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1. 发明授权

US07015552B2 Dual work function semiconductor structure with borderless contact and method of fabricating the same 失效
公开(公告)号：US07015552B2
公开(公告)日：2006-03-21
申请号：US11098103
申请日：2005-04-04
申请人： Qiuyi Ye , William R. Tonti , Yujun Li
发明人： Qiuyi Ye , William R. Tonti , Yujun Li
IPC分类号： H01L29/76 , H01L29/94 , H01L31/062 , H01L31/113 , H01L31/119
CPC分类号： H01L27/10888 , H01L21/76897 , H01L27/10894
摘要： A dual work function semiconductor structure with borderless contact and method of fabricating the same are presented. The structure may include a field effect transistor (FET) having a substantially cap-free gate and a conductive contact to a diffusion adjacent to the cap-free gate, wherein the conductive contact is borderless to the gate. Because the structure is a dual work function structure, the conductive contact is allowed to extend over the cap-free gate without being electrically connected thereto.

2. 发明授权

US06908815B2 Dual work function semiconductor structure with borderless contact and method of fabricating the same 失效
公开(公告)号：US06908815B2
公开(公告)日：2005-06-21
申请号：US10624781
申请日：2003-07-22
申请人： Qiuyi Ye , William R. Tonti , Yujun Li
发明人： Qiuyi Ye , William R. Tonti , Yujun Li
IPC分类号： H01L21/28 , H01L21/60 , H01L21/768 , H01L21/8234 , H01L21/8238 , H01L21/8242 , H01L23/522 , H01L27/088 , H01L27/092 , H01L27/108 , H01L29/423 , H01L29/43 , H01L29/49 , H01L21/336
CPC分类号： H01L27/10888 , H01L21/76897 , H01L27/10894
摘要： A dual work function semiconductor structure with borderless contact and method of fabricating the same are presented. The structure may include a field effect transistor (FET) having a substantially cap-free gate and a conductive contact to a diffusion adjacent to the cap-free gate, wherein the conductive contact is borderless to the gate. Because the structure is a dual work function structure, the conductive contact is allowed to extend over the cap-free gate without being electrically connected thereto.

3. 发明授权

US06642584B2 Dual work function semiconductor structure with borderless contact and method of fabricating the same 失效
公开(公告)号：US06642584B2
公开(公告)日：2003-11-04
申请号：US09772630
申请日：2001-01-30
申请人： Qiuyi Ye , William R. Tonti , Yujun Li
发明人： Qiuyi Ye , William R. Tonti , Yujun Li
IPC分类号： H01L2978
CPC分类号： H01L27/10888 , H01L21/76897 , H01L27/10894
摘要： A dual work function semiconductor structure with borderless contact and method of fabricating the same are presented. The structure may include a field effect transistor (FET) having a substantially cap-free gate and a conductive contact to a diffusion adjacent to the cap-free gate, wherein the conductive contact is borderless to the gate. Because the structure is a dual work function structure, the conductive contact is allowed to extend over the cap-free gate without being electrically connected thereto.

4. 发明授权

US08724365B2 Programmable semiconductor device 有权
标题翻译：可编程半导体器件
公开(公告)号：US08724365B2
公开(公告)日：2014-05-13
申请号：US13427162
申请日：2012-03-22
申请人： William R. Tonti , Wayne S. Berry , John A. Fifield , William H. Guthrie , Richard S. Kontra
发明人： William R. Tonti , Wayne S. Berry , John A. Fifield , William H. Guthrie , Richard S. Kontra
IPC分类号： G11C17/00
CPC分类号： G11C17/16 , H01L23/5256 , H01L2924/0002 , H01L2924/00
摘要： A programmable device includes a substrate (10); an insulator (13) on the substrate; an elongated semiconductor material (12) on the insulator, the elongated semiconductor material having first and second ends, and an upper surface S; the first end (12a) is substantially wider than the second end (12b), and a metallic material is disposed on the upper surface; the metallic material being physically migratable along the upper surface responsive to an electrical current I flowable through the semiconductor material and the metallic material.
摘要翻译：可编程器件包括衬底（10）; 绝缘体（13）; 绝缘体上的细长半导体材料（12），具有第一和第二端的细长半导体材料和上表面S; 第一端部（12a）比第二端部（12b）大得多，金属材料设置在上表面上; 所述金属材料可响应于流过半导体材料和金属材料的电流I而沿着上表面物理迁移。

