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1. 发明公开

EP1798745A2 Pneumatic MEMS switch and method of fabricating the same 审中-公开
标题翻译： Pneumatischer MEMS Schalter und Herstellungsverfahren
公开(公告)号：EP1798745A2
公开(公告)日：2007-06-20
申请号：EP06121124.9
申请日：2006-09-22
申请人： Samsung Electronics Co., Ltd.
发明人： Kim, Che-heung , Choi, Hyung , Song, In-sang , Lee, Sang-hun , Kwon, Sang-wook , Kim, Dong-kyun , Hong, Young-tack , Kim, Jong-seok , Lee, Chang-seung
IPC分类号： H01H59/00 , H01H35/34
CPC分类号： H01H59/0009 , H01H35/346 , H01H2221/02
摘要： A pneumatic micro electro mechanical system switch includes a substrate, a pneumatic actuating unit disposed on the substrate; the pneumatic actuating unit having a plurality of variable air cavities communicating such that when one of the plurality of variable air cavities is compressed, the rest are expanded; a signal line having a plurality of switching lines, each of which passes through a corresponding one of the plurality of variable air cavities and has switching ends disposed in a spaced-apart relation with each other in the corresponding one of the plurality of variable air cavities; a movable switching unit to connect the first and the second switching ends of each of the plurality of switching lines if one of the plurality of variable air cavities is compressed; and a driving unit to drive the pneumatic actuating unit so as to selectively compress the plurality of variable air cavities.
摘要翻译：气动微机电系统开关包括基板，设置在基板上的气动执行单元; 所述气动致动单元具有多个可变空气腔，所述多个可变空气腔连通，使得当所述多个可变气腔中的一个被压缩时，其余部分被膨胀; 信号线具有多个切换线，每个切换线通过多个可变空气腔中的对应的一个可变空气腔，并且具有在多个可变气腔中的相应一个空腔中相互间隔开设置的切换端 ; 如果多个可变空气腔中的一个被压缩，则可移动切换单元连接多个切换线中的每一个的第一和第二切换端; 以及驱动单元来驱动气动致动单元，以选择性地压缩多个可变空气腔。

2. 发明授权

EP1748457B1 Mems switch and manufacturing method thereof 有权
标题翻译： MEMS开关及其制造方法
公开(公告)号：EP1748457B1
公开(公告)日：2010-06-23
申请号：EP06253784.0
申请日：2006-07-19
申请人： Samsung Electronics Co., Ltd.
发明人： Jeong, Hee-moon , Kwon, Sang-wook , Kim, Che-heung , Kim, Jong-seok , Kim, Jun-o, 705-604 Manhyeon-maeul , Hong, Young-tack , Song, In-sang , Lee, Sang-hun
IPC分类号： H01H59/00
CPC分类号： H01H59/0009 , H01H2059/0054

3. 发明公开

EP1744172A1 Radar system having single circularly polarized antenna 审中-公开
标题翻译： Radizystem mit zirkularpolarisierter Einzelantenne
公开(公告)号：EP1744172A1
公开(公告)日：2007-01-17
申请号：EP06253463.1
申请日：2006-06-30
申请人： Samsung Electronics Co., Ltd.
发明人： Kwon, Sang-wook , Hong, Song-cheol , Song, In-sang , Kim, Dong-kyun , Kim, Jeong-geun
IPC分类号： G01S7/03
CPC分类号： H03D7/125 , G01S7/026 , G01S7/034 , H01Q9/0435 , H01Q21/24
摘要： A radar system includes a transmitter stage for generating a certain transmission signal; a circularly polarized antenna for emitting the transmission signal in a form of a circularly polarized signal, and receiving a reflection signal; a polarizer for isolating the reflection signal received from the circularly polarized antenna from the transmission signal, and outputting the reflection signal to a next stage; and a receiver stage for receiving the reflection signal output from the polarizer, converting the reflection signal into a signal of a certain frequency by using as a certain mixer switching signal the leakage signal leaking from the transmitter stage, and outputting the converted reflection signal. Therefore, the high-sensitivity radar system can be built in a compact size.
摘要翻译：雷达系统包括用于产生某一传输信号的发射机级; 圆极化天线，用于以圆偏振信号的形式发射发射信号，并接收反射信号; 偏振器，用于将从圆极化天线接收的反射信号与发射信号隔离，并将反射信号输出到下一级; 以及接收器级，用于接收从偏振器输出的反射信号，通过使用来自发射器级的泄漏信号作为特定的混频器切换信号将反射信号转换成特定频率的信号，并输出转换后的反射信号。因此，高灵敏度雷达系统可以建立在一个紧凑的尺寸。

