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    • 2. 发明授权
    • Photo-cracker cell
    • 光裂解池
    • US5298759A
    • 1994-03-29
    • US19965
    • 1993-02-19
    • Peter D. BrewerJohn A. Roth
    • Peter D. BrewerJohn A. Roth
    • B01J19/12C23C14/22C23C16/452C23C16/48C30B23/06G21K5/00
    • C23C16/482B01J19/121B01J19/123C23C14/22C23C16/452C30B23/066
    • Ultraviolet (UV) light from a lamp (12) or laser (38) is provided for cracking Group V and Group VI species comprising clusters (dimers and tetramers) or metal-organic molecules to form monomers (atoms). The UV radiation interacts with a molecular beam (14) of Group V and Group VI species following their generation in a source cell (16), which may be an effusion source in molecular beam epitaxy (MBE) apparatus, a thermal cracker cell in gas-source MBE apparatus, or a gas injector cell in metal-organic MBE apparatus (MOMBE). As configured, the UV light source and associated elements comprise a unit, termed herein a "photo-cracker cell" (10). The photo-cracker cell includes an elliptical reflective cavity (18), which defines two foci. The source of UV light is located along one focus and the path of the molecular beam is located along the other focus substantially parallel thereto. The photo-cracker cell may be provided on existing MBE or MOMBE apparatus, between the present source cell and the growth chamber (36) in which III-V, IV, and II-VI semiconductor layers on substrates are deposited.
    • 提供来自灯(12)或激光(38)的紫外线(UV)光,用于裂解含有簇(二聚体和四聚体)或金属 - 有机分子的V族和VI族物质以形成单体(原子)。 在源细胞(16)中,UV辐射与V族和VI族物质的分子束(14)相互作用,其可以是分子束外延(MBE)装置中的渗出源,气体中的热裂解池 源MBE设备或金属有机MBE设备(MOMBE)中的气体注入单元。 如所配置的,UV光源和相关元件包括本文称为“光裂解电池”(10)的单元。 光裂解单元包括限定两个焦点的椭圆反射腔(18)。 UV光源沿着一个焦点定位,并且分子束的路径沿着基本上与其平行的另一焦点定位。 可以在现有的源电池和沉积有基板上的III-V,IV和II-VI半导体层的生长室(36)之间的现有MBE或MOMBE装置上提供光裂化器单元。