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1. 发明授权

US07115969B1 Fixed parallel plate MEMS capacitor microsensor and microsensor array and method of making same 有权
标题翻译：固定平行板MEMS电容微传感器和微传感器阵列及其制作方法
公开(公告)号：US07115969B1
公开(公告)日：2006-10-03
申请号：US10242966
申请日：2002-09-13
申请人： Sanjay V. Patel , Bernd Fruhberger , Erno Klaassen , Todd E. Misna , David R. Baselt
发明人： Sanjay V. Patel , Bernd Fruhberger , Erno Klaassen , Todd E. Misna , David R. Baselt
IPC分类号： H01L29/00
CPC分类号： B81C1/00341 , B81B2201/0214 , B81C1/00182 , G01N27/227 , H01G5/18
摘要： A fixed parallel plate micro-mechanical systems (MEMS) based sensor is fabricated to allow a dissolved dielectric to flow through a porous top plate, coming to rest on a bottom plate. A post-deposition bake ensures further purity and uniformity of the dielectric layer. In one embodiment, the dielectric is a polymer. In one embodiment, a support layer is deposited onto the top plate for strengthening the sensor. In another embodiment, the bottom plate is dual-layered for a narrowed gap. Integrated circuit arrays of such sensors can be made, having multiple devices separated from each other by a physical barrier, such as a polycrystalline containment rim or trough, for preventing polymer material from one sensor from interfering with that of another.
摘要翻译：制造基于固定平行板微机械系统（MEMS）的传感器，以使溶解的电介质流过多孔顶板，停留在底板上。沉积后烘烤确保了电介质层的进一步纯度和均匀性。在一个实施方案中，电介质是聚合物。在一个实施例中，支撑层沉积在顶板上以加强传感器。在另一个实施例中，底板是双层的，用于狭窄的间隙。可以制造这种传感器的集成电路阵列，其具有通过物理屏障（例如多晶容纳边缘或槽）彼此分离的多个装置，用于防止来自一个传感器的聚合物材料与另一传感器的干扰。

2. 发明授权

US07489017B2 Fixed parallel plate MEMS capacitor microsensor array 有权
标题翻译：固定平行板MEMS电容微传感器阵列
公开(公告)号：US07489017B2
公开(公告)日：2009-02-10
申请号：US11542741
申请日：2006-10-02
申请人： Sanjay V. Patel , Bernd Fruhberger , Erno Klaassen , Todd E. Mlsna , David R. Baselt
发明人： Sanjay V. Patel , Bernd Fruhberger , Erno Klaassen , Todd E. Mlsna , David R. Baselt
IPC分类号： H01L29/00
CPC分类号： B81C1/00341 , B81B2201/0214 , B81C1/00182 , G01N27/227 , H01G5/18
摘要： A fixed parallel plate micro-mechanical systems (MEMS) based sensor is fabricated to allow a dissolved dielectric to flow through a porous top plate, coming to rest on a bottom plate. A post-deposition bake ensures further purity and uniformity of the dielectric layer. In one embodiment, the dielectric is a polymer. In one embodiment, a support layer is deposited onto the top plate for strengthening the sensor. In another embodiment, the bottom plate is dual-layered for a narrowed gap. Integrated circuit arrays of such sensors can be made, having multiple devices separated from each other by a physical barrier, such as a polycrystalline containment rim or trough, for preventing polymer material from one sensor from interfering with that of another.
摘要翻译：制造基于固定平行板微机械系统（MEMS）的传感器，以使溶解的电介质流过多孔顶板，停留在底板上。沉积后烘烤确保了电介质层的进一步纯度和均匀性。在一个实施方案中，电介质是聚合物。在一个实施例中，支撑层沉积在顶板上以加强传感器。在另一个实施例中，底板是双层的，用于狭窄的间隙。可以制造这种传感器的集成电路阵列，其具有通过物理屏障（例如多晶容纳边缘或槽）彼此分离的多个装置，用于防止来自一个传感器的聚合物材料与另一传感器的干扰。

