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1. 发明授权

US06717143B2 Beam alignment in a lower column of a scanning electron microscope or the like 有权
标题翻译：在扫描电子显微镜等的下列中的束对准
公开(公告)号：US06717143B2
公开(公告)日：2004-04-06
申请号：US10136692
申请日：2002-04-30
申请人： Paul J. Duval , Anastasia Y. Tyurina , Neal T. Sullivan
发明人： Paul J. Duval , Anastasia Y. Tyurina , Neal T. Sullivan
IPC分类号： G21K700
CPC分类号： H01J37/28 , H01J37/145 , H01J37/1472
摘要： An apparatus for imaging the surface of a sample, such as a scanning electron microscope. The apparatus generates a beam of charged particles directed at the surface, and includes an objective lens and an electrostatic lens for controlling the particle beam. The objective lens and the electrostatic lens constitute a compound lens that has an axis. The beam is controlled so that it travels along the axis of the compound lens in order to avoid adverse consequences induced by, for example, mechanical misalignments and as manifested when the focus of one of the objective and electrostatic lenses is changed during operation of the apparatus.
摘要翻译：用于对样品表面进行成像的装置，例如扫描电子显微镜。该装置产生指向表面的带电粒子束，并且包括用于控制粒子束的物镜和静电透镜。物镜和静电透镜构成具有轴的复合透镜。控制光束使其沿着复合透镜的轴线行进，以避免由例如机械不对准引起的不良后果，并且当在设备的操作期间改变物镜和静电透镜中的一个的焦点被改变时表现出来。

2. 发明授权

US06593578B1 Wien filter for use in a scanning electron microscope or the like 有权
标题翻译：用于扫描电子显微镜等的维恩滤波器
公开(公告)号：US06593578B1
公开(公告)日：2003-07-15
申请号：US10010321
申请日：2001-11-08
申请人： Paul J. Duval , Allan I. Rubin , Ira Rosenberg , Vladimir Vayner , Neal T. Sullivan
发明人： Paul J. Duval , Allan I. Rubin , Ira Rosenberg , Vladimir Vayner , Neal T. Sullivan
IPC分类号： H01F700
CPC分类号： H01J49/466 , H01J37/05 , H01J2237/057
摘要： A charged particle filter such as a Wien filter in which components used as the pole pieces and electrodes are precisely and reliably secured to a supporting structure through which they extend and to which they are brazed. Electrical insulating gaps in the magnetic circuit are located very remotely from the pole faces of the pole pieces so as to minimize any adverse effect of the gaps on the produced magnetic field.
摘要翻译：带电粒子滤波器如维恩滤波器，其中用作极片和电极的部件被精确可靠地固定到支撑结构，通过它们延伸并被钎焊到该支撑结构。磁路中的电气绝缘间隙非常远离极片的极面，以最小化间隙对所产生的磁场的任何不利影响。

3. 发明申请

US20100044577A1 MICROCHANNEL PLATE DEVICES WITH TUNABLE RESISTIVE FILMS 有权
标题翻译：具有可调电阻膜的微通道板器件
公开(公告)号：US20100044577A1
公开(公告)日：2010-02-25
申请号：US12392064
申请日：2009-02-24
申请人： Neal T. Sullivan , Anton Tremsin , Phiippe De Rouffignac , David Beaulieu , Kourosh Saadatmand , Steve Bachman , Ken Stenton
发明人： Neal T. Sullivan , Anton Tremsin , Phiippe De Rouffignac , David Beaulieu , Kourosh Saadatmand , Steve Bachman , Ken Stenton
IPC分类号： G01T3/00
CPC分类号： H01J43/246 , G01T3/08
摘要： A microchannel plate for detecting neutrons includes a hydrogen-rich polymer substrate that defines a plurality of channels extending from a top surface of the substrate to a bottom surface of the substrate, where neutrons interact with the plurality of channels to generate at least one secondary electron. A top electrode is positioned on the top surface of the substrate and a bottom electrode is positioned on the bottom surface of the substrate. A resistive layer is formed over an outer surface of the plurality of channels that provides ohmic conduction with a resistivity that is substantially constant. An emissive layer is formed over the resistive layer. Neutron interaction products interact with the plurality of channels defined by the substrate and the emissive films to generate secondary electrons that cascade within the plurality of channels to provide an amplified signal related to the detection of neutrons.
摘要翻译：用于检测中子的微通道板包括富氢聚合物基底，其限定从基底的顶表面延伸到基底的底表面的多个通道，其中中子与多个通道相互作用以产生至少一个二次电子。顶部电极位于衬底的顶表面上，底部电极位于衬底的底表面上。电阻层形成在多个通道的外表面上，其提供基本恒定的电阻率的欧姆导电。在电阻层上形成发光层。中子相互作用产物与由衬底和发射膜限定的多个通道相互作用以产生在多个通道内级联的二次电子，以提供与中子检测有关的放大信号。

