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1. 发明申请

US20130262027A1 SHAPE MEASUREMENT METHOD, AND SYSTEM THEREFOR 有权
标题翻译：形状测量方法及其系统
公开(公告)号：US20130262027A1
公开(公告)日：2013-10-03
申请号：US13880429
申请日：2011-10-21
申请人： Chie Shishido , Maki Tanaka , Atsushi Miyamoto , Akira Hamamatsu , Manabu Yano
发明人： Chie Shishido , Maki Tanaka , Atsushi Miyamoto , Akira Hamamatsu , Manabu Yano
IPC分类号： G01B21/04
CPC分类号： G01B21/04 , G01B15/04 , H01L22/12
摘要： A model based measurement method is capable of estimating a cross-sectional shape by matching various pre-created cross-sectional shapes with a library of SEM signal waveforms. The present invention provides a function for determining whether or not it is appropriate to create a model of a cross-sectional shape or a function for verifying the accuracy of estimation results to a conventional model based measurement method, wherein a solution space (expected solution space) is obtained by matching library waveforms and is displayed before measuring the real pattern by means of model based measurement. Moreover, after the real pattern is measured by means of model based measurement, the solution space (real solution space) is obtained by matching the real waveforms with the library waveforms and is displayed.
摘要翻译：基于模型的测量方法能够通过将各种预先创建的横截面形状与SEM信号波形的库进行匹配来估计横截面形状。本发明提供一种功能，用于确定是否适于创建横截面形状的模型或用于验证估计结果的准确性的功能，以用于基于常规的基于模型的测量方法，其中，解空间（预期解空间）通过匹配库波形获得，并且在通过基于模型的测量测量实际图案之前显示。此外，在通过基于模型的测量来测量实际模式之后，通过将实际波形与库波形相匹配来获得解空间（实解空间），并显示。

2. 发明授权

US5164693A Remotely controllable circuit breaker with improved arc drive structure 失效
标题翻译：具有改进的电弧驱动结构的远程可控电路断路器
公开(公告)号：US5164693A
公开(公告)日：1992-11-17
申请号：US295312
申请日：1989-01-09
申请人： Youichi Yokoyama , Hideya Kondo , Youichi Kunimoto , Manabu Yano
发明人： Youichi Yokoyama , Hideya Kondo , Youichi Kunimoto , Manabu Yano
IPC分类号： H01H71/66 , H01H9/46 , H01H51/22 , H01H71/24 , H01H71/52 , H01H73/02 , H01H73/18 , H01H73/50 , H01H89/10
CPC分类号： H01H89/10 , H01H9/46 , H01H2089/065 , H01H51/2209 , H01H71/2409 , H01H71/2454 , H01H71/2463 , H01H71/52 , H01H73/18
摘要： A remotely controllable circuit breaker has an improved scheme for effecting rapid arc extinction as well as protecting the breaker contact from the resulting arc current. The breaker includes first and second movable contacts 11 and 12 which are held respectively on parallel extending first and second contact arms 31 and 32 and are driven individually by a switching mechanism 20 including a manual handle 22 with a contact trip capability and by a remotely controllable switch 60. An arc runner 115 is connected to be in the same electrical potential as the second contact arm 32 and extends in the contact separating direction for receiving the one end of the arc developed between the rapidly separating contacts 11 and 12 and guiding the arc toward an arc extinguishing chute 110 as the first contact 11 moves away from the second contact 12. The arc runner 115 is connected at its end opposite to the arc chute 110 to an arc drive member 116 which extends immediately behind the second contact arm 32 in parallel relation thereto. The repulsion force acts to urge the arc toward the arc chute 110 for rapid arc extinction. At this time, the arc current will bypass the second contact arm 32 for protecting it from the overcurrent.

3. 发明申请

US20110260057A1 CHARGED PARTICLE BEAM APPARATUS 有权
标题翻译：充电颗粒光束装置
公开(公告)号：US20110260057A1
公开(公告)日：2011-10-27
申请号：US13124599
申请日：2009-10-22
申请人： Tadashi Otaka , Hiroyuki Ito , Ryoichi Ishii , Manabu Yano , Hajime Kawano
发明人： Tadashi Otaka , Hiroyuki Ito , Ryoichi Ishii , Manabu Yano , Hajime Kawano
IPC分类号： H01J37/26
CPC分类号： H01J37/20 , H01J37/28 , H01J2237/20214 , H01J2237/2811 , H01J2237/2817
摘要： According to a charged particle beam apparatus of this invention, an inspection position on a test sample (wafer coordinate system) is converted to a setting position of an inspection mechanism (stage coordinate system (polar coordinate system)), a rotating arm (102,1012) and a rotating stage (103,1011) being rotated to be moved for the inspection position on the test sample.In this case, a plurality of inspection devices are arranged over a locus that is drawn by the center of the rotating stage according to the rotation of the rotating arm. A function for calculating errors (e.g., center shift of the rotating stage) and compensating for the errors is provided, by which the precision of inspection is improved in a charged particle beam apparatus equipped with a biaxial rotating stage mechanism. With this configuration, a charged particle beam apparatus which is small-sized and capable of easy stage control can be realized.
摘要翻译：根据本发明的带电粒子束装置，将测试样品（晶片坐标系）上的检查位置转换为检查机构（载台坐标系（极坐标系））的设定位置，旋转臂（102， 1012）和旋转台（103,1011）旋转以移动以用于测试样品上的检查位置。在这种情况下，根据旋转臂的旋转，将多个检查装置布置在由旋转台的中心拉伸的轨迹上。提供了一种用于计算误差（例如，旋转台的中心偏移）和补偿误差的功能，通过该功能，在装备有双轴旋转平台机构的带电粒子束装置中提高了检查精度。利用这种结构，可以实现小型化并且能够容易地进行阶段控制的带电粒子束装置。

