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1. 发明申请

US20080292433A1 BATCH EQUIPMENT ROBOTS AND METHODS OF ARRAY TO ARRAY WORK-PIECE TRANSFER FOR PHOTOVOLTAIC FACTORY 审中-公开
标题翻译：批量设备机器人和方法阵列工程转让光伏工厂
公开(公告)号：US20080292433A1
公开(公告)日：2008-11-27
申请号：US11747391
申请日：2007-05-11
申请人： Robert Z. Bachrach , Avi Tepman , Alexander S. Polyak
发明人： Robert Z. Bachrach , Avi Tepman , Alexander S. Polyak
IPC分类号： B65H5/00
CPC分类号： C23C16/54 , C23C14/568 , H01L31/18
摘要： The present invention generally comprises equipment for an automated high volume batch work-piece manufacturing factory comprising work-piece handling and work-piece processing in a high productivity factory architecture capable of producing 1,000 or more work-piece an hour. The work-pieces may be presented to the equipment from a stacked supply to a parallel array. Additionally, the work-pieces may be transferred between manufacturing architectures by an array to array batch transfer. The work-pieces may be transferred within the manufacturing architecture in a parallel to parallel batch transfer operation. The robotic operations may be between robotic devices, between robotic devices and processing equipment, and within processing equipment.
摘要翻译：本发明通常包括用于自动化大批量批量工件制造工厂的设备，其包括能够每小时生产1,000个或更多个工件的高生产率工厂结构中的工件处理和工件加工。工件可以从堆叠的供应提供给设备到并行阵列。另外，工件可以通过阵列在制造架构之间转移到阵列批量传输。工件可以在并行批量传输操作的同时在制造架构内转移。机器人操作可以在机器人设备之间，机器人设备和处理设备之间以及处理设备内。

2. 发明申请

US20080279658A1 BATCH EQUIPMENT ROBOTS AND METHODS WITHIN EQUIPMENT WORK-PIECE TRANSFER FOR PHOTOVOLTAIC FACTORY 审中-公开
标题翻译：装配设备的工艺和方法在设备工作中转让光伏工厂
公开(公告)号：US20080279658A1
公开(公告)日：2008-11-13
申请号：US11747372
申请日：2007-05-11
申请人： Robert Z. Bachrach , Avi Tepman , Alexander S. Polyak
发明人： Robert Z. Bachrach , Avi Tepman , Alexander S. Polyak
IPC分类号： B65H1/00
CPC分类号： B25J15/0052 , B25J15/0226 , H01L21/67236 , H01L21/67276 , H01L21/67715 , H01L21/67721 , H01L21/67733 , H01L21/67736 , H01L21/67742 , H01L21/67748
摘要： The present invention generally comprises equipment for an automated high volume batch work-piece manufacturing factory comprising work-piece handling and work-piece processing in a high productivity factory architecture capable of producing 1,000 or more work-piece an hour. The work-pieces may be presented to the equipment from a stacked supply to a parallel array. Additionally, the work-pieces may be transferred between manufacturing architectures by an array to array batch transfer. The work-pieces may be transferred within the manufacturing architecture in a parallel to parallel batch transfer operation. The robotic operations may be between robotic devices, between robotic devices and processing equipment, and within processing equipment.
摘要翻译：本发明通常包括用于自动化大批量批量工件制造工厂的设备，其包括能够每小时生产1,000个或更多个工件的高生产率工厂结构中的工件处理和工件加工。工件可以从堆叠的供应提供给设备到并行阵列。另外，工件可以通过阵列在制造架构之间转移到阵列批量传输。工件可以在并行批量传输操作的同时在制造架构内转移。机器人操作可以在机器人设备之间，机器人设备和处理设备之间以及处理设备内。

