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1. 发明授权

US06258223B1 In-situ electroless copper seed layer enhancement in an electroplating system 有权
标题翻译：电镀系统中的原位无电铜种子层增强
公开(公告)号：US06258223B1
公开(公告)日：2001-07-10
申请号：US09350877
申请日：1999-07-09
申请人： Robin Cheung , Daniel A. Carl , Yezdi Dordi , Peter Hey , Ratson Morad , Liang-Yuh Chen , Paul F. Smith , Ashok K. Sinha
发明人： Robin Cheung , Daniel A. Carl , Yezdi Dordi , Peter Hey , Ratson Morad , Liang-Yuh Chen , Paul F. Smith , Ashok K. Sinha
IPC分类号： C25D1700
CPC分类号： H01L21/68721 , C25D7/123 , C25D17/001 , H01L21/68728 , H01L2924/0002 , H01L2924/00
摘要： The present invention discloses a system that provides for electroless deposition performed in-situ with an electroplating process to minimize oxidation and other contaminants prior to the electroplating process. The system allows the substrate to be transferred from the electroless deposition process to the electroplating process with a protective coating to also minimize oxidation. The system generally includes a mainframe having a mainframe substrate transfer robot, a loading station disposed in connection with the mainframe, one or more processing facilities disposed in connection with the mainframe, an electroless supply fluidly connected to the one or more processing applicators and optionally includes a spin-rinse-dry (SRD) station, a rapid thermal anneal chamber and a system controller for controlling the deposition processes and the components of the electro-chemical deposition system.
摘要翻译：本发明公开了一种系统，其提供用电镀方法原位进行的无电沉积，以在电镀过程之前使氧化和其它污染物最小化。该系统允许基板由无电镀沉积工艺转移到具有保护涂层的电镀工艺中以使氧化最小化。该系统通常包括具有主机基板传送机器人的主机，与主机连接设置的加载站，与主机连接设置的一个或多个处理设备，流体连接到该一个或多个处理施加器的无电解供应器，并且可选地包括旋转干燥（SRD）站，快速热退火室和用于控制沉积过程和电化学沉积系统的组件的系统控制器。

2. 发明授权

US06893548B2 Method of conditioning electrochemical baths in plating technology 失效
标题翻译：电镀技术中电化学浴的调理方法
公开(公告)号：US06893548B2
公开(公告)日：2005-05-17
申请号：US09882208
申请日：2001-06-13
申请人： Robin Cheung , Daniel A. Carl , Liang-Yuh Chen , Yezdi Dordi , Paul F. Smith , Ratson Morad , Peter Hey , Ashok Sinha
发明人： Robin Cheung , Daniel A. Carl , Liang-Yuh Chen , Yezdi Dordi , Paul F. Smith , Ratson Morad , Peter Hey , Ashok Sinha
IPC分类号： C23C18/16 , C25D7/12 , C25D21/12 , C25D21/18 , C25D5/00
CPC分类号： C25D21/18 , C23C18/1617 , C23C18/1683 , C25D21/12
摘要： An apparatus and method is provided for analyzing or conditioning an electrochemical bath. One aspect of the invention provides a method for analyzing an electrochemical bath in an electrochemical deposition process including providing a first electrochemical bath having a first bath composition, utilizing the first electrochemical bath in an electrochemical deposition process to form a second electrochemical bath having a second bath composition and analyzing the first and second compositions to identify one or more constituents generated in the electrochemical deposition process. Additive material having a composition that is substantially the same as all or at least some of the one or more constituents generated in the electrochemical deposition process may be added to another electrochemical bath to produce a desired chemical composition. The constituents may be added at the beginning of the use of the bath to initially condition the electrochemical bath or may be added, preferably either continuously or periodically, during the electrochemical deposition process.
摘要翻译：提供了一种用于分析或调理电化学浴的装置和方法。本发明的一个方面提供了一种用于在电化学沉积方法中分析电化学浴的方法，包括提供具有第一浴组成的第一电化学浴，利用电化学沉积工艺中的第一电化学浴形成具有第二浴的第二电化学浴组合和分析第一和第二组合物以鉴定在电化学沉积过程中产生的一种或多种成分。具有与在电化学沉积工艺中产生的一种或多种成分中的全部或至少一些基本上相同的组成的添加剂材料可以加入到另一电化学浴中以产生所需的化学组成。可以在使用浴的开始时添加组分以最初调节电化学浴，或者可以在电化学沉积过程期间连续地或周期性地添加。

