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    • 8. 发明授权
    • Apparatus and method for burn-in/testing of integrated circuit devices
    • 用于集成电路器件的老化/测试的装置和方法
    • US06094059A
    • 2000-07-25
    • US241045
    • 1999-02-01
    • Jerome A. FrankenyAnthony P. IngrahamJames Steven KampermanJames Robert Wilcox
    • Jerome A. FrankenyAnthony P. IngrahamJames Steven KampermanJames Robert Wilcox
    • G01R31/28G01R31/02
    • G01R31/2886
    • A technique for testing/stressing integrated circuit devices, especially wafers, having a plurality of contacts on one face thereof arranged in a predetermined pattern is provided. An interposer having a dielectric substrate and a device contact face and a tester contact face is provided. A first plurality of releasable connectors on the device contact are face arranged in the same predetermined pattern, and a second plurality of releasable connectors are arranged in the same predetermined pattern on the tester contact face. The releasable connections are formed of dendrites. Conducting vias connect the corresponding connectors of the first and second releasable connectors respectively. A test head is provided having a plurality of contact pads also arranged in the same predetermined pattern. Circuitry is provided on the test head to connect each of the contact pads thereon with external leads extending to provide signal contact to each of the contact pads on the test head. The interposer is positioned between the IC device and the test head, with the contacts on the IC device in contact with the first plurality of connectors and the contact pads on the test head in contact with the second plurality of connectors. Signals are provided to the connector pads from the electrical leads for performing testing and/or burn-in of the integrated circuit device. The testing is performed at elevational temperatures. A test head structure is also disclosed.
    • 提供了以预定图案布置的在其一个面上具有多个触点的集成电路装置,特别是晶片的测试/应力的技术。 提供具有电介质基板和器件接触面和测试器接触面的插入件。 设备触点上的第一多个可释放连接器以相同的预定图案布置,并且第二多个可释放连接器以相同的预定图案布置在测试器接触面上。 可释放的连接由枝晶形成。 导通孔分别连接第一和第二可释放连接器的相应连接器。 提供了具有也以相同的预定图案布置的多个接触垫的测试头。 在测试头上提供电路以将每个接触焊盘上的每个接触垫连接到外部引线上,以提供与测试头上的每个接触焊盘的信号接触。 插入器位于IC器件和测试头之间,IC器件上的触点与第一组多个连接器接触,测试头上的接触焊盘与第二组连接器接触。 信号从电引线提供给连接器焊盘,用于执行集成电路器件的测试和/或老化。 测试在高温下进行。 还公开了测试头结构。