4. 发明申请

US20100245346A1 Image Receiving Apparatus and Memory Medium 审中-公开
标题翻译：图像接收装置和存储介质
公开(公告)号：US20100245346A1
公开(公告)日：2010-09-30
申请号：US12710221
申请日：2010-02-22
申请人： Mikihiro Tanaka , Manabu Yano , Kazuharu Tanaike
发明人： Mikihiro Tanaka , Manabu Yano , Kazuharu Tanaike
IPC分类号： G06T15/00
CPC分类号： H04N9/7921 , H04M1/0266 , H04N5/76 , H04N5/907 , H04N13/189 , H04N13/31 , H04N13/359 , H04N13/398 , H04N21/41407 , H04N21/4325
摘要： This invention improves the convenience of viewing three-dimensional image displays. A mobile communications handset can accomplish three-dimensional image displays using image data received by a communications unit and a broadcast reception unit through a display unit provided with a parallax barrier panel. A control unit automatically performs actions to record the image data as an auxiliary recording while the three-dimensional image display is being performed when the three-dimensional image display is performed using the received image data. That is to say, recording of image data relating to the three-dimensional image display is performed automatically in preparation for cases where the display cannot be viewed three-dimensionally due to viewing conditions.
摘要翻译：本发明提供了观看三维图像显示器的便利性。移动通信手机可以通过具有视差屏障面板的显示单元，利用由通信单元和广播接收单元接收的图像数据来完成三维图像显示。当使用接收的图像数据执行三维图像显示时，控制单元自动执行将图像数据记录为辅助记录，同时执行三维图像显示。也就是说，对于由于观看条件三维地不能看到显示的情况，自动执行与三维图像显示有关的图像数据的记录。

5. 发明授权

US08487253B2 Scanning electron microscope 有权
标题翻译：扫描电子显微镜
公开(公告)号：US08487253B2
公开(公告)日：2013-07-16
申请号：US13300117
申请日：2011-11-18
申请人： Minoru Yamazaki , Akira Ikegami , Hideyuki Kazumi , Manabu Yano , Kazunari Asao , Takeshi Mizuno , Yuki Ojima
发明人： Minoru Yamazaki , Akira Ikegami , Hideyuki Kazumi , Manabu Yano , Kazunari Asao , Takeshi Mizuno , Yuki Ojima
IPC分类号： H01J37/29 , G21K5/04
CPC分类号： H01J37/28 , H01J37/244 , H01J37/265 , H01J37/29 , H01J37/3045 , H01J2237/04735 , H01J2237/04756 , H01J2237/1501 , H01J2237/24578 , H01J2237/24592
摘要： An object of the present invention is to provide a scanning electron microscope suitable for monitoring apparatus conditions of the microscope itself, irrespective of the presence of charge-up, specimen inclination, and the like. In order to achieve the object, proposed is a scanning electron microscope including a function to monitor the apparatus conditions on the basis of information obtained with an electron beam reflected before reaching a specimen. Specifically, for example, while applying a negative voltage to the specimen to reflect the electron beam before the electron beam reaches the specimen, and simultaneously supplying a predetermined signal to a deflector for alignment, the scanning electron microscope monitors changes of the detected positions of the reflected electrons of the electron beam. If the above-mentioned predetermined signal is under the condition where an alignment is properly performed, the changes of the detected positions of the electrons reflect deviation of an axis.
摘要翻译：本发明的目的是提供一种适用于监视显微镜本身的装置条件的扫描电子显微镜，而不管充电的存在，试样的倾斜度等。为了实现该目的，提出了一种扫描电子显微镜，其包括基于在到达样品之前用电子束反射获得的信息来监测设备条件的功能。具体而言，例如，在向电子束到达检体的同时向试样施加负电压以反射电子束的同时，向偏转器供给预定信号进行取向，扫描电子显微镜监视检测到的位置的变化，电子束的反射电子。如果上述预定信号处于正确执行对准的状态，则检测到的电子位置的变化反映了轴的偏差。

