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1. 发明授权

US06831736B2 Method of and apparatus for line alignment to compensate for static and dynamic inaccuracies in scanning 有权
标题翻译：用于线对齐的方法和装置，以补偿扫描中的静态和动态不准确
公开(公告)号：US06831736B2
公开(公告)日：2004-12-14
申请号：US10266823
申请日：2002-10-07
申请人： Rami Elichai , Gilad Schwartz , Ron Naftali , Pavel Margulis , Igor Slobodnik
发明人： Rami Elichai , Gilad Schwartz , Ron Naftali , Pavel Margulis , Igor Slobodnik
IPC分类号： G01N2100
CPC分类号： G01N21/956
摘要： In a method and apparatus for compensating for static and dynamic inaccuracies in an optical scanner used in a typical surface inspection system, the scanner may have a scanning axis and a cross-scanning axis. A surface of an inspection article is scanned along a scanning axis and a scanning axis signal is output at predetermined distances along this axis. The scanning axis signal may be used to determine a speed of relative movement between the scanner and the inspection article. A jitter signal may be output whenever the scanner deviates from the scanning axis, and this signal may be used to calculate the amount of deviation. Information, such as the speed of relative movement, scan line resolution, and a scanning axis static position error may be used to generate a scan line. A generated scan line may be shifted to compensate for a cross-scanning axis error. Utilizing this method, a scan line is generated that compensates for various scanner positioning errors, including the cross-axis and scanning axis static position errors, the scanning axis dynamic position error, and the cross-scanning axis jitter error.
摘要翻译：在用于补偿在典型表面检查系统中使用的光学扫描仪中的静态和动态不准确度的方法和装置中，扫描器可以具有扫描轴和横扫描轴。沿着扫描轴扫描检查物品的表面，沿着该轴以预定的距离输出扫描轴信号。扫描轴信号可以用于确定扫描仪和检查制品之间的相对移动速度。每当扫描仪偏离扫描轴时，抖动信号可能会被输出，该信号可用于计算偏差量。可以使用诸如相对移动速度，扫描线分辨率和扫描轴静态位置误差的信息来生成扫描线。生成的扫描线可以移动以补偿横扫轴的误差。利用该方法，生成扫描线，补偿各种扫描器定位误差，包括横轴和扫描轴静态位置误差，扫描轴动态位置误差和横扫轴抖动误差。

2. 发明授权

US07714999B2 High resolution wafer inspection system 有权
标题翻译：高分辨率晶圆检测系统
公开(公告)号：US07714999B2
公开(公告)日：2010-05-11
申请号：US11952010
申请日：2007-12-06
申请人： Dan Grossman , Moshe Langer , Roman Kris , Silviu Reinhorn , Ron Naftali , Haim Feldman
发明人： Dan Grossman , Moshe Langer , Roman Kris , Silviu Reinhorn , Ron Naftali , Haim Feldman
IPC分类号： G01N21/00
CPC分类号： G01N21/17 , G01N21/1717 , G01N21/9501 , G01N2021/1719
摘要： A method for inspecting a region, including irradiating the region via an optical system with a pump beam at a pump wavelength. A probe beam at a probe wavelength irradiates the region so as to generate returning probe beam radiation from the region. The beams are scanned across the region at a scan rate. A detector receives the returning probe radiation, and forms an image of the region that corresponds to a resolution better than pump and probe Abbe limits of the optical system. Roles of the pump and probe beams may be alternated, and a modulation frequency of the pump beam may be changed, to produce more information. Information extracted from the probe signal can also differentiate between different materials on the region.
摘要翻译：一种用于检查区域的方法，包括通过具有泵浦波长的泵浦光束的光学系统照射该区域。探测波长的探测光束照射该区域，以产生从该区域返回的探测光束辐射。以扫描速率跨越该区域扫描光束。检测器接收返回的探针辐射，并且形成对应于分辨率的区域的图像优于光学系统的泵浦和探针阿贝限制。泵和探针光束的作用可以交替变化，并且可以改变泵浦光束的调制频率，以产生更多的信息。从探测信号中提取的信息也可以区分该区域上的不同材料。

3. 发明授权

US07468506B2 Spot grid array scanning system 有权
标题翻译：点阵阵列扫描系统
公开(公告)号：US07468506B2
公开(公告)日：2008-12-23
申请号：US11334963
申请日：2006-01-19
申请人： Steven R. Rogers , Nissim Elmaliach , Emanuel Elyasef , Alon Litman , Ron Naftali
发明人： Steven R. Rogers , Nissim Elmaliach , Emanuel Elyasef , Alon Litman , Ron Naftali
IPC分类号： H01J3/14 , H01J5/16 , H01J40/14
CPC分类号： G01N21/8851 , G01N21/9501 , G03F7/70275 , G03F7/70358
摘要： A method for scanning a surface, consisting of focusing an array of beams using optics having an axis, so as to irradiate a region of the surface intercepted by the axis, such that each beam irradiates a portion of a respective sub-region within the region. The method further includes moving at least one of the array and the surface so as to cause a translation of the surface relative to the axis in a first direction. During the translation in the first direction, each of the beams is scanned over the respective sub-region in a second direction, which is different from the first direction.
摘要翻译：一种用于扫描表面的方法，包括使用具有轴的光学器件聚焦光束阵列，以便照射由所述轴线截取的表面的区域，使得每个光束照射所述区域内的相应子区域的一部分。所述方法还包括移动所述阵列和所述表面中的至少一个，以使所述表面相对于所述轴线在第一方向上平移。在第一方向的平移期间，每个光束在与第一方向不同的第二方向上扫描相应的子区域。

