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    • 4. 发明申请
    • DEVICE FOR DIRECTING RADIATION TO A LAYER, APPARATUS WITH SUCH DEVICE AND METHOD USING SUCH APPARATUS
    • 用于将辐射引导至层的装置,使用该装置的装置和使用该装置的方法
    • WO2006111896A3
    • 2006-12-07
    • PCT/IB2006051149
    • 2006-04-13
    • KONINKL PHILIPS ELECTRONICS NVNEIJZEN JACOBUS H MVAN SANTEN HELMAR
    • NEIJZEN JACOBUS H MVAN SANTEN HELMAR
    • G11B7/26G03F7/20
    • G11B7/261G03F7/70383G03F7/70583
    • A device for directing radiation to a layer (1) is described. The device includes a first optical element (Ll) for focusing a first radiation beam (Bl) originating from a first radiation source (Sl) onto said layer, a second optical element (L2) for focusing a second radiation beam (B2) originating from a second radiation source (S2) onto said layer. The wavelengths of the radiation from said first and said second radiation source are different from each other. The first and second optical element are jointly movable with respect to said radiation sources, wherein the focal points of the two radiation beams at least substantially coincide with various movements of the first optical element and the second optical element with respect to the radiation sources. The second optical element (L2) has an aperture (A2) which allows optically undisturbed passage of the first radiation beam (Bl). In this way a compact and light configuration of Ll and L2 is achieved as well as an improved radiation beam quality. Further an apparatus comprising such a device and a method using such an apparatus are disclosed.
    • 描述了用于将辐射引导到层(1)的装置。 该设备包括:第一光学元件(L1),用于将源自第一辐射源(S1)的第一辐射束(B1)聚焦到所述层上;第二光学元件(L2),用于聚焦源自 在所述层上的第二辐射源(S2)。 来自所述第一和所述第二辐射源的辐射的波长彼此不同。 第一和第二光学元件可相对于所述辐射源共同移动,其中两个辐射束的焦点至少基本上与第一光学元件和第二光学元件相对于辐射源的各种运动一致。 第二光学元件(L2)具有允许第一辐射束(B1)在光学上不受干扰地通过的孔(A2)。 以这种方式实现了L1和L2的紧凑和轻的构造以及改进的辐射束质量。 此外公开了包括这种装置的设备和使用这种设备的方法。