3. 发明授权

US06753248B1 Post metal barrier/adhesion film 有权
标题翻译：后金属屏障/粘合膜
公开(公告)号：US06753248B1
公开(公告)日：2004-06-22
申请号：US10352505
申请日：2003-01-27
申请人： Michael Wood , Barry L. Chin , Paul F. Smith , Robin Cheung
发明人： Michael Wood , Barry L. Chin , Paul F. Smith , Robin Cheung
IPC分类号： H01L214763
CPC分类号： H01L21/76852 , H01L21/76864 , H01L21/76873 , H01L21/76885
摘要： A method for processing a substrate. The method generally includes forming a copper interconnect in a sacrificial layer deposited on the substrate by patterning the sacrifical layer to form an interconnect and filling the interconnect with copper. The method additionally includes removing at least a portion of the sacrificial layer upon copper interconnect formation, depositing a barrier layer on the copper interconnect, and depositing a dielectric layer on the barrier layer.
摘要翻译：一种处理衬底的方法。该方法通常包括通过图案化牺牲层以形成互连并用铜填充互连件在沉积在衬底上的牺牲层中形成铜互连。该方法还包括在铜互连形成时去除牺牲层的至少一部分，在铜互连上沉积阻挡层，以及在阻挡层上沉积电介质层。

4. 发明授权

US08154013B2 Organic thin-film transistors 有权
标题翻译：有机薄膜晶体管
公开(公告)号：US08154013B2
公开(公告)日：2012-04-10
申请号：US12273585
申请日：2008-11-19
申请人： Yuning Li , Yiliang Wu , Ping Liu , Paul F. Smith
发明人： Yuning Li , Yiliang Wu , Ping Liu , Paul F. Smith
IPC分类号： H01L51/30 , C08G75/00
CPC分类号： H01L51/0003 , C07D493/04 , C07D495/04 , C07D517/04 , H01L51/0035 , H01L51/0043 , H01L51/0072 , H01L51/0541 , H01L51/0545
摘要： A thin-film transistor comprises a semiconducting layer comprising a semiconducting material selected from Formula (I) or (II): wherein X, R1, R2, R3, R4, R5 a, b, and n are as described herein. Semiconducting compositions of Formula (I) or (II) are also described.
摘要翻译：薄膜晶体管包括包含选自式（I）或（II）的半导体材料的半导体层：其中X，R 1，R 2，R 3，R 4，R 5 a，b和n如本文所述。还描述了式（I）或（II）的半导体组合物。

5. 发明授权

US08052895B2 Semiconducting ink formulation 有权
标题翻译：半导体油墨配方
公开(公告)号：US08052895B2
公开(公告)日：2011-11-08
申请号：US12248161
申请日：2008-10-09
申请人： Yiliang Wu , Paul F. Smith
发明人： Yiliang Wu , Paul F. Smith
IPC分类号： H01B1/12 , H01B1/20
CPC分类号： H01L51/0007 , C08G61/126 , C08G2261/3223 , C09D11/102 , C09D11/36 , C09D11/52 , C09D165/00 , H01L51/0003 , H01L51/0036 , H01L51/0545
摘要： A semiconducting ink formulation comprises a semiconducting material; a first solvent; and a second solvent which is miscible with the first solvent, has a surface tension equal to or greater than the surface tension of the first solvent, and in which the semiconducting material has a solubility of less than 0.1 wt % at room temperature The surface tension of the ink formulation can be controlled, allowing the formation of semiconducting layers in organic thin film transistors, including top-gate transistors.
摘要翻译：半导体油墨制剂包含半导体材料; 第一溶剂; 和与第一溶剂混溶的第二溶剂，其表面张力等于或大于第一溶剂的表面张力，并且其中半导体材料在室温下的溶解度小于0.1wt％。表面张力可以控制油墨配方，允许在包括顶栅晶体管的有机薄膜晶体管中形成半导体层。

