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1. 发明申请

US20080239257A1 Stage Apparatus and Exposure Apparatus 审中-公开
标题翻译：舞台装置和曝光装置
公开(公告)号：US20080239257A1
公开(公告)日：2008-10-02
申请号：US11575044
申请日：2005-09-08
申请人： Shigeru Hagiwara , Naohiko Iwata , Masaya Iwasaki , Tadashi Hoshino , Chizuko Motoyama , Yuzo Kato
发明人： Shigeru Hagiwara , Naohiko Iwata , Masaya Iwasaki , Tadashi Hoshino , Chizuko Motoyama , Yuzo Kato
IPC分类号： G03B27/52
CPC分类号： G03F7/70775 , G03F7/70858
摘要： A stage apparatus which can highly accurately measure the position of a stage, while achieving a high throughput, and an exposure apparatus provided with the stage apparatus. A stage apparatus is provided with: air-conditioning apparatuses (28X, 28Y) that supply temperature controlled air (down flow), which comes from a +Z direction to a −Z direction, to a light path of a laser beam radiated from a laser interferometer onto moving mirrors (26X, 26Y) provided on a wafer stage (WST); and an air conditioning apparatus (29) that supplies temperature controlled air (lower layer side flow), which comes from a −Y direction to a +Y direction, to a space lower than the light path of the laser beam. Furthermore, an air conditioning apparatus (34), which supplied temperature controlled air to a light path of an autofocusing sensor composed of an irradiation optical system (33a) and a light receiving optical system (33b), is provided.
摘要翻译：能够高精度地测量台的位置，同时实现高产量的舞台装置和设置有舞台装置的曝光装置。舞台装置具有：将从+ Z方向到-Z方向的温度受控空气（下流）供给到辐射的激光束的光路的空调装置（28X，28Y）从激光干涉仪到设置在晶片台（WST）上的移动反射镜（26X，26Y）上; 以及将温度控制空气（下层侧流）从-Y方向向+ Y方向供给到比激光的光路低的空间的空调装置（29）。此外，提供了一种将温度控制的空气供给到由照射光学系统（33a）和光接收光学系统（33b）组成的自动聚焦传感器的光路的空调装置（34）。

2. 发明授权

US4331616A Adjusting screw of a carburetor 失效
标题翻译：调节化油器的螺丝
公开(公告)号：US4331616A
公开(公告)日：1982-05-25
申请号：US217123
申请日：1980-12-17
申请人： Yuzo Kato , Mikitoshi Kako , Kunio Kadowaki
发明人： Yuzo Kato , Mikitoshi Kako , Kunio Kadowaki
IPC分类号： F02M19/01 , F02M3/10 , F02M7/22 , F16B41/00
CPC分类号： F02M7/22 , F02M3/10 , F02M2003/105 , Y10S261/84 , Y10T137/7062 , Y10T137/71
摘要： An adjusting screw of a carburetor comprising a threaded portion, an enlarged head portion and a reduced diameter portion located therebetween. A thin hollow cylindrical wall is formed on a link lever of the carburetor. After the adjusting screw is screwed into the threaded hole of the hollow cylindrical wall, the reduced diameter portion of the adjusting screw is cut. Then, the top portion of the hollow cylindrical wall is bent inward for irremovably fixing the adjusting screw onto the link lever.
摘要翻译：化油器的调节螺钉包括螺纹部分，扩大的头部和位于其间的直径减小的部分。在化油器的连杆上形成一个薄的中空圆柱形壁。调整螺丝拧入中空圆筒壁的螺纹孔后，调节螺丝的直径减小部分被切断。然后，中空圆柱形壁的顶部向内弯曲，以将调节螺钉可拆卸地固定在连杆上。