3. 发明申请

US20120219841A1 LITHIUM ION CELL DESIGN APPARATUS AND METHOD 审中-公开
标题翻译：锂离子电池设计装置和方法
公开(公告)号：US20120219841A1
公开(公告)日：2012-08-30
申请号：US13402724
申请日：2012-02-22
申请人： Hooman Bolandi , Mahendra C. Orilall , Victor Pebenito , Karl M. Brown , Michael C. Kutney , Connie P. Wang , Robert Z. Bachrach
发明人： Hooman Bolandi , Mahendra C. Orilall , Victor Pebenito , Karl M. Brown , Michael C. Kutney , Connie P. Wang , Robert Z. Bachrach
IPC分类号： H01M2/16 , B05D5/12 , C23C4/12 , B05C13/02 , B05B17/00 , H01M2/18 , B05D1/04 , B82Y30/00
CPC分类号： C23C26/00 , H01M2/162 , H01M2/1686 , H01M4/0404 , H01M4/0419
摘要： A spray module for depositing an electro-active material over a flexible conductive substrate is provided. The spray module comprises a first heated roller for heating and transferring the flexible conductive substrate, a second heated roller for heating and transferring the flexible conductive substrate, a first spray dispenser positioned adjacent to the first heated roller for depositing electro-active material onto the flexible conductive substrate as the flexible conductive substrate is heated by the first heated roller, and a second spray dispenser positioned adjacent to the second heated roller for depositing electro-active material over the flexible conductive substrate as the flexible conductive substrate is heated by the second heated roller.
摘要翻译：提供了一种用于在柔性导电基底上沉积电活性材料的喷射模块。喷射模块包括用于加热和转移柔性导电基底的第一加热辊，用于加热和转移柔性导电基底的第二加热辊，邻近第一加热辊设置的第一喷射分配器，用于将电活性材料沉积到柔性导电基底上作为柔性导电基板的导电基板被第一加热辊加热，以及邻近第二加热辊设置的第二喷射分配器，用于在柔性导电基板被第二加热辊加热时在柔性导电基板上沉积电活性材料。

