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    • 2. 发明授权
    • Apparatus and method for testing semiconductor device
    • 半导体器件测试装置及方法
    • US5266894A
    • 1993-11-30
    • US805140
    • 1991-12-11
    • Ryoichi TakagiTetsuo TadaKoji Tanaka
    • Ryoichi TakagiTetsuo TadaKoji Tanaka
    • G01R31/28G01R31/319G01R31/3193
    • G01R31/2844G01R31/31924G01R31/31937
    • A semiconductor testing apparatus includes a comparator for receiving a signal output to a pin terminal of a semiconductor device under test through a transmission line and determining a logical level of the received signal. Semiconductor testing apparatus 1 further includes a current supply circuit for comparing a voltage of an input terminal of comparator with a reference voltage applied by reference voltage sources and supplying a current to transmission line. When a signal ringing on transmission line and a reflection with undershoot and overshoot at input terminal occur, current supply circuit supplies a current to transmission line in accordance with a relationship of magnitude between the voltage at input terminal and the reference voltage. The current supply to transmission line is made to inhibit the overshoot and undershoot of the signal. This allows comparator to carry out a functional testing and a measurement of DC/AC characteristics of a semiconductor device at precise timing and at high speed.
    • 半导体测试装置包括:比较器,用于通过传输线接收输出到被测半导体器件的引脚端子的信号,并确定接收信号的逻辑电平。 半导体测试装置1还包括电流供应电路,用于将比较器的输入端的电压与由参考电压源施加的参考电压进行比较,并将电流提供给传输线。 当传输线上的信号振铃和在输入端子处产生下冲和过冲的反射出现时,电流源电路根据输入端电压和参考电压之间的大小关系向传输线提供电流。 传输线的电流供应是为了抑制信号的过冲和下冲。 这允许比较器在精确的定时和高速下进行半导体器件的DC / AC特性的功能测试和测量。
    • 3. 发明授权
    • Probing plate for wafer testing
    • 探测板用于晶圆测试
    • US4961052A
    • 1990-10-02
    • US380427
    • 1989-07-17
    • Tetsuo TadaRyoichi TakagiMasanobu Kohara
    • Tetsuo TadaRyoichi TakagiMasanobu Kohara
    • G01R31/26G01R1/073H01L21/66
    • G01R1/07342
    • A probing plate for wafer testing is provided with a plurality of probes arranged so as to correspond to a plurality of bonding pads of semiconductor devices fabricated on a semiconductor wafer. The probing plate has a base plate formed of an insulating material, such as a photosensitive glass, and has contact fingers each having a raised portion in the free end thereof, contact conductors respectively formed on the surfaces of the raised portions of the contact fingers so as to be brought into contact with the corresponding bonding pads, and wiring conductors formed in a predetermined pattern on the surface of the base plate so as to extend respectively from the contact conductors. The contact conductors and the wiring conductors are formed simultaneously by a photolithographic process. The contact fingers and the raised portions thereof are also formed by subjecting the base plate to a photolithographic process. Forming the contact conductors over the surfaces of the raised portions of the contact fingers prevents accidental contact of the contact conductors with the bonding pads of semiconductor devices other than the objective semiconductor devices.
    • 用于晶片测试的探测板设置有多个探针,其布置成对应于制造在半导体晶片上的多个半导体器件的焊盘。 探测板具有由诸如感光玻璃的绝缘材料形成的基板,并且具有在其自由端中具有凸起部分的接触指状物,分别形成在接触指尖的凸起部分的表面上的接触导体 与相应的接合焊盘和在基板的表面上以预定图案形成的布线导体接触,以便分别从接触导体延伸。 接触导体和布线导体通过光刻工艺同时形成。 接触指及其凸起部分也通过使基板进行光刻工艺而形成。 在接触指状物的凸起部分的表面上形成接触导体可防止接触导体与物镜半导体器件以外的半导体器件的接合焊盘意外接触。
    • 5. 发明授权
    • Test board for testing a semiconductor device utilizing first and second delay elements in a signal-transmission-path
    • 用于测试在信号传输路径中利用第一和第二延迟元件的半导体器件的测试板
    • US06356096B2
    • 2002-03-12
    • US09146173
    • 1998-09-03
    • Ryoichi TakagiMasahiro UedaYoshinori Deguchi
    • Ryoichi TakagiMasahiro UedaYoshinori Deguchi
    • G01R3126
    • G01R31/31937
    • A test board for testing a semiconductor device. The semiconductor device includes at least first and second input terminals and an input/output buffer cell for buffering a signal obtained from the first input terminal to output an internal signal. The operation of the semiconductor device is controlled by a signal obtained from the second input terminal. The test board includes a first delay element for delaying a signal to be transmitted therethrough for a first signal propagation delay time and a second delay element for delaying a signal to be transmitted therethrough for a second signal propagation delay time different from the first signal propagation delay time. A signal-transmission-path receives a first test signal and forms, a first signal transmission path along which the first test signal is transmitted through the first delay element to the first input terminal of the semiconductor device, and a second transmission path along which the first test signal is transmitted through the second delay element to the second input terminal of the semiconductor device.
