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    • 6. 发明授权
    • Meso-microelectromechanical system package
    • 中微机电系统封装
    • US06859119B2
    • 2005-02-22
    • US10329907
    • 2002-12-26
    • Manes EliacinTomasz KlosowiakRobert LempkowskiKe Lian
    • Manes EliacinTomasz KlosowiakRobert LempkowskiKe Lian
    • B81B7/00H01P1/10
    • B81C1/00333H01H2001/0073
    • A mesoscale microelectromechanical system (MEMS) package for a micro-machine. The mesoscale micro-machine is formed on a printed circuit board (10) at the same time and of the same materials as the mesoscale micro-machine package. Both the micro-machine and the package have a first metal layer (12, 16), an insulating member (22, 26) formed on the first metal layer, and a second metal layer (32, 36) situated on the insulating layer. The package consists of a perimeter wall surrounding the micro-machine and a low-flow capping adhesive layer (40). The first metal layers of both the micro-machine and the package are formed in the same process sequence, and the insulating layers of both the micro-machine and the package are formed in the same process sequence, and the second metal layers of both the micro-machine and the package are formed in the same process sequence. The low-flow capping adhesive secures an optional cover (46) on the package to provide an environmental seal.
    • 用于微机的中尺度微机电系统(MEMS)封装。 中等尺寸的微型机器同时形成在印刷电路板(10)上并且与中等尺寸的微型机器包装材料相同。 微机和封装均具有第一金属层(12,16),形成在第一金属层上的绝缘构件(22,26)和位于绝缘层上的第二金属层(32,36)。 包装由围绕微机器的周边壁和低流量封盖粘合剂层(40)组成。 微机和封装的第一金属层以相同的工艺顺序形成,微机和封装的绝缘层以相同的工艺顺序形成,并且两者的第二金属层 微机和封装以相同的工艺顺序形成。 低流量封盖粘合剂将可选的盖(46)固定在包装上以提供环境密封。
    • 8. 发明授权
    • Meso-microelectromechanical system having a glass beam and method for its fabrication
    • 具有玻璃束的中微机电系统及其制造方法
    • US07217369B2
    • 2007-05-15
    • US11380983
    • 2006-05-01
    • Jovica SavicManes EliacinJunhua LiuAroon V. Tungare
    • Jovica SavicManes EliacinJunhua LiuAroon V. Tungare
    • C23F1/00H01L21/00
    • H02N1/006G02B26/0841
    • A meso-electromechanical system (900, 1100) includes a substrate (215), a standoff (405, 1160) disposed on a surface of the substrate, a first electrostatic pattern (205, 1105, 1110, 1115, 1120) disposed on the surface of the substrate, and a glass beam (810). The glass beam (810) has a fixed region (820) attached to the standoff and has a second electrostatic pattern (815, 1205, 1210, 1215, 1220) on a cantilevered location of the glass beam. The second electrostatic pattern is substantially co-extensive with and parallel to the first electrostatic pattern. The second electrostatic pattern has a relaxed separation (925) from the first electrostatic pattern when the first and second electrostatic patterns are in a non-energized state. In some embodiments, a mirror is formed by the electrostatic materials that form the second electrostatic pattern. The glass beam may be patterned using sandblasting (140).
    • 中间机电系统(900,1100)包括衬底(215),设置在衬底的表面上的支座(405,1160),设置在衬底上的第一静电图案(205,1105,1110,1115,1120) 基板的表面和玻璃光束(810)。 玻璃束(810)具有附接到支座的固定区域(820),并且在玻璃束的悬臂位置上具有第二静电图案(815,1205,1212,1215,1220)。 第二静电图案与第一静电图案基本上共同并且平行。 当第一静电图案和第二静电图案处于非通电状态时,第二静电图案具有与第一静电图案的松弛分离(925)。 在一些实施例中,由形成第二静电图案的静电材料形成反射镜。 可以使用喷砂将玻璃束图案化(140)。
    • 9. 发明申请
    • MESO-MICROELECTROMECHANICAL SYSTEM HAVING A GLASS BEAM AND METHOD FOR ITS FABRICATION
    • 具有玻璃光束的MESO-微电子机电系统及其制造方法
    • US20060226732A1
    • 2006-10-12
    • US11380983
    • 2006-05-01
    • Jovica SavicManes EliacinJunhua LiuAroon Tungare
    • Jovica SavicManes EliacinJunhua LiuAroon Tungare
    • H02N1/00
    • H02N1/006G02B26/0841
    • A meso-electromechanical system (900, 1100) includes a substrate (215), a standoff (405, 1160) disposed on a surface of the substrate, a first electrostatic pattern (205, 1105, 1110, 1115, 1120) disposed on the surface of the substrate, and a glass beam (810). The glass beam (810) has a fixed region (820) attached to the standoff and has a second electrostatic pattern (815, 1205, 1210, 1215, 1220) on a cantilevered location of the glass beam. The second electrostatic pattern is substantially co-extensive with and parallel to the first electrostatic pattern. The second electrostatic pattern has a relaxed separation (925) from the first electrostatic pattern when the first and second electrostatic patterns are in a non-energized state. In some embodiments, a mirror is formed by the electrostatic materials that form the second electrostatic pattern. The glass beam may be patterned using sandblasting (140).
    • 中间机电系统(900,1100)包括衬底(215),设置在衬底的表面上的支座(405,1160),设置在衬底上的第一静电图案(205,1105,1110,1115,1120) 基板的表面和玻璃光束(810)。 玻璃束(810)具有附接到支座的固定区域(820),并且在玻璃束的悬臂位置上具有第二静电图案(815,1205,1212,1215,1220)。 第二静电图案与第一静电图案基本上共同并且平行。 当第一静电图案和第二静电图案处于非通电状态时,第二静电图案具有与第一静电图案的松弛分离(925)。 在一些实施例中,由形成第二静电图案的静电材料形成反射镜。 可以使用喷砂将玻璃束图案化(140)。