4. 发明授权

US06992287B2 Apparatus and method for image optimization of samples in a scanning electron microscope 失效
标题翻译：扫描电子显微镜中样品图像优化的装置和方法
公开(公告)号：US06992287B2
公开(公告)日：2006-01-31
申请号：US10985144
申请日：2004-11-10
申请人： Neal T. Sullivan
发明人： Neal T. Sullivan
IPC分类号： G21K7/00 , G21G5/00
CPC分类号： H01J37/28 , H01J2237/2817 , H01J2237/2826
摘要： A system and method for identifying an optimal landing energy of a probe current in a scanning electron microscope system. A probe current having a known landing energy is directed at a sample for producing a signal electron beam. The current of the signal electron beam is measured by directing the beam to a current detector for calculating a current yield, which is the ratio of the signal current to the probe current. The landing energy can then be changed for subsequent measurements of the signal current to identify the landing energy which produces a desired current yield. Once identified, the landing energy value can be used to produce a signal electron beam directed towards an imaging detector to generate topographic images of samples.
摘要翻译：用于在扫描电子显微镜系统中识别探针电流的最佳着陆能量的系统和方法。具有已知着陆能量的探针电流被引导到用于产生信号电子束的样本。通过将光束引导到电流检测器来计算电流产量，即信号电流与探针电流的比值来测量信号电子束的电流。然后可以改变着陆能量以用于信号电流的随后测量，以识别产生期望电流产量的着陆能量。一旦被识别，着陆能量值可用于产生指向成像检测器的信号电子束，以产生样本的地形图像。

5. 发明授权

US09368332B2 Microchannel plate devices with tunable resistive films 有权
标题翻译：具有可调电阻膜的微通道板器件
公开(公告)号：US09368332B2
公开(公告)日：2016-06-14
申请号：US13460726
申请日：2012-04-30
申请人： Neal T. Sullivan , Steve Bachman , Philippe de Rouffignac , Anton Tremsin , David Beaulieu , Dmitry Gorelikov
发明人： Neal T. Sullivan , Steve Bachman , Philippe de Rouffignac , Anton Tremsin , David Beaulieu , Dmitry Gorelikov
IPC分类号： H01J1/62 , H01J43/04 , H01J43/24
CPC分类号： H01J43/04 , H01J43/246
摘要： A microchannel plate includes a substrate defining a plurality of channels extending from a top surface of the substrate to a bottom surface of the substrate. A resistive layer is formed over an outer surface of the plurality of channels that provides ohmic conduction with a predetermined resistivity that is substantially constant. An emissive layer is formed over the resistive layer. A top electrode is positioned on the top surface of the substrate. A bottom electrode positioned on the bottom surface of the substrate.
摘要翻译：微通道板包括限定从衬底的顶表面延伸到衬底的底表面的多个通道的衬底。电阻层形成在多个通道的外表面上，其提供基本上恒定的预定电阻率的欧姆导通。在电阻层上形成发光层。顶部电极位于衬底的顶表面上。位于基板底面的底部电极。

