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1. 发明授权

US07489017B2 Fixed parallel plate MEMS capacitor microsensor array 有权
标题翻译：固定平行板MEMS电容微传感器阵列
公开(公告)号：US07489017B2
公开(公告)日：2009-02-10
申请号：US11542741
申请日：2006-10-02
申请人： Sanjay V. Patel , Bernd Fruhberger , Erno Klaassen , Todd E. Mlsna , David R. Baselt
发明人： Sanjay V. Patel , Bernd Fruhberger , Erno Klaassen , Todd E. Mlsna , David R. Baselt
IPC分类号： H01L29/00
CPC分类号： B81C1/00341 , B81B2201/0214 , B81C1/00182 , G01N27/227 , H01G5/18
摘要： A fixed parallel plate micro-mechanical systems (MEMS) based sensor is fabricated to allow a dissolved dielectric to flow through a porous top plate, coming to rest on a bottom plate. A post-deposition bake ensures further purity and uniformity of the dielectric layer. In one embodiment, the dielectric is a polymer. In one embodiment, a support layer is deposited onto the top plate for strengthening the sensor. In another embodiment, the bottom plate is dual-layered for a narrowed gap. Integrated circuit arrays of such sensors can be made, having multiple devices separated from each other by a physical barrier, such as a polycrystalline containment rim or trough, for preventing polymer material from one sensor from interfering with that of another.
摘要翻译：制造基于固定平行板微机械系统（MEMS）的传感器，以使溶解的电介质流过多孔顶板，停留在底板上。沉积后烘烤确保了电介质层的进一步纯度和均匀性。在一个实施方案中，电介质是聚合物。在一个实施例中，支撑层沉积在顶板上以加强传感器。在另一个实施例中，底板是双层的，用于狭窄的间隙。可以制造这种传感器的集成电路阵列，其具有通过物理屏障（例如多晶容纳边缘或槽）彼此分离的多个装置，用于防止来自一个传感器的聚合物材料与另一传感器的干扰。

2. 发明授权

US07393740B2 Methods for making fixed parallel plate MEMS capacitor microsensors and microsensor arrays 有权
标题翻译：制造固定平行板MEMS电容式微型传感器和微型传感器阵列的方法
公开(公告)号：US07393740B2
公开(公告)日：2008-07-01
申请号：US11725609
申请日：2007-03-20
申请人： Sanjay V. Patel , Bernd Fruhberger , Erno Klaassen , Todd E. Mlsna , David R. Baselt
发明人： Sanjay V. Patel , Bernd Fruhberger , Erno Klaassen , Todd E. Mlsna , David R. Baselt
IPC分类号： H01L29/00 , H01L21/8244 , H01L21/8242 , H01L21/20
CPC分类号： B81C1/00341 , B81B2201/0214 , B81C1/00182 , G01N27/227 , H01G5/18
摘要： A fixed parallel plate micro-mechanical systems (MEMS) based sensor is fabricated to allow a dissolved dielectric to flow through a porous top plate, coming to rest on a bottom plate. A post-deposition bake ensures further purity and uniformity of the dielectric layer. In one embodiment the dielectric is a polymer. In one embodiment, a support layer is deposited onto the top plate for strengthening the sensor. In another embodiment, the bottom plate is dual-layered for a narrowed gap. Integrated circuit arrays of such sensors can be made, having multiple devices separated from each other by a physical barrier, such as a polycrystalline containment rim or trough, for preventing polymer material from one sensor from interfering with that of another.
摘要翻译：制造基于固定平行板微机械系统（MEMS）的传感器，以使溶解的电介质流过多孔顶板，停留在底板上。沉积后烘烤确保了电介质层的进一步纯度和均匀性。在一个实施方案中，电介质是聚合物。在一个实施例中，支撑层沉积在顶板上以加强传感器。在另一个实施例中，底板是双层的，用于狭窄的间隙。可以制造这种传感器的集成电路阵列，其具有通过物理屏障（例如多晶容纳边缘或槽）彼此分离的多个装置，用于防止来自一个传感器的聚合物材料与另一传感器的干扰。

