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1. 发明专利

JP2008224578A Surface shape measuring method and surface shape measuring device of lengthy object 有权
标题翻译：表面形状测量方法和表面形状测量装置的长度对象
公开(公告)号：JP2008224578A
公开(公告)日：2008-09-25
申请号：JP2007066375
申请日：2007-03-15
申请人： Satoshi Kiyono , Okamoto Machine Tool Works Ltd , Hirotaka Shimizu , 株式会社岡本工作機械製作所 , 浩貴清水 , 慧清野
发明人： KIYONO SATOSHI , SHIMIZU HIROTAKA , KIKUCHI MASATO
IPC分类号： G01B21/30 , G01B21/20
摘要： PROBLEM TO BE SOLVED: To measure the surface shape (straightness) of a lengthy object with a length of 1 meter or longer, unmeasurable highly accurately by an autocollimator, by using a plurality of displacement sensors.
SOLUTION: Three displacement sensors A, B, C are fixed to an arm 311 in series at each pitch interval p. As for straightness of a measuring object fixed on a table, in an operation range measurable highly accurately by the autocollimator, pitching of a straightness value detected by a two-point method by two displacement sensors A, B is corrected by using a value measured by the autocollimator, to thereby acquire an initial straightness value data row. In measurement of the straightness in an operation range unmeasurable highly accurately by the autocollimator, a measuring reference is formed by a straightness value detected by the third displacement sensor C, and pitching is detected from an output by the two-point method by the displacement sensors A, B based on a value of measuring point in the measuring reference, and, while performing pitching correction by using it, the operation is repeated successively, and the measuring range is widened, and an extended straightness value data row is acquired, and a straightness curve is outputted.
COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：通过使用多个位移传感器来测量长度为1米或更长的长度物体的表面形状（直线度），通过自动准直器高精度地测量不可测量。解决方案：三个位移传感器A，B，C以每个间距p串联固定在臂311上。对于固定在工作台上的测量对象的平直度，在由自动准直仪高度精确测量的操作范围内，通过两个位移传感器A，B由两点法检测的直线度值的俯仰通过使用由自动准直仪，从而获取初始平直度值数据行。在通过自动准直仪高精度地测量操作范围的平直度的测量中，通过由第三位移传感器C检测到的直线度值来形成测量基准，并且通过位移传感器由两点法的输出检测俯仰 A，B基于测量基准中的测量点的值，并且在通过使用测量点进行俯仰校正的同时，连续重复操作，并且扩大测量范围，并且获取延伸的平直度值数据行，并且输出直线度曲线。版权所有（C）2008，JPO＆INPIT

2. 发明专利

JP2005321241A Detection device 审中-公开
标题翻译：检测装置
公开(公告)号：JP2005321241A
公开(公告)日：2005-11-17
申请号：JP2004138062
申请日：2004-05-07
申请人： Satoshi Kiyono , Isamu Ko , Hirotaka Shimizu , Yoji Watanabe , 浩貴清水 , 慧清野 , 陽司渡辺 , 偉高
发明人： KIYONO SATOSHI , WATANABE YOJI , KO ISAMU , SHIMIZU HIROTAKA
IPC分类号： G01B11/26
摘要： PROBLEM TO BE SOLVED: To provide a detection device capable of detecting collectively, for example, an attitude change in the three degrees of freedom of a stage.
SOLUTION: A circular motion of a peak on a position separated from the center excluding the center of an interference pattern is detected by a light receiving element, by utilizing the fact that, when rotation θz around the surface normal is generated relative to a reference lattice 20, the interference pattern on the light receiving element 14 surface is rotated around the normal by using a peak on the center of the interference pattern as an axis as much as the same angle as the reference lattice.
COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：提供能够集中地检测阶段的三个自由度的姿态变化的检测装置。解决方案：通过利用以下事实来检测在除了干涉图案的中心之外的与中心不同的位置上的峰的圆周运动，即当相对于参考点阵20，通过使用干涉图案的中心上的峰作为与参考点阵的角度相同的角度，光接收元件14表面上的干涉图案围绕法线旋转。版权所有（C）2006，JPO＆NCIPI

