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    • 1. 发明授权
    • Probing plate for wafer testing
    • 探测板用于晶圆测试
    • US4961052A
    • 1990-10-02
    • US380427
    • 1989-07-17
    • Tetsuo TadaRyoichi TakagiMasanobu Kohara
    • Tetsuo TadaRyoichi TakagiMasanobu Kohara
    • G01R31/26G01R1/073H01L21/66
    • G01R1/07342
    • A probing plate for wafer testing is provided with a plurality of probes arranged so as to correspond to a plurality of bonding pads of semiconductor devices fabricated on a semiconductor wafer. The probing plate has a base plate formed of an insulating material, such as a photosensitive glass, and has contact fingers each having a raised portion in the free end thereof, contact conductors respectively formed on the surfaces of the raised portions of the contact fingers so as to be brought into contact with the corresponding bonding pads, and wiring conductors formed in a predetermined pattern on the surface of the base plate so as to extend respectively from the contact conductors. The contact conductors and the wiring conductors are formed simultaneously by a photolithographic process. The contact fingers and the raised portions thereof are also formed by subjecting the base plate to a photolithographic process. Forming the contact conductors over the surfaces of the raised portions of the contact fingers prevents accidental contact of the contact conductors with the bonding pads of semiconductor devices other than the objective semiconductor devices.
    • 用于晶片测试的探测板设置有多个探针,其布置成对应于制造在半导体晶片上的多个半导体器件的焊盘。 探测板具有由诸如感光玻璃的绝缘材料形成的基板,并且具有在其自由端中具有凸起部分的接触指状物,分别形成在接触指尖的凸起部分的表面上的接触导体 与相应的接合焊盘和在基板的表面上以预定图案形成的布线导体接触,以便分别从接触导体延伸。 接触导体和布线导体通过光刻工艺同时形成。 接触指及其凸起部分也通过使基板进行光刻工艺而形成。 在接触指状物的凸起部分的表面上形成接触导体可防止接触导体与物镜半导体器件以外的半导体器件的接合焊盘意外接触。
    • 2. 发明授权
    • Probe plate used for testing a semiconductor device, and a test
apparatus therefor
    • 用于测试半导体器件的探针板及其测试装置
    • US5055780A
    • 1991-10-08
    • US474609
    • 1990-02-05
    • Ryouichi TakagiTetsuo TadaMasanobu Kohara
    • Ryouichi TakagiTetsuo TadaMasanobu Kohara
    • G01R31/28G01R1/04G01R1/073H01L21/66
    • G01R1/04
    • A test apparatus for a semiconductor device is provided to be used for testing, wafer by wafer, a semiconductor device formed on a semiconductor wafer. The test apparatus for a semiconductor device comprises a test head, a probe card and a selection circuit. The probe card has an insulating transparent base plate, and protruding parts are formed on the main surface of the base plate corresponding to electrode pads on a test object semiconductor wafer, and conductive layer forming a prober for the electrode pad is formed on the surface of each of these protruding parts. A wiring layer is formed on the surface opposite to the main surface. The wiring layer and the probers are connected electrically through the through holes provided on the base plate. A prober to be connected to the test head is switched electrically, which makes it possible to test a semiconductor device without moving the corresponding semiconductor wafer.
