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1. 发明专利

JP2008250217A Remaining amount control method of functional liquid tank, functional liquid supply device, droplet ejection device, manufacturing method of electrooptical apparatus, electrooptical apparatus and electronic equipment 审中-公开
标题翻译：功能液体容器的控制方法，功能液体供给装置，喷射装置，电子装置的制造方法，电子装置和电子设备
公开(公告)号：JP2008250217A
公开(公告)日：2008-10-16
申请号：JP2007094581
申请日：2007-03-30
申请人： Seiko Epson Corp , セイコーエプソン株式会社
发明人： HAYASHI KAZUYOSHI , ASANO YASUHIKO
IPC分类号： G02B5/20 , B05C5/00 , B05C11/10
摘要： PROBLEM TO BE SOLVED: To provide a remaining amount control method of functional liquid tank capable of precisely detecting that the remaining amount of the functional liquid has become zero. SOLUTION: The remaining amount control method of a functional liquid tank for storing the functional liquid to be supplied to a functional liquid droplet ejection head of inkjet method includes: a remaining amount measuring step of measuring the weight of a functional liquid tank and obtaining the remaining amount of functional liquid in the functional liquid tank from a weight difference with an empty functional liquid tank; an air bubble detecting step of detecting the presence or absence of air bubbles which are carried by the functional liquid supplied from the functional liquid tank and flow; and a discrimination step of discriminating that the functional liquid in the functional liquid tank is exhausted when the "presence" of the air bubbles is detected in the air bubble detecting step after the remaining amount of the functional liquid in the functional liquid tank is a prescribed value or less by the remaining amount measuring step. COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：提供能够精确地检测功能液体的剩余量变为零的功能液体罐的剩余量控制方法。解决方案：用于存储要供给到功能液滴喷射头的功能液体的功能液体罐的剩余量控制方法包括：剩余量测量步骤，测量功能液体罐的重量，从功能液体罐的重量差中获得功能液罐中的功能液的剩余量; 气泡检测步骤，检测由所述功能液体罐供给的功能液体携带的气泡的存在与否; 以及鉴别步骤，当在功能液体罐中的功能液体的剩余量为规定时，在气泡检测步骤中检测到气泡的“存在”时，识别功能液体罐中的功能液体被排出值或更小的剩余量测量步骤。版权所有（C）2009，JPO＆INPIT

2. 发明专利

JP2010210989A Degassing tube, and functional liquid supplying device and droplet discharging device equipped with same 审中-公开
标题翻译：脱水管和功能液体供应装置和配有其的排液装置
公开(公告)号：JP2010210989A
公开(公告)日：2010-09-24
申请号：JP2009057541
申请日：2009-03-11
申请人： Seiko Epson Corp , セイコーエプソン株式会社
发明人： ASANO YASUHIKO
IPC分类号： G02B5/20 , B05C5/00 , B05C11/10
摘要： PROBLEM TO BE SOLVED: To provide a degassing tube, etc. which can improve space efficiency for bubble removal while displaying sufficient bubble removing performance.
SOLUTION: The degassing tube 54 constituting at least a part of a functional liquid passage for supplying a functional liquid from a function liquid supply source to an ink jet type functional liquid droplet discharging head 25 to remove gas from the functional liquid allowed to flow into the passage includes: an inner tube 60 constituting the functional liquid passage and composed of a gas transmitting material; an outer tube 61 including a degassing space 62 and covering the inner tube 60; and a vacuum suction port 73 formed on the outer tube 61 and connected to the degassing space 62. The inner tube 60 is constituted of a bundle tube composed of a plurality of thin tubes 63.
COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：提供一种脱气管等，其可以在显示足够的除泡性能的情况下提高除气的空间效率。解决方案：构成至少一部分功能液体通道的脱气管54，用于将功能液体从功能液体供应源供应到喷墨型功能液滴排放头25，以从功能液体中除去气体，允许流入通道包括：构成功能液体通道并由气体传输材料构成的内管60; 包括脱气空间62并覆盖内管60的外管61; 以及形成在外管61上并连接到脱气空间62的真空吸入口73.内管60由多根细管63组成的束管构成。（C）2010，JPO＆INPIT

