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1. 发明专利

JP2005160191A Drive device 审中-公开
标题翻译：驱动装置
公开(公告)号：JP2005160191A
公开(公告)日：2005-06-16
申请号：JP2003394240
申请日：2003-11-25
申请人： Satoshi Kiyono , Takenobu Motoki , Makoto Tano , Yoji Watanabe , 健順元木 , 慧清野 , 陽司渡辺 , 誠田野
发明人： KIYONO SATOSHI , TANO MAKOTO , WATANABE YOJI , MOTOKI TAKENOBU
IPC分类号： H02N2/00 , H02N1/00
摘要： PROBLEM TO BE SOLVED: To provide a drive device in which a wide range movement of a moving member is ensured inexpensively, and driving can be carried out while employing the periodic structure of a surface shape formed by applying machining to a uniform material as the basic period of step width in place of a hard-to-manufacture electrode or magnetic pole having a fine pitch periodic structure. SOLUTION: Left inclining face (driving face) of the tooth 23a at a driving section 23 approaches or touches the right inclining face (driven face) of the tooth 11 of a moving member 10, and an electrostatic repulsive force generated through approach of charges having the same polarity and a mechanical contact reaction depending on the case are added to the pressing force. When the right inclining face of the tooth 11 is pressed by the left inclining face of the tooth 23a, a reaction is generated in the moving member 10 in the normal direction but since the moving member 10 is movable only in the left/right direction on the drawing, the horizontal component of that force pushes out the moving member 10 leftward on the drawing depending on the elongation of a second actuator 22. COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：解决问题的方案：提供一种驱动装置，其中可以廉价地确保移动部件的宽范围移动，并且可以在采用通过对均匀材料进行加工形成的表面形状的周期性结构的同时进行驱动作为阶梯宽度的基本周期代替具有细间距周期性结构的难以制造的电极或磁极。解决方案：驱动部分23处的齿23a的左倾斜面（驱动面）接近或接触移动部件10的齿11的右倾斜面（驱动面）和通过接近产生的静电排斥力的具有相同极性的电荷和根据情况的机械接触反应被加到压力中。当齿11的右倾斜面被齿23a的左倾斜面压紧时，移动部件10沿正常方向产生反作用，但由于移动部件10只能在左右方向上移动在图中，该力的水平分量根据第二致动器22的伸长率将移动构件10向外推动在图中。[C]版权所有（C）2005，JPO＆NCIPI

2. 发明专利

JP2005160192A Drive device 有权
标题翻译：驱动装置
公开(公告)号：JP2005160192A
公开(公告)日：2005-06-16
申请号：JP2003394241
申请日：2003-11-25
申请人： Satoshi Kiyono , Takenobu Motoki , Makoto Tano , Yoji Watanabe , 健順元木 , 慧清野 , 陽司渡辺 , 誠田野
发明人： KIYONO SATOSHI , TANO MAKOTO , WATANABE YOJI , MOTOKI TAKENOBU
IPC分类号： H02N2/00
摘要： PROBLEM TO BE SOLVED: To provide a drive device in which movement of a moving member can be ensured inexpensively while suppressing generation of friction powder. SOLUTION: Since the moving direction (up/down direction) when a tooth 23a approaches a tooth 11 is different from the moving direction (up/down direction) after contact, the tooth 23a simply touches the tooth 11 and no slip take place. Consequently friction powder is not generated and the driver can be used under a clean environment, e.g. a clean room. COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：提供一种能够在抑制摩擦粉的产生的同时廉价地确保移动部件的移动的驱动装置。解决方案：由于当齿23a接近齿11时的移动方向（上/下方向）与接触后的移动方向（上/下方向）不同，所以齿23a简单地接触齿11并且没有滑动地点。因此，不产生摩擦粉末，并且驾驶员可以在清洁的环境下使用，例如，一个干净的房间。版权所有（C）2005，JPO＆NCIPI

3. 发明授权

US08784156B2 Grinding method for grinding a workpiece using a grinding wheel 有权
标题翻译：使用砂轮研磨工件的研磨方法
公开(公告)号：US08784156B2
公开(公告)日：2014-07-22
申请号：US13178871
申请日：2011-07-08
申请人： Makoto Tano , Yoshio Wakazono
发明人： Makoto Tano , Yoshio Wakazono
IPC分类号： B24B1/00 , B24B49/18 , B24B51/00
CPC分类号： G05B19/4163 , B24B1/00 , B24B5/02 , B24B49/003 , B24B49/045 , B24B49/18 , B24B53/053 , G05B2219/37269
摘要： A core grinding wheel that has a grinding layer on an outer periphery of a core is used. An ultrasonic wave is output from an ultrasonic sensor to the grinding layer via grinding fluid. An ultrasonic measuring device control unit calculates a thickness of the grinding layer on the basis of a sonic velocity in the grinding layer and an arrival time difference between a reflected wave from a surface of the grinding layer and a reflected wave from a surface of the outer periphery of the core. A grinding process and a truing process are controlled on the basis of an outside diameter of the grinding wheel, which is calculated on the basis of the measured thickness of the grinding layer and an outside diameter of the core.
摘要翻译：使用在芯的外周具有研磨层的芯砂轮。超声波通过研磨液从超声波传感器输出到研磨层。超声波测量装置控制单元基于研磨层中的声速计算研磨层的厚度以及来自研磨层的表面的反射波与来自外部表面的反射波之间的到达时间差核心周边。基于研磨层的测量厚度和芯的外径计算的磨轮的外径来控制磨削过程和修整过程。