3. 发明专利

JP2009031170A Surface shape calibrating device and method 有权
标题翻译：表面形状校准装置和方法
公开(公告)号：JP2009031170A
公开(公告)日：2009-02-12
申请号：JP2007196838
申请日：2007-07-30
申请人： Okamoto Machine Tool Works Ltd , 株式会社岡本工作機械製作所
发明人： KIYONO SATOSHI , KIKUCHI MASATO
IPC分类号： G01B7/28
摘要： PROBLEM TO BE SOLVED: To provide a method for precisely measuring the surface shape (straightness) of a measuring object in a nano level, and a surface shape calibrating device used for the measurement.
SOLUTION: Respective displacement sensors of three-sets of displacement sensor holders for holding three pairs of displacement sensors mounted on an xy stage movable in the x-axis direction and y-axis direction are used, in a state where they are inserted in recessed spaces of recessed arms of the three-pairs of displacement sensor holders, the distance between the surface to be measured (front and back surfaces) of a reference straightedge held independently of the xy stage and reversely rotatably by 180° and the displacement sensors, and the distance between the surface to be measured of a workpiece mounted on a fixed table and the displacement sensors are measured, the distance values are transmitted as electrical signals from a controller to a data analysis device, and the surface shape values of the x-coordinate and y-coordinate of a measured object to be calibrated are calculated based on the transmitted distance electrical signal values.
COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：提供一种用于精确测量纳米级测量对象的表面形状（直线度）的方法和用于测量的表面形状校准装置。
解决方案：使用三组位移传感器支架的位移传感器，用于保持安装在可沿x轴方向和y轴方向移动的xy平台上的三对位移传感器，它们在插入状态下在三对位移传感器保持器的凹槽的凹进空间中，独立于xy平台并且可反转180度地保持的基准直尺的待测表面（前后表面）之间的距离和位移传感器并且测量安装在固定台上的工件的待测表面与位移传感器之间的距离，距离值作为电信号从控制器传输到数据分析装置，并且x的表面形状值基于发送的距离电信号值来计算要校准的测量对象的坐标和y坐标。版权所有（C）2009，JPO＆INPIT

4. 发明专利

JP2012083275A Calibration method for straightness of workpiece 审中-公开
标题翻译：工件直线校准方法
公开(公告)号：JP2012083275A
公开(公告)日：2012-04-26
申请号：JP2010231054
申请日：2010-10-14
申请人： Okamoto Machine Tool Works Ltd , 株式会社岡本工作機械製作所
发明人： SANO FUMIHIRO , FUJITA ETSUO , MATSUOKA KUNIYOSHI , KIYONO SATOSHI
IPC分类号： G01B21/30
摘要： PROBLEM TO BE SOLVED: To provide a method for calibrating the straightness obtained by measuring the straightness of a machining work on a work table of a machine tool via a surface shape measuring apparatus.SOLUTION: The straightness of a measurement object is measured by a displacement sensor 4 using one of attitude display objects 2 provided at both ends obtained by separating a pair of plane mirrors (M, M) by a distance d, and the displacement sensor 4 while moving a long measurement object (machining work) w by the distance d, and the straightness of the long measurement object can be calibrated using the short attitude display object 2 since calibration to subtract a movement error of a device included in this measured value is performed.
摘要翻译：要解决的问题：提供一种校准通过表面形状测量装置测量机床的工作台上的加工工作的平直度所获得的平直度的方法。解决方案：通过位移传感器4使用设置在通过分离一对平面镜而获得的两端的姿态显示对象2之一来测量测量对象的平直度（M 1 < SB>，M 2 ）距离d，位移传感器4在将长测量对象（机械加工）w移动距离d的同时，可以使用短姿态显示对象2来校准测量对象，因为执行校准以减去包括在该测量值中的设备的移动误差。版权所有（C）2012，JPO＆INPIT

