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1. 发明授权

US06250188B1 Ultrasonic vibration cutting method and apparatus 有权
标题翻译：超声波振动切割方法及装置
公开(公告)号：US06250188B1
公开(公告)日：2001-06-26
申请号：US09489028
申请日：2000-01-21
申请人： Shigeru Sato , Ryoichi Ishii
发明人： Shigeru Sato , Ryoichi Ishii
IPC分类号： B26D100
CPC分类号： B26D7/086 , Y10S83/956 , Y10T83/04 , Y10T83/0505 , Y10T83/364 , Y10T83/536 , Y10T83/538 , Y10T83/7793 , Y10T83/9379
摘要： An ultrasonic vibration cutting method comprising mounting and fixing a part to be cut on a mounting table, moving down an ultrasonic vibration rotation unit, stopping the downward movement of the ultrasonic vibration rotation unit when the cutting blade of the ultrasonic vibration rotation unit reaches a position for cutting the part, moving the ultrasonic vibration rotation unit linearly for cutting, and turning and vibrating the cutting blade with ultrasonic waves to cut the part.
摘要翻译：一种超声波振动切断方法，其特征在于，在所述超声波振动旋转单元的切割刀片达到位置时，将安装台上的被切割部件安装固定在所述超声波振动旋转单元的下方，停止所述超声波振动旋转单元的向下移动，用于切割部分，使超声波振动旋转单元线性移动以进行切割，并且用超声波旋转和振动切割刀片以切割该部件。

2. 发明授权

US5884833A Ultrasonic vibration soldering apparatus and resonator used therein 失效
标题翻译：超声波振动焊接装置及谐振器
公开(公告)号：US5884833A
公开(公告)日：1999-03-23
申请号：US839318
申请日：1997-04-17
申请人： Shigeru Sato , Mitsugu Katsumi , Ryoichi Ishii
发明人： Shigeru Sato , Mitsugu Katsumi , Ryoichi Ishii
IPC分类号： B23K1/08 , B06B1/02 , B23K3/06 , B23K3/00
CPC分类号： B23K3/0653
摘要： A support portion for attaching a horn main body to a solder tank is provided on the horn main body at a nodal point f2 and ultrasonic vibration from an external transducer is transmitted to solder in the solder tank through the horn main body.
摘要翻译：在喇叭主体上，在节点f2处设置用于将喇叭主体连接到焊料槽的支撑部分，并且来自外部换能器的超声波振动通过喇叭主体传递到焊料槽中的焊料。

3. 发明授权

US6098514A Ultrasonic vibration cutter 失效
标题翻译：超音波振动切割机
公开(公告)号：US6098514A
公开(公告)日：2000-08-08
申请号：US834993
申请日：1997-04-07
申请人： Shigeru Sato , Ryoichi Ishii
发明人： Shigeru Sato , Ryoichi Ishii
IPC分类号： B26F3/00 , B06B3/00 , B24B1/04 , B24B27/06 , B24B41/04 , B26D7/08 , B28D5/02 , B28D5/04 , B29C65/08 , B26D1/14
CPC分类号： B26D7/086 , B06B3/00 , B29C65/085 , B29C66/8167 , B29C66/83411 , Y10S83/956 , Y10T83/6588 , Y10T83/9379 , Y10T83/9464
摘要： A disk-shaped cutter extending in a direction perpendicular to the central axis of a resonator is detachably installed on the resonator which is molded substantially cylindrical with a fastening unit.
摘要翻译：在垂直于谐振器的中心轴线的方向上延伸的盘形切割器可拆卸地安装在谐振器上，该谐振器通过紧固单元被模制成大致圆柱形。

