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1. 发明授权

US07179392B2 Method for forming a tunable piezoelectric microresonator 有权
标题翻译：形成可调谐压电微谐振器的方法
公开(公告)号：US07179392B2
公开(公告)日：2007-02-20
申请号：US10794527
申请日：2004-03-05
申请人： Philippe Robert , Grégory Caruyer , Pascal Ancey , Guillaume Bouche
发明人： Philippe Robert , Grégory Caruyer , Pascal Ancey , Guillaume Bouche
IPC分类号： H01L41/08
CPC分类号： H03H9/173 , H03H3/04 , H03H2003/0414 , Y10T29/42
摘要： A process for manufacturing a resonator including the steps of: forming on an insulating substrate a first portion of a conductive material and a second portion of another material on the first portion; forming an insulating layer having its upper surface flush with the upper part of the second portion; forming by a succession of depositions and etchings a beam of a conductive material above the second portion, the beam ends being on the insulating layer on either side of the second portion, the upper surface of the second portion being exposed on either side of the beam, a third portion of a piezoelectric material on the beam and a fourth portion of a conductive material on the third portion above the beam portion located above the second portion; and removing the second portion.
摘要翻译：一种用于制造谐振器的方法，包括以下步骤：在绝缘基板上形成第一部分上的导电材料的第一部分和另一材料的第二部分; 形成其上表面与所述第二部分的上部齐平的绝缘层; 通过一系列沉积和蚀刻形成第二部分上方的导电材料束，光束端在第二部分的任一侧上的绝缘层上，第二部分的上表面暴露在光束的任一侧上，所述梁上的压电材料的第三部分和位于所述第二部分上方的所述梁部分上方的所述第三部分上的导电材料的第四部分; 并移除第二部分。

2. 发明申请

US20080283373A1 Assembly of a Microswitch and of an Acoustic Resonator 有权
标题翻译：微型开关和声谐振器的组装
公开(公告)号：US20080283373A1
公开(公告)日：2008-11-20
申请号：US11629586
申请日：2005-06-13
申请人： Grégory Caruyer , Guillaume Bouche , Pascal Ancey
发明人： Grégory Caruyer , Guillaume Bouche , Pascal Ancey
IPC分类号： H01H57/00 , H01H11/00
CPC分类号： B81C1/0015 , B81B3/0021 , B81B2201/032 , B81B2203/0315 , B81B2203/04 , H01H57/00 , H01H2057/006 , H03H9/172 , H03H2009/241 , Y10T29/49105
摘要： The invention relates to a device consisting of an electromechanical microswitch comprising mobile beam (2). According to the invention, at least part (14) of the beam forms the piezoelectric element of a piezoelectric actuator.
摘要翻译：本发明涉及由包括移动光束（2）的机电微型开关组成的装置。根据本发明，梁的至少一部分（14）形成压电致动器的压电元件。

3. 发明授权

US07038355B2 Tunable microresonator on an insulating beam deformable by the difference in thermal expansion coefficients 有权
标题翻译：可调谐的微谐振器可以通过热膨胀系数的差异而变形
公开(公告)号：US07038355B2
公开(公告)日：2006-05-02
申请号：US10814619
申请日：2004-03-31
申请人： Guillaume Bouche , Pascal Ancey , Grégory Caruyer
发明人： Guillaume Bouche , Pascal Ancey , Grégory Caruyer
IPC分类号： H02N2/00 , H01L41/00
CPC分类号： B81B3/0078 , B81B2201/0271 , B81B2201/032 , B81B2203/0109 , H01G5/16 , H03H9/172 , H03H2009/02181
摘要： A device comprising a resonator formed of a piezoelectric layer sandwiched between two metal electrodes, the resonator being laid on a suspended beam, the device comprising means for deforming said beam by the difference in thermal expansion coefficients.
摘要翻译：一种包括由夹在两个金属电极之间的压电层形成的谐振器的装置，所述谐振器被放置在悬挂梁上，所述装置包括用于使所述光束变形所述热膨胀系数差的装置。