3. 发明专利

JP2007180045A Surface treatment apparatus 有权
标题翻译：表面处理设备
公开(公告)号：JP2007180045A
公开(公告)日：2007-07-12
申请号：JP2007031956
申请日：2007-02-13
申请人： Seiko Epson Corp , セイコーエプソン株式会社
发明人： MIYASHITA TAKESHI , MIYAGAWA TAKUYA , AOKI KOJI , KUBOTA ISAO , KURASHINA OSAMU , ASANO YASUHIKO , ODA YOSHIO , MORI YOSHIAKI
IPC分类号： H05H1/24 , H01L21/3065
摘要： PROBLEM TO BE SOLVED: To provide a surface treatment apparatus in which the rate of surface treatment and a treatment capacity are increased by always uniformizing the distribution of a gas without damaging a porous body even when the output of a power supply applied to an electrode is increased. SOLUTION: In this surface treatment apparatus 30, a porous dielectric 37 is supported, by its outer peripheral edge, on the lower surface of a porous electrode 32 by the supporting member 45. The dielectric can be so supported by the supporting member that the thermal expansion deformation of the dielectric is permitted by forming an upward inclined-face on the supporting body 45 and a downward inclined-face on the dielectric 37. A discharge gas can be supplied uniformly to a discharge region 51 through the electrode 32 and the dielectric 37, both of which are porous. Many gas exhaust ports 41, by which the flow rate of the gas can be regulated, are provided around the discharge region 51. Thus, the gas is uniformly exhausted around the discharge region 51. Especially, even if the gap between the dielectric 37 and a work 39 depends on mounting accuracy or the like and varies with location, the gas can be exhausted uniformly around the discharge region 51. COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：提供一种表面处理装置，其中通过总是使气体分布均匀化而不损坏多孔体，其表面处理速率和处理能力增加，即使当施加到电极增加。解决方案：在该表面处理装置30中，通过其外周边缘，通过支撑构件45在多孔电极32的下表面上支撑多孔电介质37.电介质可以由支撑构件通过在支撑体45上形成向上的倾斜面和电介质37上的向下倾斜面来允许电介质的热膨胀变形。可以通过电极32将放电气体均匀地供给到放电区51，电介质37，两者都是多孔的。在排出区域51的周围设置有可以调节气体的流量的多个排气口41.因此，在排出区域51周围均匀排出气体。特别是，即使电介质37和工件39取决于安装精度等，并且随着位置而变化，气体可以在放电区域51周围均匀排出。版权所有（C）2007，JPO＆INPIT

4. 发明专利

JP2004283773A Surface treatment apparatus and surface treatment method 审中-公开
公开(公告)号：JP2004283773A
公开(公告)日：2004-10-14
申请号：JP2003081169
申请日：2003-03-24
申请人： Seiko Epson Corp , セイコーエプソン株式会社
发明人： ASANO YASUHIKO , MIYASAKA MASATERU , OKAMURO TAKUMA
IPC分类号： H05H1/24 , B01J19/08 , C23C16/505 , C23F4/00 , H01L21/205 , H01L21/3065
摘要： PROBLEM TO BE SOLVED: To provide a small-sized surface treatment apparatus and a surface treatment method by which the surface of even a large-sized body to be treated can surely be treated. SOLUTION: The surface treatment apparatus 10 is used for treating the surface 21 of the body 20 to be treated by the excited radicals of a reactive gas produced by placing the body 20 on a table 13 being an earth electrode and generating plasma between an electrode 11 to which electricity is applied and the table 13 under atmospheric or almost atmospheric pressure. The apparatus 10 is provided with an electrode unit 70 having a plurality of the electrodes 11 arranged side by side on the table 13 along the width of the surface 21 of the body 20 and a moving/operating part 30 for relatively moving the electrodes 11 and the table 13 to be confronted to each other when the surface 21 of the body 20 is treated. COPYRIGHT: (C)2005,JPO&NCIPI

