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    • 1. 发明授权
    • Channel hot-carrier page write
    • 频道热门页面写入
    • US5590076A
    • 1996-12-31
    • US493138
    • 1995-06-21
    • Sameer S. HaddadChi ChangDavid K. Y. Liu
    • Sameer S. HaddadChi ChangDavid K. Y. Liu
    • G11C16/02G11C16/10G11C7/00
    • G11C16/10
    • Disclosed herein is a channel hot-carrier page write including an array of stacked gate flash EEPROM memory cells operating in a very low energy programming mode permitting page writing of 1024 bits within a 20-100 .mu.S programming interval. Internal programming voltage levels are derived from on-chip circuits, such as charge pumps, operated from a single +V.sub.CC source. In a preferred embodiment, a cache memory buffers data transfers between a computer bus and the page oriented storage array. In another embodiment, core doping is increased in the channel and drain regions to enhance hot carrier injection and to lower the programming drain voltage. The stacked floating gate structure is shown to exhibit a high programming efficiency in a range from 10.sup.-6 to 10.sup.-4 at drain voltages below 5.2 VDC. In another embodiment AC components of the programming current are minimized by precharging a common source line at the start of a programming cycle.
    • 本文公开了一种通道热载体页面写入,其包括以非常低能量编程模式操作的堆叠栅极快闪EEPROM存储器单元的阵列,允许在20-100μs编程间隔内1024页的页写入。 内部编程电压电平源自片上电路,如电荷泵,由单个+ VCC源运行。 在优选实施例中,高速缓冲存储器缓冲计算机总线和面向页面的存储阵列之间的数据传输。 在另一个实施例中,在沟道和漏极区域中增加了芯掺杂以增强热载流子注入并降低编程漏极电压。 堆叠的浮置栅极结构在低于5.2VDC的漏极电压下表现出在10-6至10-4的范围内的高编程效率。 在另一个实施例中,通过在编程周期开始时对公共源极线进行预充电,使编程电流的AC分量最小化。
    • 3. 发明授权
    • Method for making semiconductor circuit including non-ESD transistors
with reduced degradation due to an impurity implant
    • 制造半导体电路的方法包括由于杂质注入而导致的劣化降低的非ESD晶体管
    • US5652155A
    • 1997-07-29
    • US550424
    • 1995-10-30
    • David K. Y. LiuMing Sang KwanChi Chang
    • David K. Y. LiuMing Sang KwanChi Chang
    • H01L27/02H01L21/266
    • H01L27/0266Y10S438/982
    • A method for reducing encroachment of an impurity implant into a channel region in a non-ESD transistor in a semiconductor circuit, the non-ESD transistor receiving both first and second implant dopants, and the circuit including a plurality of ESD transistors includes forming the ESD transistors of the circuit at a predetermined angular offset from the non-ESD transistor, and performing the second dopant implant at a predetermined tilt implant angle, wherein the non-ESD transistor has reduced encroachment of the impurity implant. A plurality of transistors formed on a semiconductor wafer include a plurality of non-ESD transistors, the plurality of non-ESD transistors including spacer regions and impurity implant regions encroaching the spacer regions, and a plurality of ESD transistors, the plurality of ESD transistors formed at a predetermined angular offset from the non-ESD transistors. Further, the plurality of ESD transistors include the spacer regions and impurity implant regions encroaching the spacer regions further than the impurity implant regions of the non-ESD transistors.
    • 一种用于减少杂质注入侵入半导体电路中的非ESD晶体管中的沟道区域的方法,所述非ESD晶体管接收第一和第二注入掺杂剂,并且包括多个ESD晶体管的电路包括形成ESD 晶体管,其以非ESD晶体管的预定角度偏移,并以预定的倾斜注入角执行第二掺杂剂注入,其中非ESD晶体管具有减少的杂质注入侵入。 形成在半导体晶片上的多个晶体管包括多个非ESD晶体管,所述多个非ESD晶体管包括间隔区域和侵入间隔区域的杂质注入区域,以及多个ESD晶体管,所述多个ESD晶体管形成 在非ESD晶体管的预定角度偏移处。 此外,多个ESD晶体管包括比非ESD晶体管的杂质注入区域更远的间隔区域和杂质注入区域。
    • 4. 发明授权
    • Method for decreasing the discharge time of a flash EPROM cell
    • 降低闪速EPROM单元的放电时间的方法
    • US5596531A
    • 1997-01-21
    • US450167
    • 1995-05-25
    • David K. Y. LiuMing S. KwanChi ChangSameer HaddadYuan Tang
    • David K. Y. LiuMing S. KwanChi ChangSameer HaddadYuan Tang
    • G11C16/14G11C7/00
    • G11C16/14
    • The present invention presents methods for reducing the discharge time of a Flash EPROM cell. In one aspect, a method includes the steps of forcing an ultraviolet voltage threshold, UVV.sub.t, below a discharge threshold voltage, V.sub.t. The method further comprises reducing the UVV.sub.t to about 0 V. Further, the method further comprises the step of reducing a core cell implant of a p-type dopant into a substrate of the cell. In a further aspect, a method for decreasing the discharge time includes the steps of providing a core cell implant of a p-type dopant into a surface of a substrate of the cell, and providing a surface doping of an n-type dopant into the core of the substrate, where the core implant reduces punchthrough and the surface doping of an n-type dopant reduces V.sub.t in the cell. In yet another aspect, a method for decreasing a discharge time of a Flash EPROM cell while reducing punchthrough includes the steps of providing a high energy core cell implant of a p type dopant into a substrate of the cell, wherein the core has a doping concentration profile with a low dopant concentration at a surface of the core to reduce UVV.sub.t and a high dopant concentration at lower than the surface to reduce punchthrough.
    • 本发明提出了减少闪存EPROM单元的放电时间的方法。 在一个方面,一种方法包括以下步骤:将紫外线电压阈值UVVt强制在放电阈值电压Vt以下,该方法还包括将UVVt降低到约0V。此外,该方法还包括如下步骤: 将p型掺杂剂细胞注入细胞的底物。 在另一方面,一种减少放电时间的方法包括以下步骤:将p型掺杂剂的核心单元注入提供到电池的衬底的表面中,并且向n型掺杂剂表面掺杂 衬底的芯部,其中芯体植入物减少穿透并且n型掺杂剂的表面掺杂减小了电池中的Vt。 在另一方面,一种减少穿透时减少闪存EPROM单元的放电时间的方法包括以下步骤:将ap型掺杂剂的高能核心单元注入提供到电池的衬底中,其中芯具有掺杂浓度分布 在芯的表面处具有低掺杂剂浓度以降低UVVt,并且在低于表面的情况下具有高掺杂剂浓度以减少穿透。