3. 发明授权

US07115969B1 Fixed parallel plate MEMS capacitor microsensor and microsensor array and method of making same 有权
标题翻译：固定平行板MEMS电容微传感器和微传感器阵列及其制作方法
公开(公告)号：US07115969B1
公开(公告)日：2006-10-03
申请号：US10242966
申请日：2002-09-13
申请人： Sanjay V. Patel , Bernd Fruhberger , Erno Klaassen , Todd E. Misna , David R. Baselt
发明人： Sanjay V. Patel , Bernd Fruhberger , Erno Klaassen , Todd E. Misna , David R. Baselt
IPC分类号： H01L29/00
CPC分类号： B81C1/00341 , B81B2201/0214 , B81C1/00182 , G01N27/227 , H01G5/18
摘要： A fixed parallel plate micro-mechanical systems (MEMS) based sensor is fabricated to allow a dissolved dielectric to flow through a porous top plate, coming to rest on a bottom plate. A post-deposition bake ensures further purity and uniformity of the dielectric layer. In one embodiment, the dielectric is a polymer. In one embodiment, a support layer is deposited onto the top plate for strengthening the sensor. In another embodiment, the bottom plate is dual-layered for a narrowed gap. Integrated circuit arrays of such sensors can be made, having multiple devices separated from each other by a physical barrier, such as a polycrystalline containment rim or trough, for preventing polymer material from one sensor from interfering with that of another.
摘要翻译：制造基于固定平行板微机械系统（MEMS）的传感器，以使溶解的电介质流过多孔顶板，停留在底板上。沉积后烘烤确保了电介质层的进一步纯度和均匀性。在一个实施方案中，电介质是聚合物。在一个实施例中，支撑层沉积在顶板上以加强传感器。在另一个实施例中，底板是双层的，用于狭窄的间隙。可以制造这种传感器的集成电路阵列，其具有通过物理屏障（例如多晶容纳边缘或槽）彼此分离的多个装置，用于防止来自一个传感器的聚合物材料与另一传感器的干扰。

4. 发明授权

US06864692B1 Sensor having improved selectivity 有权
标题翻译：传感器具有提高的选择性
公开(公告)号：US06864692B1
公开(公告)日：2005-03-08
申请号：US10177133
申请日：2002-06-20
申请人： Sanjay V. Patel , Bernd Fruhberger , Robert J. Warmack , Todd E. Mlsna , David R. Baselt , Erno Klaassen
发明人： Sanjay V. Patel , Bernd Fruhberger , Robert J. Warmack , Todd E. Mlsna , David R. Baselt , Erno Klaassen
IPC分类号： G01N27/22 , G01R27/26 , H01G5/16
CPC分类号： G01N27/227
摘要： A sensor for determining the presence of an analyte is disclosed comprising a reactive layer disposed between a base plate and a movable plate. The reactive layer is configured to interact with an analyte effecting a change in capacitance between the base plate and movable plate. When the analyte has a polarity or overall Hildebrand solubility parameter that is similar to the reactive layer, the change in capacitance is caused by a swelling of the reactive layer as analyte is absorbed into the reactive layer. This results in a decrease in capacitance. When the analyte has a solubility parameter not near the reactive layer, the absorbed analyte causes the reactive layer's total polarity to increase, an effect that dominates swelling. This causes an increase in capacitance. A capacitive sensing circuit is included for measuring the change in capacitance which is indicative of the analyte exposed to the sensor.
摘要翻译：公开了一种用于确定分析物存在的传感器，其包括设置在基板和可移动板之间的反应层。反应层被配置为与分析物相互作用，影响基板和可移动板之间的电容变化。当分析物具有类似于反应层的极性或整体Hildebrand溶解度参数时，电容的变化是由反应层的溶胀引起的，因为分析物被吸收到反应层中。这导致电容降低。当分析物具有不在反应层附近的溶解度参数时，吸收的分析物导致反应层的总极性增加，这是影响溶胀的作用。这导致电容增加。包括电容感测电路，用于测量表明分析物暴露于传感器的电容变化。

5. 发明授权

US5981297A Biosensor using magnetically-detected label 失效
标题翻译：生物传感器使用磁性检测标签
公开(公告)号：US5981297A
公开(公告)日：1999-11-09
申请号：US794979
申请日：1997-02-05
申请人： David R. Baselt
发明人： David R. Baselt
IPC分类号： C12Q1/68 , G01N33/543 , G01N35/00 , G01N33/558 , B01D35/06 , B01J7/00 , B03C1/00
CPC分类号： G01N27/745 , C12Q1/6816 , C12Q1/6837 , G01N33/54326 , G01N33/54373 , G01N35/0098
摘要： This method and apparatus for detecting target molecules in a liquid phase. The apparatus monitors whether the target molecule has selectively bound to recognition agents on the surface of a magnetic field sensor by monitoring the output of the sensor. The recognition agents which selectively bind target molecules are covalently bound to microfabricated magnetic field sensors. These sensors are then exposed to a sample suspected of containing the target molecules, whereupon the recognition agents bind to and immobilize any target molecules present. Depending on the embodiment, recognition agents that selectively bind the target molecule, or recognition agents that selectively bind the sensor-bound recognition agents, are covalently bound to magnetizable particles. These particles are then added to the sensors and, again depending on the embodiment, attach either to any immobilized target molecules or to sensor-bound recognition agents. Unattached particles are removed, and the magnetic particles are then magnetized. A change in the output of the magnetic field sensors indicates the presence of magnetic particles bound to the sensors, and thereby indicates the presence and concentration of target molecule in the sample.
摘要翻译：用于检测液相中靶分子的方法和装置。该装置通过监测传感器的输出来监视目标分子是否选择性地结合到磁场传感器表面上的识别剂。选择性地结合靶分子的识别剂共价结合到微制造的磁场传感器。然后将这些传感器暴露于怀疑含有靶分子的样品，于是识别剂结合并固定存在的任何靶分子。根据实施方案，选择性结合靶分子的识别剂或选择性结合传感器结合的识别剂的识别剂共价结合到可磁化颗粒。然后将这些颗粒添加到传感器中，并且根据实施方案，再次附着于任何固定化的靶分子或传感器结合的识别剂。去除未附着的颗粒，然后磁性颗粒被磁化。磁场传感器的输出变化表示与传感器结合的磁性粒子的存在，从而表示样品中靶分子的存在和浓度。