3. 发明授权

US06864692B1 Sensor having improved selectivity 有权
标题翻译：传感器具有提高的选择性
公开(公告)号：US06864692B1
公开(公告)日：2005-03-08
申请号：US10177133
申请日：2002-06-20
申请人： Sanjay V. Patel , Bernd Fruhberger , Robert J. Warmack , Todd E. Mlsna , David R. Baselt , Erno Klaassen
发明人： Sanjay V. Patel , Bernd Fruhberger , Robert J. Warmack , Todd E. Mlsna , David R. Baselt , Erno Klaassen
IPC分类号： G01N27/22 , G01R27/26 , H01G5/16
CPC分类号： G01N27/227
摘要： A sensor for determining the presence of an analyte is disclosed comprising a reactive layer disposed between a base plate and a movable plate. The reactive layer is configured to interact with an analyte effecting a change in capacitance between the base plate and movable plate. When the analyte has a polarity or overall Hildebrand solubility parameter that is similar to the reactive layer, the change in capacitance is caused by a swelling of the reactive layer as analyte is absorbed into the reactive layer. This results in a decrease in capacitance. When the analyte has a solubility parameter not near the reactive layer, the absorbed analyte causes the reactive layer's total polarity to increase, an effect that dominates swelling. This causes an increase in capacitance. A capacitive sensing circuit is included for measuring the change in capacitance which is indicative of the analyte exposed to the sensor.
摘要翻译：公开了一种用于确定分析物存在的传感器，其包括设置在基板和可移动板之间的反应层。反应层被配置为与分析物相互作用，影响基板和可移动板之间的电容变化。当分析物具有类似于反应层的极性或整体Hildebrand溶解度参数时，电容的变化是由反应层的溶胀引起的，因为分析物被吸收到反应层中。这导致电容降低。当分析物具有不在反应层附近的溶解度参数时，吸收的分析物导致反应层的总极性增加，这是影响溶胀的作用。这导致电容增加。包括电容感测电路，用于测量表明分析物暴露于传感器的电容变化。

4. 发明授权

US07393740B2 Methods for making fixed parallel plate MEMS capacitor microsensors and microsensor arrays 有权
标题翻译：制造固定平行板MEMS电容式微型传感器和微型传感器阵列的方法
公开(公告)号：US07393740B2
公开(公告)日：2008-07-01
申请号：US11725609
申请日：2007-03-20
申请人： Sanjay V. Patel , Bernd Fruhberger , Erno Klaassen , Todd E. Mlsna , David R. Baselt
发明人： Sanjay V. Patel , Bernd Fruhberger , Erno Klaassen , Todd E. Mlsna , David R. Baselt
IPC分类号： H01L29/00 , H01L21/8244 , H01L21/8242 , H01L21/20
CPC分类号： B81C1/00341 , B81B2201/0214 , B81C1/00182 , G01N27/227 , H01G5/18
摘要： A fixed parallel plate micro-mechanical systems (MEMS) based sensor is fabricated to allow a dissolved dielectric to flow through a porous top plate, coming to rest on a bottom plate. A post-deposition bake ensures further purity and uniformity of the dielectric layer. In one embodiment the dielectric is a polymer. In one embodiment, a support layer is deposited onto the top plate for strengthening the sensor. In another embodiment, the bottom plate is dual-layered for a narrowed gap. Integrated circuit arrays of such sensors can be made, having multiple devices separated from each other by a physical barrier, such as a polycrystalline containment rim or trough, for preventing polymer material from one sensor from interfering with that of another.
摘要翻译：制造基于固定平行板微机械系统（MEMS）的传感器，以使溶解的电介质流过多孔顶板，停留在底板上。沉积后烘烤确保了电介质层的进一步纯度和均匀性。在一个实施方案中，电介质是聚合物。在一个实施例中，支撑层沉积在顶板上以加强传感器。在另一个实施例中，底板是双层的，用于狭窄的间隙。可以制造这种传感器的集成电路阵列，其具有通过物理屏障（例如多晶容纳边缘或槽）彼此分离的多个装置，用于防止来自一个传感器的聚合物材料与另一传感器的干扰。