5. 发明专利

JP2009180700A Cylindrical shape measuring device and cylindrical surface shape measuring method 审中-公开
标题翻译：圆柱形形状测量装置和圆柱形表面形状测量方法
公开(公告)号：JP2009180700A
公开(公告)日：2009-08-13
申请号：JP2008022394
申请日：2008-02-01
申请人： Okamoto Machine Tool Works Ltd , 株式会社岡本工作機械製作所
发明人： KIYONO SATOSHI , FUJITA ETSUO
IPC分类号： G01B5/20
摘要： PROBLEM TO BE SOLVED: To provide a cylindrical shape measuring device for accurately measuring the surface shape of a cylinder processed on a machine tool.
SOLUTION: The cylindrical shape measuring device 1 includes a rotation support device of an object to be measured for supporting a cylinder 2 to be measured rotatably about its center axis, a trident sensor holder 3 that is on a cylinder surface to be measured supported by the rotation support device and abuts on the cylinder surface to be measured at a total of three points, namely one point 5c on one linear bus 6 parallel to the center axis (z-axis) of the cylinder to be measured and two points 5a and 5b existing at the positions gripping the linear bus, and a first displacement sensor 4a and a second displacement sensor 4b arranged at the positions separated from the three abutting points by a known distance in the trident sensor holder.
COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：提供一种用于精确测量在机床上加工的圆筒的表面形状的圆柱形形状测量装置。解决方案：圆筒形状测量装置1包括：待测物体的旋转支撑装置，用于支撑围绕其中心轴线可转动的待测圆筒2;三位传感器支架3，其位于要测量的气缸表面上由旋转支撑装置支撑，并且在总共三个点（即平行于要测量的气缸的中心轴线（z轴））的一个线性总线6上的一个点5c上的三个点上抵接在待测量的气缸表面上，并且两个点存在于夹持线性总线的位置处的5a，5b以及配置在与三个邻接点分离的位置的第一位移传感器4a和第二位移传感器4b在三叉传感器保持器中已知距离。版权所有（C）2009，JPO＆INPIT

6. 发明专利

JP2014013226A Calibration method of interference shape measurement mechanism 有权
标题翻译：干涉形状测量机制的校准方法
公开(公告)号：JP2014013226A
公开(公告)日：2014-01-23
申请号：JP2012187134
申请日：2012-08-28
申请人： Satoshi Kiyono , 慧清野
发明人： KIYONO SATOSHI
IPC分类号： G01B11/24 , G01B9/02
摘要： PROBLEM TO BE SOLVED: To provide a novel calibration method of an interference shape measurement machine not using a three-surface aligning method, capable of highly accurately measuring a straight shape by the interference shape measurement machine and measuring a surface shape by using the result.SOLUTION: A systematic error of an interference shape measurement mechanism and an unknown shape error of a measured object are separated in two directions to obtain two straight shape data. Such calibrated straight shape data groups are associated with each other to constitute a surface, and calibration as a surface is completed.
摘要翻译：要解决的问题：为了提供不使用三面对准方法的干涉形状测量机的新颖的校准方法，能够通过干涉测量机高精度地测量直线形状并且通过使用该结果来测量表面形状。解决方案：测量对象的干涉形状测量机构和未知形状误差的系统误差在两个方向上分离，以获得两个直形数据。这种校准的直形数据组彼此相关联以构成表面，并且完成了作为表面的校准。