5. 发明授权

US08471356B2 Programmable anti-fuse structures with conductive material islands 失效
标题翻译：具有导电材料岛的可编程抗熔丝结构
公开(公告)号：US08471356B2
公开(公告)日：2013-06-25
申请号：US12761780
申请日：2010-04-16
申请人： Kangguo Cheng , Louis L. Hsu , William R. Tonti , Chih-Chao Yang
发明人： Kangguo Cheng , Louis L. Hsu , William R. Tonti , Chih-Chao Yang
IPC分类号： G06F17/50 , H01L21/768 , H01L23/525
CPC分类号： H01L23/5252 , G06F17/505 , H01L2924/0002 , H01L2924/00
摘要： Voltage programmable anti-fuse structures and methods are provided that include at least one conductive material island atop a dielectric surface that is located between two adjacent conductive features. In one embodiment, the anti-fuse structure includes a dielectric material having at least two adjacent conductive features embedded therein. At least one conductive material island is located on an upper surface of the dielectric material that is located between the at least two adjacent conductive features. A dielectric capping layer is located on exposed surfaces of the dielectric material, the at least one conductive material island and the at least two adjacent conductive features. When the anti-fuse structure is in a programmed state, a dielectric breakdown path is present in the dielectric material that is located beneath the at least one conductive material island which conducts electrical current to electrically couple the two adjacent conductive features.
摘要翻译：提供了电压可编程的抗熔丝结构和方法，其包括位于介于两个相邻导电特征之间的电介质表面上的至少一个导电材料岛。在一个实施例中，反熔丝结构包括具有嵌入其中的至少两个相邻导电特征的电介质材料。至少一个导电材料岛位于介电材料的位于至少两个相邻导电特征之间的上表面上。电介质覆盖层位于电介质材料的暴露表面上，至少一个导电材料岛和至少两个相邻的导电特征。当反熔丝结构处于编程状态时，介电击穿路径存在于介电材料中，介电材料位于至少一个导电材料岛之下，该导电材料岛传导电流以电耦合两个相邻导电特征。

6. 发明授权

US08349697B2 Field effect transistor with air gap dielectric 有权
标题翻译：具有气隙电介质的场效应晶体管
公开(公告)号：US08349697B2
公开(公告)日：2013-01-08
申请号：US13537334
申请日：2012-06-29
申请人： Wagdi W. Abadeer , Kiran V. Chatty , Robert J. Gauthier, Jr. , Jed H. Rankin , William R. Tonti , Yun Shi
发明人： Wagdi W. Abadeer , Kiran V. Chatty , Robert J. Gauthier, Jr. , Jed H. Rankin , William R. Tonti , Yun Shi
IPC分类号： H01L21/76
CPC分类号： H01L29/66795 , H01L29/785
摘要： A field effect transistor (FET) that includes a drain formed in a first plane, a source formed in the first plane, a channel formed in the first plane and between the drain and the source and a gate formed in the first plane. The gate is separated from at least a portion of the body by an air gap. The air gap is also in the first plane.
摘要翻译：一种场效应晶体管（FET），包括形成在第一平面中的漏极，形成在第一平面中的源极，形成在第一平面中，在漏极和源极之间的沟道以及形成在第一平面中的栅极。门通过气隙与身体的至少一部分分离。气隙也在第一平面。

7. 发明申请

US20120264275A1 FIELD EFFECT TRANSISTOR WITH AIR GAP DIELECTRIC 有权
标题翻译：具有气隙介质的场效应晶体管
公开(公告)号：US20120264275A1
公开(公告)日：2012-10-18
申请号：US13537334
申请日：2012-06-29
申请人： Wagdi W. Abadeer , Kiran V. Chatty , Robert J. Gauthier, JR. , Jed H. Rankin , William R. Tonti , Yun Shi
发明人： Wagdi W. Abadeer , Kiran V. Chatty , Robert J. Gauthier, JR. , Jed H. Rankin , William R. Tonti , Yun Shi
IPC分类号： H01L21/762
CPC分类号： H01L29/66795 , H01L29/785
摘要： A field effect transistor (FET) that includes a drain formed in a first plane, a source formed in the first plane, a channel formed in the first plane and between the drain and the source and a gate formed in the first plane. The gate is separated from at least a portion of the body by an air gap. The air gap is also in the first plane.
摘要翻译：一种场效应晶体管（FET），包括形成在第一平面中的漏极，形成在第一平面中的源极，形成在第一平面中，在漏极和源极之间的沟道以及形成在第一平面中的栅极。门通过气隙与身体的至少一部分分离。气隙也在第一平面。

