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    • 1. 发明申请
    • METHOD AND APPARATUS FOR OPTICAL INSPECTION OF A DISPLAY
    • 用于光学检查显示器的方法和装置
    • WO2004070693A2
    • 2004-08-19
    • PCT/US2004/003217
    • 2004-02-03
    • PHOTON DYNAMICS INC.SAFAEE-RAD, RezaCRNATOVIC, AleksanderHAWTHORNE, JeffreyBUKAL, BrankoLEERENTVELD, Ray
    • SAFAEE-RAD, RezaCRNATOVIC, AleksanderHAWTHORNE, JeffreyBUKAL, BrankoLEERENTVELD, Ray
    • G09G
    • G06T7/0004G06T2207/30108H04N17/02H04N17/04
    • METHOD AND APPARATUS FOR OPTICAL INSPECTION OF A DISPLAY ABSTRACT OF THE DISCLOSURE A method and apparatus for optically inspecting a display employs sub-pixel accuracy for each primary color to take into account angle of rotation. The method includes capturing images of a display with R x S sensors, determining sets of sensor coordinates mapping to a pixel, determining multiple misalignment angles between the pixel on the display and the R x S sensors, determining multiple x scaling ratios, determining multiple weighting factors associated with RxS sensors in response to the corresponding multiple misalignment angle and the corresponding multiple x and y scaling ratios, determining multiple luminance values for RxS sensors, determining multiple total luminance values in response to the weighting factors and the luminance values, forming scaled images including first and second luminance values, and inspecting the scaled image to identify potential defects of the pixel on the display.
    • 用于对本发明的显示器的光学检查的方法和装置用于光学检查显示器的方法和装置对于每个基色采用子像素精度来考虑旋转角度。 该方法包括用R x S传感器捕获显示器的图像,确定映射到像素的传感器坐标的集合,确定显示器上的像素与R x S传感器之间的多个不对准角度,确定多个x缩放比例,确定多个加权 与RxS传感器相关联的因素响应于相应的多重不对准角和相应的多个x和y缩放比,确定RxS传感器的多个亮度值,响应加权因子和亮度值确定多个总亮度值,形成缩放图像 包括第一和第二亮度值,并且检查缩放图像以识别显示器上的像素的潜在缺陷。
    • 2. 发明申请
    • SUBSTRATE INSPECTION APPARATUS AND METHOD
    • 基板检查装置和方法
    • WO1997026546A1
    • 1997-07-24
    • PCT/US1997000573
    • 1997-01-13
    • PHOTON DYNAMICS, INC.
    • PHOTON DYNAMICS, INC.HAWTHORNE, JeffreySETZER, Joseph
    • G01R31/00
    • G09G3/006G02F1/1309G06T7/0004G06T2207/30121H04N5/66H04N17/04Y10S345/904
    • A method for inspecting a substrate having a plurality of output pixels using an image sensing device having a plurality of input pixels includes the steps of capturing an input image of a plurality of groups of output pixels with a plurality of groups of input pixels (300), each group of input pixels capturing a group of output pixels, each input pixel in a group of input pixels having a position, inhibiting modulation contributions from input pixels in the input image (310), forming a plurality of images from the plurality of groups of input pixels in the input image, each image including input pixels from a similar position in each group of input pixels, detecting defects in each of the plurality of images, and determining defects in subpixels of the substrate in response to the defects detected in each of the plurality of images (340).
    • 使用具有多个输入像素的图像感测装置检查具有多个输出像素的基板的方法包括以多个输入像素组(300)捕获多组输出像素的输入图像的步骤, 每组输入像素捕获一组输出像素,一组输入像素中的每个输入像素具有位置,禁止来自输入图像(310)中的输入像素的调制贡献,从多个组中形成多个图像 每个图像包括来自每组输入像素中的相似位置的输入像素,检测多个图像中的每一个中的缺陷,以及响应于每个图像中检测到的缺陷来确定基板的子像素中的缺陷 的多个图像(340)。