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    • 3. 发明授权
    • Use of thin carbon films as a bottom anti-reflective coating in manufacturing magnetic heads
    • 在制造磁头时使用薄碳膜作为底部抗反射涂层
    • US06346183B1
    • 2002-02-12
    • US09632501
    • 2000-08-03
    • Amanda BaerRichard HsiaoCherngye HwangClinton David SnyderHong Xu
    • Amanda BaerRichard HsiaoCherngye HwangClinton David SnyderHong Xu
    • C25C1434
    • G11B5/3163G03F7/091G11B5/3133G11B5/3166
    • A fabrication method using a bottom anti-reflective coating (BARC) eliminating deleterious effects of unwanted reflected light during the photo exposure step of a photolithographic process. The BARC coating comprises a carbon coating having a thickness of 300 angstroms, deposited by a carbon ion beam deposition tool, and an initial silicon BARC coating layer having thickness of 20 angstroms deposited before the carbon coating. Where the BARC layer is utilized in a photolithographic NiFe pole tip fabrication process, a NiFe seed layer is first deposited upon a substrate. The BARC layer is then formed on the NiFe seed layer and the pole tip trench is then photolithographically created. Thereafter, the BARC layer is removed from the bottom of the trench, utilizing a reactive ion etch process, exposing the NiFe seed layer. The NiFe pole tip is then fabricated into the trench, and any remaining photoresist and BARC layer are removed.
    • 使用底部抗反射涂层(BARC)的制造方法,其消除光刻工艺的光曝光步骤期间不期望的反射光的有害影响。 BARC涂层包括通过碳离子束沉积工具沉积的具有300埃厚度的碳涂层,以及在碳涂覆之前淀积厚度为20埃的初始硅BARC涂层。 在光刻NiFe极尖制造工艺中使用BARC层的情况下,首先将NiFe种子层沉积在衬底上。 然后在NiFe种子层上形成BARC层,然后光刻形成极尖沟槽。 此后,利用反应离子蚀刻工艺将BARC层从沟槽的底部移除,暴露出NiFe种子层。 然后将NiFe极尖制成沟槽,并且去除任何剩余的光致抗蚀剂和BARC层。