5. 发明专利

JP2010214299A Liquid supply device and droplet discharge device including the same 审中-公开
标题翻译：液体供应装置和包括其的卸料装置
公开(公告)号：JP2010214299A
公开(公告)日：2010-09-30
申请号：JP2009064513
申请日：2009-03-17
申请人： Seiko Epson Corp , セイコーエプソン株式会社
发明人： ASANO YASUHIKO
IPC分类号： B05C11/10 , B05C5/00
摘要： PROBLEM TO BE SOLVED: To provide a liquid supply device and the like capable of recovering bubbles in a liquid supplied from a tank unit into a waste liquid tank to suppress the generation of mist from the functional liquid mixed with the bubbles in the waste liquid tank.
SOLUTION: The liquid supply device includes: a tank unit 45 for pressurizing and feeding the stored liquid; a tank connection flow path 71 connected to the tank unit 45; a main supply flow path 72 continuous to the tank connection flow path 71; a bubble discharge flow path 82 branched from the main supply flow path 72; flow path switching means (71, 75, 77) for performing flow path switching between the main supply flow path 72 and the bubble discharge flow path 82; the waste liquid tank 85 connected to the bubble discharge flow path 82; a flow rate control valve 84 interposed in the bubble discharge flow path 82; a bubble detecting sensor 74 (76) for detecting the bubbles in the liquid flowing in the tank connection flow path 71; and a controller 88 for controlling the flow rate control valve 84 to switch the flow path from the main supply flow path 72 to the bubble discharge flow path 82, when the bubble detecting sensor 74(76) detects the bubbles in pressurizing and feeding the liquid.
COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：提供一种液体供应装置等，其能够将从罐单元供应的液体中的气泡回收到废液罐中，以抑制从与该泡沫混合的功能液体产生雾废液罐。解决方案：液体供应装置包括：用于对存储的液体进行加压和供给的罐单元45; 连接到油箱单元45的油箱连接流路71; 与罐连接流路71连续的主供给流路72; 从主供应流路72分支的气泡排出流路82; 用于在主供应流路72和气泡排出流路82之间进行流路切换的流路切换装置（71,75,77）连接到气泡排出流路82的废液罐85; 插在气泡排出流路82中的流量控制阀84; 用于检测在罐连接流路71中流动的液体中的气泡的气泡检测传感器74（76）以及控制器88，用于控制流量控制阀84，以便当气泡检测传感器74（76）检测到加压和供给液体时的气泡时，将流路从主供应流路72切换到气泡排出流路82 。版权所有（C）2010，JPO＆INPIT

6. 发明专利

JP2010214293A Functional liquid tank, method of replacing functional liquid in droplet discharge device, and droplet discharge device 有权
标题翻译：功能液体罐，液体排出装置中功能液体的替代方法和喷射装置
公开(公告)号：JP2010214293A
公开(公告)日：2010-09-30
申请号：JP2009064246
申请日：2009-03-17
申请人： Seiko Epson Corp , セイコーエプソン株式会社
发明人： ASANO YASUHIKO
IPC分类号： B05C5/00 , B05C11/10
摘要： PROBLEM TO BE SOLVED: To provide a functional liquid tank capable of efficiently replacing an old functional liquid with new one, a method of replacing the functional liquid in a droplet discharge device and the droplet discharge device.
SOLUTION: The functional liquid tank receives the supply of the functional liquid from a functional liquid supply source and supplies the functional liquid to the functional droplet discharge head 17 of a ink jet system and includes a tank body having a liquid reservoir part 71 facing a flow out side port and formed to be recessed on the bottom part and a liquid reservoir liquid level detecting means facing the liquid reservoir part 71 to detect the liquid level of the functional liquid in the liquid reservoir part 71.
COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：提供一种能够有效地更换旧功能液体的功能性液体罐，一种替换液滴喷射装置中的功能液体和液滴排出装置的方法。解决方案：功能液体容器从功能液体供应源接收功能液体的供应，并将功能液体供应到喷墨系统的功能液滴排出头17，并且包括具有液体储存部分71的罐体面向流出侧端口并形成为凹陷在底部;以及液体储存液位检测装置，面对液体储存部71，以检测液体储存部71中的功能液体的液位。版权所有：（C）2010，JPO＆INPIT