6. 发明申请

US20110226933A1 Image Intensifying Device 有权
标题翻译：图像增强装置
公开(公告)号：US20110226933A1
公开(公告)日：2011-09-22
申请号：US13151086
申请日：2011-06-01
申请人： Neal T. Sullivan , Anton Tremsin , Ken Stenton , Philippe De Rouffignac
发明人： Neal T. Sullivan , Anton Tremsin , Ken Stenton , Philippe De Rouffignac
IPC分类号： H01J40/14
CPC分类号： H01J31/507 , H01J43/246 , H01J2231/5016
摘要： An image intensifying device includes a lens that is positioned at a light input that forms an image of a scene. The image intensifying device also includes an image intensifier tube that includes a photocathode that is positioned to receive the image formed by the lens. The photocathode generates photoelectrons in response to the light image of the scene. The image intensifier tube also includes a microchannel plate having an input surface comprising the photocathode. The microchannel plate receives the photoelectrons generated by the photocathode and generating secondary electrons. An electron detector receives the secondary electrons generated by the microchannel plate and generates an intensified image of the scene.
摘要翻译：图像增强装置包括位于形成场景的图像的光输入处的透镜。图像增强装置还包括图像增强管，其包括被定位成接收由透镜形成的图像的光电阴极。光电阴极响应于场景的光图像而产生光电子。图像增强管还包括具有包括光电阴极的输入表面的微通道板。微通道板接收由光电阴极产生的光电子并产生二次电子。电子检测器接收由微通道板产生的二次电子并产生场景的增强图像。

7. 发明申请

US20100075445A1 Silicon Microchannel Plate Devices With Smooth Pores And Precise Dimensions 有权
标题翻译：具有光滑孔和精确尺寸的硅微通道板装置
公开(公告)号：US20100075445A1
公开(公告)日：2010-03-25
申请号：US12234641
申请日：2008-09-20
申请人： David Beaulieu , Neal T. Sullivan
发明人： David Beaulieu , Neal T. Sullivan
IPC分类号： H01L21/30
CPC分类号： H01J31/507 , H01J9/125 , H01J43/246 , H01J2231/5016 , Y10S977/888
摘要： A method of fabricating a microchannel plate includes forming a plurality of pores in a silicon substrate. The plurality of pores is oxidized, thereby consuming silicon at surfaces of the plurality of pores and forming a silicon dioxide layer over the plurality of pores. At least a portion of the silicon dioxide layer is stripped, which reduces a surface roughness of the plurality of pores. A semiconducting layer can be deposited onto the surface of the silicon dioxide layer. The semiconducting layer is then oxidized, thereby consuming at least some of the polysilicon or amorphous silicon layer and forming an insulating layer. Resistive and secondary electron emissive layers are then deposited on the insulating layer by atomic layer deposition.
摘要翻译：一种制造微通道板的方法包括在硅衬底中形成多个孔。多个孔被氧化，从而在多个孔的表面消耗硅，并在多个孔上形成二氧化硅层。剥离二氧化硅层的至少一部分，这降低了多个孔的表面粗糙度。半导体层可沉积在二氧化硅层的表面上。然后氧化半导体层，从而消耗多晶硅或非晶硅层中的至少一些并形成绝缘层。然后通过原子层沉积将电阻和二次电子发射层沉积在绝缘层上。

8. 发明申请

US20120273689A1 Microchannel Plate Devices With Tunable Resistive Films 审中-公开
标题翻译：具有可调电阻膜的微通道板装置
公开(公告)号：US20120273689A1
公开(公告)日：2012-11-01
申请号：US13543804
申请日：2012-07-07
申请人： Neal T. Sullivan , Anton Tremsin , Philippe de Rouffignac , David Beaulieu , Kourosh Saadatmand , Steve Bachman , Ken Stenton
发明人： Neal T. Sullivan , Anton Tremsin , Philippe de Rouffignac , David Beaulieu , Kourosh Saadatmand , Steve Bachman , Ken Stenton
IPC分类号： G01T3/00
CPC分类号： H01J43/246 , G01T3/08
摘要： A microchannel plate for detecting neutrons includes a hydrogen-rich polymer substrate that defines a plurality of channels extending from a top surface of the substrate to a bottom surface of the substrate, where neutrons interact with the plurality of channels to generate at least one secondary electron. A top electrode is positioned on the top surface of the substrate and a bottom electrode is positioned on the bottom surface of the substrate. A resistive layer is formed over an outer surface of the plurality of channels that provides ohmic conduction with a resistivity that is substantially constant. An emissive layer is formed over the resistive layer. Neutron interaction products interact with the plurality of channels defined by the substrate and the emissive films to generate secondary electrons that cascade within the plurality of channels to provide an amplified signal related to the detection of neutrons.
摘要翻译：用于检测中子的微通道板包括富氢聚合物基底，其限定从基底的顶表面延伸到基底的底表面的多个通道，其中中子与多个通道相互作用以产生至少一个二次电子。顶部电极位于衬底的顶表面上，底部电极位于衬底的底表面上。电阻层形成在多个通道的外表面上，其提供基本恒定的电阻率的欧姆导电。在电阻层上形成发光层。中子相互作用产物与由衬底和发射膜限定的多个通道相互作用以产生在多个通道内级联的二次电子，以提供与中子检测有关的放大信号。