4. 发明公开

EP1748557A3 Integrated filter including FBAR and SAW resonator and fabrication method therefor 审中-公开
标题翻译：用Dünnschichtvolumenwellenresonator，表面声波谐振器及其制造方法集成滤波
公开(公告)号：EP1748557A3
公开(公告)日：2012-05-23
申请号：EP06012762.8
申请日：2006-06-21
申请人： Samsung Electronics Co., Ltd.
发明人： Nam, Kuang-woo , Sunwoo, Kook-hyun , Song, In-sang , Kwon, Sang-wook , Kim, Duck-hwan 505-803,Hosu-maeul 5danji Cheonggu Apt. , Kim, Chul-soo , Sul, Sang-chul , Park, Yun-kwon , Park, Hae-seok 519-1505,Samsung Raemian 5th , Shin, Jea-shik , Shim, Dong-ha , Hong, Young-tack , Kim, Jong-seok , Chang, Seok-mo , Yun, Seok-chul
IPC分类号： H03H9/58 , H03H3/02
CPC分类号： H03H9/588 , H03H3/02 , H03H9/02228 , H03H2003/0071
摘要： An integrated filter including a film bulk acoustic resonator (FBAR) and a surface acoustic wave (SAW) resonator and a method of fabricating the integrated filter. The integrated filter includes: a substrate (110); a first electrode (120) positioned in a predetermined first area on an upper surface of the substrate; a first piezoelectric layer (130) positioned on the first electrode; a second electrode (150) positioned on the first piezoelectric layer; a second piezoelectric layer (140) positioned in a predetermined second area on the upper surface of the substrate; and at least one inter-digital transducer (IDT) electrode (160,170) positioned on the second piezoelectric layer. The IDT electrode includes: a first IDT electrode (160) formed in a comb structure on the second piezoelectric layer; and a second IDT electrode (170) formed in a comb structure on the second piezoelectric layer so as to mesh with the first IDT electrode. The first and second piezoelectric layers are formed of an identical material. Thus, an integrated filter which operates in various frequency bands can be made compact.

5. 发明授权

EP1788603B1 RF MEMS switch and method for fabricating the same 有权
标题翻译： RF MEMS开关和相关的生产方法
公开(公告)号：EP1788603B1
公开(公告)日：2010-05-05
申请号：EP06122879.7
申请日：2006-10-24
申请人： Samsung Electronics Co., Ltd.
发明人： Kim, Jong-seok , Kwon, Sang-wook , Kim, Dong-kyun , Kim, Che-heung , Lee, Sang-hun , Houng, Young-tack, c/o Samsung Adv. Inst. of Techn , Lee, Chang-seung , Song, In-sang
IPC分类号： H01H57/00 , H01H59/00 , H01P1/12
CPC分类号： H01P1/127 , H01H59/0009 , H01H2057/006 , Y10T29/49002 , Y10T29/49016 , Y10T29/4913 , Y10T29/49144 , Y10T29/49155

6. 发明公开

EP1788603A1 RF MEMS switch and method for fabricating the same 有权
标题翻译： HF MEMS Schalter undzugehörigesHerstellungsverfahren
公开(公告)号：EP1788603A1
公开(公告)日：2007-05-23
申请号：EP06122879.7
申请日：2006-10-24
申请人： Samsung Electronics Co., Ltd.
发明人： Kim, Jong-seok , Kwon, Sang-wook , Kim, Dong-kyun , Kim, Che-heung , Lee, Sang-hun , Houng, Young-tack, c/o Samsung Adv. Inst. of Techn , Lee, Chang-seung , Song, In-sang
IPC分类号： H01H57/00 , H01H59/00 , H01P1/12
CPC分类号： H01P1/127 , H01H59/0009 , H01H2057/006 , Y10T29/49002 , Y10T29/49016 , Y10T29/4913 , Y10T29/49144 , Y10T29/49155
摘要： An RF MEMS switch (100) and a method for fabricating the same are disclosed, in which the RF MEMS device is down driven at a low voltage using a piezoelectric effect. The RF MEMS switch includes a substrate (101) provided with RF signal lines (102a,102b) and a cavity (103a), a cantilever (110) positioned on the cavity, having one end fixed to the substrate, and a contact pad (111) connecting the RF signal lines with the cantilever in contact with the RF signal lines when the cantilever is down driven.
摘要翻译：公开了一种RF MEMS开关（100）及其制造方法，其中使用压电效应将RF MEMS器件以低电压下驱动。 RF MEMS开关包括设置有RF信号线（102a，102b）和空腔（103a）的基板（101），位于空腔上的悬臂（110），其一端固定到基板，以及接触垫 111）当悬臂向下驱动时，将RF信号线与与RF信号线接触的悬臂连接。

