与中心部分的平行心轴1同心配合的内孔和在其外周部分处的锥形表面，边缘形成有与锥形夹头2的锥形表面在内周部分处接合的锥形表面夹持装置4，其保持轮缘3并安装成使得平行主轴1能够沿轴向移动;以及定影装置5，用于确定轮辋夹紧装置4的轴向位置。由此，提供了一种高精度轮胎均匀性机器，其中（1）轮辋宽度的改变和轮辋的装配/拆卸可以容易地进行，（2）轮辋的跳动可以减小到0.025m m（标准）以下。

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