4. 发明授权

US08225496B2 Automated integrated solar cell production line composed of a plurality of automated modules and tools including an autoclave for curing solar devices that have been laminated 失效
标题翻译：由多个自动模块和工具组成的自动化集成太阳能电池生产线，包括用于固化已层压的太阳能装置的高压釜
公开(公告)号：US08225496B2
公开(公告)日：2012-07-24
申请号：US12202199
申请日：2008-08-29
申请人： Robert Z. Bachrach , Yong-Kee Chae , Soo Young Choi , Nicholas G. J. De Vries , Yacov Elgar , Eric A. Englhardt , Michel R. Frei , Charles Gay , Parris Hawkins , Choi (Gene) Ho , James Craig Hunter , Penchala N. Kankanala , Liwei Li , Wing Hoo (Hendrick) Lo , Danny Cam Toan Lu , Fang Mei , Stephen P. Murphy , Srujal (Steve) Patel , Matthew J. B. Saunders , Asaf Schlezinger , Shuran Sheng , Tzay-Fa (Jeff) Su , Jeffrey S. Sullivan , David Tanner , Teresa Trowbridge , Brice Walker , John M. White , Tae K. Won
发明人： Robert Z. Bachrach , Yong-Kee Chae , Soo Young Choi , Nicholas G. J. De Vries , Yacov Elgar , Eric A. Englhardt , Michel R. Frei , Charles Gay , Parris Hawkins , Choi (Gene) Ho , James Craig Hunter , Penchala N. Kankanala , Liwei Li , Wing Hoo (Hendrick) Lo , Danny Cam Toan Lu , Fang Mei , Stephen P. Murphy , Srujal (Steve) Patel , Matthew J. B. Saunders , Asaf Schlezinger , Shuran Sheng , Tzay-Fa (Jeff) Su , Jeffrey S. Sullivan , David Tanner , Teresa Trowbridge , Brice Walker , John M. White , Tae K. Won
IPC分类号： H01L51/44 , H01L51/48 , H01L21/768 , H01L31/072
CPC分类号： H01L21/67236 , B23K26/364 , B26F3/002 , B26F3/004 , B65G49/064 , B65G2249/02 , B65G2249/04 , C03B33/03 , C03B33/033 , H01L21/67132 , H01L21/67712 , H01L21/67715 , H01L21/67721 , H01L21/67727 , H01L21/6776 , H01L31/022425 , H01L31/03921 , H01L31/0504 , H01L31/075 , H02S50/00 , H02S50/10 , Y02E10/548 , Y02P40/57 , Y10T29/49002 , Y10T29/49355 , Y10T29/5196 , Y10T29/53113 , Y10T29/5313 , Y10T29/5317 , Y10T29/53187 , Y10T29/53365 , Y10T29/53417 , Y10T225/10 , Y10T225/325 , Y10T225/329
摘要： The present invention generally relates to a system that can be used to form a photovoltaic device, or solar cell, using processing modules that are adapted to perform one or more steps in the solar cell formation process. The automated solar cell fab is generally an arrangement of automated processing modules and automation equipment that is used to form solar cell devices. The automated solar fab will thus generally comprise a substrate receiving module that is adapted to receive a substrate, one or more absorbing layer deposition cluster tools having at least one processing chamber that is adapted to deposit a silicon-containing layer on a surface of the substrate, one or more back contact deposition chambers, one or more material removal chambers, a solar cell encapsulation device, an autoclave module, an automated junction box attaching module, and one or more quality assurance modules that are adapted to test and qualify the completely formed solar cell device.
摘要翻译：本发明一般涉及一种可用于形成光伏器件或太阳能电池的系统，该系统使用适于在太阳能电池形成过程中执行一个或多个步骤的处理模块。自动化太阳能电池制造厂通常是用于形成太阳能电池器件的自动化处理模块和自动化设备的布置。因此，自动化太阳能工厂将通常包括适于接收衬底的衬底接收模块，一个或多个吸收层沉积簇工具，其具有至少一个适于在衬底的表面上沉积含硅层的处理室，一个或多个背接触沉积室，一个或多个材料去除室，太阳能电池封装装置，高压釜模块，自动接线盒附接模块和一个或多个质量保证模块，其适于测试和限定完全形成太阳能电池装置。

5. 发明申请

US20100261071A1 METALLIZED FIBERS FOR ELECTROCHEMICAL ENERGY STORAGE 审中-公开
标题翻译：用于电化学能量储存的金属化纤维
公开(公告)号：US20100261071A1
公开(公告)日：2010-10-14
申请号：US12759404
申请日：2010-04-13
申请人： Sergey D. Lopatin , Robert Z. Bachrach , Liang-Yuh Chen
发明人： Sergey D. Lopatin , Robert Z. Bachrach , Liang-Yuh Chen
IPC分类号： H01M6/02 , H01M4/02 , H01M6/00 , D01H13/30 , C25D17/00
CPC分类号： H01M4/66 , H01M4/133 , H01M4/366 , H01M4/587 , H01M4/626 , H01M4/661 , H01M4/667 , H01M10/0525 , Y10T29/49115
摘要： A cost effective method and apparatus are provided for forming metallized fibers and depositing multilayer films thereon to form thin film electrochemical energy storage devices. In one embodiment, a fibrous substrate is formed using a fiber spinning process and the fibrous substrate is plated with a copper layer using wet deposition. Multiple material layers are then deposited onto the copper layer to form a lithium-ion battery fiber.
摘要翻译：提供了一种成本有效的方法和装置，用于形成金属化纤维并在其上沉积多层膜以形成薄膜电化学能量存储装置。在一个实施例中，使用纤维纺丝工艺形成纤维基材，并且使用湿沉积将纤维基材镀铜层。然后将多个材料层沉积到铜层上以形成锂离子电池纤维。