5. 发明授权

US06977511B2 Sensor and sensor array having improved selectivity 有权
标题翻译：传感器和传感器阵列具有改进的选择性
公开(公告)号：US06977511B2
公开(公告)日：2005-12-20
申请号：US11082634
申请日：2005-03-08
申请人： Sanjay V. Patel , Bernd Fruhberger , Robert J. Warmack , Todd E. Mlsna , David R. Baselt , Erno Klaassen
发明人： Sanjay V. Patel , Bernd Fruhberger , Robert J. Warmack , Todd E. Mlsna , David R. Baselt , Erno Klaassen
IPC分类号： G01N27/22 , G01R27/26 , H01G5/16
CPC分类号： G01N27/227
摘要： A sensor for determining the presence of an analyte is disclosed comprising a reactive layer disposed between a base plate and a movable plate. The reactive layer is configured to interact with an analyte effecting a change in capacitance between the base plate and movable plate. When the analyte has a polarity or overall Hildebrand solubility parameter that is similar to the reactive layer, the change in capacitance is caused by a swelling of the reactive layer as analyte is absorbed into the reactive layer. This results in a decrease in capacitance. When the analyte has a solubility parameter not near the reactive layer, the absorbed analyte causes the reactive layer's total polarity to increase, an effect that dominates swelling. This causes an increase in capacitance. A capacitive sensing circuit is included for measuring the change in capacitance which is indicative of the analyte exposed to the sensor.
摘要翻译：公开了一种用于确定分析物存在的传感器，其包括设置在基板和可移动板之间的反应层。反应层被配置为与分析物相互作用，影响基板和可移动板之间的电容变化。当分析物具有类似于反应层的极性或整体Hildebrand溶解度参数时，电容的变化是由反应层的溶胀引起的，因为分析物被吸收到反应层中。这导致电容降低。当分析物具有不在反应层附近的溶解度参数时，吸收的分析物导致反应层的总极性增加，这是影响溶胀的作用。这导致电容增加。包括电容感测电路，用于测量表明分析物暴露于传感器的电容变化。

6. 发明申请

US20100307224A1 PRECONCENTRATORS AND METHODS OF MAKING AND USING THE SAME 有权
标题翻译：预处理器及其制造和使用方法
公开(公告)号：US20100307224A1
公开(公告)日：2010-12-09
申请号：US12771835
申请日：2010-04-30
申请人： Jonathan Day Lucas , Manna Leon Warburton , Todd Mlsna , Sanjay V. Patel , Stephen Terrence Hobson
发明人： Jonathan Day Lucas , Manna Leon Warburton , Todd Mlsna , Sanjay V. Patel , Stephen Terrence Hobson
IPC分类号： G01N1/40
CPC分类号： G01N30/08 , G01N2030/085 , G01N2030/126
摘要： Apparatus, systems and methods are described for preconcentrators, chemical sensing systems and gas chromatographs. A preconcentrator is described that comprises a hollow enclosure containing a sorbent material. The enclosure may be a capillary tube that can be formed in to a desired shape and that may be heated. Heating may be accomplished by passing an electrical current through the capillary or other hollow enclosure form. The sorbent material can be a liquid, a solid, a porous ceramic material and/or a chemiselective polymer. The sorbent material can be coated to the inner wall of the enclosure. The hollow enclosure may be maintained in an insulated chamber. The preconcentrator acts to concentrate a vapor passed through the preconcentrator to a chemical sensing array that can detect chemicals present in the vapor. A gas passed through the hollow enclosure can provide a chemically concentrated input to a chromatographic column.
摘要翻译：描述了用于预浓缩器，化学传感系统和气相色谱仪的装置，系统和方法。描述了一种预浓缩器，其包含含有吸附剂材料的中空外壳。外壳可以是可以形成为期望形状并且可以被加热的毛细管。加热可以通过使电流通过毛细管或其它中空的外壳形式来实现。吸附剂材料可以是液体，固体，多孔陶瓷材料和/或化学选择性聚合物。吸附剂材料可以涂覆到外壳的内壁。中空的外壳可以保持在绝缘室中。预浓缩器用于将通过预浓缩器的蒸汽浓缩到可以检测蒸气中存在的化学物质的化学传感阵列。通过中空外壳的气体可以向色谱柱提供化学浓度的输入。