9. 发明授权

US08134108B2 Image intensifying device 有权
标题翻译：图像增强装置
公开(公告)号：US08134108B2
公开(公告)日：2012-03-13
申请号：US13151086
申请日：2011-06-01
申请人： Neal T. Sullivan , Anton Tremsin , Ken Stenton , Philippe De Rouffignac
发明人： Neal T. Sullivan , Anton Tremsin , Ken Stenton , Philippe De Rouffignac
IPC分类号： H01J40/14
CPC分类号： H01J31/507 , H01J43/246 , H01J2231/5016
摘要： An image intensifying device includes a lens that is positioned at a light input that forms an image of a scene. The image intensifying device also includes an image intensifier tube that includes a photocathode that is positioned to receive the image formed by the lens. The photocathode generates photoelectrons in response to the light image of the scene. The image intensifier tube also includes a microchannel plate having an input surface comprising the photocathode. The microchannel plate receives the photoelectrons generated by the photocathode and generating secondary electrons. An electron detector receives the secondary electrons generated by the microchannel plate and generates an intensified image of the scene.
摘要翻译：图像增强装置包括位于形成场景的图像的光输入处的透镜。图像增强装置还包括图像增强管，其包括被定位成接收由透镜形成的图像的光电阴极。光电阴极响应于场景的光图像而产生光电子。图像增强管还包括具有包括光电阴极的输入表面的微通道板。微通道板接收由光电阴极产生的光电子并产生二次电子。电子检测器接收由微通道板产生的二次电子并产生场景的增强图像。

10. 发明申请

US20090215211A1 Method Of Fabricating Microchannel Plate Devices With Multiple Emissive Layers 有权
标题翻译：制造具有多个发射层的微通道板装置的方法
公开(公告)号：US20090215211A1
公开(公告)日：2009-08-27
申请号：US12038139
申请日：2008-02-27
申请人： Anton Tremsin , Philippe de Rouffignac , Neal T. Sullivan , David Beaulieu , Michael D. Potter
发明人： Anton Tremsin , Philippe de Rouffignac , Neal T. Sullivan , David Beaulieu , Michael D. Potter
IPC分类号： H01L21/28 , B05D5/12
CPC分类号： H01J43/246 , H01J9/125
摘要： A method of fabricating a microchannel plate includes defining a plurality of pores extending from a top surface of a substrate to a bottom surface of the substrate where the plurality of pores has a resistive material on an outer surface that forms a first emissive layer. A second emissive layer is formed over the first emissive layer. The second emissive layer is chosen to achieve at least one of an increase in secondary electron emission efficiency and a decrease in gain degradation as a function of time. A top electrode is formed on the top surface of the substrate and a bottom electrode is formed on the bottom surface of the substrate.
摘要翻译：制造微通道板的方法包括限定从衬底的顶表面延伸到衬底的底表面的多个孔，其中多个孔在形成第一发射层的外表面上具有电阻材料。在第一发射层上形成第二发射层。选择第二发射层以实现二次电子发射效率的增加和随着时间的函数的增益降低的降低中的至少一个。顶部电极形成在衬底的顶表面上，底电极形成在衬底的底表面上。

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