3. 发明授权

US4275306A Alignment apparatus 失效
标题翻译：校准装置
公开(公告)号：US4275306A
公开(公告)日：1981-06-23
申请号：US16165
申请日：1979-02-23
申请人： Yuzo Kato , Yasuo Ogino , Ryozo Hiraga , Hideki Yoshinari , Masao Tozuka , Ichiro Kano
发明人： Yuzo Kato , Yasuo Ogino , Ryozo Hiraga , Hideki Yoshinari , Masao Tozuka , Ichiro Kano
IPC分类号： H01L21/30 , G03F9/00 , H01L21/027 , H01L21/67 , H01L21/68 , G01N21/86
CPC分类号： G03F9/70 , H01L21/681
摘要： An alignment apparatus in which alignment marks on a mask and a wafer for producing a semiconductor circuit element are photoelectrically read and the positional deviation between the two alignment marks is detected and one of the mask and the wafer is parallel-moved in accordance with the detected amount to align the mask and wafer into a predetermined positional relation. This apparatus has the function of correcting any interval error which may be present between the alignment marks.
摘要翻译：对其进行光电读取的掩模和用于制造半导体电路元件的晶片的对准标记，并且检测出两个对准标记之间的位置偏差，并根据检测到的掩模和晶片中的一个平行移动将掩模和晶片对准到预定的位置关系。该装置具有校正可能存在于对准标记之间的间隔误差的功能。

4. 发明授权

US4193097A Facsimile apparatus 失效
标题翻译：传真机
公开(公告)号：US4193097A
公开(公告)日：1980-03-11
申请号：US899724
申请日：1978-04-25
申请人： Sadasuke Kurahayashi , Yuzo Kato , Shin Tsuda , Hakaru Muto , Asao Watanabe
发明人： Sadasuke Kurahayashi , Yuzo Kato , Shin Tsuda , Hakaru Muto , Asao Watanabe
IPC分类号： H04N1/411 , H04N7/12
CPC分类号： H04N1/411
摘要： This invention relates to the reduction in time required for signal transmission in facsimile apparatus, and consists of a transmitting apparatus adapted for eliminating the signal indicating the line thickness from the binary image signal obtained by scanning the original to be transmitted and transmitting thus obtained band-compressed transmission signal, and a receiving apparatus adapted for adding a signal approximately equal to the above-mentioned signal indicating the line thickness to the above-mentioned transmission signal thereby forming received image.
摘要翻译：本发明涉及传真装置中信号传输所需的时间的减少，并且包括一种发射装置，其适用于从通过扫描待传送的原稿获得的二进制图像信号中消除指示线路厚度的信号，压缩的发送信号，以及适于将与上述表示线路厚度的信号大致相等的信号添加到上述发送信号的接收装置，从而形成接收图像。

5. 发明授权

US06590274B2 Semiconductor wafer and method for manufacturing semiconductor devices 有权
标题翻译：半导体晶片及半导体器件的制造方法
公开(公告)号：US06590274B2
公开(公告)日：2003-07-08
申请号：US09916320
申请日：2001-07-30
申请人： Takashi Ohsumi , Yuzo Kato
发明人： Takashi Ohsumi , Yuzo Kato
IPC分类号： H01L23544
CPC分类号： H01L23/544 , H01L24/11 , H01L2223/5442 , H01L2223/54453 , H01L2223/5446 , H01L2223/5448 , H01L2224/05001 , H01L2224/05008 , H01L2224/05022 , H01L2224/05548 , H01L2224/1147 , H01L2224/13099 , H01L2924/01004 , H01L2924/01005 , H01L2924/01006 , H01L2924/01013 , H01L2924/01019 , H01L2924/01022 , H01L2924/01029 , H01L2924/01033 , H01L2924/01074 , H01L2924/01078 , H01L2924/01079 , H01L2924/014 , H01L2924/14
摘要： A semiconductor wafer which is covered by an opaque resin in a dicing process includes marks formed on the semiconductor wafer, where the marks are distinguished from electrodes formed on the semiconductor wafer. In a dicing process, separating semiconductor chips from the semiconductor wafer can be precisely achieved.
摘要翻译：在切割工艺中由不透明树脂覆盖的半导体晶片包括形成在半导体晶片上的标记，其中标记与形成在半导体晶片上的电极不同。在切割工艺中，可以精确地实现半导体芯片与半导体晶片的分离。