6. 发明授权

US07340941B1 Dense thin film-based chemical sensors and methods for making and using same 有权
标题翻译：密集的薄膜化学传感器及其制造和使用方法
公开(公告)号：US07340941B1
公开(公告)日：2008-03-11
申请号：US10677908
申请日：2003-10-01
申请人： Bernd Fruhberger , David R. Baselt
发明人： Bernd Fruhberger , David R. Baselt
IPC分类号： G01N27/00
CPC分类号： G01N29/036 , G01N2291/0256
摘要： Sensors for determining the ambient amount (e.g., concentration) of a chemical (e.g., molecular hydrogen in a gas or vapor) are disclosed. Preferred embodiments of these sensors comprise a dense thin metal (e.g., palladium or a palladium alloy) film disposed on a microcantilever beam that is suspended above a stationary baseplate. The dense thin metal film is configured to absorb, for example, hydrogen, thereby causing the film to expand which in turn causes the microcantilever beam to deform. The deformation can be measured, for example, as a change in capacitance between the microcantilever beam and the stationary baseplate. The measured change in capacitance is indicative of the ambient hydrogen concentration.
摘要翻译：公开了用于确定化学物质（例如气体或蒸气中的分子氢）的环境量（例如浓度）的传感器。这些传感器的优选实施例包括设置在悬架在固定基板上方的微悬臂梁上的致密薄金属（例如，钯或钯合金）膜。致密的薄金属膜被配置为吸收例如氢，从而导致膜膨胀，这又导致微悬臂梁变形。可以测量变形，例如，作为微悬臂梁和固定基板之间的电容变化。测量的电容变化表示环境氢浓度。

7. 发明授权

US06977511B2 Sensor and sensor array having improved selectivity 有权
标题翻译：传感器和传感器阵列具有改进的选择性
公开(公告)号：US06977511B2
公开(公告)日：2005-12-20
申请号：US11082634
申请日：2005-03-08
申请人： Sanjay V. Patel , Bernd Fruhberger , Robert J. Warmack , Todd E. Mlsna , David R. Baselt , Erno Klaassen
发明人： Sanjay V. Patel , Bernd Fruhberger , Robert J. Warmack , Todd E. Mlsna , David R. Baselt , Erno Klaassen
IPC分类号： G01N27/22 , G01R27/26 , H01G5/16
CPC分类号： G01N27/227
摘要： A sensor for determining the presence of an analyte is disclosed comprising a reactive layer disposed between a base plate and a movable plate. The reactive layer is configured to interact with an analyte effecting a change in capacitance between the base plate and movable plate. When the analyte has a polarity or overall Hildebrand solubility parameter that is similar to the reactive layer, the change in capacitance is caused by a swelling of the reactive layer as analyte is absorbed into the reactive layer. This results in a decrease in capacitance. When the analyte has a solubility parameter not near the reactive layer, the absorbed analyte causes the reactive layer's total polarity to increase, an effect that dominates swelling. This causes an increase in capacitance. A capacitive sensing circuit is included for measuring the change in capacitance which is indicative of the analyte exposed to the sensor.
摘要翻译：公开了一种用于确定分析物存在的传感器，其包括设置在基板和可移动板之间的反应层。反应层被配置为与分析物相互作用，影响基板和可移动板之间的电容变化。当分析物具有类似于反应层的极性或整体Hildebrand溶解度参数时，电容的变化是由反应层的溶胀引起的，因为分析物被吸收到反应层中。这导致电容降低。当分析物具有不在反应层附近的溶解度参数时，吸收的分析物导致反应层的总极性增加，这是影响溶胀的作用。这导致电容增加。包括电容感测电路，用于测量表明分析物暴露于传感器的电容变化。

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