6. 发明申请

US20120119087A1 CHARGED-PARTICLE MICROSCOPE 审中-公开
标题翻译：充电颗粒显微镜
公开(公告)号：US20120119087A1
公开(公告)日：2012-05-17
申请号：US13386717
申请日：2010-07-13
申请人： Noritsugu Takahashi , Muneyuki Fukuda , Manabu Yano , Hirohiko Kitsuki , Kazunari Asao , Tomoyasu Shojo
发明人： Noritsugu Takahashi , Muneyuki Fukuda , Manabu Yano , Hirohiko Kitsuki , Kazunari Asao , Tomoyasu Shojo
IPC分类号： H01J37/28
CPC分类号： H01J37/28 , H01J37/10 , H01J37/145 , H01J37/21 , H01J2237/2817
摘要： A charged-particle-beam device is characterized in having a control value for an aligner coil (29) being determined by: a coil current and an electrode applied-voltage at a control value for objectives (30, 31), which is an electromagnetic-field superposition lens; a control value for image-shift coils (27, 28); and the acceleration voltage of the charged-particle-beam. By doing this, it has become possible to avoid image disturbances that occur on images to be displayed at boundaries between charged areas and non-charged areas, and provide a charged-particle-beam device that obtains clear images without any unevenness in brightness.
摘要翻译：带电粒子束装置的特征在于具有对准线圈（29）的控制值，通过以下方式确定：线圈电流和用于物镜（30,31）的控制值的电极施加电压，其为电磁场叠加透镜; 图像转换线圈（27,28）的控制值; 和带电粒子束的加速电压。通过这样做，可以避免在充电区域和非充电区域之间的边界处显示图像上出现的图像干扰，并且提供获得清晰图像而没有任何亮度不均匀的带电粒子束装置。

7. 发明申请

US20090224170A1 SCANNING ELECTRON MICROSCOPE 有权
标题翻译：扫描电子显微镜
公开(公告)号：US20090224170A1
公开(公告)日：2009-09-10
申请号：US12392563
申请日：2009-02-25
申请人： Minoru YAMAZAKI , Akira Ikegami , Hideyuki Kazumi , Manabu Yano , Kazunari Asao , Takeshi Mizuno , Yuki Ojima
发明人： Minoru YAMAZAKI , Akira Ikegami , Hideyuki Kazumi , Manabu Yano , Kazunari Asao , Takeshi Mizuno , Yuki Ojima
IPC分类号： H01J3/14 , G01N13/10 , G01N23/00
CPC分类号： H01J37/28 , H01J37/244 , H01J37/265 , H01J37/29 , H01J37/3045 , H01J2237/04735 , H01J2237/04756 , H01J2237/1501 , H01J2237/24578 , H01J2237/24592
摘要： An object of the present invention is to provide a scanning electron microscope suitable for monitoring apparatus conditions of the microscope itself, irrespective of the presence of charge-up, specimen inclination, and the like. In order to achieve the object, proposed is a scanning electron microscope including a function to monitor the apparatus conditions on the basis of information obtained with an electron beam reflected before reaching a specimen. Specifically, for example, while applying a negative voltage to the specimen to reflect the electron beam before the electron beam reaches the specimen, and simultaneously supplying a predetermined signal to a deflector for alignment, the scanning electron microscope monitors changes of the detected positions of the reflected electrons of the electron beam. If the above-mentioned predetermined signal is under the condition where an alignment is properly performed, the changes of the detected positions of the electrons reflect deviation of an axis.
摘要翻译：本发明的目的是提供一种适用于监视显微镜本身的装置条件的扫描电子显微镜，而不管充电的存在，试样的倾斜度等。为了实现该目的，提出了一种扫描电子显微镜，其包括基于在到达样品之前用电子束反射获得的信息来监测设备条件的功能。具体而言，例如，在向电子束到达检体的同时向试样施加负电压以反射电子束的同时，向偏转器供给预定信号进行取向，扫描电子显微镜监视检测到的位置的变化，电子束的反射电子。如果上述预定信号处于正确执行对准的状态，则检测到的电子位置的变化反映了轴的偏差。

