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1. 发明授权

US5140272A Method of semiconductor surface measurment and an apparatus for realizing the same 失效
标题翻译：半导体表面测量方法和实现其的设备
公开(公告)号：US5140272A
公开(公告)日：1992-08-18
申请号：US248497
申请日：1988-09-23
申请人： Shigeru Nishimatsu , Tatsumi Mizutani , Ryo Haruta , Kanji Tsujii , Chusuke Munakata , Shigeyuki Hosoki
发明人： Shigeru Nishimatsu , Tatsumi Mizutani , Ryo Haruta , Kanji Tsujii , Chusuke Munakata , Shigeyuki Hosoki
IPC分类号： G01R31/26 , G01N27/00 , G01N27/22 , G01N27/24 , G01R27/26 , G01R29/12 , G01R29/14 , G01R29/24 , H01L21/66
CPC分类号： G01R29/24 , G01R27/2605
摘要： A method of semiconductor surface measurement for measuring electrical characteristics of a surface of a semiconductor body is disclosed, by which an electrode, whose surface, which is opposite to the surface of a semiconductor substrate, is flat and the gap between the electrode and the surface is smaller than 0.5 .mu.m.
摘要翻译：公开了一种半导体表面测量方法，用于测量半导体本体的表面的电特性，通过该方法，其表面与半导体衬底的表面相反的表面是平坦的，并且电极和表面之间的间隙小于0.5亩。

2. 发明授权

US4883959A Scanning surface microscope using a micro-balance device for holding a probe-tip 失效
标题翻译：使用微量平衡装置扫描表面显微镜来保持探针尖
公开(公告)号：US4883959A
公开(公告)日：1989-11-28
申请号：US200979
申请日：1988-06-01
申请人： Shigeyuki Hosoki , Sumio Hosaka , Keiji Takata
发明人： Shigeyuki Hosoki , Sumio Hosaka , Keiji Takata
IPC分类号： G01B7/34 , G01Q10/00 , G01Q20/00 , G01Q30/02 , G01Q60/24 , G01Q60/50 , G01Q70/02 , H01J37/28
CPC分类号： G01Q60/38 , B82Y35/00 , G01Q10/06 , Y10S977/873
摘要： A scanning surface microscope is disclosed which includes a unit for moving a sample, and a micro-balance whose balance bar is provided with a probe-tip and an electrode at both ends thereof, to convert the irregularities of a sample surface facing the probe-tip into the displacement of the balance bar by utilizing a force generated between the probe-tip and the sample surface. The movement of the electrode indicative of the displacement of the balance bar is detected to obtain the topography of the sample surface.
摘要翻译：公开了一种扫描表面显微镜，其包括用于移动样品的单元和其平衡杆在其两端设置有探针尖端和电极的微量天平，以转换面向探针头的样品表面的不规则性，通过利用在探针尖端和样品表面之间产生的力而引导到平衡杆的位移。检测指示平衡杆的位移的电极的运动，以获得样品表面的形貌。

3. 发明授权

US4379250A Field emission cathode and method of fabricating the same 失效
标题翻译：场发射阴极及其制造方法
公开(公告)号：US4379250A
公开(公告)日：1983-04-05
申请号：US198176
申请日：1980-10-17
申请人： Shigeyuki Hosoki , Shigehiko Yamamoto , Hideo Todokoro , Susumu Kawase , Yasuharu Hirai
发明人： Shigeyuki Hosoki , Shigehiko Yamamoto , Hideo Todokoro , Susumu Kawase , Yasuharu Hirai
IPC分类号： H01J1/304 , H01J1/16
CPC分类号： H01J1/304 , H01J37/073 , H01J2237/06316
摘要： A field emission cathode of the present invention is characterized by the possession of a special layer which is adsorbed onto the surfaces of a tip that is joined to the top of a hairpin-shaped filament.This layer is formed by adsorbing a selected metal via oxygen to a thickness which does not exceed the thickness of the monolayer of atoms.The metal will be selected from chromium, aluminum, cerium, magnesium, titanium, silicon, zirconium or hafnium.The field emission cathode features that the electrons are emitted in a concentrated manner from a particular crystal plane among the crystal planes of the tip.Therefore, it is possible to obtain a field emission cathode having very small emission angle of electrons.
摘要翻译：本发明的场致发射阴极的特征在于具有吸附在与发夹状丝的顶部接合的尖端的表面上的特殊层。该层通过将氧选择的金属吸附至不超过原子单层厚度的厚度而形成。金属将选自铬，铝，铈，镁，钛，硅，锆或铪。场发射阴极的特征在于电子以尖端的晶面中的特定晶面以集中的方式发射。因此，可以获得具有非常小的电子发射角的场致发射阴极。

