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1. 发明授权

US07524475B2 Cerium oxide powder for one-component CMP slurry, preparation method thereof, one-component CMP slurry composition comprising the same, and method of shallow trench isolation using the slurry 有权
标题翻译：用于单组分CMP浆料的氧化铈粉末，其制备方法，包含其的单组分CMP浆料组合物以及使用该浆料的浅沟槽隔离方法
公开(公告)号：US07524475B2
公开(公告)日：2009-04-28
申请号：US11514309
申请日：2006-09-01
申请人： Seung Beom Cho , Jun Seok Nho , Dong Mok Shin , Jong Pil Kim , Myoung Hwan Oh , Jang Yul Kim , Eun Mi Choi , Min Jin Ko
发明人： Seung Beom Cho , Jun Seok Nho , Dong Mok Shin , Jong Pil Kim , Myoung Hwan Oh , Jang Yul Kim , Eun Mi Choi , Min Jin Ko
IPC分类号： B01J23/10 , B22F9/00 , B24B1/00 , C01F17/00 , C09G1/02
CPC分类号： C09K3/1463 , B82Y30/00 , C01F17/0043 , C01P2002/60 , C01P2002/72 , C01P2004/03 , C01P2004/62 , C01P2004/64 , C01P2006/12 , C01P2006/17
摘要： A cerium oxide powder for one-component CMP slurry, which has a specific surface area of 5 m2/g or more, and a ratio of volume fraction of pores with a diameter of 3 nm or more to that of pores with a diameter less than 3 nm of 8:2˜2:8, is disclosed. A method for preparing the same, a one-component CMP slurry comprising the same as an abrasive material, and a method of shallow trench isolation using the one-component CMP slurry are also disclosed. The CMP slurry causes no precipitation of the cerium oxide powder even if it is provided as a one-component CMP slurry, because the CMP slurry uses, as an abrasive material, cerium oxide powder that is obtained via a low-temperature calcination step, optionally a pulverization step, and a high-temperature calcination step and has a high pore fraction and low strength.
摘要翻译：具有比表面积为5m 2 / g以上的单组分CMP浆料的氧化铈粉末，直径为3nm以上的孔的体积分率与直径小于 3nm为8：2〜2：8。还公开了一种其制备方法，包含其作为研磨材料的单组分CMP浆料，以及使用单组分CMP浆料的浅沟槽隔离方法。由于CMP浆料使用通过低温煅烧步骤得到的氧化铈粉末，因此CMP浆料不会由于作为单组分CMP浆料而被提供，因此不会沉淀氧化铈粉末粉碎步骤和高温煅烧步骤，并且具有高孔隙率和低强度。

2. 发明申请

US20080003829A1 Chemical mechanical polishing slurry 审中-公开
标题翻译：化学机械抛光浆
公开(公告)号：US20080003829A1
公开(公告)日：2008-01-03
申请号：US11819942
申请日：2007-06-29
申请人： Dong Mok Shin , Eun Mi Choi , Seung Beom Cho
发明人： Dong Mok Shin , Eun Mi Choi , Seung Beom Cho
IPC分类号： H01L21/461 , C03C15/00 , C09K13/00
CPC分类号： H01L21/3212 , C09G1/02 , C09K3/1463
摘要： Disclosed is chemical mechanical polishing (CMP) slurry comprising: abrasive particles; an oxidant; a compound having at least two amine groups; a polycarboxylic acid; and water. The CMP slurry comprising a compound having at least two amine groups and a polycarboxylic acid provides an improved removal rate and selectivity of copper, while not adversely affecting the overall polishing rate, increases the planarization, and minimizes dishing and erosion problems.
摘要翻译：公开了化学机械抛光（CMP）浆料，其包含：磨料颗粒; 氧化剂具有至少两个胺基的化合物; 多元羧酸和水。包含具有至少两个胺基的化合物和多元羧酸的CMP浆料提供了铜的改进的去除速率和选择性，同时不会不利地影响整体抛光速率，增加了平坦化，并且使凹陷和侵蚀问题最小化。