8. 发明授权

US08110483B2 Forming an extremely thin semiconductor-on-insulator (ETSOI) layer 有权
标题翻译：形成极薄的绝缘体上半导体（ETSOI）层
公开(公告)号：US08110483B2
公开(公告)日：2012-02-07
申请号：US12603737
申请日：2009-10-22
申请人： Wagdi W. Abadeer , Lilian Kamal, legal representative , Kiran V. Chatty , Jason E. Cummings , Toshiharu Furukawa , Robert J. Gauthier , Jed H. Rankin, Jr. , Robert R. Robison , William R. Tonti
发明人： Wagdi W. Abadeer , Kiran V. Chatty , Jason E. Cummings , Toshiharu Furukawa , Robert J. Gauthier , Jed H. Rankin, Jr. , Robert R. Robison , William R. Tonti
IPC分类号： H01L21/762
CPC分类号： H01L29/0649 , H01L21/76264 , H01L21/84 , H01L27/1203
摘要： Solutions for forming an extremely thin semiconductor-on-insulator (ETSOI) layer are disclosed. In one embodiment, a method includes providing a wafer including a plurality of semiconductor-on-insulator (SOI) layer regions separated by at least one shallow trench isolation (STI); amorphizing the plurality of SOI layer regions by implanting the plurality of SOI layer regions with an implant species; and removing a portion of the amorphized SOI layer region to form at least one recess in the amorphized SOI layer region.
摘要翻译：公开了用于形成非常薄的绝缘体上半导体（ETSOI）层的解决方案。在一个实施例中，一种方法包括提供包括通过至少一个浅沟槽隔离（STI）分离的多个绝缘体上半导体（SOI）层区域的晶片; 通过用植入物种植入多个SOI层区域来使多个SOI层区域非晶化; 以及去除所述非晶化SOI层区域的一部分以在所述非晶化SOI层区域中形成至少一个凹部。

9. 发明授权

US08008696B2 Band gap modulated optical sensor 有权
标题翻译：带隙调制光传感器
公开(公告)号：US08008696B2
公开(公告)日：2011-08-30
申请号：US12146575
申请日：2008-06-26
申请人： Kangguo Cheng , Toshiharu Furukawa , Robert Robison , William R. Tonti
发明人： Kangguo Cheng , Toshiharu Furukawa , Robert Robison , William R. Tonti
IPC分类号： H01L29/72
CPC分类号： H01L27/14645 , H01L27/14627
摘要： A complementary metal-oxide-semiconductor (CMOS) optical sensor structure comprises a pixel containing a charge collection well of a same semiconductor material as a semiconductor layer in a semiconductor substrate and at least another pixel containing another charge collection well of a different semiconductor material than the material of the semiconductor layer. The charge collections wells have different band gaps, and consequently, generate charge carriers in response to light having different wavelengths. The CMOS sensor structure thus includes at least two pixels responding to light of different wavelengths, enabling wavelength-sensitive, or color-sensitive, capture of an optical data. Further, a design structure for the inventive complementary metal-oxide-semiconductor (CMOS) image sensor is also provided.
摘要翻译：互补金属氧化物半导体（CMOS）光学传感器结构包括含有与半导体衬底中的半导体层相同的半导体材料的电荷收集阱的像素，以及包含不同半导体材料的另一电荷收集阱的至少另一个像素半导体层的材料。电荷收集阱具有不同的带隙，因此响应于具有不同波长的光而产生电荷载流子。因此，CMOS传感器结构包括响应于不同波长的光的至少两个像素，使得能够对光学数据进行波长敏感或颜色敏感的捕获。此外，还提供了本发明的互补金属氧化物半导体（CMOS）图像传感器的设计结构。

10. 发明申请

US20110095393A1 CREATING EXTREMELY THIN SEMICONDUCTOR-ON-INSULATOR (ETSOI) HAVING SUBSTANTIALLY UNIFORM THICKNESS 有权
标题翻译：创造出具有重大均匀厚度的极细半导体绝缘体（ETSOI）
公开(公告)号：US20110095393A1
公开(公告)日：2011-04-28
申请号：US12603668
申请日：2009-10-22
申请人： Nathaniel C. Berliner , Kangguo Cheng , Jason E. Cummings , Toshiharu Furukawa , Jed H. Rankin , Robert R. Robison , William R. Tonti
发明人： Nathaniel C. Berliner , Kangguo Cheng , Jason E. Cummings , Toshiharu Furukawa , Jed H. Rankin , Robert R. Robison , William R. Tonti
IPC分类号： H01L29/06 , H01L21/66 , C23F1/08
CPC分类号： H01L21/7624 , H01L21/30625 , H01L22/12 , H01L22/20 , H01L2924/0002 , Y10S438/959 , H01L2924/00
摘要： An extremely thin semiconductor-on-insulator (ETSOI) wafer is created having a substantially uniform thickness by measuring a semiconductor layer thickness at a plurality of selected points on a wafer; determining a removal thickness to be removed at each of the plurality of selected points such that removal of the removal thickness results in a substantially uniform within-wafer semiconductor layer thickness; implanting a species into the wafer at each of the plurality of selected points with at least one of a dose level and an energy level based on the removal thickness for the respective point; and polishing the semiconductor layer to thin the semiconductor layer.
摘要翻译：通过测量晶片上的多个选定点处的半导体层厚度，制造出具有基本上均匀的厚度的极薄的绝缘体上半导体（ETSOI）晶片; 确定在所述多个选择点中的每一个处要除去的去除厚度，使得所述去除厚度的去除导致基本上均匀的晶片内半导体层厚度; 基于各个点的去除厚度，以剂量水平和能量水平中的至少一个将多个选择点中的每一个植入种子到晶片; 并抛光半导体层以使半导体层变薄。

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