6. 发明授权

US07607881B2 Compact apparatus and method for storing and loading semiconductor wafer carriers 有权
公开(公告)号：US07607881B2
公开(公告)日：2009-10-27
申请号：US11764735
申请日：2007-06-18
申请人： Robert Z. Bachrach
发明人： Robert Z. Bachrach
IPC分类号： B65G65/00
摘要： An improved apparatus and method is provided for storing semiconductor wafer carriers, and for loading wafers or wafer carriers to a fabrication tool. The apparatus preferably provides an elevated port for receipt of wafer carriers from an overhead factory transport, allows for local interconnection among a plurality of the inventive apparatuses, and enables independent loading of the factory load port and the tool load port. An inventive wafer handling method which divides a lot of wafers into sublots and distributes the sublots among tools configured to perform the same process is also provided.

7. 发明申请

US20070158654A1 Apparatus for fabricating large-surface area polycrystalline silicon sheets for solar cell application 失效
标题翻译：用于制造太阳能电池应用的大面积多晶硅片的设备
公开(公告)号：US20070158654A1
公开(公告)日：2007-07-12
申请号：US11325089
申请日：2006-01-03
申请人： Arnold V. Kholodenko , Robert Z. Bachrach , Mark Mandelboym
发明人： Arnold V. Kholodenko , Robert Z. Bachrach , Mark Mandelboym
IPC分类号： H01L29/00
CPC分类号： H01L31/1804 , Y02E10/547 , Y02P70/521 , Y10T117/10 , Y10T117/1044 , Y10T117/1068
摘要： A method and apparatus for forming a semiconductor sheet suitable for use as a solar cell by depositing an array of solidified drops of a feed material on a sheet support. The desired properties of the sheet fabricated with the teaching of this invention are: flatness, low residual stress, minority carrier diffusion length greater than 40 microns, and minimum grain dimension at least two times the minority carrier diffusion length. In one embodiment, the deposition chamber is adapted to form and process sheets that have a surface area of about 1,000-2,400 cm2.
摘要翻译：一种用于形成适合用作太阳能电池的半导体片的方法和装置，该方法和装置通过在片材载体上沉积馈送材料的凝固液滴阵列。通过本发明的教导制造的片材的期望性质是：平坦度，低残余应力，大于40微米的少数载流子扩散长度，以及最小晶粒尺寸至少是少数载流子扩散长度的两倍。在一个实施例中，沉积室适于形成和处理具有约1,000-2,400cm 2的表面积的片材。

8. 发明授权

US06699356B2 Method and apparatus for chemical-mechanical jet etching of semiconductor structures 失效
标题翻译：半导体结构化学机械喷射蚀刻的方法和装置
公开(公告)号：US06699356B2
公开(公告)日：2004-03-02
申请号：US09932396
申请日：2001-08-17
申请人： Robert Z. Bachrach , Jeffrey D. Chinn
发明人： Robert Z. Bachrach , Jeffrey D. Chinn
IPC分类号： B05C500
CPC分类号： H01L21/6708 , B05B1/20 , B05B7/06 , B05B7/0884
摘要： A chemical-mechanical jet etching method rapidly removes large amounts of material in wafer thinning, or produces large-scale features on a silicon wafer, gallium arsenide substrate, or similar flat semiconductor workpiece, at etch rates in the range of 10-100 microns of workpiece thickness per minute. A nozzle or array of nozzles, optionally including a dual-orifice nozzle, delivers a high-pressure jet of machining etchant fluid to the surface of the workpiece. The machining etchant comprises a liquid or gas, carrying particulate material. The liquid may be a chemical etchant, or a solvent for a chemical etchant, if desired. The areas which are not to be etched may be shielded from the jet by a patterned mask, or the jet may be directed at areas from which material is to be removed, as in wafer thinning or direct writing, depending on the size of the desired feature or etched area.
摘要翻译：化学机械喷射蚀刻方法在硅片，砷化镓衬底或类似的平坦半导体工件上快速去除大量晶片薄化中的材料，或在10-100微米范围内的蚀刻速率下产生大尺寸特征工件厚度每分钟。可选地包括双孔喷嘴的喷嘴或喷嘴阵列将蚀刻剂流体的高压射流输送到工件的表面。加工蚀刻剂包括携带颗粒材料的液体或气体。如果需要，液体可以是化学蚀刻剂或化学蚀刻剂的溶剂。不被蚀刻的区域可以通过图案化掩模与射流屏蔽，或者喷射可以被引导到要从中除去材料的区域，如在晶片变薄或直接写入中，这取决于所需的尺寸特征或蚀刻区域。

