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    • 4. 发明申请
    • DEVICE FOR DIRECTING RADIATION TO A LAYER, APPARATUS WITH SUCH DEVICE AND METHOD USING SUCH APPARATUS
    • 用于将辐射引导至层的装置,使用该装置的装置和使用该装置的方法
    • WO2006111896A3
    • 2006-12-07
    • PCT/IB2006051149
    • 2006-04-13
    • KONINKL PHILIPS ELECTRONICS NVNEIJZEN JACOBUS H MVAN SANTEN HELMAR
    • NEIJZEN JACOBUS H MVAN SANTEN HELMAR
    • G11B7/26G03F7/20
    • G11B7/261G03F7/70383G03F7/70583
    • A device for directing radiation to a layer (1) is described. The device includes a first optical element (Ll) for focusing a first radiation beam (Bl) originating from a first radiation source (Sl) onto said layer, a second optical element (L2) for focusing a second radiation beam (B2) originating from a second radiation source (S2) onto said layer. The wavelengths of the radiation from said first and said second radiation source are different from each other. The first and second optical element are jointly movable with respect to said radiation sources, wherein the focal points of the two radiation beams at least substantially coincide with various movements of the first optical element and the second optical element with respect to the radiation sources. The second optical element (L2) has an aperture (A2) which allows optically undisturbed passage of the first radiation beam (Bl). In this way a compact and light configuration of Ll and L2 is achieved as well as an improved radiation beam quality. Further an apparatus comprising such a device and a method using such an apparatus are disclosed.
    • 描述了用于将辐射引导到层(1)的装置。 该设备包括:第一光学元件(L1),用于将源自第一辐射源(S1)的第一辐射束(B1)聚焦到所述层上;第二光学元件(L2),用于聚焦源自 在所述层上的第二辐射源(S2)。 来自所述第一和所述第二辐射源的辐射的波长彼此不同。 第一和第二光学元件可相对于所述辐射源共同移动,其中两个辐射束的焦点至少基本上与第一光学元件和第二光学元件相对于辐射源的各种运动一致。 第二光学元件(L2)具有允许第一辐射束(B1)在光学上不受干扰地通过的孔(A2)。 以这种方式实现了L1和L2的紧凑和轻的构造以及改进的辐射束质量。 此外公开了包括这种装置的设备和使用这种设备的方法。
    • 6. 发明申请
    • DEVICE FOR DIRECTING RADIATION TO A LAYER, APPARATUS WITH SUCH DEVICE AND METHOD USING SUCH APPARATUS
    • 用于指示辐射到层的装置,具有这种装置的装置和使用这种装置的方法
    • WO2006111896A2
    • 2006-10-26
    • PCT/IB2006/051149
    • 2006-04-13
    • KONINKLIJKE PHILIPS ELECTRONICS N.V.NEIJZEN, Jacobus, H., M.VAN SANTEN, Helmar
    • NEIJZEN, Jacobus, H., M.VAN SANTEN, Helmar
    • G11B7/26G03F7/20
    • G11B7/261G03F7/70383G03F7/70583
    • A device for directing radiation to a layer (1) is described. The device includes a first optical element (Ll) for focusing a first radiation beam (Bl) originating from a first radiation source (Sl) onto said layer, a second optical element (L2) for focusing a second radiation beam (B2) originating from a second radiation source (S2) onto said layer. The wavelengths of the radiation from said first and said second radiation source are different from each other. The first and second optical element are jointly movable with respect to said radiation sources, wherein the focal points of the two radiation beams at least substantially coincide with various movements of the first optical element and the second optical element with respect to the radiation sources. The second optical element (L2) has an aperture (A2) which allows optically undisturbed passage of the first radiation beam (Bl). In this way a compact and light configuration of Ll and L2 is achieved as well as an improved radiation beam quality. Further an apparatus comprising such a device and a method using such an apparatus are disclosed.
    • 描述了用于将辐射引导到层(1)的装置。 该装置包括用于将源自第一辐射源(S1)的第一辐射束(B1)聚焦到所述层上的第一光学元件(L1),用于聚焦源自第二辐射源 第二辐射源(S2)到所述层上。 来自所述第一和第二辐射源的辐射的波长彼此不同。 第一和第二光学元件可相对于所述辐射源共同移动,其中两个辐射束的焦点至少基本上与第一光学元件和第二光学元件相对于辐射源的各种运动重合。 第二光学元件(L2)具有孔(A2),其允许第一辐射束(B1)的光学上不受干扰地通过。 以这种方式实现L1和L2的紧凑且轻的配置以及改进的辐射束质量。 此外,公开了一种包括这种装置的装置和使用这种装置的方法。
    • 10. 发明申请
    • LIQUID REMOVAL IN A METHOD AND DEVICE FOR IRRADIATING SPOTS ON A LAYER
    • 一种方法中的液体移除和用于在一层上辐射的装置
    • WO2004055803A1
    • 2004-07-01
    • PCT/IB2003/005200
    • 2003-11-14
    • KONINKLIJKE PHILIPS ELECTRONICS N.V.VAN SANTEN, Helmar
    • VAN SANTEN, Helmar
    • G11B7/26
    • G11B7/1374G03F7/70341G11B7/122G11B7/261
    • For irradiating a layer (3) a radiation beam (7) is directed and focused to a spot (11) on the layer (3), relative movement of the layer (3) relative to the optical element (59) is caused so that, successively, different portions of the layer (3) are irradiated and an interspace (53) between a surface of the optical element (59) nearest to the layer (3) is maintained. Furthermore, at least a portion of the interspace (53) through which the radiation irradiates the spot (11) on the layer (3) is maintained filled with a liquid (91). By directing a gas flow (71-73) to a surface zone (74) of the layer (3), liquid (91) is reliably prevented from passing that surface zone (74), without causing damage to the layer (3). The liquid (91) is drawn away from the layer (3) in the vicinity of the surface zone (74).
    • 为了照射层(3),辐射束(7)被引导并聚焦到层(3)上的斑点(11),引起层(3)相对于光学元件(59)的相对运动,使得 照射层(3)的不同部分,并且维持最靠近层(3)的光学元件(59)的表面之间的间隙(53)。 此外,辐射照射层(3)上的斑点(11)的间隙(53)的至少一部分保持充满液体(91)。 通过将气流(71-73)引导到层(3)的表面区域(74),可靠地防止液体(91)通过该表面区域(74),而不会损坏层(3)。 液体(91)在表面区域(74)附近从层(3)被拉出。