    • 用于测试半导体器件的测试板。 半导体器件至少包括第一和第二输入端子以及用于缓冲从第一输入端子获得的信号以输出内部信号的输入/输出缓冲单元。 半导体器件的操作由从第二输入端获得的信号控制。 测试板包括第一延迟元件,用于延迟第一信号传播延迟时间中通过其传输的信号,以及第二延迟元件,用于延迟要通过其传输的信号用于与第一信号传播延迟不同的第二信号传播延迟时间 时间。 信号传输路径接收第一测试信号并形成第一信号传输路径,第一测试信号沿着第一信号传输路径通过第一延迟元件传输到半导体器件的第一输入端;以及第二传输路径, 第一测试信号通过第二延迟元件发送到半导体器件的第二输入端。
    • 6. 发明授权
    • Semiconductor integrated device having independent circuit blocks and a
power breaking means for selectively supplying power to the circuit
blocks
    • 具有独立电路块的半导体集成器件和用于向电路块选择性供电的断电装置
    • US5844263A
    • 1998-12-01
    • US837940
    • 1997-04-28
    • Mikio AsaiMasahiko HyozoRyoichi Takagi
    • Mikio AsaiMasahiko HyozoRyoichi Takagi
    • H01L27/04H01L21/822H01L27/088H01L27/10
    • H01L27/088
    • A semiconductor integrated device including a first circuit block, a second circuit block, a first supply interconnection connected to the first circuit block to supply power thereto, a second supply interconnection connecting the first supply interconnection to the second circuit block, and a switch inserted across the first and second supply interconnections. The switch has a structure equivalent to a plurality of switching elements disposed in parallel on a substrate. The switch is opened by a break command output from the first circuit block so that the second supply interconnection is disconnected from the first supply interconnection, thereby preventing a standby current from flowing to the second circuit block when it is unused. This can solve a problem of a conventional semiconductor integrated device in that the standby current flowing to the second circuit block wastes power even if the second block is not used.
    • 一种半导体集成装置,包括第一电路块,第二电路块,连接到第一电路块以向其供电的第一电源互连,将第一电源互连连接到第二电路块的第二电源互连以及跨第 第一和第二供电互连。 开关具有与在基板上平行设置的多个开关元件相当的结构。 通过从第一电路块输出的断开命令来打开开关,使得第二电源互连与第一电源互连断开,从而当不使用时防止待机电流流向第二电路块。 这可以解决传统的半导体集成器件的问题在于,即使不使用第二块,流向第二电路块的待机电流也会浪费电力。
    • 7. 发明授权
    • Test method and device for semiconductor circuit
    • 半导体电路的测试方法和器件
    • US6150831A
    • 2000-11-21
    • US990800
    • 1997-12-15
    • Mikio AsaiRyoichi Takagi
    • Mikio AsaiRyoichi Takagi
    • G01R27/02G01R31/28
    • G01R31/2884
    • A semiconductor test device capable of solving a problem of a conventional one in that in the resistance measurement of a semiconductor integrated circuit it was difficult for the measurement error due to contact resistance or wiring resistance to be limited within a desired amount. The present semiconductor test device includes, in a semiconductor integrated circuit having a first semiconductor switch functioning as a pullup resistor and a second semiconductor switch functioning as a pulldown resistor, a measuring circuit for bringing the first and second semiconductor switches into conduction at the same time in response to a signal fed from a control circuit, a voltage measuring circuit for measuring the voltage at a connecting point between the two semiconductor switches, and a current measuring circuit for measuring a through current flowing through the two semiconductor switches.
    • 能够解决现有技术问题的半导体测试装置,其中在半导体集成电路的电阻测量中,由于接触电阻或布线电阻而导致的测量误差难以限制在期望的量内。 本半导体测试装置包括在具有用作上拉电阻的第一半导体开关和用作下拉电阻的第二半导体开关的半导体集成电路中,用于同时使第一和第二半导体开关导通的测量电路 响应于从控制电路馈送的信号,用于测量两个半导体开关之间的连接点处的电压的电压测量电路和用于测量流过两个半导体开关的贯通电流的电流测量电路。
    • 10. 发明授权
    • Semiconductor device
    • 半导体器件
    • US06282680B1
    • 2001-08-28
    • US09217593
    • 1998-12-21
    • Ryoichi TakagiKatsushi Asahina
    • Ryoichi TakagiKatsushi Asahina
    • G01R3128
    • G01R31/3016
    • Provided is a semiconductor device having an I/O buffer cell capable of performing a timing verification test of high accuracy. A phase comparator (2) compares the phase of data (DATA) and that of a clock (CLK) and outputs a phase comparison result to a first input of an MUX (3). A test mode signal (STM1) inputted from a test mode terminal (14) is provided to the control input of the MUX (3) through a test mode input section (4). The MUX (3) receives at its second input the output signal of an internal logic (50) through a signal input section (9) and, based on the test mode signal (STM1), outputs either the phase comparison result or the output signal of the internal logic (50), to the input section of a driver (8).
    • 提供了具有能够执行高精度的定时验证测试的I / O缓冲单元的半导体器件。 相位比较器(2)比较数据(DATA)与时钟(CLK)的相位,并将相位比较结果输出到MUX(3)的第一输入端。 从测试模式端子(14)输入的测试模式信号(STM1)通过测试模式输入部分(4)提供给MUX(3)的控制输入端。 MUX(3)在其第二输入端通过信号输入部分(9)接收内部逻辑(50)的输出信号,并且基于测试模式信号(STM1),输出相位比较结果或输出信号 的内部逻辑(50)发送到驱动器(8)的输入部分。