7. 发明专利

JP2010075845A Sub tank unit and droplet discharging apparatus provided with the same 审中-公开
标题翻译：分舱单元和喷油器排放装置同时提供
公开(公告)号：JP2010075845A
公开(公告)日：2010-04-08
申请号：JP2008247025
申请日：2008-09-26
申请人： Seiko Epson Corp , セイコーエプソン株式会社
发明人： ASANO YASUHIKO , HAYASHI KAZUYOSHI
IPC分类号： B05C11/10 , B05C5/00
摘要： PROBLEM TO BE SOLVED: To provide a sub tank unit capable of keeping an upper space inside a tank body in the atmosphere of the saturated gas of functional liquid, and to provide a droplet discharging apparatus provided with the sub tank unit.
SOLUTION: In the sub tank unit for receiving functional liquid replenishment from a main tank 61 and supplying the functional liquid to a functional liquid droplet discharging head while maintaining a water head value with an inkjet functional liquid discharge head in a prescribed range, the sub tank unit is provided with: the tank body for storing the functional liquid; and an aeration tube 76 one end of which is communicated with the upper space of the tank body and the other end of which is opened to the atmosphere. The aeration tube 76 is piped so as to draw a loop for two or more times in the vertical direction near the tank body, and has a volume equal to or larger than that of the upper space.
COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：提供一种副罐单元，其能够在功能液体的饱和气体的气氛中保持罐体内的上部空间，并且提供设置有副罐单元的液滴排出装置。解决方案：在用于从主罐61接收功能性液体补充并且将功能液体供应到功能性液滴喷射头的副罐单元中，同时用喷墨功能液体排出头保持水头值在规定范围内，副罐单元设置有用于存储功能液体的罐体; 以及通气管76，其一端与罐体的上部空间连通，另一端与大气相通。通气管76被管道化以便在靠近罐体的垂直方向上绘制两次或更多次的环，并且具有等于或大于上部空间的体积的体积。版权所有（C）2010，JPO＆INPIT

8. 发明专利

JP2008246458A Initial filling method for filling functional liquid in functional liquid supplying device, functional liquid filling device, liquid droplet discharging device, manufacturing method of electo-optical device, electo-optical device, and electrio-optical instrument 审中-公开
标题翻译：用于在功能液体供应装置中填充功能液体的初始填充方法，功能液体填充装置，液体排出装置，选择光学装置的制造方法，光电装置和电光仪器
公开(公告)号：JP2008246458A
公开(公告)日：2008-10-16
申请号：JP2007094584
申请日：2007-03-30
申请人： Seiko Epson Corp , セイコーエプソン株式会社
发明人： HAYASHI KAZUYOSHI , ASANO YASUHIKO
IPC分类号： B05C11/10 , B05C5/00 , G02B5/20 , G02F1/13 , G02F1/1335 , H01L51/50 , H05B33/10
摘要： PROBLEM TO BE SOLVED: To provide an initial filling method for filling a functional liquid in a functional liquid supplying device capable of appropriately removing bubbles in the functional liquid by a bubble removing means, in initial filling operation of the functional liquid to a subtank. SOLUTION: The initial filling method is used for filling the functional liquid in the subtank 121 connected to a functional liquid discharge head 17 by causing the functional liquid to flow from a main tank 181. The bubble removing means 135 which can remove micro-bubbles in the functional liquid and has a removal ratio dependent on the liquid flow rate is provided in the functional liquid flow passage connecting the main tank and the subtanks. After the functional liquid starts flowing from the main tank, the flow of the functional liquid is interrupted at the time when the functional liquid is filled in the bubble removing means, and then is left interrupted until a specified removal ratio is attained in the bubble removing means. Then the flow of the liquid is resumed before being interrupted at the time when the liquid flows almost through the bubble removing means. The above individual filling process is repeated to fill all the subtanks. COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：为了提供一种用于在功能液体供应装置中填充功能液体的初始填充方法，其能够通过气泡去除装置适当地去除功能液体中的气泡，在功能液体的初始填充操作中辅助水箱。
解决方案：初始填充方法用于通过使功能液体从主罐181流出而连接到功能液体排出头17的子容器121中的功能液体。气泡去除装置135可以去除微在连接主箱和子容器的功能液流通道中提供功能液中的泡沫，并且具有取决于液体流速的去除率。在主功能液体开始从主罐流出之后，功能液体在气泡去除装置中被填充时中断了功能液体的流动，然后被中断，直至在去除气泡中达到规定的去除率手段。然后在液体几乎通过气泡去除装置流动时，中断之前液体的流动恢复。重复上述单独的填充过程以填充所有子容器。版权所有（C）2009，JPO＆INPIT