7. 发明专利

JP2010197350A Sensor holder and sensor support device 有权
标题翻译：传感器支架和传感器支持装置
公开(公告)号：JP2010197350A
公开(公告)日：2010-09-09
申请号：JP2009045788
申请日：2009-02-27
申请人： Satoshi Kiyono , Nagase Integrex Co Ltd , Shoichi Shimada , Yutaka Uda , 豊宇田 , 尚一島田 , 株式会社ナガセインテグレックス , 慧清野
发明人： YAMAGUCHI MASAO , GO YASUYUKI , SHIMADA SHOICHI , UDA YUTAKA , KIYONO SATOSHI
IPC分类号： G01B21/00 , G01B21/30
摘要： PROBLEM TO BE SOLVED: To suppress displacement of a vertical direction in three sensors attached to a rod-like sensor holder. SOLUTION: Since a deflection quantity of the sensor holder SH is calculated by considering a concentrated mass and a distribution mass of a beam of two-point support when the sensors SS1-SS3 are fixed in previously determined holes HL1-HL3 to direct a direction of a detection axis to a vertical direction, the displacement of the vertical direction of the sensors SS1-SS3 is zero only by arranging the sensors SS1-SS3 in the holes HL1-HL3 since a position where deflections due to gravity of fixed positions of the three sensors SS1-SS3 are equal is determined. Thereby accurate measurement is enabled. COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：抑制安装在棒状传感器保持器上的三个传感器中的垂直方向的位移。解决方案：由于当传感器SS1-SS3固定在预先确定的孔HL1-HL3中时，通过考虑两点支撑梁的集中质量和分布质量来计算传感器支架SH的偏转量，以引导检测轴向垂直方向的方向，传感器SS1-SS3的垂直方向的位移仅通过将传感器SS1-SS3布置在孔HL1-HL3中，因为由于固定位置的重力引起的偏移的位置确定三个传感器SS1-SS3相等。从而能够进行准确的测量。版权所有（C）2010，JPO＆INPIT

8. 发明专利

JP2010066139A Level 有权
标题翻译：水平
公开(公告)号：JP2010066139A
公开(公告)日：2010-03-25
申请号：JP2008232999
申请日：2008-09-11
申请人： Satoshi Kiyono , Obishi Keiki Seisakusho:Kk , 株式会社大菱計器製作所 , 慧清野
发明人： KIYONO SATOSHI , SHIMAZU KATSUYOSHI
IPC分类号： G01C9/12 , G01C9/06
摘要： PROBLEM TO BE SOLVED: To provide a new principle and a new structure for building a level which is small in sized, light in weight, high in accuracy, and can quickly response, and to provide the level which has performance required by an industrial world. SOLUTION: The level includes a support frame LW which is not changed in shape according to the direction of gravity, nor changed in the direction, a pendulum W which is suspended from the support frame LW by a wire rod FS and changed in posture according to the direction of gravity, an angle detecting plane on which a light beam from a light source OPS fixed to the support frame LW is made incident and fixed on the pendulum W, and light receiving parts PD1 and PD2 which receive light beam from the light source OPS reflected on or transmitted through the angle detecting plane. The relative change in the postures of the pendulum W and the support frame LW is detected. COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：提供一个新的原理和新的结构，用于建立一个体积小，重量轻，精度高，可以快速响应的水平，并提供具有所需性能的水平一个工业世界。解决方案：该液位包括一根根据重力方向不变形的支撑框架LW，也不改变方向，摆杆W由线材FS悬挂在支撑框架LW上并改变根据重力方向的姿势，将固定在支撑框架LW上的来自光源OPS的光束入射并固定在摆动W上的角度检测平面，以及从该光接收部PD1和PD2接收来自光源OPS在角度检测平面上反射或透射。检测摆W和支架LW的姿势的相对变化。版权所有（C）2010，JPO＆INPIT

