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    • 1. 发明申请
    • 3D STACKED NON-VOLATILE STORAGE PROGRAMMING TO CONDUCTIVE STATE
    • 3D堆叠非易失性存储编程到导电状态
    • WO2014074408A2
    • 2014-05-15
    • PCT/US2013/068041
    • 2013-11-01
    • SANDISK TECHNOLOGIES, INC.MIHNEA, AndreiCOSTA, XiyingZHANG, Yanli
    • MIHNEA, AndreiCOSTA, XiyingZHANG, Yanli
    • G11C11/56G11C16/10H01L27/115
    • G11C11/5671G11C16/0483G11C16/10H01L27/1157H01L27/11582
    • Programming NAND strings in a 3D stacked storage device to a conductive state is disclosed. Storage elements may be erased by raising their Vt and programmed by lowering their Vt. Programming may include applying a series of increasing voltages to selected bit lines until the selected memory cell is programmed. Unselected bit lines may be held at about ground, or close to ground. The selected word line may be grounded, or be held close to ground. Unselected word lines between the selected word line and the bit line may receive about the selected bit line voltage. Unselected word lines between the source line and the selected word line may receive about half the selected bit line voltage. Programming may be achieved without boosting channels of unselected NAND strings to inhibit them from programming. Therefore, program disturb associated with leakage of boosted channel potential may be avoided.
    • 公开了将3D堆叠存储设备中的NAND串编程为导通状态。 存储元件可以通过升高Vt并通过降低Vt进行编程而被擦除。编程可能包括对选定的位线施加一系列增加的电压,直到选定的存储单元被编程为止。 未选择的位线可以保持在大约地面或靠近地面。 所选择的字线可以接地,或者靠近地面。 所选择的字线和位线之间的未被选择的字线可以接收所选位线电压。 源极线和所选字线之间的未选字线可以接收大约一半的选定位线电压。 可以在不增加未选择的NAND串的通道以阻止它们编程的情况下实现编程。 因此,可以避免与提升的通道电位的泄漏相关的程序干扰。
    • 5. 发明申请
    • EPITAXIAL EXTENSION CMOS TRANSISTOR
    • 外延扩展CMOS晶体管
    • WO2013019305A1
    • 2013-02-07
    • PCT/US2012/040067
    • 2012-05-31
    • INTERNATIONAL BUSINESS MACHINES CORPORATIONPEI, ChengwenWANG, GengZHANG, Yanli
    • PEI, ChengwenWANG, GengZHANG, Yanli
    • H01L29/78H01L21/336
    • H01L29/6656H01L29/517H01L29/6653H01L29/66545H01L29/66628H01L29/66636
    • A pair of horizontal-step-including trenches are formed in a semiconductor layer by forming a pair of first trenches having a first depth d 1 around a gate structure on the semiconductor layer, forming a disposable spacer 58 around the gate structure to cover proximal portions of the first trenches, and by forming a pair of second trenches to a second depth d2 greater than the first depth d1. The disposable spacer is removed, and selective epitaxy is performed to form an integrated epitaxial source and source extension region 16 and an integrated epitaxial drain and drain extension region 18. A replacement gate structure can be formed after deposition and of a planarization dielectric layer 70 and subsequent removal of the gate structure and laterally expand the gate cavity 59 over expitaxial source 16 and drain extension regions 18. Alternately, a contact-level dielectric layer can be deposited directly on the integrated epitaxial regions and contact via structures can be formed therein.
    • 通过在半导体层上形成围绕栅极结构的第一深度d 1的一对第一沟槽,在半导体层中形成一对水平台阶包含的沟槽,在栅极结构周围形成一次性间隔件58以覆盖近端部分 并且通过形成大于第一深度d1的第二深度d2的一对第二沟槽。 去除一次性间隔物,并且进行选择性外延以形成集成的外延源和源极延伸区域16以及集成的外延漏极和漏极扩展区域18.可以在沉积之后形成替代栅极结构,并且可以在平坦化介电层70和 随后去除栅极结构并且在外延源极16和漏极延伸区域18上横向膨胀栅极腔59.或者,可以将接触电介质层直接沉积在集成的外延区上,并且可以在其中形成接触通孔结构。
    • 7. 发明申请
    • OPERATION MODES FOR AN INVERTED NAND ARCHITECTURE
    • 反向NAND架构的操作模式
    • WO2016089467A1
    • 2016-06-09
    • PCT/US2015/052071
    • 2015-09-24
    • SANDISK TECHNOLOGIES INC.
    • ZHANG, YanliSAMACHISA, GeorgeALSMEIER, JohannCHEN, Jian
    • G11C16/04G11C11/56G11C16/26
    • G11C16/0483G11C11/5642G11C16/10G11C16/26
    • Methods for performing memory operations on a memory array that includes inverted NAND strings are described. The memory operations may include erase operations, read operations, programming operations, program verify operations, and erase verify operations. An inverted NAND string may include a string of inverted floating gate transistors or a string of inverted charge trap transistors. In one embodiment, an inverted floating gate transistor may include a tunneling layer between a floating gate of the inverted floating gate transistor and a control gate of the inverted floating gate transistor. The arrangement of the tunneling layer between the floating gate and the control gate allows electrons to be added to or removed from the floating gate via F-N tunneling between the floating gate and the control gate. The inverted NAND string may be formed above a substrate and oriented such that the inverted NAND string is orthogonal to the substrate.
    • 描述了对包括反相NAND串的存储器阵列执行存储器操作的方法。 存储器操作可以包括擦除操作,读取操作,编程操作,程序验证操作和擦除验证操作。 反相NAND串可以包括一串反向浮栅晶体管或一串反向电荷陷阱晶体管。 在一个实施例中,反相浮栅晶体管可以包括在反相浮栅晶体管的浮置栅极和反相浮栅晶体管的控制栅极之间的隧穿层。 浮动栅极和控制栅极之间的隧道层的布置允许通过浮动栅极和控制栅极之间的F-N隧穿将电子添加到浮动栅极或从浮动栅极去除。 反相NAND串可以形成在衬底之上并且被定向成使得反相NAND串与衬底正交。