4. 发明授权

US5883460A Support unit for ultrasonic vibration resonator 失效
标题翻译：超声波振动谐振器支撑单元
公开(公告)号：US5883460A
公开(公告)日：1999-03-16
申请号：US879321
申请日：1997-06-19
申请人： Shigeru Sato , Ryoichi Ishii , Seiya Nakai
发明人： Shigeru Sato , Ryoichi Ishii , Seiya Nakai
IPC分类号： B23K20/10 , B06B1/02 , B06B3/00 , H01L41/053
CPC分类号： B06B3/00
摘要： First and second boosters are attached to a holder in the following manner to prevent a portion between the first and second boosters from being curved. The outer side surface of a projecting portion on the outer peripheral surface of a second booster is pressed toward the inward of the holder by a stopper attached to the holder so that a stepped portion formed in the interior surface of the holder is pressed by the projecting portion through a bridge member and a projecting portion on the outer peripheral surface of the first booster.
摘要翻译：第一和第二增压器以下列方式附接到保持器，以防止第一和第二助力器之间的部分弯曲。第二助力器的外周面上的突出部分的外侧表面通过安装在保持器上的止动件朝向保持器的内侧挤压，使得形成在保持器的内表面中的阶梯部分被突出部分通过桥构件和在第一助力器的外周表面上的突出部分。

5. 发明授权

US08201722B2 Resonator for joining metal members together utilizing ultrasonic vibration 有权
标题翻译：用于使用超声波振动将金属构件连接在一起的谐振器
公开(公告)号：US08201722B2
公开(公告)日：2012-06-19
申请号：US12793251
申请日：2010-06-03
申请人： Shigeru Sato , Mayumi Kouya , Mitsugu Katsumi , Ryoichi Ishii , Takahiro Ito
发明人： Shigeru Sato , Mayumi Kouya , Mitsugu Katsumi , Ryoichi Ishii , Takahiro Ito
IPC分类号： B23K1/06 , B29C65/08 , B32B37/00
CPC分类号： B23K20/106 , H01L2224/75
摘要： A resonator for joining metal members utilizing ultrasonic vibration includes an ultrasonic horn having a length of at least half wavelength of a resonance frequency of ultrasonic vibration transmitted from a vibrator, and a joining tool provided on the ultrasonic horn so as to project in a direction normal to a vibration transmission direction of the ultrasonic horn at a position of a point of a maximum vibration amplitude of the ultrasonic horn. The joining tool is formed into a linear bar made of a material excellent in acoustic property and is provided on a distal end thereof with a tool head projecting laterally.
摘要翻译：用于使用超声波振动连接金属构件的谐振器包括：超声波喇叭，其具有从振动器传递的超声波振动的共振频率的至少半波长的长度，以及设置在超声波喇叭上的接合工具，以沿正常方向涉及超声波喇叭的最大振动振幅点的位置处的超声波喇叭的振动传播方向。连接工具形成为由声学特性优异的材料制成的直线杆，并且在其远端设置有横向突出的工具头。

6. 发明授权

US07854247B2 Ultrasonic vibration bonding resonator 有权
标题翻译：超声波振动键合谐振器
公开(公告)号：US07854247B2
公开(公告)日：2010-12-21
申请号：US12207729
申请日：2008-09-10
申请人： Shigeru Sato , Mayumi Kouya , Mitsugu Katsumi , Ryoichi Ishii
发明人： Shigeru Sato , Mayumi Kouya , Mitsugu Katsumi , Ryoichi Ishii
IPC分类号： B32B37/00
CPC分类号： B23K20/10
摘要： An ultrasonic vibration bonding resonator includes a resonance body, bonding working portions having a bonding working face and provided at a point of maximum oscillation on upper and lower surfaces of the resonance body and support portions provided at two points of minimum oscillation apart from the bonding working portions to opposite sides in a direction of ultrasonic vibration as projecting from front and back surfaces of the resonance body. It includes a resonance body, tool-attaching portions provided at a point of maximum oscillation on upper and lower surfaces of the resonance body, a bonding working portion having a bonding working face and attached to one of the tool-attaching portions, and support portions provided at two points of minimum oscillation apart from the bonding working portion to opposite sides in a direction of ultrasonic vibration as projecting from front and back surfaces of the resonance body.
摘要翻译：超声波振动接合谐振器包括谐振体，具有接合工作面并且设置在谐振体的上表面和下表面上的最大振荡点处的接合作业部分和设置在离接合加工的两个最小振荡点处的支撑部分从谐振体的前后表面突出的超声波振动的方向的相对侧的部分。其包括共振体，设置在谐振体的上表面和下表面上的最大振荡点处的工具附接部分，具有接合工作面并且附接到工具附接部分之一的接合作业部分和支撑部分设置在距离接合工作部分的两个最小振荡点处，在从共振体的前后表面突出的超声波振动的方向上的相对侧。