4. 发明授权

US07960900B2 Assembly of a microswitch and of an acoustic resonator 有权
标题翻译：微型开关和声谐振器的组装
公开(公告)号：US07960900B2
公开(公告)日：2011-06-14
申请号：US11629586
申请日：2005-06-13
申请人： Grégory Caruyer , Guillaume Bouche , Pascal Ancey
发明人： Grégory Caruyer , Guillaume Bouche , Pascal Ancey
IPC分类号： H01L41/08
CPC分类号： B81C1/0015 , B81B3/0021 , B81B2201/032 , B81B2203/0315 , B81B2203/04 , H01H57/00 , H01H2057/006 , H03H9/172 , H03H2009/241 , Y10T29/49105
摘要： The invention relates to a device consisting of an electromechanical microswitch comprising mobile beam (2). According to the invention, at least part (14) of the beam forms the piezoelectric element of a piezoelectric actuator.
摘要翻译：本发明涉及由包括移动光束（2）的机电微型开关组成的装置。根据本发明，梁的至少一部分（14）形成压电致动器的压电元件。

5. 发明授权

US07310029B2 Bulk acoustic resonator with matched resonance frequency and fabrication process 有权
标题翻译：具有匹配谐振频率和制造工艺的体声波谐振器
公开(公告)号：US07310029B2
公开(公告)日：2007-12-18
申请号：US10883690
申请日：2004-07-06
申请人： Philippe Robert , Pascal Ancey , Grégory Caruyer
发明人： Philippe Robert , Pascal Ancey , Grégory Caruyer
IPC分类号： H03H9/15 , H03H9/54
CPC分类号： H03H9/173 , H03H3/04 , H03H9/175 , H03H2009/02181 , Y10T29/42
摘要： The resonator comprises a piezoelectric layer arranged between two electrodes. An electrical heating resistor is arranged in thermal contact with at least one of the electrodes. Temporary heating of the electrode enables the material constituting the electrode to be partially evaporated, so as to thin the electrode and thus adjust the resonance frequency. Measurement of the resonance frequency in the course of evaporation enables the heating to be interrupted when the required resonance frequency is obtained. One of the electrodes can be arranged on a substrate formed by an acoustic Bragg grating. The resonator can comprise a substrate comprising a cavity whereon one of the electrodes is at least partially arranged.
摘要翻译：谐振器包括布置在两个电极之间的压电层。电加热电阻器布置成与至少一个电极热接触。电极的暂时加热使得构成电极的材料部分蒸发，从而使电极变薄，从而调节谐振频率。在蒸发过程中谐振频率的测量使得当获得所需的共振频率时能够中断加热。一个电极可以布置在由声布拉格光栅形成的基板上。谐振器可以包括基底，其包括其中一个电极至少部分地布置的空腔。

6. 发明授权

US07852488B2 Method and device for characterising a structure by wavelength effect in a photoacoustic system 有权
标题翻译：用于通过光声系统中的波长效应来表征结构的方法和装置
公开(公告)号：US07852488B2
公开(公告)日：2010-12-14
申请号：US11922536
申请日：2006-06-19
申请人： Arnaud Devos , Grégory Caruyer
发明人： Arnaud Devos , Grégory Caruyer
IPC分类号： G01B11/02 , G01B11/28
CPC分类号： G01N21/1702 , G01N2021/1706
摘要： The invention relates to a structure characterising device comprising means which are used for generating a first pump radiation and a second probe radiation and for transmitting different wavelength radiation, means for producing a time offset between said first pump and second probe radiation on the structure by means of detecting means of said second beam after the reflection or transmission thereof to said structure in such a way that an analysis signal is generated, means for processing said signal and identifying an area corresponding to the signal jump, for determining the jump amplitude according to different wavelengths, for comparing said amplitude with a theoretical amplitude variation pattern according to the wavelengths and for determining, for the wavelength characteristic for said theoretical pattern, a characteristic value associated to the structure thickness and to the radiation propagation velocity in said structure.
摘要翻译：本发明涉及一种结构特征化装置，其包括用于产生第一泵浦辐射和第二探测辐射并用于传输不同波长辐射的装置，用于通过装置在所述结构上产生所述第一泵和第二探测器辐射之间的时间偏移的装置所述第二光束的检测装置在以产生分析信号的方式反射或传输到所述结构之后，检测所述第二光束的检测装置，用于处理所述信号并识别与信号跳跃相对应的区域的装置，用于根据不同的信号确定跳跃幅度波长，用于将所述振幅与根据波长的理论振幅变化模式进行比较，并且对于所述理论模式的波长特性，确定与所述结构中的结构厚度和辐射传播速度相关联的特征值。

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