4. 发明申请

US20060261261A1 Spot grid array scanning system 有权
标题翻译：点阵阵列扫描系统
公开(公告)号：US20060261261A1
公开(公告)日：2006-11-23
申请号：US11334963
申请日：2006-01-19
申请人： Steven Rogers , Nissim Elmaliach , Emanuel Elyasef , Alon Litman , Ron Naftali
发明人： Steven Rogers , Nissim Elmaliach , Emanuel Elyasef , Alon Litman , Ron Naftali
IPC分类号： H01J40/14
CPC分类号： G01N21/8851 , G01N21/9501 , G03F7/70275 , G03F7/70358
摘要： A method for scanning a surface, consisting of focusing an array of beams using optics having an axis, so as to irradiate a region of the surface intercepted by the axis, such that each beam irradiates a portion of a respective sub-region within the region. The method further includes moving at least one of the array and the surface so as to cause a translation of the surface relative to the axis in a first direction. During the translation in the first direction, each of the beams is scanned over the respective sub-region in a second direction, which is different from the first direction.
摘要翻译：一种用于扫描表面的方法，包括使用具有轴的光学器件聚焦光束阵列，以便照射由所述轴线截取的表面的区域，使得每个光束照射所述区域内的相应子区域的一部分。所述方法还包括移动所述阵列和所述表面中的至少一个，以使所述表面相对于所述轴线在第一方向上平移。在第一方向的平移期间，每个光束在与第一方向不同的第二方向上扫描相应的子区域。

5. 发明授权

US07053999B2 Method and system for detecting defects 有权
公开(公告)号：US07053999B2
公开(公告)日：2006-05-30
申请号：US10105740
申请日：2002-03-21
申请人： Boris Goldberg , Ron Naftali
发明人： Boris Goldberg , Ron Naftali
IPC分类号： G01N21/00
CPC分类号： G01N21/8806 , G01N21/9501
摘要： System for scanning a surface, comprising a light source producing an illuminating light beam; an objective lens assembly, located between the light source and the surface; a plurality of interchangeable telescopes, a selected one of the interchangeable telescopes being located between the light source and the objective lens assembly; and at least one light detector, wherein at least one of the light detectors detects at least a portion of a reflected light beam, reflected from the surface and received from the selected telescope.

6. 发明授权

US06469784B2 Optical inspection method and apparatus utilizing a variable angle design 有权
公开(公告)号：US06469784B2
公开(公告)日：2002-10-22
申请号：US09941659
申请日：2001-08-30
申请人： Boris Golberg , Amir Komem , Ron Naftali , Gilad Almogy
发明人： Boris Golberg , Amir Komem , Ron Naftali , Gilad Almogy
IPC分类号： G01N2100
CPC分类号： G01N21/94
摘要： Method and apparatus for optical inspection of an article are presented. The apparatus comprises an illumination unit and at least one detection unit. The illumination unit generates an incident beam and directs it onto a predetermined region of the article. The detection unit includes a light collection system and a detector. The light collection system collects light scattered from the illuminated region with a predetermined constant maximum collection angle, and utilizes a variable angle design for selectively selecting from collected light at least one light component propagating with a solid angle segment of the maximum collection angle, and directing it to the detector.

7. 发明授权

US08134699B2 Illumination system for optical inspection 有权
标题翻译：光学检查照明系统
公开(公告)号：US08134699B2
公开(公告)日：2012-03-13
申请号：US13069332
申请日：2011-03-22
申请人： Ron Naftali , Avishay Guetta , Haim Feldman , Doron Shoham
发明人： Ron Naftali , Avishay Guetta , Haim Feldman , Doron Shoham
IPC分类号： G01N21/00
CPC分类号： G01N21/8806 , G01N21/47 , G01N21/4788 , G01N21/94 , G01N21/9501 , G01N21/95607 , G01N21/95623 , G01N2021/1772 , G01N2021/4711 , G01N2021/4735 , G01N2021/479 , G01N2021/4792 , G01N2021/8822 , G01N2021/8845 , G01N2201/0697
摘要： Apparatus for generating optical radiation includes a laser, which is configured to operate in multiple transverse modes simultaneously so as to generate an input beam, which is characterized by a first speckle contrast. The transverse modes of the input beam are optically mixed so as to generate an output beam have a second speckle contrast, which is substantially less than the first speckle contrast.
摘要翻译：用于产生光辐射的装置包括激光器，其被配置为同时以多个横向模式操作，以便产生以第一散斑对比为特征的输入光束。输入光束的横向模式被光学混合，以便产生输出光束具有基本上小于第一散斑对比度的第二散斑对比度。