7. 发明申请

US20100320255A1 RESONATOR FOR JOINING METAL MEMBERS TOGETHER UTILIZING ULTRASONIC VIBRATION 有权
标题翻译：用于接合金属部件的谐振器使用超声波振动
公开(公告)号：US20100320255A1
公开(公告)日：2010-12-23
申请号：US12793251
申请日：2010-06-03
申请人： Shigeru SATO , Mayumi Kouya , Mitsugu Katsumi , Ryoichi Ishii , Takahiro Ito
发明人： Shigeru SATO , Mayumi Kouya , Mitsugu Katsumi , Ryoichi Ishii , Takahiro Ito
IPC分类号： B23K20/10
CPC分类号： B23K20/106 , H01L2224/75
摘要： A resonator for joining metal members utilizing ultrasonic vibration includes an ultrasonic horn having a length of at least half wavelength of a resonance frequency of ultrasonic vibration transmitted from a vibrator, and a joining tool provided on the ultrasonic horn so as to project in a direction normal to a vibration transmission direction of the ultrasonic horn at a position of a point of a maximum vibration amplitude of the ultrasonic horn. The joining tool is formed into a linear bar made of a material excellent in acoustic property and is provided on a distal end thereof with a tool head projecting laterally.
摘要翻译：用于使用超声波振动连接金属构件的谐振器包括：超声波喇叭，其具有从振动器传递的超声波振动的共振频率的至少半波长的长度，以及设置在超声波喇叭上的接合工具，以沿正常方向涉及超声波喇叭的最大振动振幅点的位置处的超声波喇叭的振动传播方向。连接工具形成为由声学特性优异的材料制成的直线杆，并且在其远端设置有横向突出的工具头。

8. 发明授权

US08334520B2 Charged particle beam apparatus 有权
标题翻译：带电粒子束装置
公开(公告)号：US08334520B2
公开(公告)日：2012-12-18
申请号：US13124599
申请日：2009-10-22
申请人： Tadashi Otaka , Hiroyuki Ito , Ryoichi Ishii , Manabu Yano , Hajime Kawano
发明人： Tadashi Otaka , Hiroyuki Ito , Ryoichi Ishii , Manabu Yano , Hajime Kawano
IPC分类号： H01J37/26
CPC分类号： H01J37/20 , H01J37/28 , H01J2237/20214 , H01J2237/2811 , H01J2237/2817
摘要： An exemplary a charged particle beam apparatus converts an inspection position on a test sample (wafer coordinate system) to a setting position of an inspection mechanism (stage coordinate system (polar coordinate system)), a rotating arm and a rotating stage being rotated to be moved for the inspection position on the test sample. In this case, inspection devices are arranged over a locus that is drawn by the center of the rotating stage according to the rotation of the rotating arm. A function for calculating errors (e.g., center shift of the rotating stage) and compensating for the errors is provided, by which the precision of inspection is improved in a charged particle beam apparatus equipped with a biaxial rotating stage mechanism.
摘要翻译：一种带电粒子束装置的示例将测试样品（晶片坐标系）上的检查位置转换成检查机构（载台坐标系（极坐标系））的设置位置，旋转臂和旋转台旋转为移动到测试样品上的检查位置。在这种情况下，检查装置设置在由旋转台的旋转中心旋转的轨迹上。提供了一种用于计算误差（例如，旋转台的中心偏移）和补偿误差的功能，通过该功能，在装备有双轴旋转平台机构的带电粒子束装置中提高了检查精度。