8. 发明授权

US5389905A Damper, electromagnet assembly employing the damper, and relay employing the electromagnet assemblies 失效
标题翻译：阻尼器，采用阻尼器的电磁铁组件，以及采用电磁铁组件的继电器
公开(公告)号：US5389905A
公开(公告)日：1995-02-14
申请号：US046984
申请日：1993-04-15
申请人： Kiwamu Shibata , Yoichi Yokoyama , Manabu Yano , Nobuhiro Kitamura , Naoki Kanemoto , Tetsuyasu Kawamoto
发明人： Kiwamu Shibata , Yoichi Yokoyama , Manabu Yano , Nobuhiro Kitamura , Naoki Kanemoto , Tetsuyasu Kawamoto
IPC分类号： F16F9/53 , F16F15/023 , H01F7/08 , H01H50/30 , H01H51/22
CPC分类号： H01F7/088 , F16F15/023 , F16F9/535 , H01H50/305
摘要： A damper is provided by a plurality of chambers defined between stacked thin sheet members and containing a fluid for flowing therein through a communicating section, the chambers being made to be of a small height in the direction perpendicular to the plane of the sheet members and to form a buffer section with at least one of the chambers. With such damper employed in electromagnet assemblies and eventually relays including the assemblies, they can be sufficiently minimized in size, and their manufacture can be also made extremely easier.
摘要翻译：阻尼器由限定在堆叠的薄片构件之间并且包含用于在其中通过连通部分流动的流体的多个室提供，所述腔室在垂直于片材构件的平面的方向上具有小的高度，并且形成具有至少一个室的缓冲部分。由于在电磁体组件中使用这种阻尼器并且最终包括组件的继电器，它们的尺寸可以被充分地最小化，并且它们的制造也可以变得非常容易。

9. 发明授权

US4897625A Remotely controllable circuit breaker 失效
公开(公告)号：US4897625A
公开(公告)日：1990-01-30
申请号：US295315
申请日：1989-01-09
申请人： Youichi Yokoyama , Hideya Kondo , Youichi Kunimoto , Manabu Yano
发明人： Youichi Yokoyama , Hideya Kondo , Youichi Kunimoto , Manabu Yano
IPC分类号： H01H71/66 , H01H51/22 , H01H73/50 , H01H89/10
CPC分类号： H01H89/10 , H01H51/2209
摘要： A remotely controllable circuit breaker with an improved space saving structure comprises first and second movable contacts 11 and 12 which are held respectively on first and second contact arms 31 and 32 and are driven individually by a switching mechanism 20 including a manual handle 22 with a contact tripping capability and by a remote control signal responsive electromagnet 60. An L-shaped actuator 80 with a horizontal member 81 and a vertical member 83 is provided to operatively connect the second contact arm 32 to an axially movable core 63, the output member of the electromagnet 60. The actuator 80 is pivoted at its connection between the horizontal and vertical members 81 and 83 and carries the second contact arm 32 on its vertical member 83 for pivotal movement of the second contact arm 32 between operative and inoperative positions respectively enabling and disabling the contact closing. The electromagnet 60 is arranged in side-by-side relation to the switching mechanism 40 with the first and second contact arms 31 and 32 interposed therebetween. The actuator 80 is located in proximity to the electromagnet 60 with the vertical member 83 extending over the lengthwise dimension or the axial direction of the core 63 and with the horizontal member extending over the width dimension of the electromagnet 60 to thereby accommodate the substantial portion of the actuator 80 within the lengthwise and widthwise dimensions of the adjacently disposed electromagnet 60.

10. 发明授权

US08334520B2 Charged particle beam apparatus 有权
标题翻译：带电粒子束装置
公开(公告)号：US08334520B2
公开(公告)日：2012-12-18
申请号：US13124599
申请日：2009-10-22
申请人： Tadashi Otaka , Hiroyuki Ito , Ryoichi Ishii , Manabu Yano , Hajime Kawano
发明人： Tadashi Otaka , Hiroyuki Ito , Ryoichi Ishii , Manabu Yano , Hajime Kawano
IPC分类号： H01J37/26
CPC分类号： H01J37/20 , H01J37/28 , H01J2237/20214 , H01J2237/2811 , H01J2237/2817
摘要： An exemplary a charged particle beam apparatus converts an inspection position on a test sample (wafer coordinate system) to a setting position of an inspection mechanism (stage coordinate system (polar coordinate system)), a rotating arm and a rotating stage being rotated to be moved for the inspection position on the test sample. In this case, inspection devices are arranged over a locus that is drawn by the center of the rotating stage according to the rotation of the rotating arm. A function for calculating errors (e.g., center shift of the rotating stage) and compensating for the errors is provided, by which the precision of inspection is improved in a charged particle beam apparatus equipped with a biaxial rotating stage mechanism.
摘要翻译：一种带电粒子束装置的示例将测试样品（晶片坐标系）上的检查位置转换成检查机构（载台坐标系（极坐标系））的设置位置，旋转臂和旋转台旋转为移动到测试样品上的检查位置。在这种情况下，检查装置设置在由旋转台的旋转中心旋转的轨迹上。提供了一种用于计算误差（例如，旋转台的中心偏移）和补偿误差的功能，通过该功能，在装备有双轴旋转平台机构的带电粒子束装置中提高了检查精度。

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