7. 发明公开

EP1840924A3 Piezoelectric MEMS switch and method of fabricating the same 审中-公开
标题翻译：压电MEMS开关及其制造方法
公开(公告)号：EP1840924A3
公开(公告)日：2009-08-26
申请号：EP07104235.2
申请日：2007-03-15
申请人： Samsung Electronics Co., Ltd.
发明人： Kim, Jong-seok , Song, In-sang , Lee, Sang-hun , Kwon, Sang-wook , Lee, Chang-seung , Hong, Young-tack , Kim, Che-heung
IPC分类号： H01H57/00
CPC分类号： H01H57/00 , H01H2057/006 , Y10T403/7026
摘要： A piezoelectric Micro Electro Mechanical System (MEMS) switch includes a substrate (101), first and second fixed signal lines (103,105) symmetrically formed in a spaced-apart relation to each other on the substrate to have a predetermined gap (G) therebetween, a piezoelectric actuator (130) disposed in alignment with the first and the second fixed signal lines (103,105) in the predetermined gap (G), and having a first end supported on the substrate (101) to allow the piezoelectric actuator to be movable up and down, and a movable signal line (150) having a first end connected to one of the first and the second fixed signal lines, and a second end configured to be in contact with, or separate from the other of the first and second fixed signal lines, the movable signal line at at least one side thereof being connected to an upper surface of the piezoelectric actuator (130).

8. 发明公开

EP1798745A3 Pneumatic MEMS switch and method of fabricating the same 审中-公开
标题翻译：气动MEMS开关和制造过程
公开(公告)号：EP1798745A3
公开(公告)日：2009-01-28
申请号：EP06121124.9
申请日：2006-09-22
申请人： Samsung Electronics Co., Ltd.
发明人： Kim, Che-heung , Choi, Hyung , Song, In-sang , Lee, Sang-hun , Kwon, Sang-wook , Kim, Dong-kyun , Hong, Young-tack , Kim, Jong-seok , Lee, Chang-seung
IPC分类号： H01H59/00 , H01H35/34
CPC分类号： H01H59/0009 , H01H35/346 , H01H2221/02
摘要： A pneumatic micro electro mechanical system switch includes a substrate, a pneumatic actuating unit disposed on the substrate; the pneumatic actuating unit having a plurality of variable air cavities communicating such that when one of the plurality of variable air cavities is compressed, the rest are expanded; a signal line having a plurality of switching lines, each of which passes through a corresponding one of the plurality of variable air cavities and has switching ends disposed in a spaced-apart relation with each other in the corresponding one of the plurality of variable air cavities; a movable switching unit to connect the first and the second switching ends of each of the plurality of switching lines if one of the plurality of variable air cavities is compressed; and a driving unit to drive the pneumatic actuating unit so as to selectively compress the plurality of variable air cavities.

9. 发明公开

EP1793403A2 Mems Switch 审中-公开
标题翻译： MEMS Schalter
公开(公告)号：EP1793403A2
公开(公告)日：2007-06-06
申请号：EP06121184.3
申请日：2006-09-25
申请人： Samsung Electronics Co., Ltd.
发明人： Kim, Che-heung , Choi, Hyung 125-603, Sibeomdanji Hansin Apt. , Song, In-sang , Lee, Sang-hun , Kwon, Sang-wook
IPC分类号： H01H59/00
CPC分类号： H01H59/0009 , H01H1/20
摘要： A MEMS (micro electro mechanical system) switch, which includes a substrate; a fixed electrode formed on an upper side of the substrate; a signal line formed on both sides of the fixed electrode; a contact member formed on an upper side of the signal line at a distance from said fixed electrode and contacting an edging portion of the signal line; a supporting member supporting the contact member to be movable; and a moving electrode disposed on an upper side of the supporting member.
摘要翻译： MEMS（微电子机械系统）开关，其包括基板; 形成在所述基板的上侧的固定电极; 形成在固定电极两侧的信号线; 接触构件，形成在距离所述固定电极一定距离处的信号线的上侧，并与信号线的边缘部分接触; 支撑构件，其支撑所述接触构件以可移动; 以及设置在所述支撑构件的上侧的移动电极。

10. 发明公开

EP1793403A3 Mems Switch 审中-公开
标题翻译： MEMS开关
公开(公告)号：EP1793403A3
公开(公告)日：2009-01-21
申请号：EP06121184.3
申请日：2006-09-25
申请人： Samsung Electronics Co., Ltd.
发明人： Kim, Che-heung , Choi, Hyung 125-603, Sibeomdanji Hansin Apt. , Song, In-sang , Lee, Sang-hun , Kwon, Sang-wook
IPC分类号： H01H59/00 , H01H1/20
CPC分类号： H01H59/0009 , H01H1/20
摘要： A MEMS (micro electro mechanical system) switch, which includes a substrate; a fixed electrode formed on an upper side of the substrate; a signal line formed on both sides of the fixed electrode; a contact member formed on an upper side of the signal line at a distance from said fixed electrode and contacting an edging portion of the signal line; a supporting member supporting the contact member to be movable; and a moving electrode disposed on an upper side of the supporting member.

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