6. 发明申请

US20100090200A1 ORGANIC THIN FILM TRANSISTORS 有权
标题翻译：有机薄膜晶体管
公开(公告)号：US20100090200A1
公开(公告)日：2010-04-15
申请号：US12250691
申请日：2008-10-14
申请人： Yiliang Wu , Ping Liu , Yuning Li , Paul F. Smith
发明人： Yiliang Wu , Ping Liu , Yuning Li , Paul F. Smith
IPC分类号： H01L51/05
CPC分类号： H01L51/0529 , H01L51/0036 , H01L51/0043 , H01L51/0541 , H01L51/0545
摘要： Organic thin film transistors with improved mobility are disclosed. The transistor contains two interfacial layers between the dielectric layer and the semiconducting layer. One interfacial layer is formed from a siloxane polymer or silsesquioxane polymer. The other interfacial layer is formed from an alkyl-containing silane of Formula (1): where R′ is alkyl having from about 1 to about 24 carbon atoms; R″ is alkyl having from about 1 to about 24 carbon atoms, halogen, alkoxy, hydroxyl, or amino; L is halogen, oxygen, alkoxy, hydroxyl, or amino; k is 1 or 2; and m is 1 or 2.
摘要翻译：公开了具有改进的移动性的有机薄膜晶体管。晶体管在介电层和半导体层之间包含两个界面层。一个界面层由硅氧烷聚合物或倍半硅氧烷聚合物形成。另一界面层由式（1）的含烷基的硅烷形成：其中R'为具有约1至约24个碳原子的烷基; R“是具有约1至约24个碳原子的烷基，卤素，烷氧基，羟基或氨基; L是卤素，氧，烷氧基，羟基或氨基; k为1或2; m为1或2。

7. 发明授权

US07691920B2 Ink jet of functionalized waxes 失效
标题翻译：功能化蜡的喷墨
公开(公告)号：US07691920B2
公开(公告)日：2010-04-06
申请号：US11034714
申请日：2005-01-14
申请人： Jennifer L. Belelie , Peter G. Odell , Eniko Toma , Paul F. Smith , Rina Carlini
发明人： Jennifer L. Belelie , Peter G. Odell , Eniko Toma , Paul F. Smith , Rina Carlini
IPC分类号： A61L24/00 , B01F3/04 , B05D1/32 , B41J2/01 , B41J2/16 , B41J2/17 , B41J29/38 , C07D209/48 , C07D303/40 , G01D11/00 , C08F2/00 , C08F2/46 , C08F14/06 , C08F20/22 , C08G59/14 , C08G65/18 , C08J3/28 , C09D5/00 , C09D11/00
CPC分类号： C09D11/101
摘要： An ink jet ink includes an ink vehicle, wherein the ink vehicle includes at least one wax monomer functionalized to include in the chain at least one reactive group curable upon exposure to radiation. The reactive group is preferably curable via cationic or free radical polymerization. In a preferred embodiment, the ink vehicle includes a wax monomer having a structure: wherein C represents a cationically curable group and R represents a radically curable group. The inks may be used to form an image by jetting the ink onto a transfuse member surface, increasing the viscosity of the ink upon the transfuse member surface, subsequently transferring the ink from the transfuse member surface to an image receiving substrate, and exposing the ink to radiation following the transfer to the image receiving substrate to effect reaction of the at least one reactive group.
摘要翻译：喷墨油墨包括油墨载体，其中油墨载体包括至少一种蜡官能化的蜡单体，其在链中包含在暴露于辐射时可固化的至少一种反应性基团。反应性基团优选通过阳离子或自由基聚合可固化。在优选的实施方案中，油墨载体包括具有以下结构的蜡单体：其中C表示阳离子可固化基团，R表示可自由基固化的基团。油墨可以用于通过将墨喷射到输入构件表面上来形成图像，增加在输入构件表面上的墨的粘度，随后将墨从输液构件表面转移到图像接收基底，并使墨在转移到图像接收基板之后进行辐射以实现至少一个反应性基团的反应。

