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    • 2. 发明授权
    • Apparatus and method for image optimization of samples in a scanning electron microscope
    • 扫描电子显微镜中样品图像优化的装置和方法
    • US06992287B2
    • 2006-01-31
    • US10985144
    • 2004-11-10
    • Neal T. Sullivan
    • Neal T. Sullivan
    • G21K7/00G21G5/00
    • H01J37/28H01J2237/2817H01J2237/2826
    • A system and method for identifying an optimal landing energy of a probe current in a scanning electron microscope system. A probe current having a known landing energy is directed at a sample for producing a signal electron beam. The current of the signal electron beam is measured by directing the beam to a current detector for calculating a current yield, which is the ratio of the signal current to the probe current. The landing energy can then be changed for subsequent measurements of the signal current to identify the landing energy which produces a desired current yield. Once identified, the landing energy value can be used to produce a signal electron beam directed towards an imaging detector to generate topographic images of samples.
    • 用于在扫描电子显微镜系统中识别探针电流的最佳着陆能量的系统和方法。 具有已知着陆能量的探针电流被引导到用于产生信号电子束的样本。 通过将光束引导到电流检测器来计算电流产量,即信号电流与探针电流的比值来测量信号电子束的电流。 然后可以改变着陆能量以用于信号电流的随后测量,以识别产生期望电流产量的着陆能量。 一旦被识别,着陆能量值可用于产生指向成像检测器的信号电子束,以产生样本的地形图像。
    • 8. 发明授权
    • Fixture for microscope component alignment
    • 显微镜组件对准的夹具
    • US06825977B2
    • 2004-11-30
    • US10163917
    • 2002-06-06
    • Neal T. Sullivan
    • Neal T. Sullivan
    • G02B2100
    • G02B21/24
    • A fixture and method is provided for aligning optical elements in a microscope. The fixture attaches to an objective lens plane of the microscope and supports an alignment optical element. During optical component alignment, an alignment beam is directed along the illumination and imaging paths of the microscope through the objective lens port and into the fixture for reflection by the alignment optical element. The fixture allows an alignment optical element positioned in a single location to be used for aligning the microscope components and for adjusting the microscope objective lens.
    • 提供了用于在显微镜中对准光学元件的固定装置和方法。 固定装置连接到显微镜的物镜平面,并支撑对准光学元件。 在光学部件对准期间,对准光束沿着显微镜的照明和成像路径被引导通过物镜端口并进入固定装置,用于由对准光学元件反射。 夹具允许位于单个位置的对准光学元件用于对准显微镜部件并调整显微镜物镜。