3. 发明授权

US09223121B2 Optical structure for acquiring fingerprint image 有权
标题翻译：用于获取指纹图像的光学结构
公开(公告)号：US09223121B2
公开(公告)日：2015-12-29
申请号：US13198013
申请日：2011-08-04
申请人： Dong Mok Shin , Jae Hyeon Park , Jae Won Lee
发明人： Dong Mok Shin , Jae Hyeon Park , Jae Won Lee
IPC分类号： H04N7/18 , G02B17/08 , G02B5/04 , G06K9/00
CPC分类号： G02B17/08 , G02B5/04 , G06K9/00046
摘要： An optical structure for acquiring a fingerprint image with high resolution and minimum distortion is provided. The optical structure includes a prism configured to comprise an input surface to which light is irradiated, a contact surface formed horizontally to be in contact with a finger, and an output surface through which the light that has been irradiated to the input surface and reflected from the finger in contact with the contact surface passes; a lighting unit configured to emit a beam to the input surface of the prism; a reflector unit configured to reflect a fingerprint image passing through the output surface of the prism; a lens unit configured to comprise two or more lenses, each being configured to receive the fingerprint image reflected from the reflector unit; and an image sensor on which the fingerprint image passing through the lens unit is formed.
摘要翻译：提供了一种用于获取具有高分辨率和最小失真的指纹图像的光学结构。光学结构包括棱镜，被配置为包括光照射的输入表面，水平形成为与手指接触的接触表面以及已经照射到输入表面并从其中反射的光的输出表面与接触表面接触的手指通过; 照明单元，被配置为向棱镜的输入表面发射光束; 反射器单元，被配置为反射通过所述棱镜的输出表面的指纹图像; 配置为包括两个或更多个透镜的透镜单元，每个透镜被配置为接收从反射器单元反射的指纹图像; 以及形成有通过透镜单元的指纹图像的图像传感器。

4. 发明申请

US20120147168A1 OPTICAL STRUCTURE FOR ACQUIRING FINGERPRINT IMAGE 有权
标题翻译：用于获取指纹图像的光学结构
公开(公告)号：US20120147168A1
公开(公告)日：2012-06-14
申请号：US13198013
申请日：2011-08-04
申请人： Dong Mok Shin , Jae Hyeon Park , Jae Won Lee
发明人： Dong Mok Shin , Jae Hyeon Park , Jae Won Lee
IPC分类号： H04N7/18
CPC分类号： G02B17/08 , G02B5/04 , G06K9/00046
摘要： An optical structure for acquiring a fingerprint image with high resolution and minimum distortion is provided. The optical structure includes a prism configured to comprise an input surface to which light is irradiated, a contact surface formed horizontally to be in contact with a finger, and an output surface through which the light that has been irradiated to the input surface and reflected from the finger in contact with the contact surface passes; a lighting unit configured to emit a beam to the input surface of the prism; a reflector unit configured to reflect a fingerprint image passing through the output surface of the prism; a lens unit configured to comprise two or more lenses, each being configured to receive the fingerprint image reflected from the reflector unit; and an image sensor on which the fingerprint image passing through the lens unit is formed.
摘要翻译：提供了一种用于获取具有高分辨率和最小失真的指纹图像的光学结构。光学结构包括棱镜，被配置为包括光照射的输入表面，水平形成为与手指接触的接触表面以及已经照射到输入表面并从其中反射的光的输出表面与接触表面接触的手指通过; 照明单元，被配置为向棱镜的输入表面发射光束; 反射器单元，被配置为反射通过所述棱镜的输出表面的指纹图像; 配置为包括两个或更多个透镜的透镜单元，每个透镜被配置为接收从反射器单元反射的指纹图像; 以及形成有通过透镜单元的指纹图像的图像传感器。

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