7. 发明申请

US20080148815A1 PRECONCENTRATORS AND METHODS OF MAKING AND USING THE SAME 失效
标题翻译：预处理器及其制造和使用方法
公开(公告)号：US20080148815A1
公开(公告)日：2008-06-26
申请号：US11836736
申请日：2007-08-09
申请人： Jonathan Day Lucas , Manna Leon Warburton , Todd Mlsna , Sanjay V. Patel , Stephen Terrence Hobson
发明人： Jonathan Day Lucas , Manna Leon Warburton , Todd Mlsna , Sanjay V. Patel , Stephen Terrence Hobson
IPC分类号： G01N1/40
CPC分类号： G01N30/08 , G01N2030/085 , G01N2030/126
摘要： Apparatus, systems and methods are described for preconcentrators, chemical sensing systems and gas chromatographs. A preconcentrator is described that comprises a hollow enclosure containing a sorbent material. The enclosure may be a capillary tube that can be formed in to a desired shape and that may be heated. Heating may be accomplished by passing an electrical current through the capillary or other hollow enclosure form. The sorbent material can be a liquid, a solid, a porous ceramic material and/or a chemiselective polymer. The sorbent material can be coated to the inner wall of the enclosure. The hollow enclosure may be maintained in an insulated chamber. The preconcentrator acts to concentrate a vapor passed through the preconcentrator to a chemical sensing array that can detect chemicals present in the vapor. A gas passed through the hollow enclosure can provide a chemically concentrated input to a chromatographic column.
摘要翻译：描述了用于预浓缩器，化学传感系统和气相色谱仪的装置，系统和方法。描述了一种预浓缩器，其包含含有吸附剂材料的中空外壳。外壳可以是可以形成为期望形状并且可以被加热的毛细管。加热可以通过使电流通过毛细管或其它中空的外壳形式来实现。吸附剂材料可以是液体，固体，多孔陶瓷材料和/或化学选择性聚合物。吸附剂材料可以涂覆到外壳的内壁。中空的外壳可以保持在绝缘室中。预浓缩器用于将通过预浓缩器的蒸汽浓缩到可以检测蒸气中存在的化学物质的化学传感阵列。通过中空外壳的气体可以向色谱柱提供化学浓度的输入。

8. 发明授权

US5731587A Hot stage for scanning probe microscope 失效
标题翻译：扫描探针显微镜的热台
公开(公告)号：US5731587A
公开(公告)日：1998-03-24
申请号：US695799
申请日：1996-08-12
申请人： Michael DiBattista , Sanjay V. Patel , John L. Gland , Johannes W. Schwank
发明人： Michael DiBattista , Sanjay V. Patel , John L. Gland , Johannes W. Schwank
IPC分类号： B81C1/00 , G01Q30/10 , G01Q30/20 , G21K5/08 , H01J37/20
CPC分类号： G01Q30/10 , G21K5/08 , H01J37/20 , H01J2237/2001 , H01J2237/2065 , Y10S977/86 , Y10S977/871
摘要： A hot stage for a scanning probe microscope includes a substrate having a dielectric window region which is stress compensated to be held in mild tension at elevated temperatures. A heating element is supplied to heat a specimen deposited on the dielectric widow region and the scanning probe microscope is used to observe specimen characteristics at the elevated temperatures. The dielectric window region is configured to be thermally isolated from the rest of the hot stage allowing only a minimum amount of heat to be dissipated into the scanning probe microscope. Temperature sensing resistors are included for monitoring the temperature in the dielectric window region. Conductivity cell electrodes can also be included for sensing the conductivity and capacitance of the specimen. Furthermore, additional control and measurement hardware, such as a temperature sensor circuit, evaluation station, the ramp generator circuit, etc. can be included to provide additional system features.
摘要翻译：用于扫描探针显微镜的热阶段包括具有电介质窗口区域的基底，其被应力补偿以在升高的温度下保持温和的张力。供应加热元件以加热沉积在电介质寡妇区域上的试样，并且使用扫描探针显微镜在升高的温度下观察样品特性。电介质窗口区域被配置为与热台的其余部分热隔离，仅允许最少量的热量散发到扫描探针显微镜中。包含温度检测电阻用于监测电介质窗口区域的温度。还可以包括电导池电极，用于感测样品的电导率和电容。此外，可以包括额外的控制和测量硬件，例如温度传感器电路，评估站，斜坡发生器电路等，以提供额外的系统特征。