8. 发明授权

US07973919B2 High resolution wafer inspection system 失效
标题翻译：高分辨率晶圆检测系统
公开(公告)号：US07973919B2
公开(公告)日：2011-07-05
申请号：US12752995
申请日：2010-04-01
申请人： Dan Grossman , Moshe Langer , Roman Kris , Silviu Reinhorn , Ron Naftali , Haim Feldman
发明人： Dan Grossman , Moshe Langer , Roman Kris , Silviu Reinhorn , Ron Naftali , Haim Feldman
IPC分类号： G01N21/00
CPC分类号： G01N21/17 , G01N21/1717 , G01N21/9501 , G01N2021/1719
摘要： A method for inspecting a region, including irradiating the region via an optical system with a pump beam at a pump wavelength. A probe beam at a probe wavelength irradiates the region so as to generate returning probe beam radiation from the region. The beams are scanned across the region at a scan rate. A detector receives the returning probe radiation, and forms an image of the region that corresponds to a resolution better than pump and probe Abbe limits of the optical system. Roles of the pump and probe beams may be alternated, and a modulation frequency of the pump beam may be changed, to produce more information. Information extracted from the probe signal can also differentiate between different materials on the region.
摘要翻译：一种用于检查区域的方法，包括通过具有泵浦波长的泵浦光束的光学系统照射该区域。探测波长的探测光束照射该区域，以产生从该区域返回的探测光束辐射。以扫描速率跨越该区域扫描光束。检测器接收返回的探针辐射，并且形成对应于分辨率的区域的图像优于光学系统的泵浦和探针阿贝限制。泵和探针光束的作用可以交替变化，并且可以改变泵浦光束的调制频率，以产生更多的信息。从探测信号中提取的信息也可以区分该区域上的不同材料。

9. 发明授权

US07630069B2 Illumination system for optical inspection 有权
标题翻译：光学检查照明系统
公开(公告)号：US07630069B2
公开(公告)日：2009-12-08
申请号：US11394218
申请日：2006-01-23
申请人： Ron Naftali , Avishay Guetta , Haim Feldman , Doron Shoham
发明人： Ron Naftali , Avishay Guetta , Haim Feldman , Doron Shoham
IPC分类号： G01N21/00
CPC分类号： G01N21/8806 , G01N21/47 , G01N21/4788 , G01N21/94 , G01N21/9501 , G01N21/95607 , G01N21/95623 , G01N2021/1772 , G01N2021/4711 , G01N2021/4735 , G01N2021/479 , G01N2021/4792 , G01N2021/8822 , G01N2021/8845 , G01N2201/0697
摘要： Apparatus for generating optical radiation includes a laser, which is configured to operate in multiple transverse modes simultaneously so as to generate an input beam, which is characterized by a first speckle contrast. The transverse modes of the input beam are optically mixed so as to generate an output beam have a second speckle contrast, which is substantially less than the first speckle contrast.
摘要翻译：用于产生光辐射的装置包括激光器，其被配置为同时以多个横向模式操作，以便产生以第一散斑对比为特征的输入光束。输入光束的横向模式被光学混合，以便产生输出光束具有基本上小于第一散斑对比度的第二散斑对比度。

10. 发明申请

US20070008519A1 Illumination system for optical inspection 有权
标题翻译：光学检查照明系统
公开(公告)号：US20070008519A1
公开(公告)日：2007-01-11
申请号：US11394218
申请日：2006-01-23
申请人： Ron Naftali , Avishay Guetta , Haim Feldman , Doron Shoham
发明人： Ron Naftali , Avishay Guetta , Haim Feldman , Doron Shoham
IPC分类号： G01N21/88
CPC分类号： G01N21/8806 , G01N21/47 , G01N21/4788 , G01N21/94 , G01N21/9501 , G01N21/95607 , G01N21/95623 , G01N2021/1772 , G01N2021/4711 , G01N2021/4735 , G01N2021/479 , G01N2021/4792 , G01N2021/8822 , G01N2021/8845 , G01N2201/0697
摘要： Apparatus for generating optical radiation includes a laser, which is configured to operate in multiple transverse modes simultaneously so as to generate an input beam, which is characterized by a first speckle contrast. The transverse modes of the input beam are optically mixed so as to generate an output beam have a second speckle contrast, which is substantially less than the first speckle contrast.
摘要翻译：用于产生光辐射的装置包括激光器，其被配置为同时以多个横向模式操作，以便产生以第一散斑对比为特征的输入光束。输入光束的横向模式被光学混合，以便产生输出光束具有基本上小于第一散斑对比度的第二散斑对比度。

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