    • 提供一种用于半导体器件的测试装置,用于测试晶片晶片,半导体晶片上形成的半导体器件。 半导体器件的测试装置包括测试头,探针卡和选择电路。 探针卡具有绝缘的透明基板,并且在基板的主表面上形成与测试对象半导体晶片上的电极焊盘相对应的突出部分,并且形成用于电极焊盘的探测器的导电层形成在 每个这些突出部分。 在与主表面相对的表面上形成布线层。 布线层和探针通过设置在基板上的通孔电连接。 要连接到测试头的探测器被电切换,这使得可以在不移动对应的半导体晶片的情况下测试半导体器件。
    • 6. 发明授权
    • Lead frame and semiconductor device
    • 引线框架和半导体器件
    • US5018003A
    • 1991-05-21
    • US571842
    • 1990-08-21
    • Masatoshi YasunagaMasanobu Kohara
    • Masatoshi YasunagaMasanobu Kohara
    • H01L21/56H01L23/495
    • H01L21/565H01L23/49503H01L24/50H01L2224/45144H01L2224/48091H01L2224/48247H01L24/45H01L24/48H01L2924/00014H01L2924/01078H01L2924/01079H01L2924/181Y10T29/49121
    • A lead frame includes a die pad for mounting thereon a semiconductor chip having a plurality of electrodes, a plurality of leads for electrical connection with the plurality of electrodes of the semiconductor chip, an outer frame disposed on the periphery of the die pad for supporting the die pad and the plurality of leads, and a resin guide portion extending to the vicinity of the die pad from the outer frame for guiding molten resin over and under the semiconductor chip during resin packaging. A semiconductor device manufacturing method includes mounting a semiconductor chip having electrodes on a substrate having a resin guiding portion for guiding a resin over and under the semiconductor chip during resin packaging; electrically connecting leads on the substrate to the electrodes; positioning the semiconductor chip and the substrate between a pair of mold halves injecting a molten resin into the mold to fill the cavity; and solidifying the resin.
    • 引线框架包括用于安装其上具有多个电极的半导体芯片的芯片焊盘,用于与半导体芯片的多个电极电连接的多个引线,设置在芯片焊盘周边上的外框,用于支撑 芯片焊盘和多个引线,以及树脂引导部,其从外框延伸到芯片焊盘附近,用于在树脂封装期间将熔融树脂引导到半导体芯片的上方和下方。 一种半导体器件制造方法,包括在具有树脂引导部分的基板上安装具有电极的半导体芯片,用于在树脂封装期间将树脂引导到半导体芯片之上和之下; 将基板上的导线电连接到电极; 将半导体芯片和基板定位在将熔融树脂注入模具中以填充空腔的一对半模之间; 并固化树脂。
    • 7. 发明授权
    • Electronic device
    • 电子设备
    • US4907061A
    • 1990-03-06
    • US107396
    • 1987-10-06
    • Masanobu Kohara
    • Masanobu Kohara
    • H01L23/50H01L21/60H01L23/495H01L23/498
    • H01L23/49855H01L23/49572H01L2924/0002
    • The electronic device relating to the invention is that in which an electrode is formed on the rear side surface of a semiconductor element, a circuit wiring and an external electrode connected electrically to one end of the circuit wiring are formed on the rear side surface of a flexible insulating film with a first opening provided therefor, a lead terminal overhanging to the first opening is connected electrically to the other end of the circuit wiring, a second opening is formed on the flexible insulating film so as to expose a part of the external electrode, a package substrate is constituted of the flexible insulating film in tape assembly system, the circuit wiring, the external electrode and the lead terminal, the semiconductor element is disposed on the rear side surface side of the flexible insulating film under the first opening and the lead terminal is connected electrically and mechanically thereto, a part or the whole of the semiconductor element, the electrode, the lead terminal, a part of the circuit wiring and the first opening are sealed with a sealing resin, a semiconductor device is constituted of the semiconductor element, the electrode, the package substrate and the sealing resin, the semiconductor device is mounted in a recession formed on the front side of a thin flexible substrate like IC card so as to make the front side surface of the flexible insulating film coincide with the front side surface of the thin flexible substrate.
    • 本发明的电子设备是在半导体元件的背面形成有电极的电路布线和与电路布线的一端电连接的电路布线和外部电极形成在电路布线的背面侧 具有第一开口的柔性绝缘膜,突出到第一开口的引线端子电连接到电路布线的另一端,在柔性绝缘膜上形成第二开口以暴露外部电极的一部分 封装基板由带组装系统中的柔性绝缘膜,电路布线,外部电极和引线端子构成,半导体元件设置在柔性绝缘膜的第一开口的后侧表面侧, 引线端子电连接和机械连接,半导体元件,电极,引线的一部分或全部 端子,电路布线的一部分和第一开口用密封树脂密封,半导体器件由半导体元件,电极,封装基板和密封树脂构成,半导体器件安装在形成在 薄型柔性基板如IC卡的前侧,以使柔性绝缘膜的前侧表面与薄柔性基板的前侧表面一致。