9. 发明授权

US08333105B2 Preconcentrators and methods of making and using the same 有权
标题翻译：预收敛者及其使用方法
公开(公告)号：US08333105B2
公开(公告)日：2012-12-18
申请号：US12771835
申请日：2010-04-30
申请人： Jonathan Day Lucas , Manna Leon Warburton , Todd Mlsna , Sanjay V. Patel , Stephen Terrence Hobson
发明人： Jonathan Day Lucas , Manna Leon Warburton , Todd Mlsna , Sanjay V. Patel , Stephen Terrence Hobson
IPC分类号： G01N30/08
CPC分类号： G01N30/08 , G01N2030/085 , G01N2030/126
摘要： Apparatus, systems and methods are described for preconcentrators, chemical sensing systems and gas chromatographs. A preconcentrator is described that comprises a hollow enclosure containing a sorbent material. The enclosure may be a capillary tube that can be formed in to a desired shape and that may be heated. Heating may be accomplished by passing an electrical current through the capillary or other hollow enclosure form. The sorbent material can be a liquid, a solid, a porous ceramic material and/or a chemiselective polymer. The sorbent material can be coated to the inner wall of the enclosure. The hollow enclosure may be maintained in an insulated chamber. The preconcentrator acts to concentrate a vapor passed through the preconcentrator to a chemical sensing array that can detect chemicals present in the vapor. A gas passed through the hollow enclosure can provide a chemically concentrated input to a chromatographic column.
摘要翻译：描述了用于预浓缩器，化学传感系统和气相色谱仪的装置，系统和方法。描述了一种预浓缩器，其包含含有吸附剂材料的中空外壳。外壳可以是可以形成为期望形状并且可以被加热的毛细管。加热可以通过使电流通过毛细管或其它中空的外壳形式来实现。吸附剂材料可以是液体，固体，多孔陶瓷材料和/或化学选择性聚合物。吸附剂材料可以涂覆到外壳的内壁。中空的外壳可以保持在绝缘室中。预浓缩器用于将通过预浓缩器的蒸汽浓缩到可以检测蒸气中存在的化学物质的化学传感阵列。通过中空外壳的气体可以向色谱柱提供化学浓度的输入。

10. 发明授权

US07837844B2 Interdigitated chemical sensors, and methods of making and using the same 有权
标题翻译：交叉化学传感器，以及制造和使用它们的方法
公开(公告)号：US07837844B2
公开(公告)日：2010-11-23
申请号：US11115911
申请日：2005-04-26
申请人： Sanjay V. Patel , Todd E. Mlsna , Erno Klaasen
发明人： Sanjay V. Patel , Todd E. Mlsna , Erno Klaasen
IPC分类号： G01N27/327 , G01N27/30
CPC分类号： G01N27/226
摘要： The present invention relates to the field of chemical detection. More specifically, the invention provides devices that can detect various target analytes (e.g., chemicals and/or biological materials) present in an environment by adsorption or absorption of the target analyte(s) to or in a chemical sensing material such that an electrical parameter (e.g., capacitance, resistance, etc.) of the chemical sensing material is altered in a manner detectable by circuitry associated with the sensing electrode pair coated with the chemical sensing material. Here, the sensing electrode pair(s) of the devices of the invention are suspended over an inert substrate via one or more posts used to space the electrodes from the substrate.
摘要翻译：本发明涉及化学检测领域。更具体地，本发明提供了可以通过吸附或吸收目标分析物到化学感测材料中或在化学感测材料中来检测存在于环境中的各种目标分析物（例如，化学品和/或生物材料）的装置，使得电参数（例如，电容，电阻等）以与通过化学感测材料涂覆的感测电极对相关联的电路可检测的方式改变。这里，本发明的器件的感测电极对通过用于将电极从衬底放置的一个或多个柱悬置在惰性衬底上。

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