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    • 5. 发明授权
    • Thin film transistor and thin film transistor array panel
    • 薄膜晶体管和薄膜晶体管阵列面板
    • US08653515B2
    • 2014-02-18
    • US13367076
    • 2012-02-06
    • Yong-Su LeeYoon Ho KhangSe Hwan YuChong Sup Chang
    • Yong-Su LeeYoon Ho KhangSe Hwan YuChong Sup Chang
    • H01L29/10
    • H01L29/458H01L29/45H01L29/78618H01L29/7869
    • Provided is a thin film transistor and thin film transistor panel array. The thin film transistor includes: a substrate; a gate electrode disposed on the substrate; a semiconductor layer disposed on the substrate and partially overlapping with the gate electrode; a source electrode and a drain electrode spaced apart from each other with respect to a channel region of the semiconductor layer; an insulating layer disposed between the gate electrode and the semiconductor layer; and a barrier layer disposed between the semiconductor layer and the source electrode and between the semiconductor layer and the drain electrode, in which the barrier layer comprises graphene. An ohmic contact is provided based on the type of material used for the semiconductor layer.
    • 提供了一种薄膜晶体管和薄膜晶体管阵列阵列。 薄膜晶体管包括:基板; 设置在所述基板上的栅电极; 设置在所述基板上并与所述栅电极部分重叠的半导体层; 源电极和漏电极相对于半导体层的沟道区彼此分开; 设置在所述栅电极和所述半导体层之间的绝缘层; 以及设置在所述半导体层和所述源电极之间以及所述半导体层和所述漏电极之间的阻挡层,其中所述阻挡层包括石墨烯。 基于用于半导体层的材料的类型提供欧姆接触。