9. 发明申请

US20090173887A1 CHARGED PARTICLE BEAM TRAJECTORY CORRECTOR AND CHARGED PARTICLE BEAM APPARATUS 有权
标题翻译：充电颗粒光束光栅修正器和充电颗粒光束装置
公开(公告)号：US20090173887A1
公开(公告)日：2009-07-09
申请号：US12349708
申请日：2009-01-07
申请人： Hiroyuki ITO , Yuko Sasaki , Ryoichi Ishii , Takashi Doi
发明人： Hiroyuki ITO , Yuko Sasaki , Ryoichi Ishii , Takashi Doi
IPC分类号： H01J3/20
CPC分类号： H01J37/153 , H01J37/145 , H01J37/28 , H01J2237/1534
摘要： The invention relates to a trajectory correction method for a charged particle beam, and provides a low-cost, high accuracy and high-resolution converging optical system for use with a charged particle beam to solve problems with conventional aberration correction systems. To this end, the present invention uses a configuration which forms electromagnetic field which is concentrated towards a center of a beam trajectory axis, causes oblique of the beam to make use of lens effects and bend the trajectory, and consequently, cancels out large external side non-linear effects such a spherical aberration of the electron lens. Specifically, the configuration generates an electric field concentration in a simple manner by providing electrodes above the axis and applying voltages to the electrodes. Further, the above configuration can be realized trough operations using lenses and deflectors with incident axes and image formation positions that are normal.
摘要翻译：本发明涉及一种用于带电粒子束的轨迹校正方法，并且提供了一种用于带电粒子束的低成本，高精度和高分辨率会聚光学系统，以解决常规像差校正系统的问题。为此，本发明使用形成朝向光束轨迹轴的中心集中的电磁场的结构，使得光束的倾斜利用透镜效果并弯曲轨迹，因此抵消了大的外侧电子透镜的非线性效应如球面像差。具体地说，该配置通过在轴上方设置电极并向电极施加电压，以简单的方式产生电场浓度。此外，可以通过使用具有入射轴和成像位置的透镜和偏转器的槽操作来实现上述配置。

10. 发明申请

US20080197282A1 Scanning Transmission Charged Particle Beam Device 审中-公开
标题翻译：扫描传输带电粒子束装置
公开(公告)号：US20080197282A1
公开(公告)日：2008-08-21
申请号：US12031754
申请日：2008-02-15
申请人： Yoshihiko Nakayama , Isao Nagaoki , Ryoichi Ishii
发明人： Yoshihiko Nakayama , Isao Nagaoki , Ryoichi Ishii
IPC分类号： G01N23/00
CPC分类号： H01J37/26 , H01J37/265 , H01J37/28 , H01J2237/24455 , H01J2237/24475 , H01J2237/2804
摘要： There is provided a scanning transmission charged particle beam device by which charged particles of a bright-field image and charged particles of a dark-field image may be clearly separated, and bright-field images and dark-field images with high accuracy may be obtained even in a state in which the scanning range of a charged particle beams on a sample is changed.A deflecting coil is provided below a sample, and a charged particle detector for a dark-field image with an opening is provided below the deflecting coil. A charged particle detector for a bright-field image is provided below the above opening. By the deflecting coil below the sample, a charged particle beam for a bright-field image is configured to be synchronized with the scanning of a particle beam, and to be deflected in an opposite direction to the deflected direction of the particle beam. Thereby, a charged particles beam of a bright-field image passes through the opening of the charged particle detector for a dark-field image, and is detected by the charged particle detector for a bright-field image.
摘要翻译：提供了一种扫描透射带电粒子束装置，通过该扫描透射带电粒子束装置可以清晰地分离亮场图像的带电粒子和暗场图像的带电粒子，并且可以获得高精度的亮场图像和暗视场图像即使在样品上的带电粒子束的扫描范围发生变化的状态。在样品下方设置偏转线圈，并且在偏转线圈的下方设置用于具有开口的暗场图像的带电粒子检测器。在上述开口的下方设置用于明场图像的带电粒子检测器。通过样品下方的偏转线圈，用于亮场图像的带电粒子束被配置为与粒子束的扫描同步，并且在与粒子束的偏转方向相反的方向上偏转。因此，亮场图像的带电粒子束通过带电粒子检测器的开口进行暗场图像，并且由带电粒子检测器检测到用于亮场图像。

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