8. 发明授权

US07653982B2 Individually unique hybrid printed antennae for chipless RFID applications 有权
标题翻译：独特的混合印刷天线，用于无卡RFID应用
公开(公告)号：US07653982B2
公开(公告)日：2010-02-02
申请号：US11941570
申请日：2007-11-16
申请人： Naveen Chopra , Peter M. Kazmaier , Paul F. Smith
发明人： Naveen Chopra , Peter M. Kazmaier , Paul F. Smith
IPC分类号： B05D5/12 , H01P11/00 , H01Q1/36 , H01Q13/00 , H05K3/02 , H05K3/20
CPC分类号： G06K19/0672 , G06K19/07779 , G06K19/07783 , G06K19/07784 , H05K1/165 , H05K3/12 , H05K3/1241 , H05K2203/1476 , Y10T29/49016 , Y10T29/49018 , Y10T29/49128 , Y10T29/49155
摘要： A method of printing chipless RFID tags with unique features, includes printing a RFID antenna pattern precursor using a first printing process, wherein the RFID antenna pattern precursor includes a plurality of disconnected wire segments; and printing a conductive ink using a second print process to interconnect at least two of the plurality of disconnected wire segments, to produce a final RFID antenna with a unique antenna geometry.
摘要翻译：一种打印具有独特特征的无芯片RFID标签的方法，包括使用第一印刷工艺印刷RFID天线图案前体，其中RFID天线图案前体包括多个断开的线段; 以及使用第二打印处理打印导电油墨以互连所述多个断开的线段中的至少两个，以产生具有独特天线几何形状的最终RFID天线。

9. 发明申请

US20090181177A1 METHODS FOR REMOVING A STABILIZER FROM A METAL NANOPARTICLE USING A DESTABILIZER 有权
标题翻译：使用降解剂从金属纳米颗粒中去除稳定剂的方法
公开(公告)号：US20090181177A1
公开(公告)日：2009-07-16
申请号：US12013643
申请日：2008-01-14
申请人： Yuning LI , Hadi K. MAHABADI , Hualong PAN , Yiliang WU , Ping LIU , Paul F. Smith
发明人： Yuning LI , Hadi K. MAHABADI , Hualong PAN , Yiliang WU , Ping LIU , Paul F. Smith
IPC分类号： B05D5/12 , B41F31/00
CPC分类号： C23C18/00 , B82Y30/00 , C09D11/30 , C09D11/52 , C09D11/54 , C23C18/08 , H01L27/124 , H01L27/1292 , H05K1/097 , H05K3/125 , H05K3/1283 , H05K2203/013 , H05K2203/1163
摘要： A method of forming conductive features on a substrate, the method comprising: providing two or more solutions, wherein a metal nanoparticle solution contains metal nanoparticles with a stabilizer and a destabilizer solution contains a destabilizer that destabilizes the stabilizer, liquid depositing the metal nanoparticle solution and the destabilizer solution onto the substrate, wherein during deposition or following the deposition of the metal nanoparticle solution onto the substrate, the metal nanoparticle and the destabilizer are combined with each other, destabilizing the stabilizer from the surface of the metal nanoparticles with the destabilizer and removing the stabilizer and destabilizer from the substrate by heating the substrate to a temperature below about 180° C. or by washing with the solvent
摘要翻译：一种在基底上形成导电特征的方法，所述方法包括：提供两种或更多种溶液，其中金属纳米颗粒溶液含有金属纳米颗粒与稳定剂，去稳定剂溶液含有使稳定剂不稳定的去稳定剂，液体沉积金属纳米颗粒溶液和所述去稳定剂溶液在所述基材上，其中在沉积期间或在将所述金属纳米颗粒溶液沉积到所述基材上之后，所述金属纳米颗粒和所述去稳定剂彼此组合，使所述稳定剂从所述不稳定剂的表面不稳定化并除去通过将基底加热到低于约180℃的温度或通过用溶剂洗涤来从基底上的稳定剂和去稳定剂

10. 发明申请

US20090140236A1 THIN FILM TRANSISTORS 有权
标题翻译：薄膜晶体管
公开(公告)号：US20090140236A1
公开(公告)日：2009-06-04
申请号：US11946953
申请日：2007-11-29
申请人： Yiliang Wu , Yuning Li , Ping Liu , Paul F. Smith , Hadi K. Mahabadi
发明人： Yiliang Wu , Yuning Li , Ping Liu , Paul F. Smith , Hadi K. Mahabadi
IPC分类号： H01L51/05 , H01L29/786
CPC分类号： H01L51/0049 , B82Y10/00 , H01L51/0036 , H01L51/0541 , H01L51/0545
摘要： A thin film transistor has a semiconducting layer comprising a semiconductor and surface-modified carbon nanotubes. The semiconducting layer has improved charge carrier mobility.
摘要翻译：薄膜晶体管具有包含半导体和表面改性的碳纳米管的半导体层。半导电层具有改善的电荷载流子迁移率。

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