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    • 5. 发明授权
    • Integrated circuit system with MOS device
    • 集成电路系统与MOS器件
    • US07932103B2
    • 2011-04-26
    • US11680568
    • 2007-02-28
    • Niraj SubbaJung-Suk Goo
    • Niraj SubbaJung-Suk Goo
    • G01R31/26
    • H01L22/14
    • An integrated circuit system includes measuring capacitance for a base structure between a base gate and a base connector thereof, measuring capacitance for a test structure between a test gate and a test connector thereof, the test structure having the test gate, a test dielectric, and the test connector with the test dielectric extending thereunder, and determining a difference between the capacitances of the base structure and the test structure to determine parasitic capacitance for the base structure between the base gate and the base connector thereof.
    • 一种集成电路系统,包括测量基栅和基底连接器之间的基底结构的电容,测量测试栅和测试连接器之间的测试结构的电容,具有测试栅的测试结构,测试电介质和 所述测试连接器具有延伸到其下的测试电介质,并且确定所述基底结构和所述测试结构的电容之间的差异,以确定所述基极栅极与所述基极连接器之间的基底结构的寄生电容。