4. 发明授权

US5698798A Method and apparatus for dynamic observation of specimen 失效
标题翻译：试样动态观察方法及装置
公开(公告)号：US5698798A
公开(公告)日：1997-12-16
申请号：US411316
申请日：1995-03-28
申请人： Makiko Kohno , Shigeyuki Hosoki , Tsuyoshi Hasegawa , Yusuke Yajima , Toshio Katsuyama
发明人： Makiko Kohno , Shigeyuki Hosoki , Tsuyoshi Hasegawa , Yusuke Yajima , Toshio Katsuyama
IPC分类号： G01D21/00 , G01N23/00 , G01N25/00 , G01N33/00 , G01Q80/00
CPC分类号： G01Q60/12 , B82Y35/00 , Y10S977/852
摘要： In a measuring method and a measuring apparatus which are suited for observing a dynamic physical phenomenon particularly in a microdevice, a signal for generating a physical phenomenon in a specimen is inputted to the specimen, and a signal which is caused by this dynamic physical phenomenon is detected by a probe which is close to or in contact with the specimen surface in correspondence with a signal input to the specimen on the basis of the specific time. The measuring apparatus has a scanning probe microscope with a probe (tip) which is close to or in contact with the specimen surface, a pulse voltage application control unit for applying respective pulse voltages to the specimen and probe, and a signal measuring unit for measuring a signal from the specimen detected by the probe. The measuring apparatus causes a dynamic physical phenomenon in the specimen by applying the pulse voltage to the specimen, applies a bias voltage between the probe and specimen by applying the pulse voltage to the probe, and detects the signal caused by the dynamic physical phenomenon in the specimen. Pulse voltage application to the probe is executed by the pulse voltage application control unit in correspondence with pulse voltage application to the specimen on the basis of the specific time. A dynamic physical phenomenon in a microarea of a specimen which is caused by the particle property or wave property of electrons can thus be observed.
摘要翻译：在适于观察动态物理现象的测量方法和测量装置中，特别是在微型装置中，用于产生样本中的物理现象的信号被输入到样本，并且由该动态物理现象引起的信号是通过与基于特定时间输入到样本的信号相对应的与探针接近或接触的探针来检测。测量装置具有扫描探针显微镜，其具有与试样表面接近或接触的探针（尖端），用于向样本和探针施加相应脉冲电压的脉冲电压施加控制单元，以及用于测量由探针检测到的样本的信号。测量装置通过向样本施加脉冲电压来引起样品中的动态物理现象，通过向探针施加脉冲电压在探针和样品之间施加偏置电压，并且检测由于动态物理现象引起的信号标本。脉冲电压施加到探针由脉冲电压施加控制单元根据具体时间对标本施加脉冲电压进行。因此可以观察到由电子的粒子特性或波特性引起的样品的微区域中的动态物理现象。