9. 发明专利

JP2005160191A Drive device 审中-公开
标题翻译：驱动装置
公开(公告)号：JP2005160191A
公开(公告)日：2005-06-16
申请号：JP2003394240
申请日：2003-11-25
申请人： Satoshi Kiyono , Takenobu Motoki , Makoto Tano , Yoji Watanabe , 健順元木 , 慧清野 , 陽司渡辺 , 誠田野
发明人： KIYONO SATOSHI , TANO MAKOTO , WATANABE YOJI , MOTOKI TAKENOBU
IPC分类号： H02N2/00 , H02N1/00
摘要： PROBLEM TO BE SOLVED: To provide a drive device in which a wide range movement of a moving member is ensured inexpensively, and driving can be carried out while employing the periodic structure of a surface shape formed by applying machining to a uniform material as the basic period of step width in place of a hard-to-manufacture electrode or magnetic pole having a fine pitch periodic structure. SOLUTION: Left inclining face (driving face) of the tooth 23a at a driving section 23 approaches or touches the right inclining face (driven face) of the tooth 11 of a moving member 10, and an electrostatic repulsive force generated through approach of charges having the same polarity and a mechanical contact reaction depending on the case are added to the pressing force. When the right inclining face of the tooth 11 is pressed by the left inclining face of the tooth 23a, a reaction is generated in the moving member 10 in the normal direction but since the moving member 10 is movable only in the left/right direction on the drawing, the horizontal component of that force pushes out the moving member 10 leftward on the drawing depending on the elongation of a second actuator 22. COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：解决问题的方案：提供一种驱动装置，其中可以廉价地确保移动部件的宽范围移动，并且可以在采用通过对均匀材料进行加工形成的表面形状的周期性结构的同时进行驱动作为阶梯宽度的基本周期代替具有细间距周期性结构的难以制造的电极或磁极。解决方案：驱动部分23处的齿23a的左倾斜面（驱动面）接近或接触移动部件10的齿11的右倾斜面（驱动面）和通过接近产生的静电排斥力的具有相同极性的电荷和根据情况的机械接触反应被加到压力中。当齿11的右倾斜面被齿23a的左倾斜面压紧时，移动部件10沿正常方向产生反作用，但由于移动部件10只能在左右方向上移动在图中，该力的水平分量根据第二致动器22的伸长率将移动构件10向外推动在图中。[C]版权所有（C）2005，JPO＆NCIPI

10. 发明专利

JP2011169815A Calibration device and measuring device 有权
标题翻译：校准装置和测量装置
公开(公告)号：JP2011169815A
公开(公告)日：2011-09-01
申请号：JP2010035065
申请日：2010-02-19
申请人： Satoshi Kiyono , Shoichi Shimada , Yutaka Uda , 豊宇田 , 尚一島田 , 慧清野
发明人： SHIMADA SHOICHI , UDA YUTAKA , KIYONO SATOSHI
IPC分类号： G01B21/22 , G01B11/26
摘要： PROBLEM TO BE SOLVED: To provide a calibration device and a straight form measuring device which can rapidly, accurately and simply realize a zero point calibration of an angle two point method probe by maintaining a robustness to an environment of the angle two point method.
SOLUTION: The calibration device fixes two angle sensors SS1 to SS2 as objects to be calibrated relative to disks CP1 to CP2. At a turning angle θ=0°, inclination angles of two polygon mirrors CP1 to CP2 are measured by using the angle sensors SS1 to SS2 respectively to obtain a first measured value. At a turning angle θ=180°, inclination angles of the two polygon mirrors CP1 to CP2 are measured by using the angle sensors SS1 to SS2 to obtain a second measured value. In accordance with the first measured value and the second measured value, a zero point error of the angle sensor can be calibrated.
COPYRIGHT: (C)2011,JPO&INPIT
摘要翻译：要解决的问题：提供一种校准装置和直形测量装置，其可以通过保持对角度两点的环境的鲁棒性来快速，准确和简单地实现角度二点法探针的零点校准方法。
解决方案：校准装置将两个角度传感器SS1至SS2固定为要相对于盘CP1至CP2进行校准的对象。在转角θ= 0°的情况下，分别使用角度传感器SS1〜SS2测定两个多面镜CP1〜CP2的倾斜角度，得到第一测定值。在转角θ= 180°时，通过使用角度传感器SS1〜SS2来测定两个多面镜CP1〜CP2的倾斜角度，得到第二测定值。根据第一测量值和第二测量值，可以校准角度传感器的零点误差。版权所有（C）2011，JPO＆INPIT

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