9. 发明授权

US06540466B2 Compact apparatus and method for storing and loading semiconductor wafer carriers 失效
公开(公告)号：US06540466B2
公开(公告)日：2003-04-01
申请号：US09350867
申请日：1999-07-09
申请人： Robert Z. Bachrach
发明人： Robert Z. Bachrach
IPC分类号： B65G112
CPC分类号： H01L21/67727 , H01L21/6773 , H01L21/67733 , H01L21/67736 , H01L21/67769 , H01L21/67772 , H01L21/67775 , H01L21/67781 , Y10S414/139 , Y10S414/14
摘要： An improved apparatus and method is provided for storing semiconductor wafer carriers, and for loading wafers or wafer carriers to a fabrication tool. The apparatus preferably provides an elevated port for receipt of wafer carriers from an overhead factory transport, allows for local interconnection among a plurality of the inventive apparatuses, and enables independent loading of the factory load port and the tool load port. An inventive wafer handling method which divides a lot of wafers into sublots and distributes the sublots among tools configured to perform the same process is also provided.

10. 发明授权

US5957648A Factory automation apparatus and method for handling, moving and storing semiconductor wafer carriers 失效
标题翻译：用于处理，移动和存储半导体晶片载体的工厂自动化设备和方法
公开(公告)号：US5957648A
公开(公告)日：1999-09-28
申请号：US764661
申请日：1996-12-11
申请人： Robert Z. Bachrach
发明人： Robert Z. Bachrach
IPC分类号： B65G49/07 , H01L21/677 , B65G1/12
CPC分类号： H01L21/67769 , H01L21/67727 , H01L21/6773 , H01L21/67736 , Y10S414/139 , Y10S414/14
摘要： An improved apparatus and method is provided for handling, moving and storing semiconductor wafer carriers. The apparatus comprises two physically separate load ports, each coupled to a vertical transfer mechanism. Coupled between the two vertical transfer mechanisms is a horizontal transfer mechanism which extends above the footprint of the fabrication tool to which wafers are to be supplied. In a preferred embodiment the horizontal transfer mechanism comprises a bi-level conveyor comprised of a series of dual compartment segments. The dual compartment segments are coupled such that they may shift between a neutral and a positive position while maintaining a continuous movement channel between the two vertical transfer mechanisms. In this manner a wafer carrier may be placed within a first compartment of a neutrally positioned segment for movement; to store the wafer carrier the segment is shifted to the positive position. Thus a continuous movement channel comprised of the first or second compartments of a plurality of segments is maintained. The horizontal movement channel of a number of apparati may be interconnected to provide a local interconnection of fabrication tools.
摘要翻译：提供一种用于处理，移动和存储半导体晶片载体的改进的装置和方法。该装置包括两个物理上分离的装载端口，每个装载端口连接到垂直传送机构。在两个垂直传送机构之间耦合的是水平传送机构，其延伸到要供应晶片的制造工具的覆盖区之上。在优选实施例中，水平传送机构包括由一系列双隔室段组成的双层输送机。双隔室段联接，使得它们可以在中性位置和正位置之间移动，同时保持两个垂直传送机构之间的连续移动通道。以这种方式，晶片载体可以放置在用于运动的中性定位段的第一隔室内; 为了存储晶片载体，该段移动到正位置。因此，维持由多个段的第一或第二隔室构成的连续运动通道。多个装置的水平运动通道可以互连以提供制造工具的局部互连。

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