5. 发明授权

US5393983A Magnetic electron lens and elctron microscope using the same 失效
标题翻译：磁性电子透镜和电子显微镜使用相同
公开(公告)号：US5393983A
公开(公告)日：1995-02-28
申请号：US50044
申请日：1993-04-28
申请人： Shigeyuki Hosoki
发明人： Shigeyuki Hosoki
IPC分类号： G01Q30/10 , G01Q30/18 , H01J37/141
CPC分类号： H01J37/1416 , H01J2237/26
摘要： A magnetic electron lens for use in charged particle beam-applied apparatuses such as electron microscopes, the lens having concave lens characteristics in a geometric-optical sense. The magnetic concave lens of the invention comprises a first and a second magnetic field generating coil arranged in the propagating direction of the charged particle beam, and a first and a second magnetic shielding plate made of a superconductor each and furnished so as to enclose the first and the second magnetic field generating coils. The first magnetic shielding plate shields the magnetic field generated above the first magnetic field generating coil, and the second magnetic shielding plate shields the magnetic field generated under the second magnetic field generating coil. This setup constitutes a magnetic electron lens that is concave in terms of geometric-optical lens characteristics.
摘要翻译： PCT No.PCT / JP92 / 01076 Sec。 371日期：1993年4月28日 102（e）日期1993年4月28日PCT提交1992年8月26日PCT公布。出版物WO93 / 05529 日期：1993年3月18日。一种用于带电粒子束施加装置如电子显微镜的磁性电子透镜，具有几何光学意义上的凹透镜特性的透镜。本发明的磁凹透镜包括沿着带电粒子束的传播方向布置的第一和第二磁场产生线圈，以及由超导体制成的第一和第二磁屏蔽板，并且被设置为包围第一和第二磁场产生线圈。第一磁屏蔽板屏蔽在第一磁场产生线圈之上产生的磁场，并且第二磁屏蔽板屏蔽在第二磁场产生线圈下产生的磁场。该装置构成了几何光学透镜特性为凹面的磁性电子透镜。

6. 发明授权

US5036196A Surface microscope 失效
标题翻译：表面显微镜
公开(公告)号：US5036196A
公开(公告)日：1991-07-30
申请号：US533341
申请日：1990-06-05
申请人： Sumio Hosaka , Shigeyuki Hosoki , Tsuyoshi Hasegawa
发明人： Sumio Hosaka , Shigeyuki Hosoki , Tsuyoshi Hasegawa
IPC分类号： G01B7/34 , G01B7/00 , G01D21/02 , G01N27/00 , G01N27/02 , G01N37/00 , G01Q30/04 , G01Q60/04 , G01Q60/10 , G01Q60/24 , G01R31/302 , H01J37/00 , H01J37/28
CPC分类号： G01Q30/04 , B82Y35/00 , G01Q60/12 , Y10S977/852 , Y10S977/861
摘要： A surface microscope includes a device which brings a probe close to a surface of a sample to scan it therewith for producing a tunnel current between the probe and the sample to measure the superficial shape of the sample by detecting the tunnel current. A device for varying a gap between the probe and the sample, a system for detecting a variable component of the tunnel current varying, accompanied by variations in the gap by the device for varying same, a divider for calculating the ratio of the variable component of the tunnel current to the tunnel current, and a calculator for calculating tunnel barrier information, based on the quotient obtained by the divider, are combined with a display for displaying the measured superficial shape of the sample and the tunnel barrier information thus calculated.

