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    • 9. 发明申请
    • BIOSENSOR AND METHOD OF MANUFACTURING THE SAME
    • 生物传感器及其制造方法
    • US20090152597A1
    • 2009-06-18
    • US12195305
    • 2008-08-20
    • Tae Youb KIMNae Man ParkHan Young YuMoon Gyu JangJong Heon Yang
    • Tae Youb KIMNae Man ParkHan Young YuMoon Gyu JangJong Heon Yang
    • H01L29/12H01L21/00
    • G01N27/4146G01N27/4145Y10S977/71Y10S977/742Y10S977/963
    • Provided are a biosensor with a silicon nanowire and a method of manufacturing the same, and more particularly, a biosensor with a silicon nanowire including a defect region formed by irradiation of an electron beam, and a method of manufacturing the same. The biosensor includes: a silicon substrate; a source region disposed on the silicon substrate; a drain region disposed on the silicon substrate; and a silicon nanowire disposed on the source region and the drain region, and having a defect region formed by irradiation of an electron beam. Therefore, by irradiating a certain region of a high-concentration doped silicon nanowire with an electron beam to lower electron mobility in the certain region, it is possible to maintain a low contact resistance between the silicon nanowire and a metal electrode and to lower operation current of a biomaterial detection part, thereby improving sensitivity of the biosensor.
    • 本发明提供一种具有硅纳米线的生物传感器及其制造方法,更具体地,涉及具有通过电子束照射形成的缺陷区域的硅纳米线的生物传感器及其制造方法。 生物传感器包括:硅衬底; 设置在所述硅基板上的源极区域; 设置在所述硅基板上的漏极区域; 以及设置在源极区域和漏极区域上的硅纳米线,并且具有通过电子束的照射而形成的缺陷区域。 因此,通过用特定的区域照射具有电子束的高浓度掺杂的硅纳米线的特定区域来降低电子迁移率,可以保持硅纳米线与金属电极之间的低接触电阻并降低工作电流 的生物材料检测部件,从而提高生物传感器的灵敏度。