9. 发明专利

JP2004259987A Device and method for surface treatment 审中-公开
公开(公告)号：JP2004259987A
公开(公告)日：2004-09-16
申请号：JP2003049686
申请日：2003-02-26
申请人： Seiko Epson Corp , セイコーエプソン株式会社
发明人： ASANO YASUHIKO
IPC分类号： H05H1/24 , B01J19/08 , C23F4/00 , H01L21/3065
摘要： PROBLEM TO BE SOLVED: To provide a device and a method for surface treatment which facilitate surface treatment of various objects to be treated owing to an easy in-line arrangement and an enabled volume adjustment of a plasma discharge region in a device for manufacturing the object to be treated. SOLUTION: The surface treatment device 10 is provided, wherein surface treatment is given to the object 40 to be treated with excited active species produced in the plasma discharge region 30 under an atmospheric pressure or a pressure close thereto. The device comprises an application electrode 11, a ground electrode 13, a dielectric body 14 for allowing a surface of the object 40 to be exposed to the excited active species produced in the plasma discharge region 30 which has been formed by applying high frequency AC power on the application electrode 11 arranged on one surface 50 together with the application electrode 11 and the ground 13 and thus by causing creeping discharge on the other surface 51, and a to-be-treated object conveyer 20 for conveying the object 40 and having it passed through the plasma discharge region 30. COPYRIGHT: (C)2004,JPO&NCIPI

10. 发明专利

JP2009056366A Suction apparatus and liquid droplet discharge apparatus equipped with the same as well as electo-optical apparatus production method and electo-optical apparatus 审中-公开
标题翻译：装置设备和液体喷射装置与其它设备一样，如选择光学设备生产方法和选择光学设备
公开(公告)号：JP2009056366A
公开(公告)日：2009-03-19
申请号：JP2007224523
申请日：2007-08-30
申请人： Seiko Epson Corp , セイコーエプソン株式会社
发明人： ASANO YASUHIKO
IPC分类号： B05C5/00 , B05C11/10
摘要： PROBLEM TO BE SOLVED: To provide a suction apparatus capable of properly maintaining the functions and restoring the functions of a plurality of functional liquid droplet discharge heads separate for functional liquids by carrying out functional liquid suction suitably for a plurality of kinds of functional liquids with different viscosities. SOLUTION: The suction apparatus comprises a plurality of head caps 201 for separate functional liquids corresponding to a plurality of functional liquid droplet discharge heads 17, a plurality of suction means 337 for separate functional liquids positioned each plurality of head caps 201 for suctioning functional liquids through the respective head caps 201, and a plurality of suction channels 225 for separate functional liquids connected to the respective head caps 201 in the upstream side and the respective suction means 337 in the downstream side. Each suction means 337 has a waste liquid tank 281 to which the downstream ends of the respective channels 225a are connected and an ejector 331 capable of introducing compressed air in the primary side and connected to the upper part space of the waste liquid tank 281 in the secondary side. COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：提供一种能够适当地维持多功能液滴排出头的功能和恢复功能的抽吸装置，该功能液滴排出头分离用于功能液体，适用于多种功能性的液体吸入不同粘度的液体解决方案：抽吸装置包括用于分离功能液体的多个头盖201，其对应于多个功能液滴排出头17，多个抽吸装置337，用于分开的功能液体，每个功能液体定位在每个多个头盖201中用于抽吸功能液体通过各自的头盖201，以及多个用于分离的功能液体的抽吸通道225，其连接到上游侧的相应的头盖201和下游侧的相应的吸入装置337。每个抽吸装置337具有一个废液罐281，各个通道225a的下游端连接到废液箱281，以及能够在初级侧引入压缩空气并连接到废液罐281的上部空间的喷射器331 二次侧。版权所有（C）2009，JPO＆INPIT

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