7. 发明授权

US4193013A Cathode for an electron source and a method of producing the same 失效
标题翻译：电子源用阴极及其制造方法
公开(公告)号：US4193013A
公开(公告)日：1980-03-11
申请号：US897406
申请日：1978-04-18
申请人： Masaaki Futamoto , Ushio Kawabe , Shigeyuki Hosoki , Tsutomu Komoda , Shigehiko Yamamoto
发明人： Masaaki Futamoto , Ushio Kawabe , Shigeyuki Hosoki , Tsutomu Komoda , Shigehiko Yamamoto
IPC分类号： B44F1/12 , H01J1/15 , H01J1/304 , H01J9/02 , H01J9/04 , H01J9/18
CPC分类号： H01J1/15 , H01J1/304
摘要： A cathode for an electron source according to this invention comprises an emitter tip made of an electron emissive material, a filament for holding the emitter tip, and a binder for binding the emitter tip and the filament, the filament and the binder being made of glassy carbon. The binder can have a carbide or boride powder incorporated therein. The cathode according to this invention can be produced by using a thermosetting resin of predetermined shape as the starting material of the filament, fixing the emitter tip to a predetermined position of the thermosetting resin with the adhesive agent made of the raw thermosetting resin, and heating the resultant assembly in a non-oxidizing atmosphere to carbonize the resinous portions. This cathode is structurally very simple. Moreover, the adhesion between the filament and the emitter tip is excellent, and the emitter tip can be heated to high temperatures above 2,000.degree. C. by causing current to flow through the cathode.
摘要翻译：根据本发明的用于电子源的阴极包括由电子发射材料制成的发射极尖端，用于保持发射极尖端的灯丝和用于结合发射极尖端和灯丝的粘合剂，灯丝和粘合剂由玻璃状碳。粘合剂可以具有并入其中的碳化物或硼化物粉末。根据本发明的阴极可以通过使用预定形状的热固性树脂作为丝的起始材料，使用由原始热固性树脂制成的粘合剂将发射极尖端固定到热固性树脂的预定位置，并加热所得组合物在非氧化气氛中以使树脂部分碳化。该阴极在结构上非常简单。此外，灯丝和发射极尖端之间的粘附性优异，并且通过使电流流过阴极，可以将发射极尖端加热到高于2000℃的高温。

8. 发明授权

US5585722A Apparatus for measuring physical properties of micro area 失效
标题翻译：用于测量微区物理性能的装置
公开(公告)号：US5585722A
公开(公告)日：1996-12-17
申请号：US317737
申请日：1994-10-04
申请人： Shigeyuki Hosoki , Tsuyoshi Hasegawa , Makiko Kohno
发明人： Shigeyuki Hosoki , Tsuyoshi Hasegawa , Makiko Kohno
IPC分类号： G01B7/34 , G01N27/00 , G01Q30/10 , G01Q30/12 , G01Q30/16 , G01R33/56 , G01R33/20
CPC分类号： G01Q60/30 , B82Y35/00 , G01Q60/04 , G01Q60/08 , G01Q60/14 , G01R33/56 , Y10S977/838 , Y10S977/849 , Y10S977/863 , Y10S977/865 , Y10S977/96
摘要： An apparatus for measuring physical properties of micro area which has an object to measure physical properties from a micro area on an atomic scale on the surface of a test sample such as electron spin, nuclear magnetic moment, and nuclear quadrupole moment in high sensitivity, allows the probe 2 of the atomic force microscope to approach the surface of the test sample 1, applies a magnetic field to the test sample 1 by the magnetic field generation coil 27 and the magnetic paths 22 to 26 and furthermore a high frequency electromagnetic field to the test sample 1 by the coils 16 and 17 respectively, and detects a signal from atoms existing on the surface of the test sample 1 which are resonant with the high frequency electromagnetic field by the probe 2.
摘要翻译：用于测量微区物理性质的装置，其具有以高灵敏度测量诸如电子自旋，核磁矩和核四极矩的测试样品表面上的原子尺度上的微区域的物理特性，允许原子力显微镜的探针2接近测试样品1的表面，通过磁场产生线圈27和磁路22至26向测试样品1施加磁场，此外还将高频电磁场施加到分别由线圈16和17测试样品1，并且通过探针2检测来自存在于测试样品1的表面上的原子与高频电磁场共振的信号。

