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    • 3. 发明授权
    • Control apparatus, a stage apparatus and a hard disk servo writer
apparatus including a robust stabilizing compensator
    • 控制装置,平台装置以及包括稳健补偿器的硬盘伺服写入装置
    • US5726879A
    • 1998-03-10
    • US401677
    • 1995-03-10
    • Mikio Sato
    • Mikio Sato
    • G05B13/02G03F7/20G05B5/01G05B13/04G05B19/19G05D3/12G05B19/18G11B21/02
    • G03F7/70725G03F7/709G05B13/042G05B19/19G05B5/01G05B2219/41367G05B2219/42012Y02P90/265
    • Provided is high-performance H.sub..infin. control technology suitable for position control or speed control of semiconductor exposure apparatus, servo writer of hard disk, etc. A series compensator in the classical control technology represented by the PID compensator is employed as a frequency weight of loop shaping, whereby the design technology in the conventional classical control can be succeeded to and a high-performance control system can be realized even for cases where there is an oscillation mode of a controlled object to become a problem on control performance in the servo band, which was difficult to realize by the classical control technology. Also, using a robust stabilizing compensator obtained from a generalized plant having constant matrix weights, a high-performance control system can be realized even for cases where there is an oscillation mode of the controlled object to become a problem on control performance in the servo band, which was difficult to realize by the conventional classical control technology.
    • 提供适用于半导体曝光装置,硬盘伺服写入器等的位置控制或速度控制的高性能H INFINITY控制技术。采用PID补偿器代表的经典控制技术中的串联补偿器作为循环的频率权重 可以使传统的经典控制中的设计技术成功,并且即使在控制对象的振荡模式成为伺服带中的控制性能的问题的情况下也能够实现高性能的控制系统, 这是经典控制技术难以实现的。 此外,使用从具有恒定矩阵权重的广义工厂获得的鲁棒稳定补偿器,即使在受控对象的振荡模式成为伺服带的控制性能的问题的情况下,也可以实现高性能控制系统 ,这是传统的古典控制技术难以实现的。