6. 发明授权

US4686580A Method and apparatus for changing image size 失效
标题翻译：改变图像尺寸的方法和装置
公开(公告)号：US4686580A
公开(公告)日：1987-08-11
申请号：US577250
申请日：1984-02-06
申请人： Yuzo Kato , Hidetoshi Suzuki
发明人： Yuzo Kato , Hidetoshi Suzuki
IPC分类号： G06T3/40 , H04N1/393 , H04N1/04
CPC分类号： H04N1/3935 , G06T3/4023
摘要： An image is magnified or reduced by dividing the image into divisional images, magnifying or reducing each of the divisional images and combining the magnified or reduced divisional images. The magnification or reduction of the divisional images is carried out by inserting one pixel into, or deleting one pixel from, each of the divisional images.
摘要翻译：通过将图像划分成分割图像来放大或缩小图像，放大或缩小每个分割图像并组合放大或缩小的分割图像。分割图像的放大或缩小通过将每个分割图像插入一个像素或从其中删除一个像素来进行。

7. 发明授权

US4414581A Image signal processing method and apparatus therefor 失效
标题翻译：图像信号处理方法及其装置
公开(公告)号：US4414581A
公开(公告)日：1983-11-08
申请号：US313302
申请日：1981-10-20
申请人： Yuzo Kato , Shunichi Ishihara , Yasushi Sato , Nobuyoshi Tanaka , Naoto Kawamura , Hisashi Nakatsui
发明人： Yuzo Kato , Shunichi Ishihara , Yasushi Sato , Nobuyoshi Tanaka , Naoto Kawamura , Hisashi Nakatsui
IPC分类号： H04N1/40 , H04N1/405
CPC分类号： H04N1/40062 , H04N1/4058
摘要： An image signal processing method and apparatus for practicing the method are capable of identifying and differentiating information not having tonal rendition such as characters and linetone images from information having tonal rendition such as photographs and pictures, based on the difference of signal characteristics, for example based on the fact that the spatial frequency distribution in portions of an image not having tonal rendition are in the higher frequency range compared to that of the portions of the image having tonal rendition. The method and apparatus are also capable of conducting different processes on the identified different images.
摘要翻译：用于实施该方法的图像信号处理方法和装置能够基于信号特性的差异来识别和区分不具有诸如照片和图像的音调再现的信息的诸如字符和动画图像的音调再现的信息，例如基于关于不具有音调再现的图像的部分中的空间频率分布与具有音调再现的图像的部分相比更高的频率范围的事实。所述方法和装置还能够对所识别的不同图像进行不同的处理。

8. 发明授权

US4315201A Alignment apparatus for mask and wafer used in manufacturing semiconductor circuit elements 失效
标题翻译：用于制造半导体电路元件的掩模和晶片的对准装置
公开(公告)号：US4315201A
公开(公告)日：1982-02-09
申请号：US884534
申请日：1978-03-08
申请人： Akiyoshi Suzuki , Ryozo Hiraga , Ichiro Kano , Hideki Yoshinari , Masao Totsuka , Yuzo Kato , Yasuo Ogino
发明人： Akiyoshi Suzuki , Ryozo Hiraga , Ichiro Kano , Hideki Yoshinari , Masao Totsuka , Yuzo Kato , Yasuo Ogino
IPC分类号： H01L21/30 , G03F9/00 , H01L21/027 , H01L21/67 , H01L21/68 , G05B1/06
CPC分类号： G03F9/70
摘要： An alignment apparatus for mask and wafer each having alignment marks provided in a narrow strip like area between circuit patterns is disclosed, which mask and wafer are used in manufacturing semiconductor circuit elements. In the apparatus, the mask and wafer are scanned to obtain scan signals by means of which the amount of relative deviation between the alignment marks on mask and wafer is detected. By means of the detected signal, an alignment is effected between the mask and wafer in the apparatus. For this type of alignment apparatus, there is a problem that since the alignment marks are provided in the narrow strip like area, no coincidence between the scanning position and the strip area is attainable with pre-alignment accuracy. Improvement in the alignment apparatus according to the invention lies in that a reading of alignment marks is initiated after the coincidence is photoelectrically detected.
摘要翻译：公开了一种用于掩模和晶片的对准装置，每个具有设置在电路图案之间的窄带状区域中的对准标记，该掩模和晶片用于制造半导体电路元件。在该装置中，对掩模和晶片进行扫描以获得扫描信号，通过该扫描信号检测掩模和晶片上的对准标记之间的相对偏离量。通过检测到的信号，在设备中的掩模和晶片之间进行对准。对于这种对准装置，存在这样的问题，即由于将对准标记设置在窄条状区域中，所以在预定位精度下不能使扫描位置和条带区域之间重合。根据本发明的对准装置的改进在于，在光电检测一致之后开始对准标记的读取。