9. 发明授权

US5256876A Scanning tunnel microscope equipped with scanning electron microscope 失效
标题翻译：扫描隧道显微镜配备扫描电子显微镜
公开(公告)号：US5256876A
公开(公告)日：1993-10-26
申请号：US696787
申请日：1991-05-07
申请人： Eiichi Hazaki , Osamu Yamada , Yasushi Nakaizumi , Shigeyuki Hosoki , Sumio Hosaka , Akira Hashimoto
发明人： Eiichi Hazaki , Osamu Yamada , Yasushi Nakaizumi , Shigeyuki Hosoki , Sumio Hosaka , Akira Hashimoto
IPC分类号： G01B7/34 , G01N27/00 , G01N37/00 , G01Q10/02 , G01Q10/04 , G01Q30/02 , G01Q60/10 , H01J37/20 , H01J37/28
CPC分类号： G01Q60/16 , B82Y35/00 , G01Q30/02 , Y10S977/861
摘要： A scanning tunnel microscope comprising: a SEM stage provided in a specimen chamber of a SEM and having a mechanism for moving in a two dimensional manner along a surface perpendicular to an electron beam; a specimen stage provided on the SEM stage and provided with a mechanism for holding a specimen so that a surface of the specimen makes an angle of 45.degree. with the electron beam and for moving the specimen in a two dimensional manner in directions of the specimen surface; an STM scanning mechanism provided on the SEM stage and provided with a probe held perpendicularly to the specimen surface, a coarse movement mechanism for making the probe approach to a position at a desired distance from the specimen surface, and a probe fine movement mechanism for making the probe scan along the specimen surface; and a display unit for displaying an image by the SEM together with an image of the probe on the basis of signal obtained from a secondary electron detector provided in a specimen chamber and for displaying an image by the STM on the basis of signals from the probe fine movement mechanism.

10. 发明授权

US5229607A Combination apparatus having a scanning electron microscope therein 失效
标题翻译：其中具有扫描电子显微镜的组合装置
公开(公告)号：US5229607A
公开(公告)日：1993-07-20
申请号：US714018
申请日：1991-06-12
申请人： Hironobu Matsui , Mikio Ichihashi , Sumio Hosaka , Yoshinori Nakayama , Satoshi Haraichi , Fumikazu Itoh , Akira Shimase , Yoshimasa Kondo , Shigeyuki Hosoki , Masakazu Ichikawa , Yukio Honda , Tsuyoshi Hasegawa , Shiji Okazaki , Shunji Maeda , Hitoshi Kubota
发明人： Hironobu Matsui , Mikio Ichihashi , Sumio Hosaka , Yoshinori Nakayama , Satoshi Haraichi , Fumikazu Itoh , Akira Shimase , Yoshimasa Kondo , Shigeyuki Hosoki , Masakazu Ichikawa , Yukio Honda , Tsuyoshi Hasegawa , Shiji Okazaki , Shunji Maeda , Hitoshi Kubota
IPC分类号： G01Q10/04 , G01Q30/02 , G01Q30/12 , G01Q30/18 , G01Q60/00 , H01J37/252 , H01J37/28
CPC分类号： H01J37/28 , B82Y35/00 , G01Q30/02 , H01J37/252 , H01J37/3056
摘要： A combination apparatus having a scanning electron microscope includes equipment for performing any of observing, measuring and processing operations on a sample placed in a sample chamber. The sample chamber contains a focused electron beam irradiating unit apart from the components for performing the observing, measuring and processing operations. The focused electron beam irradiating unit irradiates a finely focused electron beam onto the surface of the sample for electron microscopic observation in scanning fashion. This setup allows the observing, measuring or processing equipment to combine with the scanning electron microscope without appreciably enlarging the construction of the combination apparatus.
摘要翻译：具有扫描电子显微镜的组合装置包括用于对放置在样品室中的样品进行观察，测量和处理操作的任何设备。样品室包含聚焦电子束照射单元，与用于进行观察，测量和处理操作的部件分开。聚焦电子束照射单元以扫描方式将精细聚焦的电子束照射到用于电子显微镜观察的样品表面上。该设置允许观察，测量或处理设备与扫描电子显微镜组合，而不会明显地扩大组合装置的结构。

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