4. 发明授权

US07257902B2 Stage device 失效
标题翻译：舞台装置
公开(公告)号：US07257902B2
公开(公告)日：2007-08-21
申请号：US11522400
申请日：2006-09-18
申请人： Wei Gao , Satoshi Kiyono , Yoshiyuki Tomita , Makoto Tano
发明人： Wei Gao , Satoshi Kiyono , Yoshiyuki Tomita , Makoto Tano
IPC分类号： G01D21/00
CPC分类号： G03F7/70775 , G03F7/70716
摘要： This invention relates to a stage device which is moved with high accuracy in an X-Y direction and a rotating direction using a planar motor. The invention is aimed at reducing the size of the stage device and at performing accurately measurement of a position of the stage to the base. The stage device comprises a scale unit having a scale part on the entire plane of the base, and three two-dimensional angle sensors disposed on a bottom surface of a movable stage part. The scale unit and the two-dimensional angle sensors form a surface encode. A position of the movable stage part is measured by the surface encoder.
摘要翻译：本发明涉及一种使用平面电机在X-Y方向和旋转方向上高精度地移动的平台装置。本发明的目的在于减小舞台装置的尺寸并且准确地测量舞台到底座的位置。舞台装置包括在基座的整个平面上具有刻度部分的刻度单元，以及设置在可移动台部的底面上的三个二维角度传感器。刻度单元和二维角度传感器形成表面编码。可动平台部分的位置由表面编码器测量。

5. 发明申请

US20070035267A1 Stage device 失效
公开(公告)号：US20070035267A1
公开(公告)日：2007-02-15
申请号：US11522400
申请日：2006-09-18
申请人： Wei Gao , Satoshi Kiyono , Yoshiyuki Tomita , Makoto Tano
发明人： Wei Gao , Satoshi Kiyono , Yoshiyuki Tomita , Makoto Tano
IPC分类号： B64C17/06
CPC分类号： G03F7/70775 , G03F7/70716
摘要： This invention relates to a stage device which is moved with high accuracy in an X-Y direction and a rotating direction using a planar motor. The invention is aimed at reducing the size of the stage device and at performing accurately measurement of a position of the stage to the base. The stage device comprises a scale unit having a scale part on the entire plane of the base, and three two-dimensional angle sensors disposed on a bottom surface of a movable stage part. The scale unit and the two-dimensional angle sensors form a surface encode. A position of the movable stage part is measured by the surface encoder.

6. 发明申请

US20120028543A1 GRINDING METHOD AND GRINDING MACHINE 有权
标题翻译：研磨方法和研磨机
公开(公告)号：US20120028543A1
公开(公告)日：2012-02-02
申请号：US13178871
申请日：2011-07-08
申请人： Makoto Tano , Yoshio Wakazono
发明人： Makoto Tano , Yoshio Wakazono
IPC分类号： B24B49/00
CPC分类号： G05B19/4163 , B24B1/00 , B24B5/02 , B24B49/003 , B24B49/045 , B24B49/18 , B24B53/053 , G05B2219/37269
摘要： A core grinding wheel that has a grinding layer on an outer periphery of a core is used. An ultrasonic wave is output from an ultrasonic sensor to the grinding layer via grinding fluid. An ultrasonic measuring device control unit calculates a thickness of the grinding layer on the basis of a sonic velocity in the grinding layer and an arrival time difference between a reflected wave from a surface of the grinding layer and a reflected wave from a surface of the outer periphery of the core. A grinding process and a truing process are controlled on the basis of an outside diameter of the grinding wheel, which is calculated on the basis of the measured thickness of the grinding layer and an outside diameter of the core.
摘要翻译：使用在芯的外周具有研磨层的芯砂轮。超声波通过研磨液从超声波传感器输出到研磨层。超声波测量装置控制单元基于研磨层中的声速计算研磨层的厚度以及来自研磨层的表面的反射波与来自外部表面的反射波之间的到达时间差核心周边。基于研磨层的测量厚度和芯的外径计算的磨轮的外径来控制磨削过程和修整过程。

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