9. 发明申请

US20140356629A1 COATED FILM 审中-公开
标题翻译：涂膜
公开(公告)号：US20140356629A1
公开(公告)日：2014-12-04
申请号：US14238483
申请日：2012-08-30
申请人： Yuzo Kato , Taishi Kawasaki , Masato Fujita
发明人： Yuzo Kato , Taishi Kawasaki , Masato Fujita
IPC分类号： C09D167/02
CPC分类号： C09D167/02 , G02B1/111 , Y10T428/31511 , C08K3/22 , C08K5/1515 , C08L67/02
摘要： According to the present invention, there is provide a coated film that suffers from less occurrence of interference fringes when forming various surface functional layers such as a hard coat layer thereon, and can exhibit a good visibility and an excellent adhesion property to the surface functional layers.The present invention relates to a coated film comprising: a polyester film, a first coating layer formed on one surface of the polyester film which is prepared from a coating solution comprising a polyester resin, titanium oxide and an epoxy compound, and a second coating layer formed on the other surface of the polyester film which is prepared from a coating solution comprising a metal oxide and two or more crosslinking agents and which has an absolute reflectance having one minimum value in a wavelength range of 400 to 800 nm, and which has the absolute reflectance at the minimum value of not less than 4.0%.
摘要翻译：根据本发明，提供一种涂布膜，当在其上形成各种表面功能层如硬涂层时，其干涉条纹的发生较少，并且可以显示出良好的可见性和对表面功能层的优异粘合性。本发明涉及一种涂膜，包括：聚酯膜，由聚酯树脂，氧化钛和环氧化合物的涂布溶液制成的聚酯膜的一个表面上形成的第一涂层和第二涂层形成在由包含金属氧化物和两种或更多种交联剂的涂布溶液制备的聚酯膜的另一表面上，并且其具有在400至800nm的波长范围内具有一个最小值的绝对反射率，并且其具有绝对反射率最小值不小于4.0％。

10. 发明授权

US4971444A Method and apparatus for detecting the position of an object 失效
标题翻译：用于检测物体位置的方法和装置
公开(公告)号：US4971444A
公开(公告)日：1990-11-20
申请号：US387361
申请日：1989-07-28
申请人： Yuzo Kato
发明人： Yuzo Kato
IPC分类号： G03F9/00
CPC分类号： G03F9/7092
摘要： A method of detecting the position of an object with respect to a predetermined standard position, includes detecting a signal concerned wtih the object, subjecting the detected signal and a predetermined reference signal to correlation processing to form a correlation signal, and detecting the position of the object with respect to the predetermined standard position, in accordance with the formed correlation signal.
摘要翻译：一种检测对象相对于预定标准位置的位置的方法，包括：检测与物体相关的信号，对检测到的信号和预定参考信号进行相关处理以形成相关信号，并且检测对象的位置根据形成的相关信号，相对于预定的标准位置对象。

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